CN103725390A - 一种硅片线切割用水基切削液及其制备方法 - Google Patents
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Abstract
一种硅片线切割用水基切削液，由下列重量份的原料制成：环烷酸钠2-3、壬基酚聚氧乙烯醚2-3、油酸二乙醇胺1-2、脂肪酸甘油酯4-5、月桂醇硫酸钠1-2、矿物油15-18、石油磺酸钠2-3、油酸1-2、助剂6-8、水200；本发明切削液的表面张力低，极大提高切削液对磨料的润湿性，提高了磨料的分散性，避免磨料团聚结成块对硅片带来损坏；冷却和润滑性能好，加工精度高，有利于提高硅片切割的成品率，使硅片切割成品率达到98%，而且切割线使用寿命长；对硅片无腐蚀且可在硅片表面形成保护膜，使硅片更容易被清洗。
Description
技术领域
本发明涉及切削液领域，尤其涉及一种硅片线切割用水基切削液及其制备方法。
背景技术
切削液应具备良好的冷却性能、润滑性能、防锈性能、除油清洗功能、防腐功能、易稀释特点。目前切削液可分为两类，油溶性切削液和水溶性切削液。一般油溶性切削液润滑性能好，但冷却性能差，且含有大量有机物，污染环境。一些水溶性切削液虽然冷却性能好，又存在润滑性和防锈效果差的问题，因此研发兼具润滑性、冷却性、防锈性、易清洗、无毒、无味、对人体无侵蚀、对设备不腐蚀、对环境不污染的切削液就显得很重要。
发明内容
本发明的目的在于提供一种硅片线切割用水基切削液及其制备方法，该切削液润滑性好，表面张力低、提高硅片成品率。
本发明的技术方案如下：
一种硅片线切割用水基切削液，其特征在于由下列重量份的原料制成：环烷酸钠2-3、壬基酚聚氧乙烯醚2-3、油酸二乙醇胺1-2、脂肪酸甘油酯4-5、月桂醇硫酸钠1-2、矿物油15-18、石油磺酸钠2-3、油酸1-2、助剂6-8、水200；所述的助剂由下列重量份的原料制成：聚氧乙烯山梨糖醇酐单油酸酯2-3、纳米氮化铝0.1-0.2、碳酸氢铵2-3、乙醇胺1-2、羧甲基壳聚糖2-3、二乙二醇丁醚1-2、丙二醇5-8、桃胶2-3、硅酸钠1-2、尿素3-4、过硫酸铵1-2、水20-24；制备方法是将过硫酸铵溶于水后，再加入其它剩余物料，搅拌10-15分钟，加热至70-80℃，搅拌反应1-2小时，即得。
所述硅片线切割用水基切削液的制备方法，其特征在于包括以下步骤：将水、环烷酸钠、壬基酚聚氧乙烯醚、月桂醇硫酸钠、石油磺酸钠混合，加热至40-50℃；加入脂肪酸甘油酯、矿物油、油酸、助剂，在1000-1200转/分搅拌下继续加热到70-80℃，搅拌10-15分钟；加入其他剩余成分，继续搅拌15-20分钟，即得。
本发明的有益效果
本发明切削液的表面张力低,极大提高切削液对磨料的润湿性,提高了磨料的分散性,避免磨料团聚结成块对硅片带来损坏；冷却和润滑性能好，加工精度高，有利于提高硅片切割的成品率,使硅片切割成品率达到98%，而且切割线使用寿命长；对硅片无腐蚀且可在硅片表面形成保护膜,使硅片更容易被清洗。
具体实施方式
一种硅片线切割用水基切削液，由下列重量份（公斤）的原料制成：环烷酸钠2.5、壬基酚聚氧乙烯醚2.5、油酸二乙醇胺1.5、脂肪酸甘油酯4.5、月桂醇硫酸钠1.5、矿物油16、石油磺酸钠2.5、油酸1.5、助剂7、水200；所述的助剂由下列重量份（公斤）的原料制成：聚氧乙烯山梨糖醇酐单油酸酯3、纳米氮化铝0.1、碳酸氢铵3、乙醇胺1、羧甲基壳聚糖2、二乙二醇丁醚1、丙二醇8、桃胶3、硅酸钠1、尿素4、过硫酸铵2、水20；制备方法是将过硫酸铵溶于水后，再加入其它剩余物料，搅拌10-15分钟，加热至70-80℃，搅拌反应1-2小时，即得。
所述硅片线切割用水基切削液的制备方法，包括以下步骤：将水、环烷酸钠、壬基酚聚氧乙烯醚、月桂醇硫酸钠、石油磺酸钠混合，加热至45℃；加入脂肪酸甘油酯、矿物油、油酸、助剂，在1100转/分搅拌下继续加热到75℃，搅拌13分钟；加入其他剩余成分，继续搅拌18分钟，即得。
该实施例得到的硅片线切割用水基切削液试验数据如下：
Claims (2)
1.一种硅片线切割用水基切削液，其特征在于由下列重量份的原料制成：环烷酸钠2-3、壬基酚聚氧乙烯醚2-3、油酸二乙醇胺1-2、脂肪酸甘油酯4-5、月桂醇硫酸钠1-2、矿物油15-18、石油磺酸钠2-3、油酸1-2、助剂6-8、水200；所述的助剂由下列重量份的原料制成：聚氧乙烯山梨糖醇酐单油酸酯2-3、纳米氮化铝0.1-0.2、碳酸氢铵2-3、乙醇胺1-2、羧甲基壳聚糖2-3、二乙二醇丁醚1-2、丙二醇5-8、桃胶2-3、硅酸钠1-2、尿素3-4、过硫酸铵1-2、水20-24；制备方法是将过硫酸铵溶于水后，再加入其它剩余物料，搅拌10-15分钟，加热至70-80℃，搅拌反应1-2小时，即得。
2.根据权利要求1所述硅片线切割用水基切削液的制备方法，其特征在于包括以下步骤：将水、环烷酸钠、壬基酚聚氧乙烯醚、月桂醇硫酸钠、石油磺酸钠混合，加热至40-50℃；加入脂肪酸甘油酯、矿物油、油酸、助剂，在1000-1200转/分搅拌下继续加热到70-80℃，搅拌10-15分钟；加入其他剩余成分，继续搅拌15-20分钟，即得。
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| CN108300557A (zh) * | 2018-03-26 | 2018-07-20 | 深逸通自动化科技（江苏）有限公司 | 一种用于切割硅晶片的金刚线切割液 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7435707B2 (en) * | 2002-05-23 | 2008-10-14 | The Lubrizol Corporation | Oil-in-water emulsions and a method of producing |
| CN102618374A (zh) * | 2012-03-07 | 2012-08-01 | 东莞市安美润滑科技有限公司 | 硬脆性晶体材料切片加工的水基切削液及其制备方法 |
| CN102807911A (zh) * | 2012-08-01 | 2012-12-05 | 魏聪敏 | 一种环保型多功能水基金属切削液及其生产工艺 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7435707B2 (en) * | 2002-05-23 | 2008-10-14 | The Lubrizol Corporation | Oil-in-water emulsions and a method of producing |
| CN102618374A (zh) * | 2012-03-07 | 2012-08-01 | 东莞市安美润滑科技有限公司 | 硬脆性晶体材料切片加工的水基切削液及其制备方法 |
| CN102807911A (zh) * | 2012-08-01 | 2012-12-05 | 魏聪敏 | 一种环保型多功能水基金属切削液及其生产工艺 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108300557A (zh) * | 2018-03-26 | 2018-07-20 | 深逸通自动化科技（江苏）有限公司 | 一种用于切割硅晶片的金刚线切割液 |
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Address after: Concentrated area of Taibai town 243181 Anhui city of Ma'anshan province Dangtu County Industrial Patentee after: DANTU JINLONG MACHINERY CO.,LTD. Address before: Concentrated area of Taibai town 243181 Anhui city of Ma'anshan province Dangtu County Industrial Patentee before: Dangtu Jinlong Machinery Factory |
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Address after: 243181 industrial concentration zone, Taibai Town, Dangtu County, Ma'anshan City, Anhui Province Patentee after: Dangtu jinlongfeng Technology Co.,Ltd. Address before: 243181 industrial concentration zone, Taibai Town, Dangtu County, Ma'anshan City, Anhui Province Patentee before: DANTU JINLONG MACHINERY CO.,LTD. |
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Denomination of invention: A kind of silicon wafer wire cutting water-based cutting fluid and preparation method thereof Effective date of registration: 20220825 Granted publication date: 20160323 Pledgee: Anhui Ma'anshan Rural Commercial Bank Co.,Ltd. Pledgor: Dangtu jinlongfeng Technology Co.,Ltd. Registration number: Y2022980013560 |
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Date of cancellation: 20220905 Granted publication date: 20160323 Pledgee: Anhui Ma'anshan Rural Commercial Bank Co.,Ltd. Pledgor: Dangtu jinlongfeng Technology Co.,Ltd. Registration number: Y2022980013560 |
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Denomination of invention: A water-based cutting fluid for silicon wafer wire cutting and its preparation method Effective date of registration: 20221118 Granted publication date: 20160323 Pledgee: Jiangsu Jiangyin Rural Commercial Bank branch Dangtu Limited by Share Ltd. Pledgor: Dangtu jinlongfeng Technology Co.,Ltd. Registration number: Y2022980022495 |
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