CN103776537A - Polarized light Stokes parameter measuring device and optimization method thereof - Google Patents
Polarized light Stokes parameter measuring device and optimization method thereof Download PDFInfo
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Abstract
The invention discloses a polarized light Stokes parameter measuring device and an optimization method thereof. The measuring device comprises a beam splitter, wave plates, beam splitting devices and four photoelectric detectors, wherein the wave plates, the beam splitting devices and four photoelectric detectors are led in two beam splitting paths of the beam splitter respectively. Incident polarized light passes through the beam splitter to generate two polarized light beams with different polarization states. The two polarized light beams are perpendicularly shot on the two wave plates to generate two light beams with new polarization states through the phase modulation function of the wave plates; the two beam splitting devices change the two polarized light beams into four polarized light beams, the four polarized light beams are perpendicularly shot on the four photoelectric detectors to generate corresponding current signals, and then the azimuth angles of the two wave plates are adjusted to the optimal to enable an instrument matrix to be optimized. After the instrument matrix is solved through calibration, the current signals generated from light to be measured are calculated and solved, and then real-time measurement of incident light Stokes parameters can be achieved. The polarized light Stokes parameter measuring device is simple in structure, easy to realize, high in measurement accuracy and high in practicality, and the optimization method is simple and easy to realize.
Description
Technical field
The invention belongs to optical measurement and field of measuring techniques, particularly a kind of measurement mechanism of polarized light stokes parameter and optimization method thereof.
Background technology
The accurate Quick Measurement of Stokes (stokes) parameter of the light polarization meaning that is widely used at aspects such as industry, military affairs and scientific researches.Polarized light Stokes' parameter ellipsometer is exactly typical application, and it has, and measuring speed is fast, measuring accuracy high, has important application in many fields such as optical measurement, film and material character research and optical patternings.The device of measuring polarization state Stokes parameter mainly contains: the photometric measurement device of rotating element and point amplitude light polarization measurement mechanism (DOAP).At present, develop point amplitude light polarization measurement mechanism of more than ten kind of different structure both at home and abroad, mainly contained plated film light splitting type, four probe type, metal grating type, liquid crystal type and optical-fiber type etc.Nineteen eighty-two American scholar R.M.A.Azzam has designed First and has utilized division of amplitude method to measure the device (DOAP) of light polarization, without any rotatable parts or modulator, simple in structure.But its structure is not optimized to design.Practical study shows: be to have certain requirements to the spectroscopical design parameter of the plated film in DOAP, like this, system just arrives optimization, and measuring accuracy is just the highest, and stability is best, and sample adaptability is the strongest.But obtain satisfactory plated film optical splitter, not a duck soup, accurately design and control coating process and parameter.Measure the problem of the device existence of light polarization for division of amplitude method, on the basis of this structure, the present invention introduces two a wave plate for phase modulating action, has built point amplitude light polarization measurement mechanism of modulating mutually based on position, and has proposed the optimization method of system instrument matrix.
summary of the invention
The problem existing for solving prior art, the object of the present invention is to provide measurement mechanism and the optimization method thereof of a kind of point of amplitude polarized light Stokes' parameter, not only avoid special and complicated plated film or etching technics, and can improve reliability, measuring accuracy and the adaptability of polarized light parameter, concrete technical scheme is as follows.
A kind of measurement mechanism of polarized light stokes parameter, it comprises incident light is divided into transmitted light and catoptrical beam splitter, also comprises successively the first wave plate of modulating mutually for position, realizes the first light-splitting device of polarization spectro and receive respectively the first photodetector and second photodetector of the two-beam after the first light-splitting device light splitting at transmitted light path; On reflected light path, also comprise successively the second wave plate of modulating mutually for position, realize the second light-splitting device of polarization spectro and receive respectively the 3rd photodetector and the 4th photodetector of the two-beam after the second light-splitting device light splitting; The light intensity signal output terminal of four described detectors by data collecting card be connected for the robot calculator that data are processed.
In the measurement mechanism of above-mentioned polarized light stokes parameter, described transmitted light is the different polarized light of two bundle polarization states with reflected light, transmitted light impinges perpendicularly on the first wave plate, reflected light impinges perpendicularly on the second wave plate, the first light-splitting device, the second light-splitting device further become the different polarized light of described two bundle polarization state into four bundle polarized lights, and four bundle polarized lights produce corresponding current signal after four described detectors; The position angle of described the first wave plate, the second wave plate is adjustable, regulate the position angle of two blocks of wave plates to optimum azimuth, can make instrument matrix optimization, solve after instrument matrix by calibration, to treat that the caused current signal of photometry calculates solves, and realizes the real-time measurement of incident light stokes parameter.
In theory, the bit phase delay amount of the first wave plate, the second wave plate has multiple combination, typically have: combination employing 1/2nd wave plates of the first wave plate, the second wave plate combine or adopt the wave plate combined of 1/2nd wave plates and quarter-wave plate combination, 1/2nd wave plates and 1/2nd wave plate combined, quarter-wave plate and quarter-wave plate combination or quarter-wave plate different bit phase delay amounts with it, the wave plate combined of 1/2nd wave plates bit phase delay amounts different from it etc. mutually from quarter-wave plate.
The optimization method of the measurement mechanism of above-mentioned polarized light stokes parameter, can adopt measurement method, detailed process is: under the condition that light channel structure is determined and each optical element is selected of measurement mechanism, optimize by regulating the position angle of the first wave plate, the second wave plate to realize, by the instrument determinant of a matrix size of measurement mechanism under actual measurement different orientations, the size that obtains matrix determinant and the azimuthal relation curve of wave plate and then determine corresponding wave plate optimum azimuth in the time of instrument matrix maximum, realize the instrument matrix optimization of measurement mechanism.
The optimization method of the measurement mechanism of above-mentioned polarized light stokes parameter, can adopt simulation, detailed process is: utilize optical gauge or equipment, the ellipsometric parameter of all beam splitters in the light path of measurement mechanism described in actual measurement, obtain the matrix expression of single beam splitter, and the instrument matrix of computation and measurement device, instrument matrix and determinant thereof to measurement mechanism carry out numerical simulation and analysis, obtain instrument matrix corresponding wave plate optimum azimuth when maximum, realize the optimization of measurement mechanism instrument matrix.In the method, by fixing in two blocks of wave plates the position angle of, adopt method for numerical simulation, computing equipment matrix determinant is with the azimuthal change curve of another piece wave plate, and on curve, the corresponding horizontal ordinate of maximal value is the optimum azimuth of another piece wave plate.
In above-mentioned optimization method, the stokes parameter of establishing incident light is
, order
t,
rrepresent respectively transmission matrix and the reflection matrix of beam splitter (1),
,
be transmission matrix and the reflection matrix of the first light-splitting device (4),
,
be transmission matrix and the reflection matrix of the second light-splitting device (5),
for the photoelectric conversion factors of photodetector,
,
be respectively the transmission matrix of the first wave plate and the second wave plate in transmitted light path and reflected light path, the current signal that four photodetectors produce is expressed as:
The first detector:
The second detector:
The 3rd detector:
The 4th detector:
,
Order
drepresent the instrument matrix of whole measurement mechanism, I represents the current matrix that each photodetector currents signal forms,
Instrument matrix
dobtain by calibrating method, if instrument matrix
dthere is invertible matrix
, the Stokes vector of light so to be measured is
The instrument matrix of known measurement mechanism, determines the Stokes vector of any light by the electric signal vector of surveying;
Make ABS=
ABS=
（3）。
Wherein, det represents Matrix Calculating determinant, by adjust to make determinant absolute value ABS to maximize to wave plate position angle, realizes the optimization of instrument matrix.
When instrument matrix
deach line linearity independence larger, instrument matrix will more be optimized, now the measuring accuracy of polarization state will improve greatly, on this situation mathematics corresponding to the ABS maximum of determinant, therefore select suitable optical element, carry out suitable position angle adjustment determinant absolute value ABS is maximized, can realize the optimization of instrument matrix.
The present invention has the following advantages with respect to prior art:
(1) optimization that the inventive method can implement device instrument matrix.Optimization method and process are simple, reliable and be easy to realize.
(2) apparatus of the present invention are simple in structure, do not need any special processing and film plating technique, and required element easily obtains, and optical path adjusting is convenient, can change parameter setting according to all kinds of light-splitting devices of selecting at any time.
(3) apparatus of the present invention measurement polarized light stokes parameter precision is high, and result is more stablized credible, and adaptability is stronger; Not only cost cheapness, and can miniaturization, be applicable to various actual measuring systems, as ellipsometer etc.
Accompanying drawing explanation
Fig. 1 is measurement mechanism light channel structure of the present invention and schematic diagram;
Fig. 2 is the light channel structure schematic diagram of a kind of specific embodiments of measurement mechanism of the present invention;
Fig. 3 is Stokes ellipsometer structure and light path schematic diagram.
Embodiment
In order to understand better the present invention, below in conjunction with drawings and Examples--the application of this device in Stokes ellipsometer, further illustrate optimization method and the process of apparatus of the present invention structure and instrument matrix thereof, but enforcement of the present invention and protection is not limited to this.
As shown in Figure 1, be a kind of light channel structure and schematic diagram of measurement mechanism of polarized light stokes parameter, incident light is conventionally divided into two-beam, i.e. transmitted light and reflected light after beam splitter 1; At transmitted light path and each wave plate of modulating mutually for position (the first wave plate 2 and the second wave plate 3) of introducing on reflected light path; Transmitted light path is placed the first wave plate 2, the first light-splitting device 4, the first photodetector 6, the second photodetector 7 modulated mutually for position successively; Reflected light path and transmitted light path are similar, place successively for position the second wave plate 3, the second light-splitting device 5, the 3rd photodetector 8, the 4th photodetector 9 of modulation mutually.Wherein the position angle of wave plate and the ellipsometric parameter of light-splitting device used are closely related.Incident light, through beam splitter, wave plate, incides after light splitting on four detectors again, and the light intensity signal of detector output reaches robot calculator through data collecting card and carries out data processing.The instrument matrix of this measurement mechanism can be optimized by regulating wave plate position angle to realize.Utilize the known light beam of multiple (four or more) Stokes parameter to incide successively in measurement mechanism, can realize measurement or the calibration of instrument matrix.
The alternative of the light-splitting device (1,4,5) that the present invention uses is more, as common plated film light splitting level crossing, polarization plated film Amici prism, Wollaston prism, prism and wedge prism etc.The device that wave plate can select the materials such as mica, quartz lamp or liquid crystal to make.The bit phase delay amount of the first wave plate 2 and the second wave plate 3 can be selected difference, has multiple possible combination.Select common 1/2nd wave plates and quarter-wave plate mutually to combine, also can realize the optimization of instrument matrix.Can also adopt the combination of 1/2nd wave plates (the first wave plate 2) and quarter-wave plate (the second wave plate 3), 1/2nd wave plates to combine with 1/2nd wave plate combined, quarter-wave plate and quarter-wave plate or the wave plate combined of quarter-wave plate different bit phase delay amounts with it, the wave plate combined of 1/2nd wave plates bit phase delay amounts different from it etc.
From aforementioned optimization method, after selected light-splitting device and detector,
for certain certain value, the major parameter that affects ABS only has
,
, after retardation of wave plate is determined,
,
parameter now mainly determined by the position angle of two blocks of wave plates, therefore the degree of optimization of instrument matrix depends on the azimuthal value of wave plate.
By above analysis, measurement mechanism of the present invention can adopt following two kinds of optimization methods.
Optimization method 1:
Measurement method is determined wave plate optimum azimuth: after selected light-splitting device and wave plate, by rotating wave plate, change its position angle, and survey record is under different orientations, surveys the size of the ABS of instrument matrix.ABS can adopt E-P method, 4 scaling methods in place or multiple spot scaling method to survey and calculate acquisition.The optimum azimuth that when ABS obtains maximal value, corresponding position angle is wave plate.
Optimization method 2:
Simulation is determined wave plate optimum azimuth: after the kind of selected light-splitting device and wave plate, adopt the ellipsometric parameter of extinction type ellipsometer measurement light-splitting device (1,4,5), the expression formula of bringing the retardation parameter of itself and wave plate into formula (3) derivation ABS.The fixing wherein position angle of wave plate of, adopts method for numerical simulation, calculates ABS with the azimuthal change curve of another piece wave plate, the optimum azimuth that on curve, the corresponding horizontal ordinate of maximal value is wave plate.
In accompanying drawing 2, beam splitter 1 adopts common plated film Amici prism, the first wave plate 2 is got approximate 1/2nd wave plates, and the second wave plate 3 is got approximate quarter-wave plate, and the first light-splitting device 4 adopts Wollaston prism, the second light-splitting device 5 also adopts Wollaston prism, 6,7,8,9 is photodetector, also comprises the first wave plate spinner 10, the second wave plate spinner 11, prism fixed mount (12,13,14) in figure, 15 is entrance pupil, and 16 is datum hole.What wherein common plated film Amici prism adopted is the GCC-401021 model that photoelectricity company of Daheng produces.What Wollaston prism adopted is the GCC-402032 model that photoelectricity company of Daheng produces.Photodetector (6,7,8,9) is photovoltaic detector, the PIN-13DP photodiode of selecting U.S. An OSI Systems Company to produce.The first wave plate 2 and the second wave plate 3 can be selected respectively 1/2nd wave plates and the quarter-wave plate of the material such as mica or quartz.The precision of the first wave plate spinner 10 and the second wave plate spinner 11 is 2 °.Entrance pupil 15 is about 2-3mm with the diameter of datum hole 16.In accompanying drawing 2, all devices are all positioned in a little black box 17, and described casing is close light tight, and interior is black, and black box size is about 15*7*13(cm), there is opening casing front and rear part.
Fig. 3 is that Stokes ellipsometer instrument matrix is measured and the installation drawing of sample measurement, and figure comprises: helium-neon laser 18 is, polaroid 19, sample stage 20, Standard Thin diaphragm or sample thin film sheet 21.Wherein the wavelength of laser instrument is 632.8nm, and polaroid polarizing angle is adjustable, and running accuracy is 0.5 °.Sample stage is controllable lift table top, and its height and horizontal tilt angle are all adjustable.
The device that the present embodiment provides can be used for measuring the Stokes' parameter of polarized light and the refractive index of film sample and thickness, and wherein the assembling of measurement mechanism and measuring process realize by following steps:
(1) beam splitter 1 is the installation of Amici prism: laser impinges perpendicularly in case from entrance pupil 15, penetrate from datum hole 16, put into Amici prism 1, now the position of Amici prism should be able to guarantee that the emergent light of transmitted light path also penetrates from datum hole, be fixed with prism fixed mount 12, and mark S the position on chest by the outgoing luminous point of reflected light path.
(2) installation of Wollaston prism (the first light-splitting device 4, the second light-splitting device 5): similar with the installation of Amici prism, put into after the first Wollaston prism, regulate its position, make the outgoing luminous energy of transmitted light path pass through smoothly datum hole.Equally, put into after the second Wollaston prism, reflected light path outgoing luminous point is still positioned at S place.Determine after prism location, adopt fixed mount (13,14) respectively two prisms to be fixed.
(3) adopt simulation to find wave plate optimum azimuth.Definite and the installation concrete steps of wave plate optimum azimuth are as follows:
The first step: adopt transmission ellipsometric parameter and the reflection ellipsometric parameter of HST type extinction type ellipsometer measurement plated film Amici prism, the first Wollaston prism and the second Wollaston prism transmission matrix are known.
Second step: wave plate selected.The phase-delay quantity that measures the first wave plate 2 and the second wave plate 3 is respectively 84.7 ° and 162.2 °.
The 3rd step: bring the phase-delay quantity of each prism ellipsometric parameter and wave plate into formula (3) and carry out sunykatuib analysis, solve and obtain many group optimum azimuths, choose wherein one group, the optimum azimuth of the first wave plate 2 and the second wave plate 3 is respectively (180 °, 225 °).
The 4th step: the first wave plate 2 and the second wave plate 3 are respectively charged into wave plate swivel mount (10,11), and rotate to optimum azimuth position and fix.
The 5th step: the installation of detector.Regulate respectively the position of four photodetectors, make four incident luminous points lay respectively at the middle position of four detectors, and Detector and data acquisition is linked and connect.
(4) measurement of instrument matrix and demarcation.Adopt the instrument matrix size of 4 scaling method measuring system optimal states.Used thickness is respectively the Si substrate Si O that 57.3 nm., 199.3 nm, 86.0 nm, 9.5 nm and refractive index are 1.46
2standard Thin diaphragm is calibrated, after laser instrument preheating half an hour, four Standard Thin diaphragms are placed on sample stage 20 successively in order, after helium-neon laser sends laser and is 19-polaroid (being positioned at 45 ° of position angles) by the polarizer, incide on sample with the linearly polarized light of 70 ° of incident angles, four bundle light after sample reflection are measured, and collected Si road current signal by lower of the automatic capture program respective record of labview
.Block entrance pupil 15, obtain one group of detector dark current signal
,
, solve instrument matrix D according to formula (1), and preserve.
So far, the optimization of Stokes ellipsometry instrument system the demarcation of implement device instrument matrix have been completed.As the film sample of a unknown parameter is placed on sample stage, in the current signal generation collecting, is returned formula (3), calculates the Stokes parameter S of the polarized light after sample reflection, and then obtains the parameter such as refractive index and thickness of film according to ellipse folk prescription journey.
The measurement result of table 1 for utilizing the Stokes ellipsometry instrument of apparatus of the present invention and the development of instrument matrix optimizing method to obtain.Experiment shows: system experimentation good stability, measuring accuracy is high, sample strong adaptability.
The experimental measurements of table 1 Peking University Standard Thin diaphragm
| Standard model |
 |
n | d（nm） | |
1
 |
79.01° | 41.42° | 1.463±0.003 | 100.1±0.2 |
Patent of the present invention has multiple specific embodiment.Therefore; as long as in the measurement mechanism of point amplitude polarized light Stokes' parameter; in two-beam road, introduce respectively two blocks of wave plates, realize optimized technical scheme and the measurement mechanism of system instrument matrix by the position angle of rotating wave plate, all belong to the protection domain of this patent.
Claims (7)
1. the measurement mechanism of a polarized light stokes parameter, it is characterized in that comprising incident light is divided into transmitted light and catoptrical beam splitter (1), also comprise successively the first wave plate (2), the first light-splitting device (4) of realizing polarization spectro of modulating mutually for position and the first photodetector (6) that receives respectively the two-beam after the first light-splitting device (4) light splitting and the second photodetector (7) at transmitted light path; On reflected light path, also comprise successively the second wave plate (3), the second light-splitting device (5) of realizing polarization spectro of modulating mutually for position and the 3rd photodetector (8) that receives respectively the two-beam after the second light-splitting device (5) light splitting and the 4th photodetector (9); The light intensity signal output terminal of four described detectors by data collecting card be connected for the robot calculator that data are processed.
2. the measurement mechanism of a kind of polarized light stokes parameter according to claim 1, it is characterized in that described transmitted light and reflected light are the different polarized light of two bundle polarization states, transmitted light impinges perpendicularly on the first wave plate (2), reflected light impinges perpendicularly on the second wave plate (3), the first light-splitting device (4), the second light-splitting device (5) further become the different polarized light of described two bundle polarization state into four bundle polarized lights, and four bundle polarized lights produce corresponding current signal after four described detectors; The position angle of described the first wave plate (2), the second wave plate (3) is adjustable, regulate the position angle of two blocks of wave plates to optimum azimuth, can make instrument matrix optimization, solve after instrument matrix by calibration, to treat that the caused current signal of photometry calculates solves, and realizes the real-time measurement of incident light stokes parameter.
3. the measurement mechanism of a kind of polarized light stokes parameter according to claim 1, the first wave plate retardation amount that it is characterized in that comprises from the combination of the bit phase delay amount of the second wave plate: the wave plate combined of 1/2nd wave plates and quarter-wave plate combination, quarter-wave plate and 1/2nd wave plate combined, 1/2nd wave plates and 1/2nd wave plate combined, quarter-wave plate and quarter-wave plate combination, quarter-wave plate different bit phase delay amounts with it or the wave plate combined of 1/2nd wave plates bit phase delay amounts different with it.
4. for optimizing the method for a kind of measurement mechanism of polarized light stokes parameter described in claim 1, it is characterized in that adopting measurement method, detailed process is: under the condition that light channel structure is determined and each optical element is selected of measurement mechanism, by regulating the first wave plate, the position angle of the second wave plate is realized and being optimized, by the instrument determinant of a matrix size of measurement mechanism under actual measurement different orientations, the size that obtains matrix determinant and the azimuthal relation curve of wave plate and then determine corresponding wave plate optimum azimuth in the time of instrument matrix maximum, realize the instrument matrix optimization of measurement mechanism.
5. for optimizing the method for a kind of measurement mechanism of polarized light stokes parameter described in claim 1, it is characterized in that adopting simulation, detailed process is: utilize optical gauge or equipment, the ellipsometric parameter of all beam splitters in the light path of measurement mechanism described in actual measurement, obtain the matrix expression of single beam splitter, and the instrument matrix of computation and measurement device, instrument matrix and determinant thereof to measurement mechanism carry out numerical simulation and analysis, corresponding wave plate optimum azimuth while obtaining instrument matrix maximum, realize the optimization of measurement mechanism instrument matrix.
6. method according to claim 4, it is characterized in that fixing in two blocks of wave plates the position angle of, adopt method for numerical simulation, computing equipment matrix determinant is with the azimuthal change curve of another piece wave plate, and on curve, the corresponding horizontal ordinate of maximal value is the optimum azimuth of another piece wave plate.
7. according to method described in claim 4 ~ 6 any one, it is characterized in that:
If the stokes parameter of incident light is
, order
t,
rrepresent respectively transmission matrix and the reflection matrix of beam splitter (1),
,
be transmission matrix and the reflection matrix of the first light-splitting device (4),
,
be transmission matrix and the reflection matrix of the second light-splitting device (5),
for the photoelectric conversion factors of photodetector,
,
be respectively the transmission matrix of the first wave plate and the second wave plate in transmitted light path and reflected light path, the current signal that four photodetectors produce is expressed as:
The first detector:
The second detector:
The 3rd detector:
The 4th detector:
,
Order
drepresent the instrument matrix of whole measurement mechanism, I represents the current matrix that each photodetector currents signal forms,
（1） ，
Instrument matrix
dobtain by calibrating method, if instrument matrix
dthere is invertible matrix
, the Stokes vector of light so to be measured is
The instrument matrix of known measurement mechanism, determines the Stokes vector of any light by the electric signal vector of surveying;
Make ABS=
ABS=
（3），
Wherein, det represents Matrix Calculating determinant, by adjust to make determinant absolute value ABS to maximize to wave plate position angle, realizes the optimization of instrument matrix.
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| CN110907360A (en) * | 2019-12-19 | 2020-03-24 | 中国科学院长春光学精密机械与物理研究所 | Polarization detection system based on wolflaston prism |
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