CN103721967B - A kind of self-cleaning grinding upper disc structure - Google Patents
A kind of self-cleaning grinding upper disc structure Download PDFInfo
- Publication number
- CN103721967B CN103721967B CN201310747969.0A CN201310747969A CN103721967B CN 103721967 B CN103721967 B CN 103721967B CN 201310747969 A CN201310747969 A CN 201310747969A CN 103721967 B CN103721967 B CN 103721967B
- Authority
- CN
- China
- Prior art keywords
- nozzle
- upper disc
- grinding upper
- grinding
- inlet pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
Abstract
The invention discloses a kind of self-cleaning grinding upper disc structure, comprise grinding upper disc, the grinding sand liquid guide groove on grinding upper disc is fixedly supported on by pillar, grinding upper disc lifts support and lifts support to lift the pulling apparatus of grinding upper disc by grinding upper disc, wherein, described lift support is fixed with water inlet pipe, described water inlet pipe is positioned at above grinding upper disc, described water inlet pipe one end is connected with water feed apparatus, described water inlet pipe is provided with multiple shower nozzle, described shower nozzle is provided with multiple nozzle, comprise central nozzle, interior side nozzle and outer nozzle, described central nozzle, interior side nozzle and outer nozzle are outwards uniformly distributed in " ten " font from center on the right side of shower nozzle, the present invention is after attrition process terminates, open water feed apparatus and can realize automatic cleaning, decrease the complicated processes of manual cleaning, substantially increase operating efficiency.
Description
Technical field
The present invention relates to a kind of self-cleaning grinding upper disc structure, belong to wafer grinding manufacture field.
Background technology
When crystal block is dispatched from the factory, its surface is all more coarse, needs to be undertaken grinding by grinder.For the grinder of wafer grinding processing, in process, generally separately grinding upper disc is not cleaned, and we know, after attrition process terminates, can with grinding sand liquid and other impurity a little on grinding upper disc, the present cleaning to grinding upper disc is adopt the mode of manual cleaning to carry out mostly, and manual cleaning is wasted time and energy inefficiency.
Summary of the invention
Technical problem to be solved by this invention provides a kind of self-cleaning grinding upper disc structure for above drawback, after attrition process terminates, opens water feed apparatus and can realize automatic cleaning, decrease the complicated processes of manual cleaning, substantially increase operating efficiency.
For solving the problems of the technologies described above, technical scheme of the present invention is:
A kind of self-cleaning grinding upper disc structure, comprise grinding upper disc, the grinding sand liquid guide groove on grinding upper disc is fixedly supported on by pillar, grinding upper disc lifts support and lifts support to lift the pulling apparatus of grinding upper disc by grinding upper disc, wherein, described lift support is fixed with water inlet pipe, described water inlet pipe is positioned at above grinding upper disc, described water inlet pipe one end is connected with water feed apparatus, described water inlet pipe is provided with multiple shower nozzle, described shower nozzle is provided with multiple nozzle, comprise central nozzle, interior side nozzle and outer nozzle, described central nozzle, interior side nozzle and outer nozzle are outwards uniformly distributed in " ten " font from center on the right side of shower nozzle, described central nozzle and shower nozzle angle α are 90 degree, described interior side nozzle and shower nozzle angle β are 60 degree, described outer nozzle and shower nozzle angle γ are 30 degree.
A kind of self-cleaning grinding upper disc structure, wherein, the quantity of described shower nozzle is 3.
A kind of self-cleaning grinding upper disc structure, wherein, the quantity of described nozzle is 9.
Method of work: after attrition process terminates, open water feed apparatus, water flows into water inlet pipe by water feed apparatus, and the water in water inlet pipe is sprayed by nozzle through shower nozzle, the grinding upper disc being sprayed onto below according to the nozzle of different angles cleans, and closes water feed apparatus until clean up.
Beneficial effect;
1, after attrition process terminates, open water feed apparatus and can realize automatic cleaning, decrease the complicated processes of manual cleaning, substantially increase operating efficiency.
2, the grinding upper disc of nozzle to below according to different angles sprays, and realizes multi-angle cleaning, greatly improves cleaning performance.
Accompanying drawing explanation
Fig. 1 is schematic diagram of the present invention.
Fig. 2 is shower nozzle schematic diagram of the present invention.
Fig. 3 is nozzle distribution schematic diagram of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described.
Embodiment
As shown in the figure, a kind of self-cleaning grinding upper disc structure, comprise grinding upper disc 1, the grinding sand liquid guide groove 3 on grinding upper disc 1 is fixedly supported on by pillar 2, grinding upper disc lifts support 4 and lifts support to lift the pulling apparatus 5 of grinding upper disc by grinding upper disc, wherein, described lift support 4 is fixed with water inlet pipe 6, described water inlet pipe 6 is positioned at above grinding upper disc 1, described water inlet pipe 6 one end is connected with water feed apparatus 7, described water inlet pipe 6 is provided with multiple shower nozzle 8, described shower nozzle 8 is provided with multiple nozzle 9, comprise central nozzle 91, interior side nozzle 91 and outer nozzle 93, described central nozzle 91, interior side nozzle 92 and outer nozzle 93 are outwards uniformly distributed in " ten " font from center on the right side of shower nozzle 8, described central nozzle 91 is 90 degree with shower nozzle 8 angle α, described interior side nozzle 92 is 60 degree with shower nozzle 8 angle β, described outer nozzle 93 is 30 degree with shower nozzle 8 angle γ.The quantity of described shower nozzle 8 is 3.The quantity of described nozzle 9 is 9.
Method of work: after attrition process terminates, open water feed apparatus 7, water flows into water inlet pipe 6 by water feed apparatus 7, water in water inlet pipe 6 is sprayed by nozzle 9 when shower nozzle 8, the grinding upper disc 1 being sprayed onto below according to the nozzle 9 of different angles cleans, and closes water feed apparatus 7 until clean up.
Beneficial effect; After attrition process terminates, open water feed apparatus and can realize automatic cleaning, decrease the complicated processes of manual cleaning, substantially increase operating efficiency.The grinding upper disc of nozzle to below according to different angles sprays, and realizes multi-angle cleaning, greatly improves cleaning performance.
The above; be only the present invention's preferably detailed description of the invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (1)
1. a self-cleaning grinding upper disc structure, comprise grinding upper disc, the grinding sand liquid guide groove on grinding upper disc is fixedly supported on by pillar, grinding upper disc lifts support and lifts support to lift the pulling apparatus of grinding upper disc by grinding upper disc, it is characterized in that, described lift support is fixed with water inlet pipe, described water inlet pipe is positioned at above grinding upper disc, described water inlet pipe one end is connected with water feed apparatus, described water inlet pipe is provided with multiple shower nozzle, described shower nozzle is provided with multiple nozzle, comprise central nozzle, interior side nozzle and outer nozzle, described central nozzle, interior side nozzle and outer nozzle are outwards uniformly distributed in " ten " font from center on the right side of shower nozzle, described central nozzle and shower nozzle angle α are 90 degree, described interior side nozzle and shower nozzle angle β are 60 degree, described outer nozzle and shower nozzle angle γ are 30 degree, the quantity of described shower nozzle is 3, the quantity of described nozzle is 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310747969.0A CN103721967B (en) | 2013-12-31 | 2013-12-31 | A kind of self-cleaning grinding upper disc structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310747969.0A CN103721967B (en) | 2013-12-31 | 2013-12-31 | A kind of self-cleaning grinding upper disc structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103721967A CN103721967A (en) | 2014-04-16 |
| CN103721967B true CN103721967B (en) | 2016-03-09 |
Family
ID=50446398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310747969.0A Expired - Fee Related CN103721967B (en) | 2013-12-31 | 2013-12-31 | A kind of self-cleaning grinding upper disc structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103721967B (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201493751U (en) * | 2009-09-11 | 2010-06-02 | 镇江市港南电子有限公司 | Improved grinding upper disc |
| CN201543457U (en) * | 2009-09-11 | 2010-08-11 | 镇江市港南电子有限公司 | Grinding machine |
| CN201559124U (en) * | 2009-10-13 | 2010-08-25 | 中芯国际集成电路制造(上海)有限公司 | Grinding head assembly cleaning device and chemical mechanical grinding device |
| CN102528643A (en) * | 2010-12-30 | 2012-07-04 | 中芯国际集成电路制造(上海)有限公司 | Chemical mechanical polishing equipment and polishing unit thereof |
| CN202655278U (en) * | 2012-05-29 | 2013-01-09 | 昆山锐捷五金制品有限公司 | Cleaning device of centerless grinding machine |
| CN203317219U (en) * | 2013-06-26 | 2013-12-04 | 中芯国际集成电路制造(北京)有限公司 | Finisher of grinding pad and grinding device |
| CN103447251A (en) * | 2013-08-14 | 2013-12-18 | 青岛田瑞牧业科技有限公司 | Production method of sterilizing cleaning equipment for cage floor |
| CN103476508A (en) * | 2011-02-21 | 2013-12-25 | 杜尔系统有限责任公司 | Nozzle head for applying an insulating material |
| CN103624023A (en) * | 2013-11-29 | 2014-03-12 | 重庆顺多利机车有限责任公司 | Aluminium casting locating cleaning device |
| CN203695496U (en) * | 2013-12-31 | 2014-07-09 | 镇江市港南电子有限公司 | Self-cleaning upper grinding disc structure |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20110056789A (en) * | 2009-11-23 | 2011-05-31 | 엠피아이 코포레이션 | Device and method for automatically cleaning a nozzle |
-
2013
- 2013-12-31 CN CN201310747969.0A patent/CN103721967B/en not_active Expired - Fee Related
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201493751U (en) * | 2009-09-11 | 2010-06-02 | 镇江市港南电子有限公司 | Improved grinding upper disc |
| CN201543457U (en) * | 2009-09-11 | 2010-08-11 | 镇江市港南电子有限公司 | Grinding machine |
| CN201559124U (en) * | 2009-10-13 | 2010-08-25 | 中芯国际集成电路制造(上海)有限公司 | Grinding head assembly cleaning device and chemical mechanical grinding device |
| CN102528643A (en) * | 2010-12-30 | 2012-07-04 | 中芯国际集成电路制造(上海)有限公司 | Chemical mechanical polishing equipment and polishing unit thereof |
| CN103476508A (en) * | 2011-02-21 | 2013-12-25 | 杜尔系统有限责任公司 | Nozzle head for applying an insulating material |
| CN202655278U (en) * | 2012-05-29 | 2013-01-09 | 昆山锐捷五金制品有限公司 | Cleaning device of centerless grinding machine |
| CN203317219U (en) * | 2013-06-26 | 2013-12-04 | 中芯国际集成电路制造(北京)有限公司 | Finisher of grinding pad and grinding device |
| CN103447251A (en) * | 2013-08-14 | 2013-12-18 | 青岛田瑞牧业科技有限公司 | Production method of sterilizing cleaning equipment for cage floor |
| CN103624023A (en) * | 2013-11-29 | 2014-03-12 | 重庆顺多利机车有限责任公司 | Aluminium casting locating cleaning device |
| CN203695496U (en) * | 2013-12-31 | 2014-07-09 | 镇江市港南电子有限公司 | Self-cleaning upper grinding disc structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103721967A (en) | 2014-04-16 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160225 Address after: On the south side of the 223600 Suqian city of Jiangsu province in Shuyang County risound Road on the eastern side of Cixi Road Patentee after: ZHENJIANG GANGNAN ELECTRONICS CO., LTD. Address before: 212132 Dongfang Road, Dagang mechanical and Electrical Industrial Park, Dagang District, Zhenjiang, Jiangsu Patentee before: Zhenjiang Gangnan Electric Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160309 Termination date: 20191231 |