CN103774226B - 一种大尺寸蓝宝石单晶炉保温结构 - Google Patents
一种大尺寸蓝宝石单晶炉保温结构 Download PDFInfo
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- CN103774226B CN103774226B CN201410037225.4A CN201410037225A CN103774226B CN 103774226 B CN103774226 B CN 103774226B CN 201410037225 A CN201410037225 A CN 201410037225A CN 103774226 B CN103774226 B CN 103774226B
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- Prior art keywords
- molybdenum
- brick
- thermoscreen
- zirconium white
- zirconium
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- 238000009413 insulation Methods 0.000 title claims abstract description 53
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 39
- 239000010980 sapphire Substances 0.000 title claims abstract description 39
- 239000013078 crystal Substances 0.000 title claims abstract description 22
- 238000010276 construction Methods 0.000 title claims abstract description 13
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 57
- 239000011449 brick Substances 0.000 claims abstract description 43
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 35
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 33
- 239000011733 molybdenum Substances 0.000 claims abstract description 33
- 239000000835 fiber Substances 0.000 claims description 22
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 19
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 19
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 14
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical group [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 239000004411 aluminium Substances 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 230000003245 working effect Effects 0.000 abstract description 5
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
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Priority Applications (1)
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CN201410037225.4A CN103774226B (zh) | 2014-01-26 | 2014-01-26 | 一种大尺寸蓝宝石单晶炉保温结构 |
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CN201410037225.4A CN103774226B (zh) | 2014-01-26 | 2014-01-26 | 一种大尺寸蓝宝石单晶炉保温结构 |
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CN103774226A CN103774226A (zh) | 2014-05-07 |
CN103774226B true CN103774226B (zh) | 2016-04-20 |
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CN201410037225.4A Expired - Fee Related CN103774226B (zh) | 2014-01-26 | 2014-01-26 | 一种大尺寸蓝宝石单晶炉保温结构 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104152995B (zh) * | 2014-09-04 | 2016-08-31 | 南京晶升能源设备有限公司 | 用于蓝宝石单晶炉的组合式下隔热保温屏 |
CN104178813A (zh) * | 2014-09-15 | 2014-12-03 | 同方国芯电子股份有限公司 | 泡生法蓝宝石单晶生长炉保温侧屏 |
CN104264213A (zh) * | 2014-09-30 | 2015-01-07 | 元亮科技有限公司 | 一种大尺寸掺杂蓝宝石晶体的efg生长装置及其生长工艺 |
CN104630888A (zh) * | 2014-12-18 | 2015-05-20 | 福建鑫晶精密刚玉科技有限公司 | 一种用于蓝宝石生长炉的可视坩埚盖 |
CN105088332A (zh) * | 2015-09-02 | 2015-11-25 | 哈尔滨奥瑞德光电技术有限公司 | 生长大尺寸蓝宝石的单晶炉改进结构 |
CN107460548A (zh) * | 2016-06-02 | 2017-12-12 | 济南瑰宝新材料有限公司 | 一种氧化锆纤维制品复合金属涂层保温结构 |
CN107254714A (zh) * | 2017-08-12 | 2017-10-17 | 哈尔滨奥瑞德光电技术有限公司 | 200kg以上大尺寸蓝宝石单晶炉的热场结构 |
CN108342771A (zh) * | 2018-05-22 | 2018-07-31 | 苏州恒嘉晶体材料有限公司 | 一种复合式侧保温屏 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201411509Y (zh) * | 2009-06-26 | 2010-02-24 | 哈尔滨工大奥瑞德光电技术有限公司 | 一种用于生长300mm以上大尺寸蓝宝石的单晶炉炉体 |
CN201962419U (zh) * | 2011-02-24 | 2011-09-07 | 浙江昀丰新能源科技有限公司 | 一种蓝宝石单晶炉 |
CN102628183B (zh) * | 2012-04-18 | 2016-04-27 | 江苏协鑫软控设备科技发展有限公司 | 保温结构及高温炉 |
CN103215635B (zh) * | 2013-04-27 | 2016-03-16 | 哈尔滨奥瑞德光电技术有限公司 | 一种蓝宝石单晶炉保温结构 |
CN103233270B (zh) * | 2013-04-27 | 2016-01-06 | 哈尔滨奥瑞德光电技术有限公司 | 一种蓝宝石单晶炉上部保温结构 |
CN103352247B (zh) * | 2013-07-17 | 2016-06-29 | 江苏国晶光电科技有限公司 | 一种应用于泡生法蓝宝石单晶生长的轴向温度梯度可调的保温结构 |
CN103397383B (zh) * | 2013-08-14 | 2016-03-09 | 上海森松压力容器有限公司 | 一种节能蓝宝石晶体炉及其使用方法 |
CN103422162A (zh) * | 2013-09-03 | 2013-12-04 | 无锡鼎晶光电科技有限公司 | 一种生长方形蓝宝石的单晶炉热场结构 |
CN203741457U (zh) * | 2014-01-26 | 2014-07-30 | 哈尔滨奥瑞德光电技术股份有限公司 | 一种大尺寸蓝宝石单晶炉保温结构 |
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- 2014-01-26 CN CN201410037225.4A patent/CN103774226B/zh not_active Expired - Fee Related
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Denomination of invention: Heat preservation structure of large-sized sapphire mono-crystal furnace Effective date of registration: 20180929 Granted publication date: 20160420 Pledgee: Longjiang bank Limited by Share Ltd. Harbin Development Zone sub branch Pledgor: HARBIN AURORA OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2018990000856 |
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