CN103759753B - A kind of grating photoelectric speed testing device - Google Patents
A kind of grating photoelectric speed testing device Download PDFInfo
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- CN103759753B CN103759753B CN201310684531.2A CN201310684531A CN103759753B CN 103759753 B CN103759753 B CN 103759753B CN 201310684531 A CN201310684531 A CN 201310684531A CN 103759753 B CN103759753 B CN 103759753B
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Abstract
The invention discloses a kind of grating photoelectric speed testing device, draw together the power supply, simulation high-speed grating optical signal generating apparatus, the aftertreatment systems of tested grating photoelectric and voltage measurement display four part that are sequentially connected with；Power supply is system power supply；Simulation high-speed grating optical signal generating apparatus produces the intensity signal of mechanical periodicity, and light intensity change is identical with the Moire fringe that metrological grating relative movement produces, and light intensity change is converted into the signal of telecommunication simultaneously；From the aftertreatment systems of the signal of telecommunication tested grating photoelectric of access that simulation high-speed grating optical signal generating apparatus produces, it is thus achieved that voltage change；By the displacement measurement of display is analyzed, whether the aftertreatment systems of test gratings photosignal can the tracking velocity of matched FBG.The present invention utilizes high-speed grating rotary motion simulation grating high-speed straight-line motor message, for solving the subsequent optical electric treatment system signal processing speed problem of test gratings optical signal.
Description
Technical field:
The present invention relates to automatic field, be specifically related to a kind of grating photoelectric analog.
Background technology:
Owing to grating sensor certainty of measurement is high, range of dynamic measurement is wide, can carry out the features such as noncontacting measurement, the automatization easily realizing system and digitized, measuring technology based on the metrological grating of Moire fringe to be widely used in recent ten years, grating sensor has become hi-Fix and the indispensable necessary requirement of High-speed machining.
The operation principle of metrological grating sensor (hereinafter referred to as grating sensor) is as it is shown in figure 1, the general scale grating 3 same or like by light source 1,2, two pitch of condenser lens and indication grating 4, photoelectric device 5 and photosignal aftertreatment systems 6 form.Grating matrix is transparent, light source 1 produce light beam by condenser lens 2 parallel after, during through scale grating 3, form light/dark district at its Fei Nieer focal plane, indication grating 4 is just in this position.When two grating relative motioies, the light intensity through two gratings obtains modulation and forms Moire fringe.The change of these light intensity is changed into the signal of telecommunication by photoelectric device 5, and the information of voltage obtained by follow-up process system 6 obtains the displacement of grating scale.
Realizing the needs of modern industry and measurement, the precision of grating sensor and velocity of displacement are two important indexs.On the one hand, being applied in the grating sensor in the fields such as Digit Control Machine Tool, fine measuring instrument, automation equipment, its precision level is reacted directly in the precision of machining, gauge check, location control.As grinding machine processing request has 1um precision, rose engine requires there is 0.1um precision etc..On the other hand, the tracking velocity of grating sensor is also particularly important index.Such as, vibration in machine tooling process, startup, rapid return, the target homing of military radar, tracking etc. all because measuring the low error that causes of response (tracking) speed of system, even cannot be able to be applied.
The linear grating chi that Heidenhain company produces, is widely used on Digit Control Machine Tool, for instance milling machine, machining center, boring machine, lathe and grinding machine.The conventional selection of to be feed shaft the be machine and equipment of closed loop control, its dynamic property advantage, reliable movement velocity, make it can not only meet conventional shaft dynamic performance requirements along the outstanding acceleration measuring direction, also can meet the high dynamic performance requirement of direct-driving motor.Its LIP series superhigh precision grating scale precision can be applicable to movement velocity up to ± below 0.5um, LIDA series of straight lines grating scale and reaches on the high-speed motion apparatus of 10m/s.
Current China is widely used in the grating digital readout of machine tool industry and mostly is 5um precision, it is impossible to meet the requirement in modern factories workshop.Therefore more domestic colleges and universities and research institution are devoted to improving of research grating photoelectric aftertreatment systems, and the resolution as improved optical-mechanical system improves grating signal segmentation multiple in other words.Document " design of high-speed, high precision grating displacement sensor sensing and algorithm of subdivision " (building-block machine and automatization's process technology, 2010,9:27-30) propose the design of a kind of brand-new grating displacement sensor sensing and algorithm of subdivision, the method that this is designed with singlechip technology and the powerful operational capability of PC combines, the meter devising a set of novelty counts greatly (complete grid stroke number) and meter decimal (digital subdivision) but separate harmonious scheme, has both achieved high power segmentation.
But the generally precision of grating or segmentation multiple and pattern displacement speed contradiction each other, speed is more high, and performance and efficiency requirements to the opto-electronic receiver of subsequent conditioning circuit, conversion and process are more high.In order to test gratings photosignal aftertreatment systems whether can the tracking velocity of matched FBG, a kind of low cost, can the equipment of aftertreatment systems of test gratings photosignal and the device of simulation high-speed grating optical signal be necessary.
Summary of the invention:
The present invention be in order to solve the aftertreatment systems of test gratings optical signal whether can the tracking velocity problem of matched FBG, it is provided that a kind of grating photoelectric analog, including the structure that can simulate high-speed grating optical signal.
This invention address that technical problem adopts the following technical scheme that:
Grating photoelectric speed testing device, it is characterised in that: include the power supply, simulation high-speed grating optical signal generating apparatus, the aftertreatment systems of tested grating photoelectric and voltage measurement display four part that are sequentially connected with；Power supply is system power supply；Simulation high-speed grating optical signal generating apparatus produces the intensity signal of mechanical periodicity, and light intensity change is identical with the Moire fringe that metrological grating relative movement produces, and light intensity change is converted into the signal of telecommunication simultaneously；From the aftertreatment systems of the signal of telecommunication tested grating photoelectric of access that simulation high-speed grating optical signal generating apparatus produces, it is thus achieved that voltage change；The measured value of displacement is shown finally by displacement display；By the displacement measurement of display is analyzed, whether the aftertreatment systems of test gratings photosignal can the tracking velocity of matched FBG.
Described grating photoelectric speed testing device, it is characterized in that: described simulation high-speed grating optical signal generating apparatus includes base, the motor of two identical parameters, two motors are symmetrical arranged on base, two motors are fixed respectively through a motor clamp cap, two motors are in transmission connection a code-disc respectively, two code-discs are fixed on the power transmission shaft of corresponding motor respectively through a code-disc folder, the rear end of two motors is provided with the shell being fixed on base, be positioned at two code-discs both sides shell on be arranged with laser instrument, photoelectricity stall, photoelectricity stall is provided with light cell；Wherein code-disc is the metal dish uniformly delineating the rectangular slits that n bar length is l at circumferencial direction, after motor is electrified, two code-discs rotate against with identical speed m (r/s), the light beam that laser instrument the is launched rectangular slits by two code-discs, it is irradiated on light cell, light cell receives the light intensity change information that the cycle is T (s), identical with the Moire fringe that metrological grating relative movement produces.
Described grating photoelectric speed testing device, it is characterised in that: described light cell can receive the cycle and be:
T=1/2mn
Being V (m/s) when being test for grating scale speed, the pitch of grating scale is h (m), it is assumed that grating scale moves the distance of a pitch and produces t light intensity period of change, it may be assumed that
th/V=T=1/2mn
Then by changing electric moter voltage value so that:
m=V/2nth
Realize the simulation of grating optical signal.
Described grating photoelectric speed testing device, it is characterized in that: described code-disc folder includes upper press cover, lower cover and axle center, the front end in axle center is tapered and center drilling, and the rear end in axle center is provided with external screw thread, and the front end in axle center screws in upper press cover, middle part screws in lower cover.
The beneficial effects of the present invention is:
The present invention utilizes high-speed grating rotary motion simulation grating high-speed straight-line motor message, for solving the subsequent optical electric treatment system signal processing speed problem of test gratings optical signal.
Accompanying drawing explanation
Fig. 1 is the system design drawing of typical case's metering-type grating encoder.
Fig. 2 is the system pie graph of grating photoelectric speed measurer.
Fig. 3 is the simulation high-speed grating optical signal generating apparatus figure based on the present invention.
Fig. 3 a is the structure chart of code-disc.
Fig. 3 b is the structure chart of code-disc folder.
Fig. 3 c is that code-disc presss from both sides the overall diagram being fixed on motor shaft by code-disc.
Detailed description of the invention
The system of the grating photoelectric speed measurer of the present invention is constituted as in figure 2 it is shown, comprise power supply 1, simulation high-speed grating optical signal generating apparatus 2, the aftertreatment systems 3 of tested grating photoelectric and voltage measurement display 4 four part.Power supply 1 is system power supply；Simulation high-speed grating optical signal generating apparatus 2 produces the intensity signal of mechanical periodicity, and it is identical that light intensity change produces Moire fringe with metrological grating relative movement, and light intensity change is converted into the signal of telecommunication simultaneously；From the aftertreatment systems 3 of the signal of telecommunication tested grating photoelectric of access that simulation high-speed grating optical signal generating apparatus 2 produces, it is thus achieved that voltage change；The measured value of displacement is shown finally by displacement display 4.By the displacement measurement of display is analyzed, it is possible to whether the aftertreatment systems of test gratings photosignal can the tracking velocity of matched FBG.
Referring to Fig. 3, Fig. 3 a, Fig. 3 b and Fig. 3 c, in the present embodiment, simulation high-speed grating optical signal generating apparatus mechanism is:
As it is shown on figure 3, simulation high-speed grating optical signal generating apparatus is by base 1, motor (1) 2, motor clamp cap (1) 3, laser instrument 4, shell 5, code-disc (1) 6, code-disc folder (1) 7, code-disc folder (2) 8, code-disc (2) 9, photoelectricity stall 10, light cell 11, motor (2) 12 and motor clamp cap (2) 13 composition.Motor (1) and motor (2), motor clamp cap (1) and motor clamp cap (2), it is identical respectively that code-disc (1) and code-disc (2), code-disc folder (1) and code-disc press from both sides (2) structure.
It is example with motor (1), code-disc (1) and code-disc folder (1).Being the structure of code-disc (1) as shown in Figure 3 a, arrange a circular metal dish, diameter is d, and it is the rectangular slits of l that the circumferencial direction at metal dish uniformly delineates n bar length；Press from both sides the structure of (1) as shown in Figure 3 b for code-disc, be made up of upper press cover 14, lower cover 15 and axle center 16；Fig. 3 c shows that code-disc 6 is fixed on the overall diagram on the axle of motor 2 by code-disc folder 7.Code-disc 6 is clipped in the middle of upper press cover 14 and the lower cover 15 of code-disc folder 7, utilizes code-disc to press from both sides the pyramidal structure in 7 axle center 16, it is possible to be fixed on by code-disc on the axle of motor 2.
Simulation high-speed grating optical signal generating apparatus embodiment based on the present invention is as follows:
Such as Fig. 3, motor clamp cap (1) and motor clamp cap (2) is utilized to be fixed on base 1 in motor (1) and motor (2), it is ensured that motor (1) and motor (2) are coaxial；Code-disc (1) and code-disc (2) utilize code-disc folder (1) and code-disc folder (2) to be separately fixed on the axle of motor (1) and motor (2)；The light beam that laser instrument 4 is launched, by code-disc (1) and code-disc (2) rectangular slits, is received by light cell 11.Motor (1) and motor (2) are electrified, motor speed is proportional to added magnitude of voltage, code-disc (1) is made to rotate against with identical speed m (r/s) with code-disc (2), light cell 11 can receive the light intensity change information that the cycle is T (s), produces Moire fringe with metrological grating relative movement identical.
T=1/2mn
Being V (m/s) when being test for grating scale speed, the pitch of grating scale is h (m), it is assumed that grating scale moves the distance of a pitch and produces t light intensity period of change.That is:
th/V=T=1/2mn
Then:
m=V/2nth
Such as being test for grating scale speed is V=1m/s, pitch is h=10um, grating scale moves the distance of a pitch and produces a light intensity period of change, i.e. t=1, the seam number n=500 of code-disc (1) and code-disc (2), then by changing electric moter voltage value so that m=V/2nth=1/ (2 × 500 × 10 × 10-6)=100r/s just can realize the simulation of grating optical signal.
Claims (4)
1. grating photoelectric speed testing device, it is characterised in that: include the power supply, simulation high-speed grating optical signal generating apparatus, the aftertreatment systems of tested grating photoelectric and voltage measurement display four part that are sequentially connected with；Power supply is system power supply；Simulation high-speed grating optical signal generating apparatus produces the intensity signal of mechanical periodicity, and light intensity change is identical with the Moire fringe that metrological grating relative movement produces, and light intensity change is converted into the signal of telecommunication simultaneously；From the aftertreatment systems of the signal of telecommunication tested grating photoelectric of access that simulation high-speed grating optical signal generating apparatus produces, it is thus achieved that voltage change；The measured value of displacement is shown finally by displacement display；By the displacement measurement of display is analyzed, whether the aftertreatment systems of test gratings photosignal can the tracking velocity of matched FBG.
2. grating photoelectric speed testing device according to claim 1, it is characterized in that: described simulation high-speed grating optical signal generating apparatus includes base, the motor of two identical parameters, two motors are symmetrical arranged on base, two motors are fixed respectively through a motor clamp cap, two motors are in transmission connection a code-disc respectively, two code-discs are fixed on the power transmission shaft of corresponding motor respectively through a code-disc folder, the rear end of two motors is provided with the shell being fixed on base, be positioned at two code-discs both sides shell on be arranged with laser instrument, photoelectricity stall, photoelectricity stall is provided with light cell；Wherein code-disc is the metal dish uniformly delineating the rectangular slits that n bar length is l at circumferencial direction, after motor is electrified, two code-discs rotate against with identical speed m (r/s), the light beam that laser instrument the is launched rectangular slits by two code-discs, it is irradiated on light cell, light cell receives the light intensity change information that the cycle is T (s), identical with the Moire fringe that metrological grating relative movement produces.
3. grating photoelectric speed testing device according to claim 2, it is characterised in that: described light cell can receive the cycle and be:
T=1/2mn
Being V (m/s) when being test for grating scale speed, the pitch of grating scale is h (m), it is assumed that grating scale moves the distance of a pitch and produces t light intensity period of change, it may be assumed that
Th/V=T=1/2mn
Then by changing electric moter voltage value so that:
M=V/2nth
Realize the simulation of grating optical signal.
4. grating photoelectric speed testing device according to claim 1, it is characterized in that: described simulation high-speed grating optical signal generating apparatus includes upper press cover, lower cover and axle center, the front end in axle center is tapered and center drilling, the rear end in axle center is provided with external screw thread, and the front end in axle center screws in upper press cover, middle part screws in lower cover.
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| CN107957502A (en) * | 2017-10-19 | 2018-04-24 | 山东微感光电子有限公司 | Laser fiber tachogenerator, Boolean value output sensor and measuring method |
| CN108534817B (en) * | 2018-04-16 | 2023-09-01 | 吉林大学 | Grating encoder reliability test device |
| CN112254665B (en) * | 2020-09-09 | 2022-04-01 | 杭州电子科技大学 | High-precision digital circular division sensor, system and detection method |
| CN111982508B (en) * | 2020-09-28 | 2022-06-21 | 马鞍山钢铁股份有限公司 | Continuous-annealing line tooth type coupling fault detection device, system and method |
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| CN101957179A (en) * | 2010-08-27 | 2011-01-26 | 清华大学 | Optical fiber displacement measurement system and method |
| CN202141471U (en) * | 2011-05-27 | 2012-02-08 | 鲁冬 | Intelligent measurement testing device of sensors |
| CN102636127A (en) * | 2012-04-26 | 2012-08-15 | 中国计量科学研究院 | Trajectory tracking type interference signal counting and subdividing device and method |
| CN102679882A (en) * | 2012-04-27 | 2012-09-19 | 夏豪杰 | Phase modulation grating sensor and method for realizing measurement |
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| JP2962819B2 (en) * | 1990-11-30 | 1999-10-12 | キヤノン株式会社 | Displacement measuring device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101957179A (en) * | 2010-08-27 | 2011-01-26 | 清华大学 | Optical fiber displacement measurement system and method |
| CN202141471U (en) * | 2011-05-27 | 2012-02-08 | 鲁冬 | Intelligent measurement testing device of sensors |
| CN102636127A (en) * | 2012-04-26 | 2012-08-15 | 中国计量科学研究院 | Trajectory tracking type interference signal counting and subdividing device and method |
| CN102679882A (en) * | 2012-04-27 | 2012-09-19 | 夏豪杰 | Phase modulation grating sensor and method for realizing measurement |
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