CN103722465A - 一种生物芯片用玻璃基片表面浴法抛光设备 - Google Patents
一种生物芯片用玻璃基片表面浴法抛光设备 Download PDFInfo
- Publication number
- CN103722465A CN103722465A CN201410025721.8A CN201410025721A CN103722465A CN 103722465 A CN103722465 A CN 103722465A CN 201410025721 A CN201410025721 A CN 201410025721A CN 103722465 A CN103722465 A CN 103722465A
- Authority
- CN
- China
- Prior art keywords
- substrate surface
- glass substrate
- basin
- rotating mechanism
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
- B24B7/242—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410025721.8A CN103722465B (zh) | 2014-01-21 | 2014-01-21 | 一种生物芯片用玻璃基片表面浴法抛光设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410025721.8A CN103722465B (zh) | 2014-01-21 | 2014-01-21 | 一种生物芯片用玻璃基片表面浴法抛光设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103722465A true CN103722465A (zh) | 2014-04-16 |
CN103722465B CN103722465B (zh) | 2017-01-18 |
Family
ID=50446887
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410025721.8A Active CN103722465B (zh) | 2014-01-21 | 2014-01-21 | 一种生物芯片用玻璃基片表面浴法抛光设备 |
Country Status (1)
Country | Link |
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CN (1) | CN103722465B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104400587A (zh) * | 2014-10-16 | 2015-03-11 | 中山市吉尔科研技术服务有限公司 | 一种旋流式光学镜片抛光设备 |
CN113601397A (zh) * | 2021-10-08 | 2021-11-05 | 常州市名流干燥设备有限公司 | 一种半导体晶圆干燥用打磨膏输送装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004358591A (ja) * | 2003-06-03 | 2004-12-24 | Seiko Epson Corp | 研磨工具及び研磨方法 |
JP2006116678A (ja) * | 2004-10-25 | 2006-05-11 | Olympus Corp | 研磨方法及び装置 |
CN102120314A (zh) * | 2010-12-09 | 2011-07-13 | 中国科学院光电技术研究所 | 全淹没射流抛光装置及方法 |
CN102328259A (zh) * | 2011-10-26 | 2012-01-25 | 中国科学院光电技术研究所 | 光学元件超光滑表面的抛光装置 |
CN202507156U (zh) * | 2011-11-21 | 2012-10-31 | 南通瑞尔实业有限公司 | 一种大型抛光机 |
CN203751884U (zh) * | 2014-01-21 | 2014-08-06 | 南通天盛新能源科技有限公司 | 一种生物芯片用玻璃基片表面浴法抛光设备 |
-
2014
- 2014-01-21 CN CN201410025721.8A patent/CN103722465B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004358591A (ja) * | 2003-06-03 | 2004-12-24 | Seiko Epson Corp | 研磨工具及び研磨方法 |
JP2006116678A (ja) * | 2004-10-25 | 2006-05-11 | Olympus Corp | 研磨方法及び装置 |
CN102120314A (zh) * | 2010-12-09 | 2011-07-13 | 中国科学院光电技术研究所 | 全淹没射流抛光装置及方法 |
CN102328259A (zh) * | 2011-10-26 | 2012-01-25 | 中国科学院光电技术研究所 | 光学元件超光滑表面的抛光装置 |
CN202507156U (zh) * | 2011-11-21 | 2012-10-31 | 南通瑞尔实业有限公司 | 一种大型抛光机 |
CN203751884U (zh) * | 2014-01-21 | 2014-08-06 | 南通天盛新能源科技有限公司 | 一种生物芯片用玻璃基片表面浴法抛光设备 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104400587A (zh) * | 2014-10-16 | 2015-03-11 | 中山市吉尔科研技术服务有限公司 | 一种旋流式光学镜片抛光设备 |
CN113601397A (zh) * | 2021-10-08 | 2021-11-05 | 常州市名流干燥设备有限公司 | 一种半导体晶圆干燥用打磨膏输送装置 |
CN113601397B (zh) * | 2021-10-08 | 2022-02-15 | 常州市名流干燥设备有限公司 | 一种半导体晶圆干燥用打磨膏输送装置 |
Also Published As
Publication number | Publication date |
---|---|
CN103722465B (zh) | 2017-01-18 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Effective date of registration: 20151109 Address after: 226000 Huaxing Road 2, Nantong Development Zone, Jiangsu, Nantong Applicant after: NANTONG TIANSHENG NEW ENERGY TECHNOLOGY Co.,Ltd. Address before: 226009 Jiangsu Province Economic and Technological Development Zone, Nantong City Hongxing Road No. 96 Applicant before: T-SUN TECHNOLOGICAL Co.,Ltd. |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 226000 Huaxing Road 2, Nantong Development Zone, Jiangsu, Nantong Patentee after: NANTONG MEVID EXPERIMENTAL EQUIPMENT CO.,LTD. Address before: 226000 Huaxing Road 2, Nantong Development Zone, Jiangsu, Nantong Patentee before: NANTONG TIANSHENG NEW ENERGY TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20221220 Address after: 259 beigaoxin Road, Tangzha Town, Chongchuan District, Nantong City, Jiangsu Province, 226000 Patentee after: Jiangsu Beisi Ante Bioengineering Co.,Ltd. Address before: 226000 No.2, Huaxing Road, Nantong Development Zone, Nantong City, Jiangsu Province Patentee before: NANTONG MEVID EXPERIMENTAL EQUIPMENT CO.,LTD. |