CN103797343B - Capacitive ultrasound transducer - Google Patents
Capacitive ultrasound transducer Download PDFInfo
- Publication number
- CN103797343B CN103797343B CN201280031330.6A CN201280031330A CN103797343B CN 103797343 B CN103797343 B CN 103797343B CN 201280031330 A CN201280031330 A CN 201280031330A CN 103797343 B CN103797343 B CN 103797343B
- Authority
- CN
- China
- Prior art keywords
- ultrasonic transducer
- diaphragm
- backboard
- insulating barrier
- sensor head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000002604 ultrasonography Methods 0.000 title claims abstract description 7
- 239000000463 material Substances 0.000 claims description 15
- 239000010410 layer Substances 0.000 claims description 11
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- REDXJYDRNCIFBQ-UHFFFAOYSA-N aluminium(3+) Chemical class [Al+3] REDXJYDRNCIFBQ-UHFFFAOYSA-N 0.000 claims description 4
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 239000002344 surface layer Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 229910000601 superalloy Inorganic materials 0.000 claims description 2
- 230000001603 reducing Effects 0.000 abstract description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 230000026683 transduction Effects 0.000 description 2
- 238000010361 transduction Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N Silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005039 chemical industry Methods 0.000 description 1
- 239000003653 coastal water Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000001808 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000001590 oxidative Effects 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Abstract
The present invention relates to a kind of capacitive ultrasound transducer, including a sensor head with backboard, the structurized front of described backboard is provided with insulating barrier and its back side is provided with electrode.In order to realize the structure improved, though utilize this structure Strong oxdiative and the medium of reduction also can realize until the temperature tolerance of the raising of hundreds of degree Celsius, the diaphragm arranged as acoustic generator is applied in tension along in-plane.
Description
Technical field
The present invention relates to a kind of capacitive ultrasound transducer, including a sensor head with backboard, described
The structurized front of backboard is provided with insulating barrier and its back side is provided with electrode.
Background technology
Mainly two kinds of sonac is used in air or the application in gaseous environment now,
This refers to piezoelectric ceramics and/or capacitive ultrasonic sensor.Except principle of work and power and the difference of acoustic characteristic
Outside, only could use both types when moderate temperature and medium do not have corrosivity.
Certainly the application that some temperature are higher is had cannot to use measurement technology up to now, such as at internal combustion engine
In research and development.In this case, depending on operating mode and flow transducer depending on the position in exhaust system, aerofluxus temperature
Degree may be-40 DEG C (such as when electromotor cold start in temperature case) until about 1000 DEG C.Key is also
There is the fact: the delivery temperature of internal combustion engine may change rapidly and tempestuously, such as when from fully loaded
When electromotor runs to the load variations of running under power.The sensing technology used should be resistant to this pole
The hot stress alternation of degree.
Piezoelectric ceramic ultrasonic sensor is (such as at DE 10040344, DE 4434692, DE
102006026674, public in DE 102008027970, DE 102009032809 and DE 202004002107
Open nearest research and development achievement) can only the temperature below 350 DEG C use.This restriction stems from and is used
The Curie temperature of piezoquartz, piezoquartz will lose its piezoelectric property after exceeding this temperature.Continue
Hot stress alternation may cause fatigue of materials (permanent destruction piezoquartz) in these sensors.
Traditional capacitive ultrasound transducer does not the most have required temperature tolerance.These capacitive ultrasound transducer
The diaphragm of the metal coating tightened on conductive matrices simultaneously constitute the insulating barrier of electric capacity, be wherein typically used as
The plastic foil of dielectric film sheet material or also have the diaphragm being made up of silicon nitride all can not meet temperature requirement, as example
As at D.A.Hutchins, D.W.Schindel, A.G.Bashford and W.M.D.Wright in 1998 years
" the Advances in ultrasonic electrostatic delivered on 36th phase Elservier Ultrasonics
Transduction " literary composition is explained as.Even if when using the diaphragm of simple metal, higher than 300 DEG C
At a temperature of the most occurred oxidation, if the material thickness of transducer diaphragm is the least, this oxidation causes it fast
Speed is damaged.
In addition to the thermostability of diaphragm, the thermostability of common insulating barrier and electrode is the most not high enough.Pass through high temperature
Cause the electrical breakdown causing sensor permanent damage the most in a insulating layer.Reason is that the insulation that temperature causes
The structural rearrangement of layer or recrystallization.If back electrode, then by high temperature, metal level accelerates to be diffused into silicon wafer
In body, this causes electrode to be wholly absent after some time.In the case of hot stress alternation, owing to heat is swollen
The coupling of swollen coefficient is very poor, causes insulating barrier to peel off from carrier material, or causes diaphragm from sensor shell
Body leaves, it means that the destruction of sensor.
Summary of the invention
The task of the present invention is a kind of improved structure of ultrasonic transducer, even if whereby in Strong oxdiative and reduction
Medium also can realize until the temperature tolerance of the raising of hundreds of degree Celsius.
In order to solve described task, according to the present invention, described transducer is characterised by, diaphragm is along plane side
To being applied in tension.
At this according to the first embodiment, diaphragm is compressed between two rings.
And a kind of alternative embodiment is characterised by, diaphragm is connected together with at least one boxing.
Setting in an advantageous manner, the material of diaphragm is selected from Ni-Cr alloy, austenitic steel, ferritic steel or " super
Level alloy ".
Have the advantage that especially at this, diaphragm by a kind of chromium content be at least 16% and aluminum content at least
The material of 1% is constituted.
Also having a kind of embodiment to be suitable for solving above-mentioned task, wherein, insulating barrier is had noncrystalline by one
The material of structure is constituted.
Preferably setting at this, insulating barrier is made up of multiple noncrystalline layers.
Above-mentioned task can also be solved by feature of the present invention, i.e. back electrode has the knot of multilamellar
Structure, at least one of which layer constitutes diffusion impervious layer relative to the base material of backboard, and surface layer is by platinum
Constitute.
Setting the most in an advantageous manner, sensor head is designed to the remainder independent of ultrasonic transducer can
The assembly changed.
A kind of advantageous embodiment of the ultrasonic transducer according to the present invention is characterised by, is provided with one
Heater for acoustic radiation face.
The another kind of advantageous embodiment of the ultrasonic transducer according to the present invention is characterised by, by changing
Passage in energy device is connected to each region above and below diaphragm.
At this in an advantageous manner, filter it is provided with in the channel.
Another feature of the present invention can be, via the backboard of a resilient key contacting sensor head.
At this in an advantageous manner, between pin and backboard, insert the intermediate plate of a metal.
By features described above with select material targetedly, even if also can realize in Strong oxdiative and reducing medium
Until the temperature tolerance of hundreds of degree Celsius.In the range of lower limit temperature, by using transducer heater to keep away
Exempt from condensate to be formed, thus ensure the Functional Capability of transducer.By the performance that these are special, ultrasonic transduction
Device can apply to all occasions cannot tackled in the most operational common technique.In this respect
Example can be for controlling the ultrasonic flowmeter of technological process, in coastal waters in chemical industry or field of food industry
Oil platform (Off-Shores) is upper and is used for accurate gas stream in the duct or also in the research and development of internal combustion engine
The sensor of measurement.
Accompanying drawing explanation
The present invention is explained in detail by the accompanying drawing hereinafter with reference to first-selected embodiment.
Accompanying drawing 1 show the profile of ultrasonic transducer of the present invention,
Accompanying drawing 2 show the perspective view of a kind of embodiment of the pretension diaphragm for this transducer.
Detailed description of the invention
The sonac of the following stated is distinguished by its temperature tolerance, oxidative resistance and corrosion resistance also
And be for having high mechanical load, thermic load and the broad application of chemistry load and to develop.As at Fig. 1
In it can be seen that as, sensor head is made up of a upper shell 1 and a lower house 2, with screw will
The two part 1,2 is mutually tightened, and can also be otherwise connected with each other if desired.Backboard 3 wraps
Include front and the coating back electrode 5 on the back side with structuring insulating barrier 4.Said insulating barrier 4
It is made up of a kind of material with non-crystalline structure, is the most also made up of multiple noncrystalline layers.Back electrode 5
Body can also have multiple structure, and at least one of which layer constitutes an expansion relative to the base material of backboard 3
Dissipate barrier layer.One surface layer being made up of platinum additionally can be set.
The diaphragm 6 of the ultrasonic transducer of the present invention is fixed in a clamping ring 7, as the most permissible
As seeing.Along in-plane, diaphragm can be applied tension by this clamping mode of diaphragm 6.
Specifically, such as, two rings can be set, diaphragm 6 is pressed between the two ring, or can also
The embodiment welded together with at least one ring 7 by diaphragm 6 is set.Usual Ni-Cr alloy, Austria
Family name's body steel, ferritic steel or " superalloy " making diaphragm, the most advantageously, chromium content is at least 16%
And aluminum content is at least 1%.
In order to avoid condensation when cold operation, the heating of the upper shell 1 of an encirclement ultrasonic transducer is set
Device 8, acoustic radiation face is especially maintained at required temperature by this heater.
Some passages 9 being preferably provided with filter 10 are set, for the most especially at upper shell 2
In, but also on the dorsal part of backboard 3 and back electrode 5 after contacting plate 12 in be connected to diaphragm
Each region above and below in the of 6.Spring catch 11 is close on contacting plate 12, in order to electric contact is connected and passed
The backboard 3 of sensor head.
Advantageously, sensor head is designed to the removable assembly of the remainder independent of ultrasonic transducer.
Claims (12)
1. capacitive ultrasound transducer, has backboard and the diaphragm being arranged on backboard including one
Sensor head, the structurized front of described backboard is provided with insulating barrier and its back side is provided with electrode,
Described diaphragm is as acoustic generator, and wherein, diaphragm is applied in tension along in-plane, its feature
Being, diaphragm is connected together with at least one boxing.
Ultrasonic transducer the most according to claim 1, it is characterised in that the material choosing of diaphragm
From Ni-Cr alloy, austenitic steel, ferritic steel or " superalloy ".
Ultrasonic transducer the most according to claim 2, it is characterised in that diaphragm is by a kind of chromium
Content be at least 16% and aluminum content be at least 1% material constitute.
Ultrasonic transducer the most according to claim 1, it is characterised in that insulating barrier is by one
The material with non-crystalline structure is constituted.
Ultrasonic transducer the most according to claim 4, it is characterised in that insulating barrier is by multiple
Noncrystalline layer is constituted.
Ultrasonic transducer the most according to claim 1, it is characterised in that electrode has multilamellar
Structure, at least one of which layer relative to backboard base material constitute diffusion impervious layer, and
Surface layer is made up of platinum.
Ultrasonic transducer the most according to claim 1, it is characterised in that sensor head designs
Become the removable assembly of remainder independent of ultrasonic transducer.
8. according to the ultrasonic transducer one of claim 1 to 7 Suo Shu, it is characterised in that arrange
There is a heater for acoustic radiation face.
9. according to the ultrasonic transducer one of claim 1 to 7 Suo Shu, it is characterised in that pass through
Passage in ultrasonic transducer is connected to each region above and below diaphragm.
Ultrasonic transducer the most according to claim 9, it is characterised in that set in the channel
It is equipped with filter.
11. according to the ultrasonic transducer one of claim 1 to 7 Suo Shu, it is characterised in that warp
Backboard by a resilient key contacting sensor head.
12. ultrasonic transducers according to claim 11, it is characterised in that at pin and the back of the body
The intermediate plate of a metal is inserted between plate.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATA929/2011 | 2011-06-24 | ||
| ATA929/2011A AT509922B1 (en) | 2011-06-24 | 2011-06-24 | CAPACITIVE ULTRASOUND TRANSFORMER |
| PCT/EP2012/061702 WO2012175492A2 (en) | 2011-06-24 | 2012-06-19 | Capacitive ultrasonic transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103797343A CN103797343A (en) | 2014-05-14 |
| CN103797343B true CN103797343B (en) | 2016-11-30 |
Family
ID=
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4081626A (en) * | 1976-11-12 | 1978-03-28 | Polaroid Corporation | Electrostatic transducer having narrowed directional characteristic |
| CN1129979A (en) * | 1994-06-20 | 1996-08-28 | 索尼公司 | Vibration sensor and navigation apparatus |
| CN1575210A (en) * | 2001-10-23 | 2005-02-02 | 大卫·W·申德尔 | Ultrasonic printed circuit board transducer |
| CN101394685A (en) * | 2007-09-20 | 2009-03-25 | 美国西门子医疗解决公司 | Microfabricated acoustic transducer with a multilayer electrode |
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4081626A (en) * | 1976-11-12 | 1978-03-28 | Polaroid Corporation | Electrostatic transducer having narrowed directional characteristic |
| CN1129979A (en) * | 1994-06-20 | 1996-08-28 | 索尼公司 | Vibration sensor and navigation apparatus |
| CN1575210A (en) * | 2001-10-23 | 2005-02-02 | 大卫·W·申德尔 | Ultrasonic printed circuit board transducer |
| CN101394685A (en) * | 2007-09-20 | 2009-03-25 | 美国西门子医疗解决公司 | Microfabricated acoustic transducer with a multilayer electrode |
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|---|---|---|---|
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |