CN103728244B - The synchronous rotation angle mechanism of support of optical assembly - Google Patents
The synchronous rotation angle mechanism of support of optical assembly Download PDFInfo
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- CN103728244B CN103728244B CN201310471728.8A CN201310471728A CN103728244B CN 103728244 B CN103728244 B CN 103728244B CN 201310471728 A CN201310471728 A CN 201310471728A CN 103728244 B CN103728244 B CN 103728244B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 30
- 230000003287 optical effect Effects 0.000 title claims abstract description 16
- 230000001360 synchronised effect Effects 0.000 title claims abstract description 16
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 20
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 3
- 230000003993 interaction Effects 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 5
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- 238000004458 analytical method Methods 0.000 description 7
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- 238000006073 displacement reaction Methods 0.000 description 6
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- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000386 microscopy Methods 0.000 description 2
- 239000012472 biological sample Substances 0.000 description 1
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- 239000007791 liquid phase Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
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Abstract
A kind of synchronous rotation angle mechanism of support of optical assembly, feature is that its formation comprises pedestal, the first rhombus-mechanism, the second rhombus-mechanism, emissive source, receiver and driver module, the present invention is applicable to two groups of optical components and rotates around common axle synchronous backward, be a kind of have structure simple, debug conveniently and common axis of rotation axially without any the rotation angle mechanism of device.
Description
Technical field
The present invention relates to rotation angle mechanism, particularly a kind of synchronous rotation angle mechanism of support of optical assembly, be specially adapted to two groups of optical components rotate and the axial rotation angle mechanism without any device of its common axis of rotation around common axle synchronous backward, as the driving turntable of ellipsometer, X-ray diffractometer supports the support turntable etc. of turntable and Brewster angle microscopy.
Background technology
Along with the development of membrane science and technology, the demand of film analysis (liquid/solid phase surface film analysis, microstructure film analysis, ultrathin organic film analysis etc.) is got more and more, the various high-accuracy measurement and analysis instrument for film is come out one after another, as ellipsometer, Brewster angle microscopy, varied angle ultraviolet/far-infrared reflection spectra instrument, X-ray diffractometer etc.The ultimate principle of these equipment is all send light beam by emissive source, with different incident angles to tested face, received by detector after tested face reflection and analyze the characteristic information (e.g., thickness, reflectivity, refractive index etc.) obtaining tested face.Therefore need a mechanism to drive emissive source and receiver to rotate around the measured point of sample simultaneously.
A kind of rotation angle mechanism being applied to X-ray diffractometer is described at first technology [1] (US7852983B2).This rotation angle mechanism can realize emissive source and receiver rotates backward around common shaft, but this rotation angle mechanism is while driving emissive source and receiver, and measured point, also along with moving up and down, greatly reduces the stability of system like this.And there are screw mandrel and slide block in the axis of common rotation axis, therefore cannot measure large biological sample, limit the range of application of surveying instrument.
At first technology [2] (JP11014566A) with at first technology [3] (W02005015187A1), a kind of rotation angle mechanism is described respectively.When this rotation angle mechanism can ensure that sample is motionless, realize emissive source and receiver rotates backward around common shaft.But the axis of its common rotation axis has mechanical hook-up, also limit its range of application equally.
A kind of angular instrument is described at first technology [4] (DE10139645A1).When the driving mechanism of this angular instrument can ensure that sample is motionless, realize emissive source and receiver rotates backward around common shaft, and its common rotation axis axially without any device.But it is very high to the requirement of debuging precision and metering system this mechanism to be applied to high-precision turntable.
Summary of the invention
The object of the invention is for the above-mentioned deficiency in first technology, a kind of synchronous rotation angle mechanism of support of optical assembly is provided, this mechanism is applicable to two groups of optical components and rotates around common axle synchronous backward, have structure simple, debug conveniently and common axis of rotation axially without any the rotation angle mechanism of device.
Technical solution of the present invention is as follows:
A kind of synchronous rotation angle mechanism of support of optical assembly, feature is that its formation comprises pedestal, the first rhombus-mechanism, the second rhombus-mechanism, emissive source, receiver and driver module, and the first described rhombus-mechanism is made up of the first side link, the first input connecting rod, the second side link, the second input connecting rod, the second described rhombus-mechanism is by the first side link, first exports connecting rod, first arc shaped slider, second side link, second exports connecting rod, second arc shaped slider, arc track forms, one end of the first described side link and one end of the second side link are articulated with A point, this A point is the first rhombus-mechanism and the second rhombus-mechanism center of rotation, the other end of the first described side link and described first exports connecting rod one end and is articulated with C point, the other end and described second one end exporting connecting rod of the second described side link are articulated with CC point, one end that described first one end and described second inputting connecting rod inputs connecting rod is articulated with E point jointly by bearing pin and described web joint, the other end of described first input connecting rod is point articulated with the B of centre on the first side link, on the other end and second side link of described second input connecting rod, the BB of centre is point articulated, and B point is equal to the distance of A point with BB point to the distance of A point,
Described semicircle arc track is fixed on the one side of described pedestal, described first output connecting rod and described first slide block are articulated with D point, the second described output connecting rod and the second slide block are articulated with DD point, described emissive source, receiver are fixedly connected with the first arc shaped slider, the second arc shaped slider respectively, described emissive source, the optical axis of receiver are by the center of circle O point of described arc-shaped guide rail, and described center of circle O, A point, E point are all positioned on the ymmetry center plane of arc-shaped guide rail;
Described driver module is made up of web joint, line slideway, linear slider, screw mandrel, nut, bearing seat, shaft coupling, drive source and drive source support, described drive source is fixedly connected by drive source support and pedestal and is positioned at the top of described arc track, be connected with screw mandrel by shaft coupling, the bearing seat described in one is respectively equipped with at the two ends of screw mandrel, the centre of screw mandrel and nut screw connection, this nut is connected with linear slider by web joint, and the centre of this web joint and first inputs connecting rod and second and inputs rod hinge connection in E point;
Web joint described in screw mandrel motion described in described drive source drives drives is moved up and down relative to described pedestal along described line slideway by described linear slider, the first described rhombus-mechanism synchronously drives the first side link and the second side link point A on pedestal to rotate equal angular in opposite direction, under the first side link and first input the interaction of connecting rod, and under the second side link and second input the interaction of connecting rod, and synchronously drive the first arc shaped slider and the second arc shaped slider to rotate equal angular in opposite direction around arc track center of circle O point by described second rhombus-mechanism.
Described first side link is equal with the length of the second side link, and the length that the first input connecting rod and second inputs connecting rod is equal, and the length that the first output connecting rod and second exports connecting rod is equal.
Technique effect of the present invention is as follows:
By change the first input connecting rod, the second input connecting rod and the first side link, the second side link design length can realize the first arc shaped slider, the second arc shaped slider exports different rotating angle movement rules.
The present invention adopts and combines by simple parallel-crank mechanism, slider-crank mechanism the rhombus-mechanism realization formed, structure is simple, debugs conveniently, working stability, be convenient to realize high-precision steering angle instrument, have wide practical use to for large-sized bio-measurement instrument.
Accompanying drawing explanation
Fig. 1 is the front view of the synchronous rotation angle mechanism embodiment of support of optical assembly of the present invention.
Fig. 2 is Fig. 1 partial view.
Fig. 3 is the structural drawing of embodiment first rhombus-mechanism.
Fig. 4 is the structural drawing of embodiment second rhombus-mechanism.
Fig. 5 is the motion analysis diagram of slider-crank mechanism in embodiment.
Fig. 6 is synchronous rotation angle mechanism input resolution of the present invention and output corner graph of a relation.
Embodiment
First refer to Fig. 1, Fig. 1 is the front view of the synchronous rotation angle mechanism embodiment of support of optical assembly of the present invention, as seen from the figure, the synchronous rotation angle mechanism of support of optical assembly of the present invention, is made up of pedestal 1, first rhombus-mechanism, the second rhombus-mechanism, emissive source 9, receiver 10 and driver module.The first described rhombus-mechanism inputs connecting rod 6, second side link 22, second input connecting rod 66 by the first side link 2, first and forms, as shown in Figure 2; Second rhombus-mechanism exports connecting rod 3, first arc shaped slider 4, second side link 22, second output connecting rod 33, second arc shaped slider 44 primarily of the first side link 2, first, arc track 5 forms, as shown in Figure 3; Driver module is primarily of web joint 7, and line slideway 8, linear slider 11, screw mandrel 12, nut 17, bearing seat 13, shaft coupling 14, drive source 15 and drive source support 16 form.The center of rotation of described first rhombus-mechanism, the second rhombus-mechanism coincides with the A point on pedestal 1, and is positioned in Center Symmetry Plane.On one end and first side link 2 of described first input connecting rod 6, B is point articulated, and described second to input BB on one end of connecting rod 66 and the second side link 22 point articulated, and B point is equal to the distance of A point with BB point to the distance of A point.Thus realize being connected of described first rhombus-mechanism and described second rhombus-mechanism.
Described arc track 5 is fixedly connected with described pedestal 1.One end of described first input connecting rod 6, one end of second input connecting rod 66 is all articulated with E point with web joint 7 by bearing pin 18 jointly, and E point is positioned in Center Symmetry Plane, the other end respectively with described first side link 2, second side link 22 is articulated with the first side link 2, B and BB point on second side link 22, described first side link 2, one end of second side link 22 is articulated with A point with pedestal 1 respectively, first side link 2, the other end of the second side link 22 and described first exports connecting rod 3, second exports connecting rod 33 is articulated with C and CC point respectively, described first exports connecting rod 3, second exports connecting rod 33 and described first slide block 3, second slide block 33 is articulated with D and DD point respectively.Described emissive source 9, receiver 10 are fixedly connected with the first arc shaped slider 4, second arc shaped slider 44 respectively.The center of circle O point of described arc-shaped guide rail is positioned in Center Symmetry Plane.
The described modular belt plate 7 that is dynamically connected moves up and down relative to pedestal 1, the first rhombus-mechanism described in cooperation synchronously drives the first side link 2 and the some A of the second side link 22 on pedestal to rotate equal angular in opposite direction, under the first side link 2 and first input the interaction of connecting rod 6, and under the second side link 22 and second input the interaction of connecting rod 66, and the first arc shaped slider 4 and the second arc shaped slider 44 is synchronously driven to rotate equal angular in opposite direction around arc track 5 center of circle O point by described second rhombus-mechanism.Therefore achieving moving up and down of web joint 7 has synchronously driven the emissive source 9 be fixed on the first arc shaped slider 4, second arc shaped slider 44 to rotate backward around the center of circle O point of arc-shaped guide rail with receptacle 10, and the center of circle O point of arc-shaped guide rail is axial without any mechanical hook-up.
In described synchronous rotation angle mechanism example, the motion analysis diagram of the first rhombus-mechanism as shown in Figure 5.Can expression formula be obtained according to the cosine law:
Wherein: a is that the bar of the first input connecting rod 6 is long, b is that the bar of the first side link 2 is long, δ is the angle of the first side link 2 and Center Symmetry Plane, and the bar length and second of the first input connecting rod 6 inputs the bar appearance etc. of connecting rod 66, the bar length of the first side link 2 and the bar appearance etc. of the second side link 22.
The first side link 2, second side link 22 can be obtained as follows relative to the relation of the straight-line displacement resolution ax y of pedestal 1 corner displacement δ and web joint 7 through deriving:
That is:
Because the second rhombus-mechanism is composed in parallel by symmetrical two parallel-crank mechanisms, namely the quadrilateral be made up of an A, some C, some D, some O, parallelogram is with the quadrilateral be made up of an A, some CC, some DD, some O, therefore the angular displacement of rotating at the center of circle O point around arc-shaped guide rail 5 of the first arc shaped slider 4, second arc shaped slider 44 is identical with the angular displacement of the first side link 2, second side link 22 respectively, is also δ.In sum, the relation of the straight-line displacement resolution ax y of the angular displacement δ that the first arc shaped slider 4, second arc shaped slider 44 rotates at the center of circle O point around arc-shaped guide rail 5 and web joint 7 is such as formula (2), work as a=b=100, Δ δ=0.006 °, is depicted as curve as shown in Figure 6 by software by Δ y and δ.
Claims (2)
1. the synchronous rotation angle mechanism of a support of optical assembly, be characterised in that its formation comprises pedestal (1), the first rhombus-mechanism, the second rhombus-mechanism, emissive source (9), receiver (10) and driver module, the first described rhombus-mechanism is made up of the first side link (2), the first input connecting rod (6), the second side link (22), the second input connecting rod (66), the second described rhombus-mechanism is by the first side link (2), first exports connecting rod (3), first arc shaped slider (4), second side link (22), second exports connecting rod (33), second arc shaped slider (44), arc track (5) forms, one end of described the first side link (2) and one end of the second side link (22) are articulated with A point, this A point is the first rhombus-mechanism and the second rhombus-mechanism center of rotation, the other end and described first of described the first side link (2) exports connecting rod (3) one end and is articulated with C point, one end that the other end and described second of described the second side link (22) exports connecting rod (33) is articulated with CC point, one end that described first one end and described second inputting connecting rod (6) inputs connecting rod (66) is articulated with E point jointly by bearing pin (18) and web joint (7), the other end and the upper middle B of the first side link (2) of the first described input connecting rod (6) are point articulated, the other end and the upper middle BB of the second side link (22) of described second input connecting rod (66) are point articulated, and B point is equal to the distance of A point with BB point to the distance of A point,
Semicircle arc track (5) is fixed on the one side of described pedestal (1), described first exports connecting rod (3) is articulated with D point with the first slide block (4), described second exports connecting rod (33) is articulated with DD point with the second slide block (44), described emissive source (9), receiver (10) respectively with the first arc shaped slider (4), second arc shaped slider (44) is fixedly connected, described emissive source (9), the optical axis of receiver (10) passes through the center of circle O point of described arc-shaped guide rail, described center of circle O, A point, E point is positioned on the ymmetry center plane of arc-shaped guide rail (5),
Described driver module is by web joint (7), line slideway (8), linear slider (11), screw mandrel (12), nut (17), bearing seat (13), shaft coupling (14), drive source (15) and drive source support (16) composition, described drive source (15) is fixedly connected by drive source support (16) and pedestal (1) and is positioned at the top of described arc track (5), be connected with screw mandrel (12) by shaft coupling (14), the bearing seat (13) described in one is respectively equipped with at the two ends of screw mandrel (12), the centre of screw mandrel (12) coordinates with nut (17), this nut (17) is connected with linear slider (11) by web joint (7), the centre of this web joint (7) and first inputs connecting rod (2) and second and inputs connecting rod (22) and be articulated with E point,
Web joint (7) described in screw mandrel (12) motion described in described drive source (15) drives drives is moved up and down relative to described pedestal (1) along described line slideway (8) by described linear slider (11), the first described rhombus-mechanism synchronously drives the first side link (2) and the some A of the second side link (22) on pedestal to rotate equal angular in opposite direction, under the first side link (2) and first inputs the interaction of connecting rod (6), and under the second side link (22) and second inputs the interaction of connecting rod (66), and synchronously drive the first arc shaped slider (4) and the second arc shaped slider (44) to rotate equal angular in opposite direction around arc track (5) center of circle O point by described second rhombus-mechanism.
2. the synchronous rotation angle mechanism of support of optical assembly according to claim 1, it is characterized in that described first side link is equal with the length of the second side link, the length that first input connecting rod and second inputs connecting rod is equal, and the length that the first output connecting rod and second exports connecting rod is equal.
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| CN201310471728.8A CN103728244B (en) | 2013-10-11 | 2013-10-11 | The synchronous rotation angle mechanism of support of optical assembly |
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| CN109187436A (en) * | 2018-07-03 | 2019-01-11 | 长春理工大学 | Airborne Wake Bubble polarization characteristic back scattering test macro |
| CN112894295B (en) * | 2020-12-25 | 2022-10-14 | 中国科学院国家天文台南京天文光学技术研究所 | High-precision self-learning segmented circular arc guide rail common circle splicing device |
| CN116592802A (en) * | 2023-05-17 | 2023-08-15 | 丹东奥龙射线仪器集团有限公司 | Power transmission and angle measurement device of X-ray diffraction angle measurement instrument and angle control method thereof |
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| US4426725A (en) * | 1979-08-20 | 1984-01-17 | Grady John K | Biplanar variable angle X-ray examining apparatus |
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| TW368682B (en) * | 1996-07-05 | 1999-09-01 | Canon Kk | Exposure apparatus |
| CN1229913A (en) * | 1998-03-04 | 1999-09-29 | 西门子公司 | Method and apparatus for evaluating internal film stress at high lateral resolution |
| CN1377460A (en) * | 1999-09-29 | 2002-10-30 | 拉姆研究公司 | Method and apparatus for characterization of microelectronic feature quality |
| WO2005015187A1 (en) * | 2003-08-08 | 2005-02-17 | Optical Metrology Patents Limited | An inspection system support mechanism |
| CN2898816Y (en) * | 2005-07-26 | 2007-05-09 | 王宗凯 | Measuring system of optical parameter by spatial angle distribution |
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2013
- 2013-10-11 CN CN201310471728.8A patent/CN103728244B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4426725A (en) * | 1979-08-20 | 1984-01-17 | Grady John K | Biplanar variable angle X-ray examining apparatus |
| TW368682B (en) * | 1996-07-05 | 1999-09-01 | Canon Kk | Exposure apparatus |
| JPH1114566A (en) * | 1997-06-23 | 1999-01-22 | Rigaku Corp | X-ray apparatus for x-ray diffraction measurement and for fluorescent x-ray measurement |
| CN1229913A (en) * | 1998-03-04 | 1999-09-29 | 西门子公司 | Method and apparatus for evaluating internal film stress at high lateral resolution |
| CN1377460A (en) * | 1999-09-29 | 2002-10-30 | 拉姆研究公司 | Method and apparatus for characterization of microelectronic feature quality |
| WO2005015187A1 (en) * | 2003-08-08 | 2005-02-17 | Optical Metrology Patents Limited | An inspection system support mechanism |
| CN2898816Y (en) * | 2005-07-26 | 2007-05-09 | 王宗凯 | Measuring system of optical parameter by spatial angle distribution |
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