CN103759792A - Micro-flow thermal mass flow controller calibration device and calibration method thereof - Google Patents
Micro-flow thermal mass flow controller calibration device and calibration method thereof Download PDFInfo
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- CN103759792A CN103759792A CN201310722236.1A CN201310722236A CN103759792A CN 103759792 A CN103759792 A CN 103759792A CN 201310722236 A CN201310722236 A CN 201310722236A CN 103759792 A CN103759792 A CN 103759792A
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- mass flow
- thermal mass
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Abstract
The invention relates to a micro-flow thermal mass flow controller calibration device and a calibration method thereof. The calibration device for the micro-flow thermal mass flow controller comprises a reference chamber, a constant volume chamber, a first isolation valve and a differential pressure gauge, wherein the first isolation valve and the differential pressure gauge are connected between the constant volume chamber and the reference chamber. The micro-flow thermal mass flow controller calibration device and the calibration method thereof can calibrate the mass flow rate of micro-flow gas and solve the problem that little pressure changes on the basis of high pressure is difficult to accurately measure.
Description
Technical field
The present invention relates to a kind of collimation technique of micrometeor thermal mass flow controller, the particularly calibrating installation of micrometeor thermal mass flow controller and calibration steps thereof.
Background technology
In vertification regulation JJG897-2005 " mass flowmeter vertification regulation ", introduced the method for multiple calibrating mass flow meter and mass flow controller, but, or belong to the gas mass flow calibration method of large flow range, or belong to the calibration method of non-pneumatic mass rate.
Conventionally, PVTt method is applicable to thermal mass flow controller and thermal mass flow meter calibrating.But, for the calibration under micrometeor calibration range and high top hole pressure condition, it is long that the weak point of this method is to calibrate accumulated time, and the dummy discharge amount of impact that the factor such as temperature variation is introduced under high top hole pressure condition is large, limited the calibration lower limit of calibrating installation; Secondly, the measurement that this method changes the little pressure under high top hole pressure condition has brought difficulty.
Summary of the invention
Provide hereinafter about brief overview of the present invention, to the basic comprehension about some aspect of the present invention is provided.Should be appreciated that this general introduction is not about exhaustive general introduction of the present invention.It is not that intention is determined key of the present invention or pith, and nor is it intended to limit the scope of the present invention.Its object is only that the form of simplifying provides some concept, usings this as the preorder in greater detail of discussing after a while.
A fundamental purpose of the present invention is to provide a kind of calibrating installation and calibration steps thereof of micrometeor thermal mass flow controller, can calibrate micrometeor gas mass flow, and solves the difficult problem that on high pressure basis, little pressure variation is difficult to accurate measurement.
According to an aspect of the present invention, a kind of calibrating installation of micrometeor thermal mass flow controller,
Comprise reference chamber and constant volume chamber, and be connected to the first isolation valve and differential manometer between constant volume chamber and reference chamber;
Described differential manometer is for measuring the draught head between described constant volume chamber and reference chamber;
When described the first isolation valve is zero for the draught head between described constant volume chamber and described reference chamber, close, make gas barrier between described constant volume chamber and described reference chamber;
Described constant volume chamber is also connected with tested micrometeor thermal mass flow controller, for when described the first isolation valve cuts out, receive the gas flow of described tested micrometeor thermal mass flow controller output, and according to described gas flow and cumulative time, described tested micrometeor thermal mass flow controller is calibrated.
According to a second aspect of the invention, a kind of calibration steps of the calibrating installation based on micrometeor thermal mass flow controller, comprising:
In constant volume chamber and reference chamber, be filled with gas;
When pressure reduction between constant volume chamber and reference chamber is zero, close the first isolation valve;
Constant volume chamber receives the gas flow of tested micrometeor thermal mass flow controller output, and according to the gas pressure change of constant volume chamber and cumulative time, tested micrometeor thermal mass flow controller is calibrated.
Adopt calibrating installation and the calibration steps thereof of micrometeor thermal mass flow controller of the present invention, can calibrate micrometeor gas mass flow, and solve the problem that on high pressure basis, little pressure variation is difficult to accurate measurement.
Accompanying drawing explanation
Below with reference to the accompanying drawings illustrate embodiments of the invention, can understand more easily above and other objects, features and advantages of the present invention.Parts in accompanying drawing are just in order to illustrate principle of the present invention.In the accompanying drawings, same or similar technical characterictic or parts will adopt same or similar Reference numeral to represent.
Fig. 1 is a kind of structural drawing of embodiment of the calibrating installation of micrometeor thermal mass flow controller of the present invention;
Fig. 2 is a kind of process flow diagram of embodiment of the calibration steps of the calibrating installation based on micrometeor thermal mass flow controller of the present invention.
Embodiment
Embodiments of the invention are described with reference to the accompanying drawings.The element of describing in an accompanying drawing of the present invention or a kind of embodiment and feature can combine with element and feature shown in one or more other accompanying drawing or embodiment.It should be noted that for purposes of clarity, in accompanying drawing and explanation, omitted expression and the description of unrelated to the invention, parts known to persons of ordinary skill in the art and processing.
Shown in Figure 1, be the structural drawing of a kind of embodiment of the calibrating installation of micrometeor thermal mass flow controller of the present invention.
In the present embodiment, the calibrating installation of micrometeor thermal mass flow controller comprises reference chamber 10 and constant volume chamber 20, and is connected to the first isolation valve 30 and differential manometer 40 between constant volume chamber and reference chamber.
Differential manometer 40 is for measuring the draught head between constant volume chamber 20 and reference chamber 10.When the first isolation valve 30 is zero for the draught head between constant volume chamber 20 and reference chamber 10, close, make gas barrier between constant volume chamber 20 and reference chamber 10.
Constant volume chamber 20 is also connected with tested micrometeor thermal mass flow controller 50, for when the first isolation valve 30 cuts out, receive the gas flow of tested micrometeor thermal mass flow controller 50 outputs, and according to gas flow and cumulative time, tested micrometeor thermal mass flow controller 50 is calibrated.
Under original state, the air pressure in constant volume chamber 20 and reference chamber 10 equates.When tested micrometeor thermal mass flow controller 50 to constant volume chamber 20 interior input after gas, can measure the pressure differential between constant volume chamber 20 and reference chamber 10, again according to tested 50 times to constant volume chamber 20 input gas flows of micrometeor thermal mass flow controller, can calculate the actual normal flow of tested micrometeor thermal mass flow controller 50 outputs, with this actual normal flow, demarcate tested micrometeor thermal mass flow controller 50, can reach the object that it is calibrated.
Because being has in essence utilized the pressure reduction between constant volume chamber 20 and reference chamber 10 to calibrate, even if constant volume chamber 20 is very large with the air pressure of reference chamber 10, but pressure reduction is very little, also can realize accurate calibration.
Preferably, constant volume chamber 20 and reference chamber 10 have identical material, shape, and adopt identical manufacturing process manufacture.So,, because constant volume chamber 20 is identical with reference chamber 10, the in the situation that of can exchanging use at differential pressure gauge two ends, the two can exchange use.
In one embodiment, between constant volume chamber 20 and tested micrometeor thermal mass flow controller 50, by the second isolation valve 60, be connected.
The second isolation valve 60, for opening when the first isolation valve 30 cuts out, makes the gas flow of tested micrometeor thermal mass flow controller 50 outputs enter constant volume chamber 20.
While opening due to the second isolation valve 60, the first isolation valve 30 is in closed condition, thereby the gas flow of tested micrometeor thermal mass flow controller 50 outputs only can enter constant volume chamber 20, and can not enter into reference chamber 10 by the first isolation valve 30.
In one embodiment, in the time period that differential manometer 40 can be closed at the first isolation valve 30, measure the pressure differential between constant volume chamber 20 and reference chamber 10.And the differential pressure measurement principle of differential manometer 40 is irrelevant with the gaseous species that is filled with constant volume chamber 20 and reference chamber 10.
In one embodiment, the calibrating installation of micrometeor thermal mass flow controller can also comprise source of the gas 70.Source of the gas 70 is connected with tested micrometeor thermal mass flow controller 50, for being filled with gas to tested micrometeor thermal mass flow controller 50, constant volume chamber 20 and reference chamber 10.
Shown in Figure 2, be the process flow diagram of a kind of embodiment of the calibration steps of the calibrating installation based on micrometeor thermal mass flow controller of the present invention.
In the present embodiment, the calibration steps of the calibrating installation based on micrometeor thermal mass flow controller comprises:
S10: be filled with gas in constant volume chamber 20 and reference chamber 10, for example, can be filled with the high pure nitrogen of 10kPa;
S20: when pressure reduction between constant volume chamber 20 and reference chamber 10 is zero, close the first isolation valve 30;
S30: constant volume chamber 20 receives the gas flow of tested micrometeor thermal mass flow controller 50 outputs, and according to the gas pressure change of constant volume chamber 20 and cumulative time, tested micrometeor thermal mass flow controller 50 is calibrated.
As a kind of embodiment, before step S10, this calibration steps can also comprise:
To constant volume chamber 20, reference chamber 10 and between connecting tube, tested micrometer flow thermal mass flow controller 50 and constant volume chamber 20 between connecting tube hunt leak, if there is air-leak section, first process gas leakage, guarantee the impermeability of constant volume chamber 20, reference chamber 10 and each connecting tube.
Tested micrometeor thermal mass flow controller 50 is carried out to preheating.Be no less than official hour in tested micrometeor thermal mass flow controller 50 operation instructions preheating time.
Measure the total measurement (volume) of pipeline between constant volume chamber 20 and constant volume chamber 20 and tested micrometeor thermal mass flow controller 50.For example, in one embodiment, can by gas expansion method, carry out the measurement of total measurement (volume) with the volumetric standard of 1L.
Pipe blow-through also returns to zero to tested micrometeor thermal mass flow controller 50.
The gas flow value of tested micrometeor thermal mass flow controller 50 outputs is set to the first predetermined value, for example, can be set to 5 standard ml/min (sccm).
In one embodiment, " pipe blow-through " can specifically comprise:
In tested micrometeor thermal mass flow controller 50, be filled with high-purity calibration gas (for example, high-purity nitrogen) and continued for first schedule time, and this high-pure gas is extracted.
In one embodiment, " according to the gas pressure change of constant volume chamber 20 and cumulative time, tested micrometeor thermal mass flow controller is calibrated " and can specifically be comprised:
According to gas pressure change and cumulative time, calculate normal flow;
Standard of comparison flow and the first predetermined value;
According to normal flow and described the first predetermined value, calculate tested micrometeor thermal mass flow controller traffic alignment coefficient.
For example, the first predetermined value is 5sccm, and is 4.91sccm according to the normal stream value that gas pressure change and cumulative time calculate, and tested micrometeor thermal mass flow controller traffic alignment coefficient is 4.91/5=0.982.
In calibration steps implementation, should keep environment temperature constant, otherwise will cause calibration to occur deviation.
Adopt calibrating installation and the calibration steps thereof of micrometeor thermal mass flow controller of the present invention, can calibrate micrometeor gas mass flow, extended the lower limit of traditional quality traffic alignment.
In addition,, by measuring the method for constant volume chamber and reference chamber pressure reduction, solved little pressure on high pressure basis and changed a difficult problem that is difficult to accurate measurement.
In addition, if be connected respectively and measure absolute pressure vacuum meter with reference chamber in constant volume chamber, can realize the calibration of larger flow under little top hole pressure condition, at this moment, reference chamber can be used as constant volume chamber and uses, and calibrating installation can be calibrated two mass flow controllers simultaneously, and then can improve calibration efficiency.
Above some embodiments of the present invention are described in detail.As one of ordinary skill in the art can be understood, whole or any steps or the parts of method and apparatus of the present invention, can be in the network of any computing equipment (comprising processor, storage medium etc.) or computing equipment, with hardware, firmware, software or their combination, realized, this is that those of ordinary skills use their basic programming skill just can realize in the situation that understanding content of the present invention, therefore need not illustrate at this.
In equipment of the present invention and method, obviously, each parts or each step reconfigure after can decomposing, combine and/or decomposing.These decomposition and/or reconfigure and should be considered as equivalents of the present invention.The step that also it is pointed out that the above-mentioned series of processes of execution can order naturally following the instructions be carried out in chronological order, but does not need necessarily according to time sequencing, to carry out.Some step can walk abreast or carry out independently of one another.Simultaneously, in the above in the description of the specific embodiment of the invention, the feature of describing and/or illustrating for a kind of embodiment can be used in same or similar mode in one or more other embodiment, combined with the feature in other embodiment, or substitute the feature in other embodiment.
Should emphasize, term " comprises/comprises " existence that refers to feature, key element, step or assembly while using herein, but does not get rid of the existence of one or more further feature, key element, step or assembly or add.
Although described the present invention and advantage thereof in detail, be to be understood that in the situation that do not exceed the spirit and scope of the present invention that limited by appended claim and can carry out various changes, alternative and conversion.And scope of the present invention is not limited only to the specific embodiment of the described process of instructions, equipment, means, method and step.One of ordinary skilled in the art will readily appreciate that from disclosure of the present invention, can use carry out with the essentially identical function of corresponding embodiment described herein or obtain process, equipment, means, method or step result essentially identical with it, that existing and will be developed future according to the present invention.Therefore, appended claim is intended to comprise such process, equipment, means, method or step in their scope.
Claims (10)
1. a calibrating installation for micrometeor thermal mass flow controller, is characterized in that:
Comprise reference chamber and constant volume chamber, and be connected to the first isolation valve and differential manometer between constant volume chamber and reference chamber;
Described differential manometer is for measuring the draught head between described constant volume chamber and reference chamber;
When described the first isolation valve is zero for the draught head between described constant volume chamber and described reference chamber, close, make gas barrier between described constant volume chamber and described reference chamber;
Described constant volume chamber is also connected with tested micrometeor thermal mass flow controller, for when described the first isolation valve cuts out, receive the gas flow of described tested micrometeor thermal mass flow controller output, and according to described gas flow and cumulative time, described tested micrometeor thermal mass flow controller is calibrated.
2. the calibrating installation of micrometeor thermal mass flow controller according to claim 1, is characterized in that:
Described constant volume chamber and reference chamber have identical material, shape, and adopt identical manufacturing process manufacture.
3. the calibrating installation of micrometeor thermal mass flow controller according to claim 1, is characterized in that:
Between described constant volume chamber and described tested micrometeor thermal mass flow controller, by the second isolation valve, be connected;
Described the second isolation valve, for opening when described the first isolation valve cuts out, makes the gas flow of described tested micrometeor thermal mass flow controller output enter described constant volume chamber.
4. according to the calibrating installation of the micrometeor thermal mass flow controller described in claim 1-3 any one, it is characterized in that:
Described differential manometer is also for measuring the pressure differential between described constant volume chamber and described reference chamber in the time period of closing at described the first isolation valve.
5. the calibrating installation of micrometeor thermal mass flow controller according to claim 4, is characterized in that:
Also comprise source of the gas, be connected with described tested micrometeor thermal mass flow controller, for being filled with gas to described tested micrometeor thermal mass flow controller, constant volume chamber and reference chamber.
6. a calibration steps for the calibrating installation of the micrometeor thermal mass flow controller based on as described in claim 1-5 any one, is characterized in that, comprising:
In constant volume chamber and reference chamber, be filled with gas;
When pressure reduction between constant volume chamber and reference chamber is zero, close the first isolation valve;
Constant volume chamber receives the gas flow of tested micrometeor thermal mass flow controller output, and according to the gas pressure change of constant volume chamber and cumulative time, tested micrometeor thermal mass flow controller is calibrated.
7. calibration steps according to claim 6, is characterized in that, " in constant volume chamber and reference chamber, is filled with gas " before, also comprises in described step:
To constant volume chamber, reference chamber and between connecting tube, tested micrometer flow thermal mass flow controller and constant volume chamber between connecting tube hunt leak;
Tested micrometeor thermal mass flow controller is carried out to preheating;
Measure the total measurement (volume) of pipeline between constant volume chamber and constant volume chamber and tested micrometeor thermal mass flow controller;
Clean described pipeline and described tested micrometeor thermal mass flow controller is returned to zero;
The gas flow value of tested micrometeor thermal mass flow controller output is set to the first predetermined value.
8. calibration steps according to claim 7, is characterized in that, described " cleaning described pipeline " specifically comprises:
In tested micrometeor thermal mass flow controller, be filled with high-purity calibration gas and continued for first schedule time, and this high-pure gas is extracted.
9. according to the calibration steps described in claim 7 or 8, it is characterized in that, described " tested micrometeor thermal mass flow controller being calibrated according to described gas flow and cumulative time " specifically comprises:
According to described gas pressure change and described cumulative time, calculate normal flow;
More described normal flow and described the first predetermined value;
According to described normal flow and described the first predetermined value, calculate described tested micrometeor thermal mass flow controller traffic alignment coefficient.
10. according to the calibration steps described in claim 6-8 any one, it is characterized in that:
In described calibration steps implementation, keep environment temperature constant.
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| CN201310722236.1A CN103759792B (en) | 2013-12-24 | 2013-12-24 | Micro-flow thermal mass flow controller calibration device and calibration method thereof |
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| CN201310722236.1A CN103759792B (en) | 2013-12-24 | 2013-12-24 | Micro-flow thermal mass flow controller calibration device and calibration method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112198905A (en) * | 2020-09-11 | 2021-01-08 | 兰州空间技术物理研究所 | Gas flow control system and control method of standard digital interface |
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| US4490077A (en) * | 1981-07-28 | 1984-12-25 | Nippon Kokan Kabushiki Kaisha | Apparatus for continuously measuring flow rate of fine material flowing through transport pipe |
| US6277199B1 (en) * | 1999-01-19 | 2001-08-21 | Applied Materials, Inc. | Chamber design for modular manufacturing and flexible onsite servicing |
| CN2890855Y (en) * | 2005-12-20 | 2007-04-18 | 浙江省质量技术监督检测研究院 | Piston type flow calibrator employing zero balance method |
| CN101451877A (en) * | 2009-01-14 | 2009-06-10 | 廖明燕 | Volume tube with passive containing cylinder pressure equilibrium structure |
| CN101657700A (en) * | 2007-09-14 | 2010-02-24 | 西门子公司 | The calibration of dust load flow measuring systems |
| CN101672669A (en) * | 2005-03-16 | 2010-03-17 | 兰姆研究公司 | System and method for gas flow velocity verification |
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2013
- 2013-12-24 CN CN201310722236.1A patent/CN103759792B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4490077A (en) * | 1981-07-28 | 1984-12-25 | Nippon Kokan Kabushiki Kaisha | Apparatus for continuously measuring flow rate of fine material flowing through transport pipe |
| US6277199B1 (en) * | 1999-01-19 | 2001-08-21 | Applied Materials, Inc. | Chamber design for modular manufacturing and flexible onsite servicing |
| CN101672669A (en) * | 2005-03-16 | 2010-03-17 | 兰姆研究公司 | System and method for gas flow velocity verification |
| CN2890855Y (en) * | 2005-12-20 | 2007-04-18 | 浙江省质量技术监督检测研究院 | Piston type flow calibrator employing zero balance method |
| CN101657700A (en) * | 2007-09-14 | 2010-02-24 | 西门子公司 | The calibration of dust load flow measuring systems |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112198905A (en) * | 2020-09-11 | 2021-01-08 | 兰州空间技术物理研究所 | Gas flow control system and control method of standard digital interface |
| CN112198905B (en) * | 2020-09-11 | 2023-03-10 | 兰州空间技术物理研究所 | Gas flow control method of standard digital interface |
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