CN103762147A - Anode structure of ionization gauge - Google Patents
Anode structure of ionization gauge Download PDFInfo
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- CN103762147A CN103762147A CN201310722445.6A CN201310722445A CN103762147A CN 103762147 A CN103762147 A CN 103762147A CN 201310722445 A CN201310722445 A CN 201310722445A CN 103762147 A CN103762147 A CN 103762147A
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Abstract
The invention relates to an anode structure of an ionization gauge. The anode structure comprises a ball net electrode, anode rings, auxiliary anode rings and a plurality of connecting supporting pieces. The connecting supporting pieces are respectively used for supporting the ball net electrode, the anode rings and the auxiliary anode rings, wherein the ball net electrode is of a spherical net-shaped structure made of conductive materials, the anode rings and the auxiliary anode rings are supported inside the ball net electrode with the connecting supporting pieces, the auxiliary anode rings surround the anode rings, and the ball net electrode, the anode rings and the auxiliary anode rings are insulated with each other. The ball net electrode is of the spherical structure, and an electric field formed by the ball net electrode has the good symmetry and homogeneity; the saddle-shaped electric field can be formed by the anode rings and the ball net electrode, the shape of the saddle-shaped electric field becomes sharp through the auxiliary anode rings, electrons are constrained through the whole electric field, the lengths of motion tracks of the electrons in the anode structure of the ionization gauge can be accordingly increased, and the sensitivity of the ionization gauge is improved.
Description
Technical field
The present invention relates to vacuumatic measuring field, relate in particular to a kind of ionization gauge anode construction.
Background technology
Technique is along with scientific and technical fast development, high-technology field to extra-high vacuum measurement have higher requirement, especially the high-technology field such as Aero-Space, high-energy physics, Surface Science, has proposed more urgent requirement to vacuum measurement.
Ionization gauge is the formalism that is hopeful to solve superelevation/extra-high vacuum measurement problem at present most, and known according to the operation principle of ionization gauge, ionization gauge sensitivity improves, and is the key point of extending its measurement lower limit.And ionization gauge sensitivity is the coefficient relevant to regulating structure, its definition is as follows:
In formula, S represents sensitivity, and L represents trajectory of electron motion length, and σ represents ionization probability, and k represents Boltzmann constant, and T represents thermodynamic temperature.
From formula (1), sensitivity is relevant with ionization probability σ in the movement locus length L of regulating Anodic region to electronics, and the electronic motion being confined in shape of a saddle anode electric field is the key that is hopeful to extend movement locus length L most.
Sheng Leimei etc. have proposed a kind of carbon nanotube cathod ionization gauge anode construction at " A saddle-field gauge with carbon nanotube field emitters " (Diamond & Related Materials14 (2005) 1695 – 1699).As shown in Figure 1, by negative electrode 1 ', gate pole 2 ' anode ring 3 ' and the glass cylinder 5 ' and the collector 6 ' that are coated with golden film 4 ', form anode ionization system, under suitable voltage arranges, electric field is the shape of a saddle and distributes, sensitivity can reach 1.7Pa-1, but the shape of a saddle Electric Field Distribution of this anode ionized space still lacks good symmetry and uniformity, can affect to a certain extent the vibration of electronics, in addition, the surface of gold film is larger, can increase to a great extent discharge quantity, affect vacuum environment.
Summary of the invention
Provide hereinafter about brief overview of the present invention, to the basic comprehension about some aspect of the present invention is provided.Should be appreciated that this general introduction is not about exhaustive general introduction of the present invention.It is not that intention is determined key of the present invention or pith, and nor is it intended to limit the scope of the present invention.Its object is only that the form of simplifying provides some concept, using this as the preorder in greater detail of discussing after a while.
The invention provides a kind of ionization gauge anode construction, this anode construction has higher sensitivity.
To achieve these goals, the invention provides a kind of ionization gauge anode construction, comprising: net electrode, anode ring, auxiliary anode ring and multiple connection strutting piece, each described connection strutting piece supports respectively described net electrode, anode ring, auxiliary anode ring; Wherein, described net electrode is the spherical network structure of being made by electric conducting material, described anode ring and described auxiliary anode be the inside at described net electrode by described connection supports support, described auxiliary anode ring is around described anode ring, and described net electrode, anode ring and auxiliary anode ring are insulated from each other.
Than prior art, beneficial effect of the present invention is, net electrode employing spherical structure, and the electric field of its formation has better symmetry and uniformity; Anode ring and net electrode can form shape of a saddle electric field, auxiliary anode ring makes the shape of shape of a saddle electric field more precipitous, whole electric field has constraint effect to electronics, make the length of electronics movement locus in ionization gauge anode construction of the present invention can become large, according to above-mentioned formula (1), can learn, because it is large that movement locus length becomes, the sensitivity that has improved ionization gauge.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the schematic diagram of ionization gauge anode construction in prior art;
Fig. 2 is that the master of ionization gauge anode construction of the present invention looks schematic diagram;
Fig. 3 be in Fig. 2 A-A to sectional view.
Reference numeral:
1 '-negative electrode; 2 '-gate pole; 3 '-anode ring; 4 '-Jin film; 5 '-glass cylinder; 6 '-collector;
1-ionization gauge anode construction (the present invention); 2-net electrode; 3-anode ring; 4-auxiliary anode ring; 5-ring flange; 6-connects strutting piece; 7-first anode ring; 8-second plate ring.
Embodiment
For making object, technical scheme and the advantage of the embodiment of the present invention clearer, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is the present invention's part embodiment, rather than whole embodiment.The element of describing in an accompanying drawing of the present invention or a kind of execution mode and feature can combine with element and feature shown in one or more other accompanying drawing or execution mode.It should be noted that for purposes of clarity, in accompanying drawing and explanation, omitted expression and the description of unrelated to the invention, parts known to persons of ordinary skill in the art and processing.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skills obtain under the prerequisite of not paying creative work, belongs to the scope of protection of the invention.
In the following embodiment of the present invention, the sequence number of embodiment and/or sequencing are only convenient to describe, and do not represent the quality of embodiment.Description to each embodiment all emphasizes particularly on different fields, and there is no the part of detailed description in certain embodiment, can be referring to the associated description of other embodiment.
This provides a kind of ionization gauge anode construction 1, comprising: net electrode 2, and this net electrode 2 is network structures spherical in shape, and is made by electric conducting material; Ionization gauge anode construction 1 of the present invention also wraps anode ring 3, auxiliary anode ring 4 and multiple connection strutting piece.Connect strutting piece and support respectively net electrode 2, anode ring 3 and auxiliary anode ring 4, and anode ring 3 and auxiliary anode ring 4 are supported on to the spherical inside of net electrode 2, state auxiliary anode ring around anode ring, in addition, between net electrode, anode ring and auxiliary anode ring, be all insulated from each other.Certainly, can know, net electrode interior is hollow, to provide space to make anode ring and auxiliary anode ring be supported on net electrode interior.
In the present invention, net electrode 2,3 actings in conjunction of anode ring can form shape of a saddle electric field, auxiliary anode ring 4 can change the distribution situation of electric field, for example can compress shape of a saddle electric field, make this electric field become precipitous, compress the low part in saddle-shaped centre, make the raised part in two ends more precipitous.
The net electrode 2 of ionization gauge anode construction 1 of the present invention adopts spherical structure, and the electric field (for example shape of a saddle electric field) of its formation has better symmetry and uniformity; Auxiliary anode ring 4 has effect of contraction to the electric field of net electrode 2 and the 3 actings in conjunction formation of anode ring, therefore the length of electronics movement locus in ionization gauge anode construction 1 of the present invention can become large, according to above-mentioned formula (1), can learn, because it is large that movement locus length becomes, the sensitivity that has improved ionization gauge.
Optionally, the above-mentioned net electrode 2 of ionization gauge anode mechanism of the present invention can be formed by the conductive filament manufacture of diameter 0.3-0.6 millimeter, for example that conductive filament braiding winding is made, and, this braiding be wound around can be integrally formed one complete spherical, also can form two semicircles, then splicing, certainly, forming multiple parts then splices passable equally.In addition, except being worked out by conductive filament, also can form with the electric conductor etching of spherical shell shape.Further, the material of net electrode is one or more in molybdenum, tungsten, copper, stainless steel, carbon nano-tube, when net electrode is made by conductive filament braiding winding, conductive filament can be one or more in these materials, and net electrode be the etching of spherical shell shape electric conductor form time, spherical shell shape electric conductor can be one or more in above-mentioned material.
Optionally, the diameter of net electrode 2 is 30-40 millimeter.In prior art, adopting glass cylinder, and enclosing golden film, the manufacturing process of net electrode 2 of the present invention is simple, is easy to Installation and Debugging, cost-saving.
Further, optional intrafascicular one or more of molybdenum, tungsten, copper, stainless steel, nano wire bundle, carbon nano-tube that adopt of anode ring 3 and described auxiliary anode ring 4.Be that anode ring 3 and auxiliary anode ring 4 can be that metal can be also nonmetal.In the optional execution mode of one, anode ring 3 has two, and the diameter of one of them is 6-9 millimeter, and another diameter is 14-16 millimeter; Auxiliary anode ring 4 has one, and its diameter is 17-20 millimeter.For convenience of description anode ring less diameter is referred to as to first anode ring, in Fig. 3, with label 7, represents, the anode ring that diameter is larger is referred to as second plate ring, in Fig. 3, with label 8, represents.Wherein second plate ring is around first anode ring, and auxiliary anode ring is around first anode ring and second plate ring.Certainly, the setting position of first anode ring, second plate ring and auxiliary anode ring also can be understood as: first anode ring 7, second plate ring 8 and auxiliary anode ring 4 are coaxial, and be arranged in same level, further they are still coaxial with net electrode 2.
Certainly, should be appreciated that, above-mentioned set-up mode is a kind of optional embodiment, be not limited to the present invention, first anode ring 7, second plate ring 8 and auxiliary anode ring 4 also can disalignments, not in same level, or coaxially in same level, these can not be used in the present invention, and which kind of set-up mode is all after movable electron impact ionization gauge anode construction 1, can have the better movement locus of (length) in order to guarantee.
Further, ionization gauge anode construction 1 of the present invention also comprises ring flange 5, connects strutting piece and respectively net electrode, anode ring and auxiliary anode ring is supported on ring flange.
Wherein connect strutting piece 6 and both there is electrical connection function, have again support function.Connect the core body that strutting piece 6 has conduction, this guarantees its realization electrical connection function, also has the insulation crust of parcel conductive core perisporium, and this insulation crust not only can be isolated from the outside conductive core, equally also can play a supporting role.Connecting strutting piece 6 is connected to above-mentioned net electrode 2, anode ring 3 and auxiliary anode ring 4 on ring flange 5, and they are supported on ring flange 5, therefore, for example in the above-described embodiments, have under the situation of two anode rings and an auxiliary anode ring 4, connect strutting piece 6 and at least need four, support respectively two anode rings, an auxiliary anode ring and a net electrode 2.Certainly the stability in order to support also can be used multiple connection strutting pieces 6 to support simultaneously.
But should be appreciated that, the support function of above-mentioned connection strutting piece can be provided by insulation crust, also can be provided by conductive core and insulation crust, certainly, which kind of form is all for net electrode, anode ring and auxiliary anode ring are supported on ring flange simultaneously.
Take a connection strutting piece 6 as example explanation, the conductive core that passes through that connects strutting piece 6 is connected to ring flange 5 by net electrode 2 now, and one end of conductive core connects net electrode 2, other end mounting flange 5.Because be, take one, connect strutting piece 6 as example, so connect net electrode 2 as example take this support connecting piece, in fact this connects strutting piece 6 and can connect net electrode 2, any one in anode ring 3 or auxiliary anode ring 4, the parts that do not connected by this connection strutting piece 6 connect strutting piece 6 by other and connect.Certainly support function and linkage function are similar, and the insulation crust that connects strutting piece 6 supports above-mentioned net electrode 2 or anode ring 3 or auxiliary anode ring 4.
More than just a connection strutting piece 6 is example, one end of the conductive core of each in fact connection strutting piece 6 connects respectively net electrode 2, anode ring 3 or auxiliary anode ring 4, the other end is connected to ring flange 5, and supports described net electrode 2, anode ring 3, auxiliary anode ring 4 by insulation crust.Should be appreciated that, ionization gauge anode construction 1 is in vacuum working environment, for example, in vacuum chamber, by connecting support connecting piece, the net electrode 2 in vacuum environment, anode ring 3 and auxiliary anode ring 4 are electrically connected to ring flange 5, on ring flange 5, there is the binding post connecting for conductive core, this binding post can penetrate ring flange 5, for electric signal transmission.
In the optional execution mode of one, the insulation crust of above-mentioned connection strutting piece 6 can be pottery, can insulate, and also has certain intensity can support net electrode 2 parts such as grade.Certainly, this is optional execution mode, is not intended to limit the present invention.
Further, more stable for what guarantee to support, at net electrode 2 outer surfaces, one circle reinforcing ring is set, the conductive core of above-mentioned connection strutting piece 6 is directly connected with ferrule, this reinforcing ring can conduct electricity, do not affect being electrically connected between conductive core and net electrode 2, conductive core is connected with net electrode 2 by metal retainer ring.Certainly, by above-mentioned explanation, be appreciated that the material that reinforcing ring adopts is electric conducting material.
The fixed form of above-mentioned reinforcing ring has multiple, and for example reinforcing ring can be embedded in net electrode 2 surfaces, also by conductive filament, is bundled on net electrode 2.In addition, the setting position of reinforcing ring also can have various ways, can be for example the ring body place face of reinforcing ring through the center of circle of net electrode 2, reinforcing ring is divided into symmetrical two parts by net electrode, also can be understood as reinforcing ring place face, is the plane of symmetry of net electrode 2.Certainly, when net electrode 2 is ball shape, even aforesaid way also can find multiple positions to install on net electrode 2, as long as can guarantee, by this reinforcing ring, can more firmly fix net electrode 2.
The above-mentioned optional execution mode of the present invention that is, is not limitation of the present invention, and the such as size material of the quantity of anode ring, each part etc. can change to some extent in rational scope.
Finally it should be noted that: although described above the present invention and advantage thereof in detail, be to be understood that in the case of not exceeding the spirit and scope of the present invention that limited by appended claim and can carry out various changes, alternative and conversion.And scope of the present invention is not limited only to the specific embodiment of the described process of specification, equipment, means, method and step.One of ordinary skilled in the art will readily appreciate that from disclosure of the present invention, can use carry out with the essentially identical function of corresponding embodiment described herein or obtain process, equipment, means, method or step result essentially identical with it, that existing and will be developed future according to the present invention.Therefore, appended claim is intended to comprise such process, equipment, means, method or step in their scope.
Claims (10)
1. an ionization gauge anode construction, is characterized in that, comprising:
Net electrode, anode ring, auxiliary anode ring and multiple connection strutting piece, each described connection strutting piece supports respectively described net electrode, anode ring, auxiliary anode ring;
Wherein, described net electrode is the spherical network structure of being made by electric conducting material, described anode ring and described auxiliary anode be the inside at described net electrode by described connection supports support, described auxiliary anode ring is around described anode ring, and described net electrode, anode ring and auxiliary anode ring are insulated from each other.
2. ionization gauge anode construction according to claim 1, is characterized in that,
Described net electrode is made spherical by conductive filament braiding winding, and the spherical network structure that is.
3. ionization gauge anode construction according to claim 1, is characterized in that,
The material of described net electrode is one or more in molybdenum, tungsten, copper, stainless steel, carbon nano-tube.
4. ionization gauge anode construction according to claim 2, is characterized in that,
The diameter of described net electrode is 30-40 millimeter, and/or the diameter of described conductive filament is 0.3-0.6 millimeter.
5. ionization gauge anode construction according to claim 1, is characterized in that,
Described anode ring has two, and the diameter of one of them is 6-9 millimeter, and another diameter is 14-16 millimeter, and in two described anode rings, the larger described anode ring of diameter is around the less described anode ring of diameter;
Described auxiliary anode ring has one, and its diameter is 17-20 millimeter.
6. ionization gauge anode construction according to claim 1, is characterized in that,
Described anode ring and described auxiliary anode ring are intrafascicular one or more of molybdenum, tungsten, copper, stainless steel, nano wire bundle, carbon nano-tube.
7. ionization gauge anode construction according to claim 1, is characterized in that,
Described connection strutting piece has conductive core, and wraps up the insulation crust of described conductive core perisporium.
8. ionization gauge anode construction according to claim 7, is characterized in that,
Described ionization gauge anode construction also comprises ring flange;
One end of the conductive core of each described connection strutting piece connects separately described net electrode, anode ring or auxiliary anode ring, and the other end is connected to ring flange, and described net electrode, anode ring, auxiliary anode ring are supported on described ring flange.
9. ionization gauge anode construction according to claim 8, is characterized in that,
Along a circle reinforcing ring is set on described net electrode, one end of described conductive core is connected in described reinforcing ring.
10. ionization gauge anode construction according to claim 9, is characterized in that,
Described reinforcing ring is embedded in described net electrode, and described reinforcing ring is divided into symmetrical two parts by described net electrode.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310722445.6A CN103762147B (en) | 2013-12-24 | 2013-12-24 | Anode structure of ionization gauge |
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| CN201310722445.6A CN103762147B (en) | 2013-12-24 | 2013-12-24 | Anode structure of ionization gauge |
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| CN103762147A true CN103762147A (en) | 2014-04-30 |
| CN103762147B CN103762147B (en) | 2016-02-17 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109767970A (en) * | 2018-12-05 | 2019-05-17 | 兰州空间技术物理研究所 | A kind of microencapsulated formula ionization gauge |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS5589728A (en) * | 1978-12-27 | 1980-07-07 | Shinku Denshi:Kk | Hot-cathode ionization vacuum meter |
| JPS6135325A (en) * | 1984-07-27 | 1986-02-19 | Japan Atom Energy Res Inst | Ionization vacuum gauge |
| JPS63198840A (en) * | 1987-02-13 | 1988-08-17 | Fumio Watanabe | Hot-cathode ionization gauge |
| JPH04105031A (en) * | 1990-08-24 | 1992-04-07 | Sukegawa Electric Co Ltd | X-ray beam electron stream setoff method and hot cathode type electric dissociate vacuum meter using the method |
| JPH08240503A (en) * | 1995-03-06 | 1996-09-17 | Aneruba Kk | Flange mount-type hot cathode ionization vacuum gauge |
| CN1240933A (en) * | 1999-06-25 | 2000-01-12 | 清华大学 | Very-high-vacuity micro-ionization meter with very low gas absorption and release rates |
| KR20010000401A (en) * | 2000-09-26 | 2001-01-05 | 김도윤 | field ionization vacuum gauge |
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2013
- 2013-12-24 CN CN201310722445.6A patent/CN103762147B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5589728A (en) * | 1978-12-27 | 1980-07-07 | Shinku Denshi:Kk | Hot-cathode ionization vacuum meter |
| JPS6135325A (en) * | 1984-07-27 | 1986-02-19 | Japan Atom Energy Res Inst | Ionization vacuum gauge |
| JPS63198840A (en) * | 1987-02-13 | 1988-08-17 | Fumio Watanabe | Hot-cathode ionization gauge |
| JPH04105031A (en) * | 1990-08-24 | 1992-04-07 | Sukegawa Electric Co Ltd | X-ray beam electron stream setoff method and hot cathode type electric dissociate vacuum meter using the method |
| JPH08240503A (en) * | 1995-03-06 | 1996-09-17 | Aneruba Kk | Flange mount-type hot cathode ionization vacuum gauge |
| CN1240933A (en) * | 1999-06-25 | 2000-01-12 | 清华大学 | Very-high-vacuity micro-ionization meter with very low gas absorption and release rates |
| KR20010000401A (en) * | 2000-09-26 | 2001-01-05 | 김도윤 | field ionization vacuum gauge |
Non-Patent Citations (1)
| Title |
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| 李旺奎等: "场致发射冷阴极球形振荡器真空规", 《真空科学与技术》, vol. 6, no. 1, 28 February 1986 (1986-02-28), pages 49 - 55 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109767970A (en) * | 2018-12-05 | 2019-05-17 | 兰州空间技术物理研究所 | A kind of microencapsulated formula ionization gauge |
| CN109767970B (en) * | 2018-12-05 | 2021-05-28 | 兰州空间技术物理研究所 | Miniature packaged ionization gauge |
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| CN103762147B (en) | 2016-02-17 |
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