CN103779262A - Origin positioning method for controlling lifting motion of wafer boat - Google Patents
Origin positioning method for controlling lifting motion of wafer boat Download PDFInfo
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- CN103779262A CN103779262A CN201410058337.8A CN201410058337A CN103779262A CN 103779262 A CN103779262 A CN 103779262A CN 201410058337 A CN201410058337 A CN 201410058337A CN 103779262 A CN103779262 A CN 103779262A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
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Abstract
An origin positioning method for controlling lifting motion of a wafer boat comprises the steps that firstly, the wafer boat is controlled to move downwards at a set speed parameter, and the wafer boat is controlled immediately to be decelerated and stopped when an origin sensor detects that the origin sensor is just shielded by a wafer boat lifting mechanism; secondly, the wafer boat is controlled to start to move upwards at a smaller speed parameter, when an origin pulse rising edge is detected, Z-phase pulses are searched for, and the wafer boat is controlled to be decelerated and stopped after the Z-phase pluses are found. In addition, after the steps, the wafer boat is continuously controlled to move downwards at a slow speed, and the wafer boat is stopped immediately when the origin pulse rising edge is detected, or Z-phase pulses are searched for, and the wafer boat is decelerated and stopped or stopped immediately after the Z-phase pulses are found. The accuracy and the stability for returning to the origin are improved through the steps. Besides, different working conditions of a digital sensor are combined for use, so that reliability is improved, and the implementation mode is quite simple.
Description
Technical field
The present invention relates to semiconductor device and processing and manufacturing field, more specifically, relate to a kind of control the brilliant boat that is loaded with wafer is drawn off to the brilliant boat elevating movement original point position method in semiconductor vertical oxidation equipment.
Background technology
Semiconductor device design develops rapidly to the direction of high density, high integration, and semiconductor integrated circuit new technology, new technology, new equipment have been proposed to more and more higher requirement.In all semiconductor manufacturing equipment, vertical diffusion/oxidation furnace is one of important technological equipment of operation before integrated circuit production line, and it is mainly applicable to the techniques such as diffusion in the above silicon chip technique of VLSL diameter 150mm, annealing, alloy, oxidation, film growth.
Quartz boat lifting device (being boat elevating mechanism) is a very important constituent apparatus in vertical diffusion/oxidation furnace, its major function is: be responsible for being transported in reaction boiler tube (Tube) and carrying out related process being loaded with the quartz boat (Boat) of silicon chip (Wafer) and heat-preserving container, and silicon chip (Wafer), quartz boat (Boat) and heat-preserving container transport reaction boiler tube after technique completes.
In the course of the work, silicon chip is delivered to boat elevating mechanism by mechanical arm for transmitting silicon chip, and boat elevating mechanism transports silicon chip the important task of carrying out high temperature oxidation process into vertical diffusion/oxidation body of heater again; Complete after technique, boat elevating mechanism need to be down to original position, and the silicon chip that completes oxidation is sent to oxidation furnace by mechanical arm for transmitting silicon chip.Because the boat elevating mechanism precision and stability of keeping in the center is directly connected to mechanical arm for transmitting silicon chip and the safety of boat elevating mechanism in transmission sheet process, and the brilliant boat elevating movement initial point basis, location that is subsequent technique process itself, therefore, accurately control the former point methods of brilliant boat elevating movement, the problem that those skilled in the art pay close attention to always, an especially stationarity difficult problem especially.
At present, in vertical heater equipment, conventionally adopt NC51 speed instruction voltage output type locating module to seek former point mode; It arranges three position transducers on brilliant boat lifting shaft, be generally optical pickocff, three transducers be respectively be arranged on brilliant boat lifting shaft upper end positive limit sensors, be arranged on the negative limit sensors of brilliant boat lifting shaft lower end and be arranged at the home position sensing between positive and negative limit sensors, wherein, origin sensor is higher than the positive about hundreds of centimetre of limit sensors, generally, be 180 centimetres; Origin sensor, higher than approximately several centimetres of negative limit sensors, preferably, is 3 centimetres of left and right.
In prior art, NC51 speed instruction voltage output type locating module is sought former point mode and is controlled the step of the former point methods of brilliant boat elevating movement and comprise:
First, carry out brilliant boat and move downward program with certain speed, in the time that origin sensor detects boat elevating mechanism and just blocked origin sensor, control immediately brilliant boat and stop;
Then, start brilliant boat move upward with a slower speed, do not shelter from after origin sensor when origin sensor detects the motion of boat elevating mechanism, control immediately brilliant boat and stop, so far, former point search finishes.
Can find out from technique scheme, there is following shortcoming in technique scheme:
1., owing to there being electromagnetic interference in factory building, and NC51 is Voltage-output type locating module, the anti-electromagnetic interference of module is poor, makes the bad stability of controlling;
2., prior art adopts two step localization methods, only passed through two para-crystal boats and stopped original point position, but boat halt and initial initial point has larger position error, this error can not meet the requirement of equipment to boat elevating mechanism positioning precision;
3., particularly the halt of this scheme in origin sensor top, boat elevating mechanism does not have a paper home position sensing, like this, utilizes home position sensing cause very big inconvenience for down-stream, and the follow-up treatment step take initial initial point as reference point, can continue to continue to use this error;
4., the error of every para-crystal boat halt can be different, particularly, through after lifting process repeatedly, mechanical arm for transmitting silicon chip need be proofreaied and correct with brilliant boat halt, no person, has been difficult to silicon chip and has loaded and unloaded exactly;
5., adopt single-sensor type, for example, adopt normally closed sensor type, in the time of transducer power down, the motion of boat elevating mechanism can not get controlling, so that boat elevating mechanism is down to negative spacing and damages brilliant boat, there is great hidden danger in fail safe.
Summary of the invention
The object of the present invention is to provide a kind of control that the brilliant boat that is loaded with wafer is drawn off to the former point methods of brilliant boat elevating movement and the motion-control module in semiconductor vertical oxidation equipment, can realize the method for searching for initial point in comparatively reliable, stable, accurate motion control, use with better function, anti-interference is stronger.
For achieving the above object, technical scheme of the present invention is as follows:
Control an original point position method for brilliant boat elevating movement, be applied in semiconductor vertical oxidation equipment, on the brilliant boat lifting shaft of described semiconductor vertical oxidation equipment, be provided with home position sensing; It is characterized in that, described home position sensing is digital sensor, and Z phase pulse generator is set above described home position sensing, and described control step comprises:
Step S01: control brilliant boat and move downward with the speed parameter of a setting; Wherein, described speed parameter comprises speed, the direction of motion and acceleration; In the time that origin sensor detects boat elevating mechanism and just blocked origin sensor, control immediately brilliant boat and slow down and stop immediately;
Step S02: start brilliant boat with a slower speed parameter and move upward, in the time that home position sensing detects origin pulse rising edge, carry out Z phase pulse search, search after the pulse of Z phase, control immediately brilliant boat deceleration and stop at the first result initial point.
Preferably, after described step S02, also comprise step:
Step S03: described brilliant boat is stablized after a predetermined amount of time at the first result initial point, continues to control brilliant boat and moves downward with speed slowly;
Step S04: carry out the second result original point return step according to predefined instruction; Wherein, described predefined instruction is selected in one of following three kinds of modes:
1., in the time that home position sensing detects the rising edge of origin pulse, control immediately described brilliant boat and stop at the second result initial point;
2., in the time that home position sensing detects the rising edge of origin pulse, control described brilliant boat and slow down and stop at the second result initial point;
3., in the time that home position sensing detects the rising edge of origin pulse, then carry out Z phase pulse search, search after the pulse of Z phase, control described brilliant boat and stop at the second result initial point.
Preferably, described the second result initial point is between the rising and falling edges of origin pulse.
Preferably, in described step S03 brilliant boat to stablize a special time at the first result initial point be 5 seconds.
Preferably, described brilliant boat lifting is by gear control transmission, and the width of described Z phase pulse is with the transmission Periodic correlation connection of described brilliant boat elevating control gear.
Preferably, described home position sensing is for often driving transducer.
Preferably, on the brilliant boat lifting shaft of described semiconductor vertical oxidation equipment, two position transducers are also set, be respectively be arranged on brilliant boat lifting shaft upper end positive limit sensors, be arranged on the negative limit sensors of brilliant boat lifting shaft lower end; Described home position sensing is arranged between positive and negative limit sensors, and the position of several Centimeter Level in close described negative limit sensors top.
Preferably, described home position sensing is arranged at 3 centimetres of negative limit sensors tops.
Preferably, described positive and negative limit sensors is normally closed transducer.
Preferably, described positive and negative limit sensors is digital sensor.
Can find out from technique scheme, the present invention is by adopting the former point mode of four-step search to be used in combination, and adopt Z to search for mutually, the potential safety hazard of avoiding single initial point way of search to bring, add selection dissimilar, for example, normally closed and often drive transducer combination, thereby make up the shortcoming that adopts single type transducer can not process well powering-off state, what is more important, execution is sought after original position completes can shelter from origin sensor, can feed back initial point signal, be conducive to the utilization to initial point signal to subsequent step, and be convenient to use in program development signal condition.Therefore, the present invention has can realize in comparatively reliable, stable, accurate motion control and searches for initial point, uses the features such as with better function, anti-interference is stronger.
Accompanying drawing explanation
Fig. 1 is the schematic flow sheet of original point position method one preferred embodiment of the brilliant boat elevating movement of control of the present invention;
Fig. 2 is the corresponding relation schematic diagram of the concrete speed parameter of the first process and brilliant boat movement position in the embodiment of the present invention;
Fig. 3 is the corresponding relation schematic diagram that in the embodiment of the present invention, three kinds of the second process steps preset instruction execution step and the second result original point return position;
Fig. 4 is the present invention's concrete speed parameter of the second process and the schematic diagram with brilliant boat movement position relation.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
It should be noted that, the system-operating environment of the original point position method of the brilliant boat elevating movement of control of the present invention comprises three position transducers is set conventionally on brilliant boat lifting shaft, be respectively be arranged on brilliant boat lifting shaft upper end positive limit sensors, be arranged on the negative limit sensors of brilliant boat lifting shaft lower end and be arranged at the home position sensing between positive and negative limit sensors.Different from other former point searching method, former point searching method of the present invention is by a pulse that Z phase pulse generator produces, thereby can locate more accurately.
In an embodiment of the present invention, home position sensing is digital sensor, preferably, positive and negative limit sensors can be also digital sensor, like this, and can be searchable to the pulse of Z phase, improve the detection progress of system, thereby improved the accuracy that initial point detects.
Home position sensing is generally positioned near initial point, considers for simplification system, is set to initial point and overlaps.And origin sensor, higher than approximately several centimetres of negative limit sensors, generally, is 3 centimetres of left and right.
In an embodiment of the present invention, home position sensing is selected dissimilar transducer, and preferably, origin sensor adopts and often opens, and positive and negative limit sensors adopts normally closed transducer.In the time of former point search, in the time that positive and negative limit sensors is encountered in detection, the motion of the brilliant boat stopping immediately.That is to say, if when home position sensing runs into power-off, search may move downward always, until run into limit sensors, motion stops immediately, no longer carries out ensuing former point search; If positive and negative limit sensors runs under powering-off state, former point search can stop immediately, thus the safety of the equipment of assurance.
The former point searching method of control of the present invention adopts two kinds of i.e. former point process combinations of the first and second search, and the method being realized by four steps, is elaborated below in conjunction with Fig. 1-4 pair embodiment of the present invention.
Refer to Fig. 1, Fig. 1 is the schematic flow sheet of original point position method one preferred embodiment of the brilliant boat elevating movement of control of the present invention.As shown in the figure, step S01 and step S02 belong to the first search initial point process steps; Step S03 and step S04 belong to the second search initial point process steps.In the former point process of the first search, the pulse that Z phase pulse generator produces is that send the position of any from home position sensing top; In the former point process of the second search, the pulse that Z phase pulse generator produces is that send the position of any from home position sensing below, generally, and the transmission Periodic correlation connection of the width isomorphous boat elevating control gear of Z phase pulse.
Step S01: control brilliant boat and move downward with the speed parameter of a setting; Wherein, speed parameter comprises speed, the direction of motion and acceleration; In the time that origin sensor detects that boat elevating mechanism has just blocked origin sensor, control immediately brilliant boat and slow down and stop immediately;
Step S02: start brilliant boat with a slower speed parameter and move upward, in the time that home position sensing detects origin pulse rising edge, carry out Z phase pulse search, search after the pulse of Z phase, control immediately brilliant boat deceleration and stop at the first result initial point.
Particularly, incorporated by reference to Fig. 2, be the corresponding relation schematic diagram of the first search concrete speed parameter of former point process and brilliant boat movement position in the embodiment of the present invention.As shown in Figure 2, controlling brilliant boat moves downward with search speed 1, in the time that origin sensor detects boat elevating mechanism and has just blocked origin sensor (when the rising edge of origin pulse detected), control immediately brilliant boat slow down immediately the liter up and down that stops at origin pulse along between; Start brilliant boat with a slower starting velocity and move upward, and be stabilized in search speed 2; As can be seen from the figure, search speed 1 great-than search speed 2.In the time that home position sensing detects origin pulse rising edge, carry out Z phase pulse search, searching after the pulse of Z phase, the brilliant boat of execution control immediately slows down and stops at the step of the first result initial point.As shown in the figure, because the pulse of Z phase is positioned at the top of origin pulse, the first result initial point is positioned at initial point top a bit, and now, brilliant boat does not cover initial point, but compared with prior art, completes after above-mentioned steps, and the first result initial point can very accurately draw.
Consult Fig. 3 incorporated by reference to Fig. 1, for three kinds of the second search procedure step in the embodiment of the present invention preset the corresponding relation schematic diagram of instruction execution step and the second result original point return position.As shown in Figure 1, after step S02, can also comprise:
Step S03: brilliant boat is stablized after a predetermined amount of time at the first result initial point, continues to control brilliant boat and moves downward with speed slowly;
Step S04: carry out the second result original point return step according to predefined instruction, wherein, predefined instruction is selected in one of following three kinds of modes:
1., in the time that home position sensing detects the rising edge of origin pulse, control immediately brilliant boat and stop at the second result initial point;
2., in the time that home position sensing detects the rising edge of origin pulse, control brilliant boat and slow down and stop at the second result initial point;
3., in the time that home position sensing detects the rising edge of origin pulse, then carry out Z phase pulse search, search after the pulse of Z phase, control brilliant boat and stop at the second result initial point.
As shown in Figure 3, after the second search procedure completes, preferably, the second result initial point is all between the rising and falling edges of the origin pulse detecting, that is to say, boat elevating mechanism is positioned at origin sensor is sheltered from, and above-mentioned this method judges whether boat elevating mechanism arrives original position, for utilizing home position sensing state that reference point very is easily provided in down-stream.
Below in conjunction with Fig. 4, describing predefined instruction in detail is the second search procedure step implementation status of Z phase pulse.Refer to Fig. 4, Fig. 4 is the present invention's concrete speed parameter of the second search procedure and the schematic diagram with brilliant boat movement position relation.
Particularly, as shown in Figure 4, search speed 1 and search speed 2 occur in the first search procedure, the pulse that Z phase pulse generator produces is that send the position of any from former below, and brilliant boat is stablized after 5 seconds at the first result initial point, starts to move downward with search speed 3 slowly, in the time that home position sensing detects the rising edge of origin pulse, carry out again Z phase pulse search, search after the pulse of Z phase, control brilliant boat and stop at the second result initial point.Preferably, search speed 1 great-than search speed 2, search speed 2 great-than search speed 3.
In sum, the present invention is by adopting the former point mode of four-step search to be used in combination, and adopt Z to search for mutually, the potential safety hazard of avoiding single initial point way of search to bring, add selection dissimilar, for example, normally closed and often drive transducer combination, thereby make up the shortcoming that adopts single type transducer can not process well powering-off state, what is more important, carries out to seek after original position completes to shelter from origin sensor, can feed back initial point signal, be conducive to the utilization to initial point signal to subsequent step, and be convenient to use in program development signal condition.Therefore, the present invention has can realize in comparatively reliable, stable, accurate motion control and searches for initial point, uses the features such as with better function, anti-interference is stronger.
Above-described is only the preferred embodiments of the present invention; described embodiment is not in order to limit scope of patent protection of the present invention; therefore the equivalent structure that every utilization specification of the present invention and accompanying drawing content are done changes, and in like manner all should be included in protection scope of the present invention.
Claims (10)
1. control an original point position method for brilliant boat elevating movement, be applied in semiconductor vertical oxidation equipment, on the brilliant boat lifting shaft of described semiconductor vertical oxidation equipment, be provided with home position sensing; It is characterized in that, described home position sensing is digital sensor; Described control step comprises:
Step S01: control brilliant boat and move downward with the speed parameter of a setting; Wherein, described speed parameter comprises speed, the direction of motion and acceleration; In the time that origin sensor detects boat elevating mechanism and just blocked origin sensor, control immediately brilliant boat and slow down and stop immediately;
Step S02: start brilliant boat with a slower speed parameter and move upward, in the time that home position sensing detects origin pulse rising edge, carry out Z phase pulse search, search after the pulse of Z phase, control immediately brilliant boat deceleration and stop at the first result initial point.
2. original point position method as claimed in claim 1, is characterized in that, also comprises step after described step S02:
Step S03: described brilliant boat is stablized after a predetermined amount of time at the first result initial point, continues to control brilliant boat and moves downward with speed slowly;
Step S04: carry out the second result original point return step according to predefined instruction; Wherein, described predefined instruction is selected in one of following three kinds of modes:
1., in the time that home position sensing detects the rising edge of origin pulse, control immediately described brilliant boat and stop at the second result initial point;
2., in the time that home position sensing detects the rising edge of origin pulse, control described brilliant boat and slow down and stop at the second result initial point;
3., in the time that home position sensing detects the rising edge of origin pulse, then carry out Z phase pulse search, search after the pulse of Z phase, control described brilliant boat and stop at the second result initial point.
3. original point position method as claimed in claim 2, is characterized in that, described the second result initial point is between the rising and falling edges of the origin pulse detecting.
4. original point position method as claimed in claim 1, is characterized in that, in described step S03, to stablize a scheduled time at the first result initial point be 5 seconds to brilliant boat.
5. original point position method as claimed in claim 1, is characterized in that, described brilliant boat lifting is by gear control transmission, and the width of described Z phase pulse is with the transmission Periodic correlation connection of described brilliant boat elevating control gear.
6. original point position method as claimed in claim 1, is characterized in that, described home position sensing is for often driving transducer.
7. original point position method as claimed in claim 1, it is characterized in that, on the brilliant boat lifting shaft of described semiconductor vertical oxidation equipment, two position transducers are also set, be respectively be arranged on brilliant boat lifting shaft upper end positive limit sensors, be arranged on the negative limit sensors of brilliant boat lifting shaft lower end; Described home position sensing is arranged between positive and negative limit sensors, and the position of several Centimeter Level in close described negative limit sensors top.
8. original point position method as claimed in claim 7, is characterized in that, described home position sensing is arranged at 3 centimetres of negative limit sensors tops.
9. as the original point position method of claim 1 to 7 as described in any one, it is characterized in that, described positive and negative limit sensors is normally closed transducer.
10. as the original point position method of claim 1 to 7 as described in any one, it is characterized in that, described positive and negative limit sensors is digital sensor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410058337.8A CN103779262B (en) | 2014-02-20 | 2014-02-20 | Origin positioning method for controlling lifting motion of wafer boat |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410058337.8A CN103779262B (en) | 2014-02-20 | 2014-02-20 | Origin positioning method for controlling lifting motion of wafer boat |
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| CN103779262A true CN103779262A (en) | 2014-05-07 |
| CN103779262B CN103779262B (en) | 2017-02-01 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105937051A (en) * | 2015-11-27 | 2016-09-14 | 上海广奕电子科技股份有限公司 | Safety protection device of a vertical diffusion furnace |
| CN106371402A (en) * | 2016-09-29 | 2017-02-01 | 深圳市合信自动化技术有限公司 | Method for realizing homing through transmitting origin-point signals by means of communication and corresponding servo driver |
| CN110007207A (en) * | 2019-04-17 | 2019-07-12 | 山东阅芯电子科技有限公司 | The method of anchor point quantity is reduced in semiconductor devices detection device |
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| CN101813410A (en) * | 2008-12-17 | 2010-08-25 | 北京七星华创电子股份有限公司 | 300mm vertical oxidation furnace quartz boat rotary device |
| CN102423877A (en) * | 2011-10-09 | 2012-04-25 | 北京七星华创电子股份有限公司 | Positioning element and positioning mechanism thereof |
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| CN1192042A (en) * | 1996-12-26 | 1998-09-02 | 株式会社爱德万测试 | Semiconductor device testing apparatus |
| US20030071198A1 (en) * | 2001-10-15 | 2003-04-17 | Boris Kesil | Method and apparatus for preventing transfer of an object having wrong dimensions or orientation |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105937051A (en) * | 2015-11-27 | 2016-09-14 | 上海广奕电子科技股份有限公司 | Safety protection device of a vertical diffusion furnace |
| CN106371402A (en) * | 2016-09-29 | 2017-02-01 | 深圳市合信自动化技术有限公司 | Method for realizing homing through transmitting origin-point signals by means of communication and corresponding servo driver |
| CN110007207A (en) * | 2019-04-17 | 2019-07-12 | 山东阅芯电子科技有限公司 | The method of anchor point quantity is reduced in semiconductor devices detection device |
| CN110007207B (en) * | 2019-04-17 | 2021-01-26 | 山东阅芯电子科技有限公司 | Method for reducing number of positioning points in semiconductor device detection equipment |
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| CN103779262B (en) | 2017-02-01 |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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| TR01 | Transfer of patent right |
Effective date of registration: 20180115 Address after: 100176 No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |