CN103795368A - Device for positioning wafer - Google Patents
Device for positioning wafer Download PDFInfo
- Publication number
- CN103795368A CN103795368A CN201410077868.1A CN201410077868A CN103795368A CN 103795368 A CN103795368 A CN 103795368A CN 201410077868 A CN201410077868 A CN 201410077868A CN 103795368 A CN103795368 A CN 103795368A
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- CN
- China
- Prior art keywords
- wafer
- positioning
- pin
- positioning pins
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the field of wafers, in particular to a device for positioning a wafer. The device for positioning the wafer is characterized in that circular-arc-shaped positioning pins are fixed on a horizontal cylinder, and spring positioning needles are fixed on a longitudinal cylinder; longitudinal positioning pins and horizontal positioning pins are fixed on a platform, and the number of the longitudinal positioning pins, the number of the horizontal positioning pins, the number of the circular-arc-shaped positioning pins and the number of the spring positioning needles are both two. According to the technical scheme, the two longitudinal positioning pins and the two horizontal positioning pins form accurate right angle reference positioning to the wafer, one side of the wafer is positioned by two fixing circular-arc-shaped positioning pins, the other side of the wafer is positioned by two spring positioning needles, and thus accurate positioning to the wafer is achieved.
Description
Technical field
The present invention relates to wafer art, is a kind of device for positions wafer.
Background technology
At tuning fork crystal production field, by the wafer after the cutting of square crystal raw material, due to thin, crisp, be difficult to entirely true location.
Summary of the invention
The object of the invention is to provide a kind of device that can disposable accurate equidirectional positions wafer.
Technical scheme of the present invention is: a kind of device for positions wafer, it is characterized in that circular arc alignment pin is fixed on lateral air cylinder, and spring pilot pin is fixed on longitudinal cylinder; Longitudinal register pin and located lateral pin are fixed on platform; Longitudinal register pin, located lateral pin, circular arc alignment pin, spring pilot pin respectively have two.
Owing to having adopted technique scheme, two longitudinal register pins and two located lateral pins form right angle origin reference location accurately to wafer, one side is located by 2 fixing circular arc alignment pins, and opposite side is located by 2 spring pilot pins, realizes the accurate location to wafer.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
In the drawings: 1, longitudinal register pin; 2, platform; 3, circular arc alignment pin; 4, wafer; 5, spring pilot pin; 6, longitudinal cylinder; 7, lateral air cylinder; 8, located lateral pin.
Embodiment
Below in conjunction with embodiment, the present invention is further illustrated.
In Fig. 1, circular arc alignment pin 3 is fixed on lateral air cylinder 7, and spring pilot pin 5 is fixed on longitudinal cylinder 6; Longitudinal register pin 1 and located lateral pin 8 are fixed on platform 2; Longitudinal register pin 1, located lateral pin 8, circular arc alignment pin 3, spring pilot pin 5 respectively have two.
Wafer 4 is positioned on platform 2, first under the effect of lateral air cylinder 7, carries out a side location by two circular arc alignment pins 3, and then opposite side is positioned by two spring pilot pins 5 under the effect of longitudinal cylinder 6; Location rear spring pilot pin 5 is first moved back, and circular arc alignment pin 3 retreats again, like this wafer 4 can be due to strain off normal.
Claims (1)
1. for a device for positions wafer, it is characterized in that circular arc alignment pin (3) is fixed on lateral air cylinder (7) upper, spring pilot pin (5) is fixed on longitudinal cylinder (6); Longitudinal register pin (1) and located lateral pin (8) are fixed on platform (2); Longitudinal register pin (1), located lateral pin (8), circular arc alignment pin (3), spring pilot pin (5) respectively have two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410077868.1A CN103795368A (en) | 2014-03-05 | 2014-03-05 | Device for positioning wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410077868.1A CN103795368A (en) | 2014-03-05 | 2014-03-05 | Device for positioning wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103795368A true CN103795368A (en) | 2014-05-14 |
Family
ID=50670743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410077868.1A Pending CN103795368A (en) | 2014-03-05 | 2014-03-05 | Device for positioning wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103795368A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201979301U (en) * | 2010-05-28 | 2011-09-21 | 上海德尔格医疗器械有限公司 | Frock jig |
| CN202763726U (en) * | 2012-08-15 | 2013-03-06 | 吴江市博众精工科技有限公司 | Product carrier |
| CN103522221A (en) * | 2013-10-24 | 2014-01-22 | 随州润晶电子科技有限公司 | Device for bidirectionally positioning and clamping wafer |
| CN103569672A (en) * | 2012-07-20 | 2014-02-12 | 上海微电子装备有限公司 | Silicon wafer and glass substrate compatible conveying device |
-
2014
- 2014-03-05 CN CN201410077868.1A patent/CN103795368A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201979301U (en) * | 2010-05-28 | 2011-09-21 | 上海德尔格医疗器械有限公司 | Frock jig |
| CN103569672A (en) * | 2012-07-20 | 2014-02-12 | 上海微电子装备有限公司 | Silicon wafer and glass substrate compatible conveying device |
| CN202763726U (en) * | 2012-08-15 | 2013-03-06 | 吴江市博众精工科技有限公司 | Product carrier |
| CN103522221A (en) * | 2013-10-24 | 2014-01-22 | 随州润晶电子科技有限公司 | Device for bidirectionally positioning and clamping wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140514 |
|
| WD01 | Invention patent application deemed withdrawn after publication |