CN103765160B - Angular-rate sensor - Google Patents
Angular-rate sensor Download PDFInfo
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- CN103765160B CN103765160B CN201280042188.5A CN201280042188A CN103765160B CN 103765160 B CN103765160 B CN 103765160B CN 201280042188 A CN201280042188 A CN 201280042188A CN 103765160 B CN103765160 B CN 103765160B
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- 238000001514 detection method Methods 0.000 claims abstract description 67
- 230000005284 excitation Effects 0.000 claims abstract description 57
- 230000002093 peripheral effect Effects 0.000 claims abstract description 22
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 238000005452 bending Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 13
- 230000006866 deterioration Effects 0.000 abstract description 3
- 239000012528 membrane Substances 0.000 description 6
- 230000004069 differentiation Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
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Abstract
The present invention provides detection sensitivity precision that a kind of axle improving direction about the z axis produces, additionally and will not make the angular-rate sensor of oscillating mode of the detection sensitivity precision deterioration produced around the axle of X-direction/Y direction.Weight (3) has cylindric or coniform.The contour shape of the peripheral part of diaphragm (1) has the shape in the corner of tetragon with line part (ST).4 vibrational excitation electrodes (11) are formed respectively in 4 regions separated by the 1st imaginary line (L1) and the 2nd imaginary line (L2).4 angular velocity detection electrodes (13) are formed respectively in 4 regions separated by the 1st notional diagonal (CL1) and the 2nd notional diagonal (CL2).
Description
Technical field
The present invention relates to angular-rate sensor.
Background technology
Fig. 1 (A)～(C) are that the conventional angular velocity shown in Japanese Unexamined Patent Publication 2010-160095 publication (patent documentation 1) passes
The top view of sensor, profile and bottom view.In this angular-rate sensor, possesses flat diaphragm (diaphragm)
101, be configured at the central part of diaphragm 101 weight 103, supporting diaphragm peripheral part support 105, on the surface of diaphragm every
Lower electrode 107, the piezoelectric membrane 109 being formed on lower electrode of dielectric film 106 formation, be formed on piezoelectric membrane
4 vibrational excitations electrode 111 and 4 angular velocity detection electrodes 113.In order to for weight 103, cause and there is regulation
The vibration of the component motion in the direction of vibrating shaft, drives the vibrational excitation portion being made up of 4 vibrational excitation electrodes 111.Then,
The position in the direction of the offset axis produced weight 103 according to Coriolis force is detected from 4 angular velocity detection electrodes 113
Move, and obtain angular velocity.In this angular-rate sensor, in the center of diaphragm 101, there is initial point O and film when defining
When the surface of sheet 101 is contained in XYZ three-dimensional orthogonal coordinate system as X/Y plane, using in X-axis and Z axis as vibration
Axle, using another as offset axis, detects according to the detected value from the angular velocity detection electrode 113 constituting displacement detecting portion
Angular velocity around Y-axis.It addition, in order to detect around X-axis and around the angular velocity of Y-axis, make weight 103 vibrate in z-direction.Separately
Outward, in order to detect angular velocity about the z axis, weight 103 is made to vibrate in X-direction or Y direction.
Prior art literature
Patent documentation 1: Japanese Unexamined Patent Publication 2010-160095 publication
Summary of the invention
The problem that invention is to be solved
But, in conventional angular-rate sensor, the section shape of weight 103 is circular and the periphery of diaphragm portion 101
The contour shape in portion is also respectively circle.In such a configuration, even if make weight for the angular velocity that actually detects about the z axis
Hammer 103 vibrates in X-direction or Y direction, and weight 103 also cannot be made fully to vibrate.That is, it practice, due to diaphragm 101
, there is weight 103 and vibrate obliquely and high accuracy in the shape of the electrode on surface, weight 103 and the machining accuracy of support 105
Angular velocity detection about the z axis difficulty problem.That is, in the angular-rate sensor of the oscillating mode recorded at patent documentation 1, it is impossible to
Driving vibration and detecting the separation of vibration when being sufficiently carried out angular velocity detection about the z axis, it is difficult to realize sufficient angular velocity
Detection sensitivity precision.
It is an object of the invention to provide the angular-rate sensor of a kind of oscillating mode, this angular-rate sensor improves about the z axis
The detection sensitivity precision that the axle in direction produces, additionally and the detection spirit produced around the axle of X-direction Y direction will not be made
Sensitivity precision deteriorates.
The technological means of solution problem
The angular-rate sensor of the present invention possesses flat diaphragm, is configured at the weight of the central part of diaphragm, support membrane
The support of the peripheral part of sheet, the vibrational excitation portion being arranged at diaphragm and displacement detecting portion.Vibrational excitation portion, for weight, draws
Act the vibration of the component motion in the direction of the vibrating shaft with regulation.Displacement detecting portion is detected according to Coriolis force in weight
The displacement in the direction of the offset axis produced.It addition, when defining the surface bag in the center of diaphragm with initial point O and diaphragm
When being contained in XYZ three-dimensional orthogonal coordinate system as X/Y plane, using in X-axis and Z axis as vibrating shaft, another is made
For offset axis, detect the angular velocity around Y-axis according to the detected value from displacement detecting portion.
Especially, in the present invention, weight has cylindric or coniform.It addition, by the profile of the peripheral part of diaphragm
Shape is set to the shape in foursquare corner with line part or bending section.Herein, shape cylindric of weight is determined
Or coniform cylinder or the circular cone the most completely of not mean onlying that, but allow and manufacture upper crooked the depositing occurred
The concavo-convex existence on the surface occurred in, manufacture, the wide diameter portion produced in the boundary portion (corner) of weight Yu diaphragm grade
Exist.It addition, the line part that comprised of the contour shape of the peripheral part of diaphragm and bending section are also not necessarily limited to the most complete
Rectilinear form and curved shape.
According to the present invention, the X-direction needed for angular velocity detection and the vibration of Y direction about the z axis become obvious.Separately
Outward, the vibration around X-axis and the Z-axis direction needed for the angular velocity detection of Y-axis also will not be lost.According to the invention it is thus possible to
Offer can make weight angular velocity of fully vibration in X-direction or Y direction pass for the angular velocity that detects about the z axis
Sensor.Additionally, using the teaching of the invention it is possible to provide improve detection sensitivity precision that the axle in direction about the z axis produces, additionally and will not make around X-axis side
Angular-rate sensor to the oscillating mode of the detection sensitivity precision deterioration of the axle generation of Y direction.
Inventor the shape of weight is defined as cylindric or cone shape in the case of, have studied and changing diaphragm
Peripheral part contour shape in the case of this 3 axial vibration of X, Y, Z.Its result, finds that following relation is set up.
The contour shape of the peripheral part of diaphragm is circular situation: the vibration of Z-direction is good, but is difficult to separate X-axis
The vibration in direction and the vibration of Y direction.
The contour shape of the peripheral part of diaphragm is the situation of tetragon: be easily isolated vibration and the Y direction of X-direction
Vibration, but easily produce crooked in the vibration of Z-direction.
Therefore, inventor is for the contour shape of the peripheral part of diaphragm, as situation and the feelings of tetragon of above-mentioned circle
The intermediate shape of condition considers the shape of the present invention, has carried out various test, its result, it was found that if the middle shape of the present invention
Shape, the most easily distinguishes the vibration of X-direction and the vibration of Y direction, the displacement of the diaphragm additionally and during the vibration of Z-direction
For concentric circles, reach stable driving vibration.
Above-mentioned vibrational excitation portion and displacement detecting portion are made up of multiple electrodes respectively.It is known as the shape of electrode, configuration
Position, there is difference in detection performance.Accordingly, with respect to shape, the allocation position of preferred electrode, according to the performance as target
And determine aptly.Concrete angular-rate sensor possesses the lower electrode on the surface being formed at diaphragm, is formed at lower electrode
On piezoelectric film, be formed on piezoelectric film and constitute 4 vibrational excitation electrodes in vibrational excitation portion and shake to be positioned at 4
The mode of the inner side of dynamic excitation electrode is formed on piezoelectric film and constitutes 4 angular velocity detection electrodes in displacement detecting portion.
In this case it is assumed that 2 limits opposed with diaphragm the 1st imaginary line that is orthogonal and that divide this 2 limit equally and diaphragm is right
Orthogonal and that this limit 2 is divided equally the 2nd imaginary line in remaining 2 limits put, by the center in the corner, opposed 2 of diaphragm
The 1st notional diagonal and by the 2nd notional diagonal at the center in opposed remaining 2 corners of diaphragm.It addition,
The contour shape of the peripheral part of diaphragm is set to relative 1st imaginary line or the 2nd imaginary line is the symmetrical shape of line.In this situation
Under, for 4 vibrational excitation electrodes, formed respectively in 4 regions separated by the 1st imaginary line and the 2nd imaginary line, or
Person is formed in 4 regions separated by the 1st notional diagonal and the 2nd notional diagonal respectively.It addition, 4 angular velocity detection
Formed respectively in 4 regions separated by the 1st imaginary line and the 2nd imaginary line with electrode, or by the 1st notional diagonal
Formed with in 4 regions of the 2nd notional diagonal separation.Thereby, it is possible to reliably obtain energy from 4 angular velocity detection electrodes
Enough distinguish the vibration of X-direction and the signal of the vibration of Y direction.
It addition, in the case of semiconductor substrate enforcement etching is formed diaphragm, weight and support, for
Obtain the signal that the differentiation of the vibration of the vibration of X-direction and Y direction can be made to become more apparent, by the 1st imaginary line
And the 2nd form 4 vibrational excitation electrodes, respectively false by the 1st imaginary line and the 2nd in 4 regions separating of imaginary line
Think that 4 regions that line separates form 4 angular velocity detection electrodes the most respectively.In such a situation it is preferred that with the 1st notional diagonal
And the 2nd the notional diagonal mode the most consistent with the axis of the axis of X-axis and Y-axis formed.
In the concrete structure changing idea, it is possible to separated by the 1st notional diagonal and the 2nd notional diagonal
4 vibrational excitation electrodes are formed respectively in 4 regions.It addition, 4 angular velocity detection electrodes are by the 1st notional diagonal
Formed respectively with in 4 regions of the 2nd notional diagonal separation.In this case, the 1st imaginary line and the 2nd imaginary line and X are made
The axis of axle and the axis of Y-axis are the most consistent.In such an arrangement, by the contour shape of diaphragm along the 2nd imagination
The length dimension of line be set to R1, the length dimension along the 1st imaginary line of the contour shape of diaphragm is set to R2, will be along the 2nd
In the case of the length dimension of notional diagonal is set to R3, if meeting R1: R2: R3=(value of the scope of 0.95 ± 0.02): 1
: the relation of (value of the scope of 0.85 ± 0.02), then main shaft sensitivity and other axle sensitivity can be made all to balance.
4 vibrational excitation electrodes and 4 angular velocity detection electricity consumptions are highly preferred is formed not across diaphragm and weight
Border and the border of diaphragm and support.Thereby, it is possible to produce vibration efficiently, and shaking of X-direction can be increased
The dynamic vibration with Y direction.
4 vibrational excitation electrodes and 4 angular velocity detection electricity consumptions highly preferred be configured to relative 1st imaginary line and
2nd imaginary line becomes line symmetric shape.Thereby, it is possible to obtain making the differentiation of the vibration of the vibration of X-direction and Y direction
The clearest and the most definite signal.
Although the shape of electrode, but the contour shape of 4 vibrational excitation electrodes is by the radial outside being positioned at weight
The outside inner edge the most opposed with outside this and in the case of outside linking and a pair link limit of inner edge constitute,
The shape that preferably shape of the part being shaped as peripheral part to diaphragm of outside is similar.Shake thereby, it is possible to produce efficiently
Dynamic.
In such a situation it is preferred that the shape of the inner edge of the contour shape of vibrational excitation electrode is set to the shape of outside
Similar shape.Thereby, it is possible to produce vibration the most efficiently.
It addition, the contour shape of 4 angular velocity detection electrodes is by the outside of radial outside and the outside being positioned at weight
Outside the most opposed inner edge and link and in the case of a pair link limit composition of inner edge, outside and inner edge are excellent
Choosing is respectively provided with concentric circular shape.If using such angular velocity detection electrode, then can be within the bounds of possibility
Increase can be distinguished the vibration of X-direction and the signal of the vibration of Y direction and obtain this letter from 4 angular velocity detection electrodes
Number.
It addition, the linking part in the limit of the contour shape of diaphragm and corner preferably bends.Thereby, it is possible to improve the machinery of diaphragm
Intensity.It addition, the corner of the contour shape of the contour shape of 4 vibrational excitation electrodes and 4 angular velocity detection electrodes
Bend the most respectively.Thereby, it is possible to prevent electrode to be stripped.
Accompanying drawing explanation
Fig. 1 (A)～(C) are the top view of conventional angular-rate sensor, profile and bottom view.
Fig. 2 (A) and (B) are top view and the ends of an example of the embodiment of the angular-rate sensor of the present invention
View.
Fig. 3 is to be shown in the angular-rate sensor about embodiment driving vibrational excitation electrode so that weight is at X
The figure of a part for output in the frequency range of the regulation obtained from 4 angular velocity detection electrodes during vibration on direction of principal axis.
Fig. 4 (A) and (B) are the flanging parts (non-etched part) for explanation, semiconductor substrate being carried out dry ecthing and being formed
Figure.
Fig. 5 illustrates the top view of another embodiment of the invention.
Fig. 6 is that the angular-rate sensor being shown in the embodiment about Fig. 5 is driving vibrational excitation electrode so that weighing
A part for output in the frequency range of the regulation obtained from 4 angular velocity detection electrodes during hammer vibration in the X-axis direction
Figure.
Fig. 7 (A) and (B) are top view and the back views of the angular-rate sensor of the 3rd embodiment of the present invention.
Fig. 8 (A)～(D) are the figures of the example illustrating different electrode shapes and electrode configuration.
Fig. 9 is the figure illustrating the different diaphragm of contour shape.
(symbol description)
1: diaphragm；3: weight；5: support；9: piezoelectric membrane；11: vibrational excitation electrode；12A: outside；12B: interior
Limit；12C: link limit；13: angular velocity detection electrode；14A: outside；14B: inner edge；14C: link limit；L1: the 1 imaginary line；
L2: the 2 imaginary line；CL2: the 2 notional diagonal；CL1: the 1 notional diagonal.
Detailed description of the invention
Hereinafter, referring to the drawings, embodiments of the present invention are described.Fig. 2 (A) and (B) are the angular velocity sensings of the present invention
The top view of one example of the embodiment of device and bottom view.Further, since the conventional angle of profile construction and Fig. 1 (B)
Velocity sensor is identical, so omitting.It addition, in Fig. 2 (A), not shown wiring pattern.Angular velocity in present embodiment passes
In sensor, possess flat diaphragm 1, be configured at the back side central part of diaphragm 1 weight 3, supporting diaphragm 1 peripheral part
Bearing portion 5, the not shown lower electrode formed across not shown dielectric film on the surface of diaphragm 1, it is formed on lower electrode
Piezoelectric membrane 9,4 the vibrational excitation electrodes 11 being formed on piezoelectric membrane 9 and 4 angular velocity detection electrodes 13.
Diaphragm 1 and weight 3 and support 5 are to have by configuring on a face of the semiconductor substrate that crystal orientation is (100)
The mask of the shape corresponding with the end face of the end face of weight 3 and support 5 also implements dry ecthing and one landform from this mask side
Become.In the present embodiment, by 4 vibrational excitation electrodes 11, constitute for weight, cause the vibration with regulation
The vibrational excitation portion of the vibration of the component motion in the direction of axle.It addition, by angular velocity detection electrode 13, constitute detection root
The displacement detecting portion of the displacement in the direction of the offset axis produced in weight 3 according to Coriolis force.
Weight 3 has cylindric or coniform.It addition, the contour shape of the peripheral part of diaphragm is (at this at tetragon
For generally square in embodiment) corner there is the shape of line part ST.In the present embodiment, on foursquare each limit
The intersection point portion of S1～S4 and line part ST, defines little radius portion.
In the present embodiment, comprise when defining the surface in the center of diaphragm 1 with initial point O and diaphragm 1
When XYZ three-dimensional orthogonal coordinate system as X/Y plane, as shown in Fig. 2 (A), define X-axis and Y-axis.That assumes with diaphragm 1 is right
Remain opposed with diaphragm 1 of orthogonal and that this 2 limit S1 and S3 is divided equally the 1st imaginary line L1 of 2 limit S1 and S3 put
Remaining orthogonal and that this 2 limit S2 and S4 is divided equally the 2nd imaginary line L2 of 2 limit S2 and S4, opposed by diaphragm 1
1st notional diagonal CL1 at the center of 2 corner C1 and C3 and by opposed remaining 2 corner C2 of diaphragm 1
And the 2nd notional diagonal CL2 at the center of C4.It addition, the contour shape of the peripheral part of diaphragm 1 to be set to relative 1st imagination
Line L1 or the 2nd imaginary line L2 is the shape that line is symmetrical.In the present embodiment, by the 1st imaginary line L1 and the 2nd imaginary line
Form respectively 4 vibrational excitation electrodes 11 in 4 regions that L2 separates.It addition, 4 angular velocity detection with electrode 13 by
4 regions that 1st notional diagonal CL1 and the 2nd notional diagonal CL2 separate are formed respectively.
The contour shape of 4 vibrational excitation electrodes 11 by be positioned at the outside 12A of radial outside of weight 3 and this outside
Outside inner edge 12B the most opposed for 12A and link, a pair link limit 12C and 12D of 12A and inner edge 12B is constituted.
Outside 12A is shaped as and a part for the peripheral part of diaphragm 1 (part on 2 adjacent limits and the part of whole line part)
The similar shape of shape.It addition, the shape of the inner edge 12B of the contour shape of vibrational excitation electrode 11 is also the shape of outside
Similar shape.If 4 vibrational excitation electrodes 11 to be set to such shape, then can produce vibration efficiently.
It addition, the contour shape of 4 angular velocity detection electrodes 13 by be positioned at weight 3 radial outside outside 14A and
The outside the most opposed inner edge 14B of 14A and a pair link limit 14C of 14A and inner edge 14B and 14D structure outside linking
Become.In the present embodiment, outside 14A and inner edge 14B is respectively provided with concentric circular shape.If so determining that 4 are shaken
Dynamic excitation electrode 11 and 4 angular velocity detection electrodes 13, then can reliably obtain from 4 angular velocity detection electrodes 13
The vibration of X-direction and the signal of the vibration of Y direction can be distinguished.
In the present embodiment, 4 vibrational excitation electrodes 11 and 4 angular velocity detection electrodes 13 are formed not
Cross over the border of diaphragm 1 and the border of weight 3 and diaphragm 1 and support 5.If so forming 4 vibrational excitation electrodes
11 and 4 angular velocity detection electrodes 13, then can make the amplitude of output signal from 4 angular velocity detection electrodes 13
Become bigger amplitude.
In order to for weight 3, cause the vibration of the component motion in the direction of the vibrating shaft with regulation, drive and shaken by 4
The vibrational excitation portion that dynamic excitation is constituted with electrode 11.It addition, by detecting according to Ke Liao from 4 angular velocity detection electrodes 13
The displacement in the direction of the offset axis that profit power produces in weight 3, obtains angular velocity.In this angular-rate sensor, by X-axis with
And in Z axis as vibrating shaft, using another as offset axis, according to from the angular velocity detection constituting displacement detecting portion
The angular velocity around Y-axis is detected with the detected value of electrode 13.It addition, in order to detect around X-axis and around the angular velocity of Y-axis, make weight 3
Vibrate in z-direction.According to present embodiment, the X-direction needed for angular velocity detection about the z axis and the vibration of Y direction
Become obvious.It addition, the vibration around X-axis and the Z-direction needed for the angular velocity detection of Y-axis also will not be lost.Therefore, root
According to present embodiment, it is possible to obtain following angular-rate sensor, this angular-rate sensor can detect Coriolis force, Er Qiewei
Detection angular velocity about the z axis can make the weight vibrate fully in X-direction or Y direction.It addition, in order to detect around
The angular velocity of Z axis, makes weight 3 vibrate in X-direction or Y direction.
Fig. 3 is shown in the angular-rate sensor about present embodiment so that weight 3 shakes with 24.2kHz in the X-axis direction
In the frequency range of the regulation obtained from 4 angular velocity detection electrodes 13 when dynamic mode drives vibrational excitation electrode 11
The part of output.It addition, X1, X2, Y1 and Y2 in figure with in order to distinguish the electrode in Fig. 2 (A) and additional symbol
X1, X2, Y1 and Y2 are identical.According to Fig. 3, the available vibration that can distinguish X-direction and Y direction clearly defeated
Go out.
If the semiconductor substrate being (100) to crystal orientation as shown in Fig. 4 (A) and (B) carry out dry ecthing and one
Define diaphragm 1, weight 3 and support 5, then at the boundary portion of support 5 and diaphragm 1 and weight 3 and diaphragm 1 body
Boundary portion, residual flanging part (non-etched part) 4A～4C somewhat.Especially, the flanging part formed between weight 3 and diaphragm 1
(non-etched part) has directivity.As shown in Fig. 4 (A), distinguish along the 1st imaginary line L1 and the crimping of the 2nd imaginary line L2
The extreme length of portion's (non-etched part) 4A is than the flanging part along the 1st notional diagonal CL1 and the 2nd notional diagonal CL2 (not
Etched part) extreme length of 4B is longer.Vibration characteristics is made a big impact by the existence of long flanging part (non-etched part) 4A.
Fig. 5 illustrates the top view of the 2nd embodiment of the present invention for disposing such situation.In present embodiment
In, 4 vibrational excitation electrodes 11 ' are formed in 4 regions separated by the 1st imaginary line L1 and the 2nd imaginary line L2 respectively,
4 angular velocity detection also distinguish shape in 4 regions separated by the 1st imaginary line L1 and the 2nd imaginary line L2 with electrode 13 '
Become.In this case, the 1st notional diagonal CL1 and the 2nd notional diagonal CL2 are divided with the axis of Y-axis and the axis of X-axis
The most consistent.In the present embodiment, by take on the direction being formed with the short flanging part of length (non-etched part) 4B X-axis and
The coordinate of Y-axis, reduces the impact of the existence of flanging part (non-etched part).
Fig. 6 is shown in the angular-rate sensor of the embodiment about Fig. 5 so that weight 3 is in the X-axis direction with 24.0kHz
The frequency model of the regulation that the mode of vibration obtains from 4 angular velocity detection electrodes 13 ' when driving vibrational excitation electrode 11 '
Enclose a part for interior output.It addition, X1, X2, Y1 and Y2 in figure with in order to distinguish the electrode in Fig. 5 and additional symbol
X1, X2, Y1 and Y2 are identical.As comparison diagram 6 and Fig. 3 understands, in this case, compared to the embodiment party of Fig. 3
The situation of formula, the difference between output (X1, X2) and the output (Y1, Y2) of Y direction of X-direction is bigger.Therefore, compared to figure
The embodiment of 2, in the structure of the embodiment of Fig. 5, the differentiation of the vibration of X-direction and the vibration of Y direction becomes more
Clearly.It addition, certainly can adopt in the electrode shape different from present embodiment according to the characteristic of the diaphragm material used
With different electrode configurations.
Fig. 7 (A) and (B) illustrate top view and the back view of the angular-rate sensor of the 3rd embodiment of the present invention.
In this example embodiment, 4 vibrational excitations with electrode 11 " in 4 separated by the 1st notional diagonal CL1 and the 2nd notional diagonal CL2
Formed respectively in individual region.It addition, 4 angular velocity detection electrodes 13 are " also right by the 1st notional diagonal CL1 and the 2nd imagination
Formed respectively in 4 regions that linea angulata CL2 separates.In the present embodiment, the 1st imaginary line L1 and the 2nd imaginary line L2 and X-axis
Axis and the axis of Y-axis respectively consistent.By experimental verification, in such an arrangement, by the contour shape of diaphragm
The length dimension along the 2nd imaginary line be set to R1, the length dimension along the 1st imaginary line of the contour shape of diaphragm be set to
R2, the length dimension along the 2nd notional diagonal is set to R3 in the case of, if meeting R1: R2: R3=(0.95 ± 0.02
The value of scope): 1: the relation of (value of the scope of 0.85 ± 0.02), then can make main shaft sensitivity and other axle sensitivity
All balance.It addition, in the present embodiment, the outside of the radial outside of 4 vibrational excitation electrodes 11 " by being positioned at weight 3 "
Inner edge 12 " outside B, link 12 " A the most opposed for A for 12 " A and outside this 12 " and inner edge 12 " a pair link limit 12 of B "
" D is constituted C and 12.Outside 12 " A is shaped as and diaphragm 1 " peripheral part a part (2 adjacent limit SL " a part
With whole line part S1 " part) the similar shape of shape.It addition, vibrational excitation is with electrode 11 " the inner edge of contour shape
12 " shape of B has circular shape.If by 4 vibrational excitation electrodes 11 " be set to such shape, then can be the most efficient
Ground produces vibration.The outside of the radial outside of " contour shape by being positioned at weight 3 " it addition, 4 angular velocity detection electrodes 13
Inner edge 14 " outside B, the link 14 " A and inner edge 14 " a pair of B links limit 14 " C that 14 " A and outsides 14 " are the most opposed for A
And 14 " D constitute.In the present embodiment, outside 14 " A and inner edge 14 " B is respectively provided with concentric circular shape.If this
Sample determines 4 vibrational excitation electrodes 11 " and 4 angular velocity detection electrodes 13 ", then can use from 4 angular velocity detection
Electrode 13 " reliably obtains the signal of the vibration that can distinguish the vibration of X-direction and Y direction.It addition, in present embodiment
In [part shown in r of Fig. 7 (A)], make the angle of 4 vibrational excitation electrodes 11 " and 4 angular velocity detection electrodes 13 "
Portion bends, it is possible to be effectively prevented stripping electrode.It addition, diaphragm 1 in the present embodiment " the Bian Hejiao of contour shape
Linking part [part shown in r of Fig. 7 (the A)] bending in portion, so diaphragm 1 " mechanical strength high.
In the example of Fig. 8 (A), 4 vibrational excitation electrodes 11 ' are formed at by the 1st notional diagonal CL1 and the 2nd
In 4 regions that notional diagonal CL2 separates.It addition, 4 angular velocity detection electrodes 13 ' are respectively formed in by the 1st imaginary line
In 4 regions that L1 and the 2nd imaginary line L2 separates.In the example of Fig. 8 (B), there is the electricity identical with the example of Fig. 8 (A)
Pole configures, but the inner edge 12 ' B of vibrational excitation electrode 11 ' has circular shape.In the example of Fig. 8 (C), with Fig. 8's (B)
Similarly, the inner edge 12 ' B of vibrational excitation electrode 11 ' has circular shape to example, and electrode is configured to and the example phase of Fig. 2 (A)
With.And then, in the example of Fig. 8 (D), in the same manner as the example of Fig. 8 (B), the inner edge 12 ' B of vibrational excitation electrode 11 ' has
Circular shape, electrode is configured to identical with the example of Fig. 5.
It addition, in the above-described embodiment, the contour shape of the peripheral part of diaphragm is set at tetragon (the biggest
Cause square) corner there is the shape of line part but it also may the contour shape of the peripheral part of diaphragm is set as illustrated in fig. 9
For having the shape of bending section C in foursquare corner.Even if in this case, it is also possible to obtain and by the periphery of diaphragm
The effect that the situation of the shape that the contour shape in portion is set to have line part in foursquare corner is same.
Industrial applicability
According to the present invention, the X-direction needed for angular velocity detection and the vibration of Y direction about the z axis become obvious.Separately
Outward, the vibration around X-axis and the Z-direction needed for the angular velocity detection of Y-axis also will not be lost.Therefore, according to the present invention, energy
The detection sensitivity precision of enough axle generations improving direction about the z axis, additionally and will not make around X-direction/Y direction
The angular-rate sensor of the detection sensitivity precision deterioration that axle produces.
Claims (14)
1. an angular-rate sensor, possesses:
Flat diaphragm；
Weight, is configured at the central part of described diaphragm；
Support, supports the peripheral part of described diaphragm；
Vibrational excitation portion, for described weight, causes the vibration of the component motion in the direction of the vibrating shaft with regulation；And
Displacement detecting portion, the displacement in the direction of the offset axis that detection produces in described weight according to Coriolis force,
It is contained in as X/Y plane when defining the surface in the center of described diaphragm with initial point O and described diaphragm
During XYZ three-dimensional orthogonal coordinate system, using in described X-axis and Z axis as described vibrating shaft, using another as institute's rheme
Move axle, according to the detected value from described displacement detecting portion, detect the angular velocity around Y-axis,
Described angular-rate sensor is characterised by,
Described weight has cylindric or coniform,
The contour shape of the described peripheral part of described diaphragm is the shape in the corner of tetragon with line part or bending section.
Angular-rate sensor the most according to claim 1, it is characterised in that
Described tetragon is generally square.
Angular-rate sensor the most according to claim 1, it is characterised in that possess:
Lower electrode, is formed at the surface of described diaphragm；
Piezoelectric film, is formed on described lower electrode；
4 vibrational excitation electrodes, are formed on described piezoelectric film and constitute described vibrational excitation portion；And
4 angular velocity detection electrodes, in the way of being positioned at the inner side of described 4 vibrational excitation electrodes, are formed at described pressure
On electrolemma and constitute described displacement detecting portion,
Assume that orthogonal and that this 2 limit is divided equally the 1st imaginary line in 2 limits opposed with described diaphragm and described film
Opposed orthogonal and that this 2 limit is divided equally the 2nd imaginary line in remaining 2 limits of sheet, by opposed 2 of described diaphragm
1st notional diagonal at the center in corner and the 2nd false by the center in opposed remaining 2 corners of described diaphragm
When thinking diagonal,
The described contour shape of the peripheral part of described diaphragm has the most described 1st imaginary line or the 2nd imaginary line becomes line pair
The shape claimed,
Described 4 vibrational excitation electrodes are difference shape in 4 regions separated by described 1st imaginary line and the 2nd imaginary line
Become or formed respectively in 4 regions separated by described 1st notional diagonal and described 2nd notional diagonal,
Described 4 angular velocity detection electrodes are difference in 4 regions separated by described 1st imaginary line and the 2nd imaginary line
Formed or formed respectively in 4 regions separated by described 1st notional diagonal and described 2nd notional diagonal.
Angular-rate sensor the most according to claim 3, it is characterised in that
Semiconductor substrate is implemented etching and is formed by described diaphragm, described weight and described support,
Described 4 vibrational excitation electrodes are difference shape in 4 regions separated by described 1st imaginary line and the 2nd imaginary line
Become,
Described 4 angular velocity detection electrodes also divide in 4 regions separated by described 1st imaginary line and the 2nd imaginary line
Do not formed,
The axis of described 1st notional diagonal and described 2nd notional diagonal and the axis of described Y-axis and described X-axis divides
The most consistent.
Angular-rate sensor the most according to claim 3, it is characterised in that
Described 4 vibrational excitation electrodes and described 4 angular velocity detection electrodes are configured to the most described 1st imaginary line
And the 2nd imaginary line become line symmetric shape.
Angular-rate sensor the most according to claim 3, it is characterised in that
Semiconductor substrate is implemented etching and is formed by described diaphragm, described weight and described support,
Described 4 vibrational excitation electrodes are in 4 districts separated by described 1st notional diagonal and described 2nd notional diagonal
Formed respectively in territory,
Described 4 angular velocity detection electrodes are 4 separated by described 1st notional diagonal and described 2nd notional diagonal
Formed respectively in region,
Described 1st imaginary line and described 2nd imaginary line are the most consistent with the axis of the axis of described Y-axis and described X-axis,
The length dimension R1 along described 2nd imaginary line of described contour shape, described contour shape along described 1st imagination
The length dimension R2 of line and the length dimension R3 along described 2nd notional diagonal of described contour shape meets R1: R2: R3
=(value of the scope of 0.95 ± 0.02): 1: the relation of (value of the scope of 0.85 ± 0.02).
7. according to the angular-rate sensor described in claim 4 or 6, it is characterised in that
Described 4 vibrational excitation electrodes and described 4 angular velocity detection electrodes be formed not across described diaphragm with
The border of the border of described weight and described diaphragm and described support.
Angular-rate sensor the most according to claim 3, it is characterised in that
The contour shape of described 4 vibrational excitation electrodes is by being positioned at the outside of radial outside of described weight and described outside
The most opposed inner edge and link a pair link limit of described outside and described inner edge and constitute,
Described outside be shaped as the shape similar to the shape of a part for the peripheral part of described diaphragm.
Angular-rate sensor the most according to claim 8, it is characterised in that
The shape of described inner edge is the similar shape of the shape of described outside.
Angular-rate sensor the most according to claim 8, it is characterised in that
The shape of described inner edge is circular shape.
11. angular-rate sensors according to claim 3, it is characterised in that
The contour shape of described 4 angular velocity detection electrodes by be positioned at described weight radial outside outside and described outside
Inner edge that limit is the most opposed and link a pair link limit of described outside and described inner edge and constitute, described outside and
Inner edge is respectively provided with concentric circular shape.
12. angular-rate sensors according to claim 3, it is characterised in that
The described limit of the described contour shape of described diaphragm and the linking part bending in described corner.
13. angular-rate sensors according to claim 8, it is characterised in that
The corner of the contour shape of described 4 vibrational excitation electrodes bends respectively.
14. angular-rate sensors according to claim 11, it is characterised in that
The corner of the contour shape of described 4 angular velocity detection electrodes bends respectively.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011192127 | 2011-09-02 | ||
| JP2011-192127 | 2011-09-02 | ||
| PCT/JP2012/072308 WO2013032003A1 (en) | 2011-09-02 | 2012-09-03 | Angular velocity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103765160A CN103765160A (en) | 2014-04-30 |
| CN103765160B true CN103765160B (en) | 2016-08-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201280042188.5A Expired - Fee Related CN103765160B (en) | 2011-09-02 | 2012-09-03 | Angular-rate sensor |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9726490B2 (en) |
| JP (3) | JP5981435B2 (en) |
| CN (1) | CN103765160B (en) |
| WO (1) | WO2013032003A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2014178172A1 (en) * | 2013-04-30 | 2014-11-06 | 旭化成株式会社 | Angular velocity sensor |
| JP2015224893A (en) * | 2014-05-26 | 2015-12-14 | Tdk株式会社 | Angular velocity sensor |
| CN108592900B (en) * | 2018-04-27 | 2021-05-18 | 东南大学 | Silicon micromechanical gyroscope with four vertical column-shaped mass blocks |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP5956970B2 (en) | 2016-07-27 |
| JP5981435B2 (en) | 2016-08-31 |
| JP2014066708A (en) | 2014-04-17 |
| JPWO2013032003A1 (en) | 2015-03-23 |
| US9726490B2 (en) | 2017-08-08 |
| US20140224015A1 (en) | 2014-08-14 |
| WO2013032003A1 (en) | 2013-03-07 |
| JP6058581B2 (en) | 2017-01-11 |
| JP2014132277A (en) | 2014-07-17 |
| CN103765160A (en) | 2014-04-30 |
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