JP6146592B2 - Physical quantity sensor, electronic equipment - Google Patents

Description

  The present invention relates to a physical quantity sensor and an electronic device using the same.

  In recent years, angular velocity sensors that detect angular velocities are often used for posture control such as car navigation systems and camera shake correction. Some of such angular velocity sensors detect an angular velocity around an in-plane axis on which an element is formed.

  An angular velocity sensor disclosed in Patent Document 1 is a pair of annular driving masses on an XY plane, an anchor arranged at the center thereof, a substrate on which the anchors are fixed, and a pair of the driving masses arranged opposite to each other in the X-axis direction. And a pair of second mass parts arranged opposite to each other in the Y-axis direction of the driving mass, and arranged to face the first mass part and the second mass part on the substrate. And a detection electrode.

  With such a configuration, when the driving mass is rotationally driven alternately and repeatedly around the anchor axis in the Z-axis direction perpendicular to the XY plane, when an angular velocity around the X-axis or around the Y-axis is applied, the Coriolis force is generated. It acts to detect the angular velocity due to the rotation of the seesaw-shaped first mass part or the second mass part.

US Patent Application Publication No. 2009/0100930

  However, according to the angular velocity sensor disclosed in Patent Document 1, there is a problem that centrifugal force is generated by rotational driving, and the seesaw-shaped detection electrode vibrates particularly when the rotation direction is changed. Since the output is generated when the detection electrode vibrates, there is a problem that the output is generated even when the angular velocity is not applied.

  Therefore, the present invention does not vibrate the detection electrode by driving. For example, when the sensor is used as an angular velocity sensor, the influence of linear acceleration, which is a physical quantity other than the angular velocity as an output value, and the angular velocity of the other axis other than the detection axis. An object of the present invention is to provide a physical quantity sensor and an electronic device that are not affected by at least one of the effects of the above.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following application examples.

[Application Example 1] In each of the substrate, the first displacement portion and the second displacement portion that are arranged on a space plane on the substrate and have a rotation axis, and the first displacement portion and the second displacement portion of the substrate. A fixed electrode portion provided at an opposing position, a support portion that supports the rotation shaft of each of the first displacement portion and the second displacement portion, a fixing portion that supports the support portion via a spring portion, A drive unit that vibrates the support unit in a vibration direction, wherein the first displacement unit and the second displacement unit are displaceable in a direction perpendicular to the space plane about the rotation axis, and the rotation Each of the shafts is provided so as to be offset from the center of gravity of the first displacement portion or the second displacement portion, and the rotation axis of the first displacement portion and the rotation axis of the second displacement portion are offset from the center of gravity. A physical quantity sensor characterized in that the directions of are opposite to each other.
According to the above configuration, for example, when the physical quantity sensor is used as an angular velocity sensor, only the angular velocity around the detection axis is detected, and the angular velocity of other axes other than the detection axis that causes noise is not detected. Therefore, physical quantity detection can be performed with high accuracy.

Application Example 2 The physical quantity sensor according to Application Example 1, wherein each of the rotation shafts is arranged in parallel to the vibration direction of the support portion.
According to the above configuration, for example, when a physical quantity sensor is used as an angular velocity sensor, when an angular velocity is generated around the detection axis, each displacement portion is easily displaced in a direction perpendicular to the space plane on the substrate. Can be performed with high accuracy.

Application Example 3 The physical quantity sensor according to Application Example 1 or Application Example 2, wherein the first and second displacement units are arranged so as to be symmetrical with each other.
According to the above configuration, the absolute value of the electrostatic capacitance of each displacement portion is the same, and the displacement can be detected by differential detection.

[Application Example 4] A substrate, and a first vibrating body and a second vibrating body arranged on a space plane on the substrate, wherein the first vibrating body includes a first displacement portion having a rotation axis, and A second displacement portion; and a first support portion for supporting each of the first displacement portion and the rotation shaft of the second displacement portion, wherein the second vibrating body has a third displacement having a rotation shaft. Each of the first to fourth displacement portions of the substrate, and a second support portion that supports each of the rotation shafts of the third displacement portion and the fourth displacement portion. A fixed electrode portion provided at a position opposite to the first support portion, a fixed portion that supports each of the first support portion and the second support portion via a spring portion, and each of the first support portion and the second support portion. A drive unit that vibrates, wherein the first vibrating body and the second vibrating body vibrate in opposite directions, and the first to fourth displacement parts The rotary shaft can be displaced in a direction perpendicular to the space plane, and each of the rotary shafts is provided so as to be shifted from the center of gravity of each of the first to fourth displacement portions. The rotation axis and the rotation axis of the second displacement part are opposite to each other in the direction of deviation from the center of gravity, and the rotation axis of the third displacement part and the rotation axis of the fourth displacement part Is a physical quantity sensor characterized in that the directions of deviation from the center of gravity are opposite to each other.
According to the above configuration, for example, when the physical quantity sensor is used as an angular velocity sensor, only the angular velocity around the detection axis is detected, and the angular velocity and linear acceleration of other axes other than the detection axis that causes noise are not detected. Therefore, the physical quantity can be detected with higher accuracy than in the first application example.

Application Example 5 The physical quantity sensor according to Application Example 4, wherein the first vibrating body and the second vibrating body are connected to each other by a connecting spring.
According to the said structure, the vibration efficiency of a 1st vibrating body and a 2nd vibrating body can be improved.

Application Example 6 The capacitance between the first displacement portion and the fixed electrode portion facing the first displacement portion is C1, and the electrostatic capacitance between the second displacement portion and the fixed electrode portion facing the capacitance is C1. The capacitance between the third displacement portion and the fixed electrode portion facing the third displacement portion is C3, and the capacitance between the fourth displacement portion and the fixed electrode portion facing the capacitance is C2. 6. The physical quantity sensor according to Application Example 4 or Application Example 5, wherein an output value of the physical quantity sensor is (C1 + C2) − (C3 + C4) when the capacity is C4.
According to the above configuration, the differential capacitance output can be detected, and the angular velocity can be detected with high accuracy.

Application Example 7 The physical quantity sensor according to any one of Application Examples 1 to 6, wherein an angular velocity generated around an axis in a direction orthogonal to the vibration direction in a plan view is detected.
According to the above configuration, only the angular velocity around the detection axis is detected, and the angular velocity of the other axes other than the detection axis is not detected. Therefore, a physical quantity sensor that can detect the angular velocity with high accuracy is obtained.

Application Example 8 An electronic apparatus comprising the physical quantity sensor according to any one of Application Examples 1 to 7.
According to the above configuration, an electronic apparatus including a physical quantity sensor that can detect a physical quantity with high accuracy is obtained.
In addition, the physical quantity sensor according to this application example includes a first axis, a second axis orthogonal to the first axis, and a third axis orthogonal to the first axis and the second axis. When the virtual axis is used, the first displacement portion and the second displacement are disposed so as to face the substrate and one surface along the first axis and the second axis of the substrate and have a rotation axis. A fixed electrode portion provided on the one surface so as to face each of the first displacement portion and the second displacement portion, and the rotation shaft of each of the first displacement portion and the second displacement portion. A supporting part that supports the fixing part, and a fixing part that supports the supporting part via a spring part;
A drive unit that vibrates the support unit in the first axis direction, and the first displacement unit and the second displacement unit are displaceable in the third axis direction about the rotation axis, The first displacement portion is provided on one side of the support portion in the second axis direction, and the second displacement portion is provided on the other side of the support portion in the second axis direction, and the rotating shaft Are provided so as to be offset from the center of gravity of the first displacement part or the second displacement part, and the rotation axis of the first displacement part and the rotation axis of the second displacement part are offset from the center of gravity. The driving parts are arranged between the first displacement part and the second displacement part in a plan view of the support part.
Further, in the physical quantity sensor according to this application example, each of the rotation shafts may be arranged along the first axial direction of the support portion.
Further, in the physical quantity sensor according to this application example, the first displacement unit and the second displacement unit may be arranged so as to be symmetrical with each other with respect to the drive unit.
In the physical quantity sensor according to this application example, the free end sides of the first and second displacement plates may be further away from the driving unit than the rotation shafts.
The physical quantity sensor according to this application example includes a first axis, a second axis orthogonal to the first axis, and a third axis orthogonal to the first axis and the second axis. A shaft, and a substrate, and a first vibrating body and a second vibrating body disposed so as to face one surface along the first axis and the second axis of the substrate, The first vibrating body includes a first displacement portion and a second displacement portion having a rotation axis, and a first support portion supporting each of the rotation shafts of the first displacement portion and the second displacement portion. The second vibrating body supports each of a third displacement portion and a fourth displacement portion having a rotation axis, and the rotation shafts of the third displacement portion and the fourth displacement portion. A fixed electrode portion provided on the one surface so as to face each of the first to fourth displacement portions of the substrate, and a spring A fixing part that supports each of the first support part and the second support part via a drive part, and a drive part that vibrates in the first axial direction of the first support part and the second support part. The first vibrating body and the second vibrating body are connected to the first support portion and the second support portion by a connecting spring, and can vibrate in opposite directions, the first to fourth displacement portions. Is displaceable in the third axis direction about the rotation axis, and each of the rotation axes is provided offset from the center of gravity of each of the first to fourth displacement portions. The rotation axis and the rotation axis of the second displacement part are opposite in direction of deviation from the center of gravity, and the rotation axis of the third displacement part and the rotation axis of the fourth displacement part , The directions of deviation from the center of gravity are opposite to each other, and the first support part and the second support part In the plan view, the driving unit is disposed between the first displacement unit and the second displacement unit and between at least one of the third displacement unit and the fourth displacement unit. It is characterized by that.
Further, in the physical quantity sensor according to this application example, the driving unit includes a first driving unit disposed between the first displacement unit and the second displacement unit, the third displacement unit, and the fourth displacement unit. You may provide the 2nd drive part arrange | positioned between displacement parts.
Further, in the physical quantity sensor according to this application example, each of the rotation shafts may be arranged along the first axial direction of the support portion.
In the physical quantity sensor according to this application example, the first displacement portion and the second displacement portion are symmetrical to each other with respect to the first drive portion, and the third displacement portion and the fourth displacement portion. May be arranged symmetrically with respect to the second drive unit.
Moreover, as for the physical quantity sensor which concerns on this application example, the free end side of the said 1st-4th displacement plate may be separated from the said drive part with respect to each said rotating shaft.
Further, in the physical quantity sensor according to this application example, the capacitance between the first displacement portion and the fixed electrode portion facing the first displacement portion is C1, and the second displacement portion and the fixed electrode portion facing the second displacement portion. The capacitance between the third displacement portion and the fixed electrode portion opposed to the third displacement portion is defined as C3, and the fourth displacement portion and the fixed electrode portion opposed thereto. When the capacitance between and is C4, the output value of the physical quantity sensor may be (C1 + C2) − (C3 + C4).
The physical quantity sensor according to this application example may detect an angular velocity generated around the axis in the second axis direction.
The physical quantity sensor according to this application example includes a first axis, a second axis orthogonal to the first axis, and a third axis orthogonal to the first axis and the second axis. A shaft, and a substrate, and a first vibrating body and a second vibrating body disposed so as to face one surface along the first axis and the second axis of the substrate, The first vibrating body includes a first displacement portion and a second displacement portion having a rotation axis, and a first support portion supporting each of the rotation shafts of the first displacement portion and the second displacement portion. The second vibrating body supports each of a third displacement portion and a fourth displacement portion having a rotation axis, and the rotation shafts of the third displacement portion and the fourth displacement portion. A fixed electrode portion provided on the one surface so as to face each of the first to fourth displacement portions of the substrate, and a spring A fixing part that supports each of the first support part and the second support part via a drive part, and a drive part that vibrates the first support part and the second support part in the first axial direction. The first vibrating body and the second vibrating body are connected to the first support portion and the second support portion by a connecting spring, and can vibrate in directions opposite to each other, and the first to fourth displacements The portion is displaceable in the third axis direction about the rotation axis, and each of the rotation shafts is provided offset from the center of gravity of each of the first to fourth displacement portions, and the first displacement portion The rotation axis of the second displacement part and the rotation axis of the second displacement part are opposite in direction of deviation from the center of gravity, and the rotation axis of the third displacement part and the rotation of the fourth displacement part The direction of deviation from the center of gravity is opposite to the axis, and the first displacement portion and the second displacement The third displacement portion and the fourth displacement portion are arranged side by side in the first axis direction, and each of the rotation shafts is arranged along the first axis direction. To do.
Further, in the physical quantity sensor according to this application example, the capacitance between the first displacement portion and the fixed electrode portion facing the first displacement portion is C1, and the second displacement portion and the fixed electrode portion facing the second displacement portion. With
The capacitance between the third displacement portion and the fixed electrode portion facing the third displacement portion is C3, and the capacitance between the fourth displacement portion and the fixed electrode portion facing the third displacement portion is C2. When the capacitance between them is C4, the output value of the physical quantity sensor may be (C1 + C2) − (C3 + C4).
The physical quantity sensor according to this application example may detect an angular velocity generated around the axis in the second axis direction.

1 is a schematic configuration diagram illustrating a first embodiment of a physical quantity sensor of the present invention. It is an AA cross-sectional enlarged view in FIG. It is the structure schematic which shows 2nd Embodiment of the physical quantity sensor of this invention. It is explanatory drawing of an effect | action of a physical quantity sensor. It is the structure schematic which shows 3rd Embodiment of the physical quantity sensor of this invention. It is a composition schematic diagram showing a 4th embodiment of a physical quantity sensor of the present invention. It is a composition schematic diagram showing a 5th embodiment of a physical quantity sensor of the present invention. It is explanatory drawing of the mobile telephone to which the electronic device provided with the physical quantity sensor of this invention is applied.

Embodiments of a physical quantity sensor and an electronic apparatus according to the present invention will be described below in detail with reference to the accompanying drawings.
FIG. 1 is a schematic configuration diagram showing a first embodiment of a physical quantity sensor of the present invention. FIG. 2 is an AA cross-sectional enlarged view in FIG. In each figure, for convenience of explanation, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other. In the following, the direction parallel to the X axis (first axis) is the X axis direction, the direction parallel to the Y axis (second axis) is the Y axis direction, and the direction parallel to the Z axis (third axis) is the Z axis. It is called direction.

  The physical quantity sensor 10 of the present invention has a first and second displacement parts 20 and 30, rotary shafts 22 and 32, a support part 40, a fixing part 50, and a support part 40 fixed on the vibration system structure 12. The spring part 60 which connects the part 50 and the drive part 70 are formed as main basic structures. The physical quantity sensor 10 of the present embodiment is a sensor that can detect an angular velocity around any one of the X axis, the Y axis, and the Z axis. Hereinafter, as an example, the physical quantity sensor 10 can vibrate along the X axis direction. A configuration of an angular velocity sensor capable of detecting rotation acting around the axis will be described.

  The vibration system structure 12 is composed of silicon as a main material, and is formed on a silicon substrate (silicon wafer) with a thin film formation technique (for example, a deposition technique such as an epitaxial growth technique or a chemical vapor deposition technique) or various processing techniques (for example, Each part mentioned above is integrally formed by processing into desired external shape using etching techniques, such as dry etching and wet etching. Alternatively, after the silicon substrate and the glass substrate are bonded together, only the silicon substrate is processed into a desired outer shape, whereby the above-described portions can be formed. By using silicon as the main material of the vibration system structure 12, excellent vibration characteristics can be realized and excellent durability can be exhibited. Further, it is possible to apply a fine processing technique used for manufacturing a silicon semiconductor device, and the physical quantity sensor 10 can be downsized.

  The first and second displacement portions 20 and 30 are formed in a rectangular plate shape in the XY plan view with the Z axis as a normal line, and the displacement plates 21 and 31 that displace the space plane of the XY plane in the Z axis direction are provided. I have. The displacement plates 21 and 31 are connected to the support portion 40 by the rotation shafts 22 and 32. The rotating shafts 22 and 32 are formed at positions shifted from the center of gravity of the displacement plates 21 and 31 as shown in FIG. Both the rotating shafts 22 and 32 are provided so as to extend in the X-axis direction that is the vibration direction. The rotating shafts 22 and 32 are torsionally deformed around the axis when an external force is applied to rotate the displacement plates 21 and 31 in the Z direction.

  With such a configuration, the first and second displacement units 20 and 30 are attached to the rotation shafts 22 and 32 so that the rotation directions due to gravity (external force in the Z-axis direction) rotate in opposite directions. In other words, it can be said that the direction of deviation of the rotation shaft 22 from the center of gravity of the displacement plate 21 and the direction of deviation of the rotation shaft 32 from the center of gravity of the displacement plate 31 are opposite to each other.

  The support portion 40 is a frame that supports the first and second displacement portions 20 and 30. The support portion 40 of the first embodiment includes an opening 42 that surrounds the outer circumferences of the first and second displacement portions 20 and 30 so that the swinging sides (free end sides) of the displacement plates 21 and 31 face each other. It is supported via rotating shafts 22 and 32. Note that the shape of the support portion 40 is not limited to the frame shape, and other shapes are also applicable.

  A plurality of fixing portions 50 are provided outside the support portion 40. In the present embodiment, the support portion 40 is provided in a region surrounded by the fixed portions 50a, 50b, 50c, and 50d arranged in a rectangular shape in plan view with the Z axis as a normal line.

  The spring part 60 connects the support part 40 and the fixed part 50. The spring part 60 of the first embodiment is composed of first and second spring parts 62 and 64. The first spring portion 62 includes a pair of spring portions 62a and 62b, and each spring portion 62a and 62b has a shape extending in the X-axis direction while reciprocating in the Y-axis direction. The spring portions 62a and 62b are provided symmetrically with respect to the Y axis that intersects the center of the support portion 40 in plan view with the Z axis as a normal line. By forming each spring part 62a, 62b in such a shape, the first spring part 62 can be smoothly expanded and contracted in the X-axis direction which is the vibration direction while suppressing deformation in the Y-axis direction and the Z-axis direction. Can do. The configuration of the second spring portion 64 is provided symmetrically with the first spring portion 62 with respect to the X axis that intersects the center of the support portion 40, and includes a pair of spring portions 64a and 64b. By making each spring part 64a, 64b into such a shape, the second spring part 64 is smoothly expanded and contracted in the X-axis direction which is the vibration direction while suppressing deformation in the Y-axis direction and the Z-axis direction. Can do.

  The drive unit 70 has a function of vibrating the support unit 40 at a predetermined frequency in the X-axis direction. That is, the drive unit 70 is vibrated so as to repeat the state in which the support unit 40 is displaced in the + X-axis direction and the state in which the support unit 40 is displaced in the −X-axis direction. The drive units 70a and 70b are composed of a drive electrode and a fixed electrode (not shown), and are formed in each of the first and second displacement units 20 and 30, but can be configured to vibrate the support unit 40 in the X direction. If so, only one of the displacement portions may be used. The fixed electrode has a pair of comb-like electrode pieces arranged to face each other in the X-axis direction via the drive electrode. The drive unit 70 having such a configuration generates an electrostatic force between each drive electrode and each electrode piece by applying a voltage to the electrode piece by a power source (not shown), while expanding and contracting the spring part 60. The support unit 40 is vibrated in the X-axis direction at a predetermined frequency. The driving unit 70 can employ an electrostatic driving method, a piezoelectric driving method, an electromagnetic driving method using a Lorentz force of a magnetic field, or the like.

  A substrate 74 shown in FIG. 2 supports the vibration system structure 12. The substrate 74 is composed of silicon as a main material, but is not limited to silicon, and may be, for example, quartz or various types of glass. The substrate 74 has a plate shape, and the fixing portion 50 is bonded to the upper surface. As a result, the vibration system structure 12 can be fixed and supported on the substrate 74. In addition, the clearance gap between the board | substrate 74 and the vibration type structure 12 is set to the distance which the 1st and 2nd displacement parts 20 and 30 displaced by external force do not contact. The joining method of the board | substrate 74 and the vibration type structure 12 is not specifically limited, It can join using various joining methods, such as direct joining and anodic joining. Note that the fixing unit 50 is not limited to the substrate 74 and may be provided on a member (for example, a package) other than the substrate 74. A lower electrode (fixed electrode portion) 76 is provided on the upper surface of the substrate 74 at a location facing the first and second displacement portions 20 and 30. The first and second displacement portions 20 and 30 and the first and second displacement portions 20 and 30 fixed to the substrate 74 and the lower electrode 76 arranged to face each other in the Z-axis direction form a transducer. The

  FIG. 3 is a schematic configuration diagram showing a second embodiment of the physical quantity sensor of the present invention. As illustrated, the physical quantity sensor 100 according to the second embodiment includes two vibration bodies on the vibration system structure 120 and four displacement portions provided in each vibration body. Specifically, the physical quantity sensor 100 includes a first vibrating body 14 having first and second displacement portions 20 and 30 and a second vibrating body having third and fourth displacement portions 80 and 90 along the vibration direction of the sensor. 16 is composed. The vibration system structure 120 is composed of silicon as a main material, and each part is integrated by processing the silicon substrate (silicon wafer) into a desired outer shape using a thin film forming technique and various processing techniques. Is formed. The structure of the 1st and 2nd displacement parts 20 and 30 is the same as that of the structure of 1st Embodiment, The detailed description is abbreviate | omitted. The basic configuration of the third and fourth displacement portions 80 and 90 is the same as that of the first and second displacement portions 20 and 30. However, a third spring portion (connecting spring) 66 is formed between the first and second displacement portions 20 and 30 and the third and fourth displacement portions 80 and 90. The third spring portion 66 includes a pair of spring portions 66a and 66b, and each spring portion 66a and 66b has a shape extending in the X-axis direction while reciprocating in the Y-axis direction. The spring portions 66a and 66b are provided symmetrically with respect to the X axis that intersects the centers of the first support portion 44 and the second support portion 46 in an XY plan view with the Z axis as a normal line. By forming each spring part 66a, 66b in such a shape, the first spring part 62 can be smoothly expanded and contracted in the X-axis direction while suppressing deformation in the Y-axis direction and the Z-axis direction.

  The drive unit 72 of the physical quantity sensor 100 of the second embodiment has the same basic configuration as the drive unit 70 of the first embodiment. However, an alternating voltage whose phase is shifted by 180 degrees is applied to the drive units 72a and 72b of the first and second displacement units 20 and 30 and the drive units 72c and 72d of the third and fourth displacement units 80 and 90. Thus, an electrostatic force is generated between each drive electrode and each electrode piece, and the first and second displacement portions are expanded and contracted in the X-axis direction while the first to third spring portions 62, 64, 66 are expanded and contracted. 20, 30 and the third and fourth displacement portions 80, 90 are vibrated in the X-axis direction at a predetermined frequency and in opposite phases. Note that only one of the drive units 72a and 72b may be formed. The same applies to the drive units 72c and 72d.

  In the physical quantity sensor 100 of the second embodiment, the capacitance generated between the first to fourth displacement portions 20, 30, 80, 90 and the lower electrode 76 facing each of them is C1-C4, respectively. In this case, the output is set to be (C1 + C2) − (C3 + C4).

  Next, the operation of the physical quantity sensors 10 and 100 of the present invention having the above configuration will be described below. FIG. 4 is an explanatory diagram of the operation of the physical quantity sensor. In FIG. 4, A to G are shown separately depending on the state of the force applied to the displacement plate.

  First, when the input to the physical quantity sensor is zero (state A), the direction in which the rotation shafts 22, 32, 82, and 92 of the first to fourth displacement portions 20, 30, 80, and 90 extend is the same as the vibration direction. The first to fourth displacement portions 20, 30, 80, 90 do not fluctuate other than the inclination due to the weight of the displacement plate. Therefore, since the capacitance of the transducer does not change, the output is zero.

  Next, when the angular velocity around the X axis with respect to the physical quantity sensor is input (state B), the axial directions of the rotation shafts 22, 32, 82, and 92 of the first to fourth displacement portions 20, 30, 80, and 90 are vibrations. Since it is formed in the same direction as the direction, no Coriolis force is generated. Therefore, since the capacitance of the transducer does not change, the output becomes zero.

であらわすことができる。ここでｍ：質量、ｖ：速度、Ω：角速度をそれぞれ示している。 Next, the case where the angular velocity around the Y axis with respect to the physical quantity sensor is input (state C) will be described. Here, the first and second displacement portions 20 and 30 of the first vibrating body 14 vibrate in the −X axis direction, and the third and fourth displacement portions 80 and 90 of the second vibrating body 16 vibrate in the + X axis direction. Assume that an angular velocity is input around the Y axis. In general, the Coriolis force F

Can be represented. Here, m: mass, v: velocity, and Ω: angular velocity are shown.

  In the first and second displacement portions 20 and 30, when an angular velocity Ωy around the Y axis is applied while vibrating in the −X axis direction, the Coriolis force in the −Z axis direction acts to cause the displacement plates 21 and 31 to be − By rotating in the Z-axis direction, the capacitances C1 and C2 between the displacement plates 21 and 31 and the lower electrode 76 change. Further, in the third and fourth displacement portions 80 and 90, when an angular velocity Ωy around the Y axis is applied while vibrating in the + X axis direction, a Coriolis force in the + Z axis direction is applied, and the displacement plates 21 and 31 are moved to the + Z axis. The capacitances C3 and C4 between the displacement plates 81 and 91 and the lower electrode 76 change accordingly. Thus, in the first and second displacement portions 20, 30 and the third and fourth displacement portions 80, 90, the direction of the Coriolis force is reversed, and the first to fourth displacement portions 20, 30, 80, 90 From the outputs of the capacitances C1 to C4, a change in capacitance according to the angular velocity around the Y axis can be detected by (C1 + C2) − (C3 + C4).

  Next, the case where the angular velocity around the Z axis with respect to the physical quantity sensor is input (state D) will be described. Here, the first and second displacement portions 20 and 30 of the first vibrating body 14 vibrate in the −X axis direction, and the third and fourth displacement portions 80 and 90 of the second vibrating body 16 vibrate in the + X axis direction. Assume that an angular velocity is input around the Z axis.

  In the first and second displacement portions 20 and 30, when an angular velocity Ωz around the Z axis is applied while vibrating in the −X axis direction, a Coriolis force in the + Y axis direction acts. At this time, the rotation shafts 22 and 32 of the first and second displacement portions 20 and 30 are formed at positions shifted from the center of gravity of the respective displacement plates 21 and 31, and the directions of displacement from the center of gravity are formed opposite to each other. . For this reason, the displacement plate 21 is pushed down in the −Z axis direction, and the displacement plate 31 is pushed up in the + z axis direction. Thereby, the electrostatic capacitances C1 and C2 between the displacement plates 21 and 31 and the lower electrode 76 change.

  In the third and fourth displacement portions 80 and 90, when an angular velocity Ωz around the Z axis is applied while vibrating in the + X axis direction, a Coriolis force in the −Y axis direction acts. At this time, the rotation shafts 82 and 92 of the third and fourth displacement portions 80 and 90 are formed at positions shifted from the center of gravity of the respective displacement plates 81 and 91, and the directions of displacement from the center of gravity are formed opposite to each other. . For this reason, the displacement plate 81 is pushed up in the + Z-axis direction, and the displacement plate 91 is pushed down in the −Z-axis direction. As a result, the capacitances C3 and C4 between the displacement plates 81 and 91 and the lower electrode 76 change.

  As a result, the outputs of the capacitances C1 to C4 of the first to fourth displacement portions 20, 30, 80, 90 are C1-C4 = 0 and C2-C3 = 0, and (C1 + C2) − (C3 + C4) = ( C1-C4)-(C2-C3) = 0, and the Coriolis force acting in the Z-axis direction is not detected.

  Next, when acceleration in the X-axis direction with respect to the physical quantity sensor is input (state E), the axial directions of the rotation shafts 22, 32, 82, and 92 of the first to fourth displacement units 20, 30, 80, and 90 are X Since it is formed in the same direction as the axial acceleration, the displacement portion is not displaced. Therefore, since the capacitance of the transducer does not change, the output becomes zero.

  Next, when acceleration in the + Y-axis direction with respect to the physical quantity sensor is input (state F), the first and second displacement units 20 and 30 apply acceleration in the + Y-axis direction while vibrating in the −X-axis direction. The rotation shafts 22 and 32 of the first and second displacement portions 20 and 30 are formed at positions shifted from the center of gravity of the respective displacement plates 21 and 31, and the directions of displacement from the center of gravity are opposite to each other. For this reason, the displacement plate 21 is pushed up in the + Z-axis direction, and the displacement plate 31 is pushed down in the −Z-axis direction. Thereby, the electrostatic capacitances C1 and C2 between the displacement plates 21 and 31 and the lower electrode 76 change.

  Further, in the third and fourth displacement portions 80 and 90, acceleration in the + Y-axis direction is applied while vibrating in the + X-axis direction. The rotation shafts 82 and 92 of the third and fourth displacement portions 80 and 90 are formed at positions shifted from the center of gravity of the respective displacement plates 81 and 91, and the directions of displacement from the center of gravity are opposite to each other. For this reason, the displacement plate 81 is pushed up in the + Z-axis direction, and the displacement plate 91 is pushed down in the −Z-axis direction. As a result, the capacitances C3 and C4 between the displacement plates 81 and 91 and the lower electrode 76 change.

  As a result, the outputs of the capacitances C1 to C4 of the first to fourth displacement portions 20, 30, 80, 90 are C1-C3 = 0 and C2-C4 = 0, and acceleration acting in the Y-axis direction is not detected. . Even when the acceleration in the −Y-axis direction is input to the physical quantity sensor, the outputs of the electrostatic capacitances C1 to C4 of the first to fourth displacement units 20, 30, 80, and 90 are C1−C3 = 0 and C2−. When C4 = 0, (C1 + C2) − (C3 + C4) = (C1−C3) + (C2−C4) = 0, and acceleration acting in the Y-axis direction is not detected.

  Finally, when acceleration in the + Z-axis direction for the physical quantity sensor is input (state G), the first and second displacement units 20 and 30 apply acceleration in the + Z-axis direction while vibrating in the −X-axis direction. As a result, the displacement plate 21 and the displacement plate 31 rotate in the −Z-axis direction, whereby the capacitances C1 and C2 between the displacement plates 21 and 31 and the lower electrode 76 change. Further, in the third and fourth displacement portions 80 and 90, the displacement plate 81 and the displacement plate 91 are rotated in the −Z-axis direction by applying acceleration in the + Z-axis direction while oscillating in the + X-axis direction. The capacitances C3 and C4 between the plates 81 and 91 and the lower electrode 76 change. As a result, the capacitances C1 to C4 of the first to fourth displacement portions 20, 30, 80, 90 are all the same value, the output is C1 + C2 = C3 + C4, and no acceleration acting in the + Z-axis direction is detected. Even when the acceleration in the −Z-axis direction is input to the physical quantity sensor, the capacitances C1 to C4 of the first to fourth displacement units 20, 30, 80, 90 are all the same value, and the output is C1 + C2 = C3 + C4. , Acceleration acting in the Z-axis direction is not detected.

  The angular velocity and acceleration except for the same axial direction as the rotation axis can be applied in the physical quantity sensor 100 according to the second embodiment. However, if the acceleration in the Z-axis direction is excluded, the angular velocity and acceleration are related to the first embodiment. Even a physical quantity sensor can be applied.

  According to such a physical quantity sensor, only the angular velocity around the detection axis is detected, and the angular velocity of other axes other than the detection axis that causes noise is not detected. Therefore, physical quantity detection can be performed with high accuracy.

  FIG. 5 is a schematic configuration diagram showing a third embodiment of the physical quantity sensor of the present invention. As shown in the figure, the physical quantity sensor 100a of the third embodiment is a side where the rotation shafts 22a and 32a of the first and second displacement portions 20a and 30a are close to each other, and is on the swing side of the displacement plates 21a and 31a (free movement). The end side is fixed to the first support portion 44 so as to face the outside. The second support is such that the rotation shafts 82a and 92a of the third and fourth displacement portions 80a and 90a are close to each other, and the swinging side (free end side) of the displacement plates 81a and 91a faces outward. It is fixed to the part 46. At this time, each of the rotation shafts 22a, 32a, 82a, 92a of the first to fourth displacement portions 20a, 30a, 80a, 90a is separated from the center of gravity of each of the first to fourth displacement portions 20a, 30a, 80a, 90a. It is provided with a shift. Further, the rotational axis 22a of the first displacement part 20a and the rotational axis 32a of the second displacement part 30a are opposite to each other in the direction of deviation from the center of gravity, and the rotational axis 82a of the third displacement part 80a and the fourth displacement part. The rotating shaft 92a of 90a is arranged so that the directions of deviation from the center of gravity are opposite to each other. Other configurations are the same as the configuration of the physical quantity sensor 100 of the second embodiment, and the same reference numerals are given and detailed description thereof is omitted.

  Also in the physical quantity sensor 100a of the third embodiment having such a configuration, when the physical quantity sensor is used as an angular velocity sensor, only the angular velocity around the detection axis is detected, and the angular velocity of other axes other than the detection axis that causes noise is detected. Not detected. Therefore, physical quantity detection can be performed with high accuracy. Further, the rotation shafts 22 a and 32 a of the first and second displacement portions 20 a and 30 a are inside the first support portion 44, and the rotation shafts 82 a and 92 a of the third and fourth displacement portions 80 a and 90 a are of the second support portion 46. It becomes the structure attached to each inside, and it can be set as the form which displacement plates do not contact and break.

  FIG. 6 is a schematic configuration diagram showing a fourth embodiment of the physical quantity sensor of the present invention. As illustrated, the physical quantity sensor 100b according to the fourth embodiment arranges the first to fourth displacement portions 20b, 30b, 80b, and 90b side by side in the X-axis direction in an XY plan view with the Z-axis as a normal line. ing. At this time, each of the rotation shafts 22b, 32b, 82b, and 92b of the first to fourth displacement portions 20b, 30b, 80b, and 90b has a center of gravity of each of the first to fourth displacement portions 20b, 30b, 80b, and 90b. It is deviated from. Further, the rotation shaft 22b of the first displacement portion 20b and the rotation shaft 32b of the second displacement portion 30b are opposite in the direction of deviation from the center of gravity, and the rotation shaft 82b of the third displacement portion 80b and the fourth displacement portion. The rotating shaft 92b of 90b is arranged so that the directions of deviation from the center of gravity are opposite to each other. Other configurations are the same as the configuration of the physical quantity sensor 100 of the second embodiment, and the same reference numerals are given and detailed description thereof is omitted.

  Also in the physical quantity sensor 100b of the fourth embodiment having such a configuration, when the physical quantity sensor is used as an angular velocity sensor, only the angular velocity around the detection axis is detected, and the angular velocity of other axes other than the detection axis that causes noise is detected. Not detected. Therefore, physical quantity detection can be performed with high accuracy.

  FIG. 7 is a schematic configuration diagram showing a fifth embodiment of the physical quantity sensor of the present invention. As shown in the drawing, the physical quantity sensor 100c of the fifth embodiment has the first and second support portions 44a and 46a formed in a substantially H shape in an XY plan view with the Z axis as a normal line, and ± Y axis directions The first to fourth displacement portions 20c, 30c, 80c, and 90c are attached to the two recesses. The drive units 70a and 70b are configured to be attached to the first and second support units 44a and 46a, respectively. At this time, each of the rotation shafts 22c, 32c, 82c, and 92c of the first to fourth displacement portions 20c, 30c, 80c, and 90c has a center of gravity of each of the first to fourth displacement portions 20c, 30c, 80c, and 90c. It is deviated from. Further, the rotational axis 22c of the first displacement part 20c and the rotational axis 32c of the second displacement part 30c are opposite to each other in the direction of deviation from the center of gravity, and the rotational axis 82c of the third displacement part 80c and the fourth displacement part. The rotating shaft 92c of 90c is arranged so that the directions of deviation from the center of gravity are opposite to each other. Other configurations are the same as the configuration of the physical quantity sensor 100 of the second embodiment, and the same reference numerals are given and detailed description thereof is omitted.

  Also in the physical quantity sensor 100c of the fifth embodiment having such a configuration, when the physical quantity sensor is used as an angular velocity sensor, only the angular velocity around the detection axis is detected, and the angular velocity of other axes other than the detection axis that causes noise is detected. Not detected. Therefore, physical quantity detection can be performed with high accuracy. The first to fourth displacement portions 20c, 30c, 80c, and 90c are configured to be attached to the outside of the first and second support portions 44a and 46a, and the physical quantity sensor has a configuration in which the displacement plate is disposed within the frame of the support portion. As a result, the parasitic capacitance of the wiring can be reduced.

  FIG. 8 is an explanatory diagram of a mobile phone to which an electronic device including the physical quantity sensor of the present invention is applied. As shown in the figure, the mobile phone 500 includes a plurality of operation buttons 502, an earpiece 504, and a transmission port 506, and a display unit 508 is disposed between the operation buttons 502 and the receiver 504. Such a cellular phone 500 incorporates physical quantity sensors 10, 100, 100a, 100b, and 100c that function as angular velocity detection means (gyro sensors).

  10, 100, 100a, 100b, 100c ......... physical quantity sensor, 12, 120 ......... vibrating system structure, 14 ......... first vibrating body, 16 ......... second vibrating body, 20, 20a, 20b, 20c ......... first displacement portion, 21, 21a, 21b, 21c ......... displacement plate, 22, 22a, 22b, 22c ......... rotation shaft, 30, 30a, 30b, 30c ......... second displacement portion, 31, 31 a, 31 b, 31 c ............ displacement plate, 32, 32 a, 32 b, 32 c ...... Rotation shaft, 40 ...... support part, 42 ...... opening, 44, 44 a ...... first support part, 46, 46a ......... second support portion, 50 ......... fixed portion, 60 ......... spring portion, 62 ......... first spring portion, 64 ......... second spring portion, 66 ......... third spring Part (connection spring), 70... Drive part, 72... Drive part, 74. ... Lower electrode, 80, 80a, 80b, 80c ......... Third displacement part, 90, 90a, 90b, 90c ... ... Fourth displacement part, 500 ... ... Mobile phone, 502 ... ... Operation buttons, 504 ... ...... Earpiece, 506... Transmitter, 508 ... Display section.

Claims (4)

When the first axis, the second axis orthogonal to the first axis, and the third axis orthogonal to the first axis and the second axis are virtual axes,
A substrate,
A first vibrating body and a second vibrating body disposed so as to face one surface along the first axis and the second axis of the substrate;
The first vibrating body supports a first displacement portion and a second displacement portion each having a rotation axis, and a first support that supports each of the rotation shafts of the first displacement portion and the second displacement portion. And comprising
The second vibrating body supports a third displacement portion and a fourth displacement portion each having a rotation axis, and a second support that supports each of the rotation shafts of the third displacement portion and the fourth displacement portion. And comprising
A fixed electrode portion provided on the one surface so as to face each of the first to fourth displacement portions of the substrate;
A fixing portion supporting each of said first support and said second support portion via the spring portion,
A drive section that vibrates the first support section and the second support section in the first axial direction;
The first vibrating body and the second vibrating body are connected to the first support portion and the second support portion by a connecting spring, and can vibrate in opposite directions.
The first to fourth displacement portions can be displaced in the third axis direction about the rotation axis,
Each of the rotation shafts is provided to be shifted from the center of gravity of each of the first to fourth displacement portions,
The rotational axis of the first displacement part and the rotational axis of the second displacement part are opposite to each other in the direction of deviation from the center of gravity.
And the direction of deviation from the center of gravity of the rotation axis of the third displacement part and the rotation axis of the fourth displacement part are opposite to each other,
The first displacement portion, the second displacement portion, the third displacement portion, and the fourth displacement portion are arranged side by side in the first axial direction,
Each of the rotation shafts is disposed along the first axis direction . The capacitance between the first displacement part and the fixed electrode part facing the first displacement part is C1,
The capacitance between the second displacement part and the fixed electrode part facing the second displacement part is C2,
The capacitance between the third displacement part and the fixed electrode part facing the third displacement part is C3,
When the capacitance between the fourth displacement portion and the fixed electrode portion facing the fourth displacement portion is C4,
2. The physical quantity sensor according to claim 1 , wherein an output value of the physical quantity sensor is (C1 + C2) − (C3 + C4). The physical quantity sensor according to claim 1 or 2, characterized in that detects the angular velocity generated around the axis of the second axial direction. An electronic apparatus comprising the physical quantity sensor according to any one of claims 1 to 3 .

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