CN103710681A - Testing apparatus and testing method for reaction source bottle - Google Patents

Testing apparatus and testing method for reaction source bottle Download PDF

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Publication number
CN103710681A
CN103710681A CN201410010548.4A CN201410010548A CN103710681A CN 103710681 A CN103710681 A CN 103710681A CN 201410010548 A CN201410010548 A CN 201410010548A CN 103710681 A CN103710681 A CN 103710681A
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bottle
test
source
liquid source
testing apparatus
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CN103710681B (en
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苏艳波
兰云峰
任鑫
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North China Science And Technology Group Ltd By Share Ltd
Beijing Naura Microelectronics Equipment Co Ltd
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Beijing Sevenstar Electronics Co Ltd
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Abstract

The invention discloses a testing apparatus and a testing method for a reaction source bottle. The testing apparatus comprises a source bottle body, and a gas inlet pipe, a gas outlet pipe and a thermocouple, which are arranged on a bottle cap of the bottle body; the testing apparatus is characterized by also comprising a balance, the source bottle body is arranged on the balance, and one end of the gas inlet pipe stretches into the bottle body and the other end of the gas inlet pipe is connected with a gas supply device; one end of the gas outlet pipe is communicate with the bottle body and the other end of the gas outlet pipe is connected with a tail gas collecting device; a first pressure gauge and a liquid level sensor are arranged on the bottle cap, a second pressure gauge is arranged on the gas outlet pipe and a flowmeter is arranged on the gas inlet pipe; a valve is arranged on at least one of the gas inlet pipe and the gas outlet pipe. According to the testing apparatus and the testing method, the relations among gas inflowing quantity, liquid level height, solution temperature, pressure in bottle and liquid source carrying volume of the reaction source bottle under a room temperature condition can be accurately acquired through testing calculation, the testing device has a simple structure and is easy to operate, the testing method is accurate and reliable and is suitable for popularization in factories.

Description

A kind of testing apparatus for reaction source bottle and test method
Technical field
The present invention relates to a kind of reaction source bottle for atomic layer deposition apparatus, more specifically, relate to a kind of off-line type testing apparatus and test method for reaction source bottle.
Background technology
Technique for atomic layer deposition (Atomic Layer Deposition, ALD), is called as atomic layer epitaxy technology (Atomic Layer Epitaxy, ALE) the earliest, a kind of semiconductor film membrane preparation technology that Shi You Finland scholar Tuomo Suntola proposes.
The principal reaction method of technique for atomic layer deposition is: at a certain temperature, in the reaction chamber of atomic layer deposition apparatus, pass into the first pre-reaction material, precursor molecules is adsorbed on and on substrate surface, forms promoting agent; When the absorption of precursor reaches capacity state, remove the first precursor and by product; Then, pass into the second pre-reaction material, the second precursor be adsorbed on substrate surface promoting agent, be the first precursor generation chemical reaction, at substrate surface, generate the unimolecular layer of film to be prepared, and discharge the by product of gaseous state; Then, remove the second precursor and by product in reaction chamber, the like.Like this, by two or more gaseous state precursor is alternately injected to reaction chamber, at processed substrate surface, form and replace saturated surface reaction layer, thereby realize ald.Can be by selecting the growth cycle of different numbers, to prepare the film of different thickness.
The preparation of above-mentioned vapor reaction precursor, is in reaction process process, by pass into carrier gas (being generally nitrogen) in reaction source bottle, and carries reaction soln (being generally trimethyl aluminium or water) by carrier gas, periodically to passing into realization in reaction chamber.This is because the saturated vapor pressure in common liquid source (reaction soln) is lower, rely on the quantity of steam producing that self volatilizees can not meet technique needs, therefore, need to be by pass into carrier gas in reaction source bottle, rely on carrier gas to come transport fluid source, periodically in reaction chamber, provide pre-reaction material.
Therefore, in order scientifically to design and develop reaction source bottle, to accurately carry out measure control in reaction process process, effectively improve the carrying capacity of carrier gas, first need some the main technical details research experiment in reaction process process, comprise the relation between source bottle air input, liquid level, solution temperature, pressure of the inside of a bottle and the liquid source amount of carrying etc., to determine the reasonableness of design.
At present, the ordinary method of the designing technique parameter of existing definite source bottle realizes by on-line sampling, by in the actual procedure of reaction process, the parameters such as source bottle air input, liquid level, solution temperature, pressure of the inside of a bottle are sampled, then pass through series of computation, obtain the mutual relationship between these parameters and the liquid source amount of carrying.The defect of this method is the more difficult assurance of the precision of image data in the actual procedure of reaction process, and the accuracy of impact research Relationship between Parameters often needs the data gathering by repeatedly just can complete; And image data in the actual procedure of reaction process, also can bring certain impact to productive temp.
Summary of the invention
The object of the invention is to overcome the above-mentioned defect that prior art exists, providing a kind of can test by off-line, and can accurately gather reaction source bottle test device and the test method of required technical parameter, by designing a kind of simulation reaction technique actual procedure, the reaction source bottle test device with weighing structure, realization accurately gathers required technical parameter, can accurately calculate the relation between reaction source bottle air input, liquid level, solution temperature, pressure of the inside of a bottle and the liquid source amount of carrying under room temperature condition.
For achieving the above object, technical scheme of the present invention is as follows:
For a testing apparatus for reaction source bottle, comprise source bottle bottle, be arranged on inlet pipe, escape pipe, thermocouple on the bottle cap of bottle, it is characterized in that, also comprise a balance, described bottle is placed on balance; Described inlet pipe one end extend in bottle, and the other end connects air feeder; Described escape pipe one end is communicated with bottle, and the other end connects tail gas collecting device; The first tensimeter and liquid level sensor are housed on described bottle cap, the second tensimeter is housed on described escape pipe, described inlet pipe is equipped with under meter; Wherein, on described inlet pipe and escape pipe, have one at least valve is housed.
Further, the bottleneck of described bottle is flange shape, and described bottle cap is fixedly connected with the upper surface of described bottleneck flange.
Further, the upper surface of described bottleneck flange has annular seal groove, in described sealing groove, is provided with sealing-ring.
Further, described bottle cap is provided with two interfaces that are communicated with bottle, and described inlet pipe, thermocouple are connected with described interface by joint respectively.
Further, described inlet pipe one end extend in bottle, and the other end connects inlet mouth valve, under meter, air feeder successively.
Further, the air inlet pipeline section between inlet mouth valve and under meter is flexible pipe.
Further, described escape pipe one end is communicated with bottle, and the other end connects air outlet valve, tail gas collecting device successively.
Further, the pipeline section of giving vent to anger between air outlet valve and tail gas collecting device is flexible pipe, and the second tensimeter is housed on described flexible pipe.
Further, described inlet pipe one end extend in bottle, and the other end connects inlet mouth valve, under meter, air feeder successively, and the air inlet pipeline section between inlet mouth valve and under meter is flexible pipe; Described escape pipe one end is communicated with bottle, and the other end connects air outlet valve, tail gas collecting device successively; The pipeline section of giving vent to anger between air outlet valve and tail gas collecting device is flexible pipe, and the second tensimeter is housed on described flexible pipe.
Further, described escape pipe one end and bottle cap are welded to connect, and are communicated with bottle, and the other end is connected to tail gas collecting device, and the second tensimeter is housed.
The present invention also provides the test method of the above-mentioned testing apparatus for reaction source bottle simultaneously, it is characterized in that, comprises the following steps successively:
Step S01: first, test is filled in the bottle of reaction source bottle with liquid source, closes the valve on inlet pipe, escape pipe, use balance measurement is the quality of reaction source bottle on balance now;
Step S02: then, the valve of opening on inlet pipe, escape pipe starts test, simultaneously, with stopwatch, record test period, with thermocouple, measure the temperature in liquid source in bottle, and in process of the test the carrier gas flux of recording flowmeter, the escape pipe top hole pressure that the pressure in the reaction source bottle that the first tensimeter shows and the second tensimeter show;
Step S03: when the test period of setting arrives, close the valve on inlet pipe, escape pipe, use the now quality of reaction source bottle on balance of balance measurement, obtain before and after test the quality change value in liquid source in bottle;
Step S04: according to pressure, carrier gas flux, the test period in the quality change value in the liquid source measuring in above-mentioned steps, source bottle, by calculating, draw the amount of substance concentration formula in liquid source in mixing steam, thereby obtain the corresponding relation between pressure in the amount of substance concentration in liquid source in mixing steam and the quality change value in liquid source, source bottle, carrier gas flux, test period.
Further, in step S04, according to the quality change amount in liquid source in bottle, calculate the amount of substance difference in liquid source in process of the test; According to pressure, the test temperature in carrier gas flux, test period, source bottle, calculate the amount of substance of the mixing steam producing in process of the test; According to the amount of substance of the mixing steam producing in the amount of substance difference in liquid source in process of the test and test, calculate the amount of substance concentration in liquid source in mixing steam, can obtain the relation between reaction source bottle carrier gas charge flow rate and the liquid source amount of carrying.
Further, in step S01, test is filled in the bottle of reaction source bottle with liquid source, closes the valve on inlet pipe, escape pipe, and measure the height of liquid source in bottle; In step S03, when the test period of setting arrives, close the valve on inlet pipe, escape pipe, measure the height of residual solution source in bottle, obtain the height difference of liquid source, test front and back in bottle; In step S04, the height difference of liquid source in bottle, pressure, carrier gas flux, the test period in the bottle of source before and after the test that obtains, again according to the cross-sectional area of bottle, by calculating, draw the amount of substance concentration formula in liquid source in mixing steam, thereby obtain the amount of substance concentration in liquid source in mixing steam and the corresponding relation between carrier gas flux.
From technique scheme, can find out, the present invention is by a kind of simulation reaction technique actual procedure of design, the reaction source bottle test device with weighing structure, realization is carried out off-line to required critical technical parameter and is accurately gathered, can accurately calculate the relation between reaction source bottle air input, liquid level, solution temperature, pressure of the inside of a bottle and the liquid source amount of carrying under room temperature condition, there is testing apparatus easy to operate, the test method simple in structure feature such as accurately and reliably, avoided online detection to the disadvantageous effect of producing, applicable factory promotes the use of.
Accompanying drawing explanation
Fig. 1 is the contour structures schematic diagram of a kind of testing apparatus for reaction source bottle of the present invention;
Fig. 2 is the structure sectional view of a kind of testing apparatus for reaction source bottle of the present invention.
1. balances in figure, 2. bottle, 3. bottle cap, 4. the first tensimeter, 5. the second escape pipe flexible tube section, 6. the second inlet pipe flexible tube section, 7. the 3rd air inlet pipeline section, 8. under meter, 9. thermocouple, 10. thermocouple joint, 11. first air inlet pipeline sections, 12. sealing-rings, 13. air outlet valves, 14. second tensimeters, 15. inlet mouth valves, 16. first pipeline sections of giving vent to anger, 17. bolts, 18. inlet pipe joints, 19. liquid level sensors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
Embodiment mono-
In the present embodiment, first introduce the concrete structure of testing apparatus of the present invention.Refer to Fig. 1, Fig. 1 is the contour structures schematic diagram of a kind of testing apparatus for reaction source bottle of the present invention.As shown in the figure, testing apparatus comprises a balance 1, and the bottle 2 of reaction source bottle lies in a horizontal plane on balance 1, and balance is for the variation of reaction source bottle quality before and after weighing test.The bottleneck of bottle 2 is flange shape, and bottle cap 3 is connected with flange bottleneck by bolt 17.Described bottle is transparent material, is convenient to Real Time Observation bubble situation and liquid level changing conditions in process of the test.Concrete material and the trade mark of described each parts of testing apparatus, select according to the character of the working temperature of testing apparatus, operating pressure, working medium and accuracy requirement.
Refer to Fig. 1, bottle cap is provided with the thermocouple interface that is communicated with bottle, and thermocouple 9 is connected with the interface of bottle cap by thermocouple joint 10, and the measuring junction of thermocouple 9 is inserted in the testing liquid in bottle, for measuring the temperature of testing liquid.Bottle cap is also provided with the inlet pipe interface that is communicated with bottle, and the first air inlet pipeline section 11 is connected with inlet pipe interface thread by inlet pipe joint 18, and is inserted in the testing liquid in bottle, for passing into carrier gas.The first tensimeter 4 is arranged on bottle cap 3, for detection of the pressure in bottle.Liquid level sensor 19 is arranged on bottle cap 3, and extend in the testing liquid of bottle 2, for measuring liquid level height.
Refer to Fig. 1, the other end of the first air inlet pipeline section 11 is connected with inlet mouth valve 15; Inlet port valve door is connected with the air outlet of under meter 8 by the second inlet pipe flexible tube section 6, and the inlet mouth of under meter is connected with air feeder (not shown) by the 3rd air inlet pipeline section 7.In process of the test, inlet mouth valve closes for controlling the logical of carrier gas; Under meter is for controlling and detect the flow of carrier gas.
Refer to Fig. 1, first pipeline section 16 of giving vent to anger is welded on bottle cap 3, the first pipeline section the other end of giving vent to anger is connected with air outlet valve 13, and air outlet valve is connected with tail gas collecting device (not shown) by the second escape pipe flexible tube section 5, and the second tensimeter 14 is arranged on the second escape pipe flexible tube section.In process of the test, air outlet valve carries the logical of testing liquid mixing steam and closes for controlling; The second tensimeter is for detection of the pressure in escape pipe.Described the second inlet pipe flexible tube section and the second escape pipe flexible tube section are flexible pipe, can avoid extraneous gravity factor to exert an influence to the mass measurement before and after test.Inlet mouth valve, air outlet valve are selected a use, can play control action kou.
Refer to Fig. 2, Fig. 2 is the structure sectional view of a kind of testing apparatus for reaction source bottle of the present invention.As shown in the figure, the upper surface of bottleneck flange has annular seal groove, and sealing-ring 12 is arranged in the sealing groove of bottle 2, when bottle cap is connected with flange bottleneck by bolt 17, can play good sealing effectiveness.
Below by specific examples, introduce the using method of testing apparatus of the present invention.
Before test, test is filled in bottle with testing liquid, closes inlet mouth valve and air outlet valve, measure the now quality of testing apparatus.Open inlet mouth valve and air outlet valve and start test, adopt stopwatch (not shown) to record test period simultaneously, and in process of the test, observe the air flow of under meter and the pressure in reaction source bottle.After test period arrives, close inlet mouth valve and air outlet valve, now quality change or the employing liquid level sensor measuring liquid level of testing apparatus change to adopt balance measurement.Calculate the relation between reaction source bottle air input and the liquid source amount of carrying.
Water using below as test testing liquid, introduce the method for calculation of the amount of substance concentration of water in mixing steam:
By the relation between quality and amount of substance, can obtain the amount of substance formula one of water:
n H 2 O = Δm 18
Wherein, Δ m is the quality change of water in bottle before and after the test recording by balance, or records liquid level change h according to liquid level sensor, according to formula Δ m=ρ * s * h, tries to achieve, and wherein ρ is liquid source density, and S is source bottle section area.
By the Ideal-Gas Equation, can obtain formula two:
n v = P v R × T × V v
Wherein, n vfor the amount of substance of the mixing steam that produces, P vfor mixing steam pressure, T is test temperature, and V is mixing steam volume, and R is perfect gas case constant.
By the relation between mixing steam flow and pressure, can obtain formula three:
Q v = Q N 2 × ( P v P HS - P v )
Wherein, Q vfor mixing steam flow, Q n2for carrier gas flux, P vfor the saturated vapour pressure in liquid source, P hSfor the bottle internal pressure recording by tensimeter.
Formula three is updated to formula two, can obtains formula four:
n v = P v R × T × Q N 2 × ( P v P HS - P v ) × t
Wherein, t is test period.
By formula one and formula four, the amount of substance concentration formula that can obtain water in mixing steam is:
C = n H 2 O n n 2 = Δm × R × T × ( P HS - P v ) 18 × P v 2 × Q N 2 × t
For example, before test, test water is filled in bottle, closes inlet mouth valve and air outlet valve, measuring the now quality of testing apparatus is 4359.0g.Open inlet mouth valve and air outlet valve, start test, adopt stopwatch (not shown) to record test period simultaneously, and the air flow of observing and adjust under meter in process of the test is 2L/min, and the pressure in reaction source bottle.After for some time, stop stopwatch and close inlet mouth valve and air outlet valve, the now stopwatch time of reading is 1400.5min, and measuring the now quality of testing apparatus is 4280.5g.The changing value that can try to achieve the amount of substance of source water in bottle according to formula one is:
n H 2 O = Δm 18 = 4359.0 - 4280.5 18 = 4.36 mol
Checking in the saturated vapor pressure of water in the time of 20 ℃ is 2338.8Pa, and by tensimeter, recording bottle internal pressure is 13332Pa, obtains mixing steam flow be according to the formula three ways of calculating:
Q v = Q N 2 × ( P v P HS - P v ) = 0.4255 L / min
The mixing steam volume that calculates duration of test is
V v=Q v×t=0.4255L/min×1400.5min=595.91L
The amount of substance that calculates duration of test mixing steam according to formula two is:
n v = P v R × T × V v = 572.41 mol
Wherein R is perfect gas case constant, 8.31; T is test temperature 293K.
So the amount of substance concentration of water is in mixing steam:
C = n H 2 O n n 2 = 0.762 %
By testing apparatus of the present invention and test method, can measure exactly the relation between reaction source bottle air input under room temperature condition, liquid level, solution temperature, pressure of the inside of a bottle and the liquid source amount of carrying.Therefore,, when reaction source bottle is designed and developed, can well determine the reasonableness of design.
Embodiment bis-
In the present embodiment, testing apparatus is identical with embodiment mono-, and test method adopts the liquid level by test water in the bottle of measurement source to change, and calculates and obtains required critical technical parameter.
Before experiment, test water is filled in bottle, closes inlet mouth valve and air outlet valve, measuring the now interior liquid level of source bottle is 152.3mm.Open inlet mouth valve and air outlet valve and start test, adopt stopwatch (not shown) to record test period simultaneously, and the air flow of observing and adjust under meter in process of the test is 2L/min, and the pressure in reaction source bottle.After for some time, stop stopwatch and close inlet mouth valve and air outlet valve, the now stopwatch time of reading is 1400.5min, and measuring the now interior liquid level of source bottle is 147.2mm.So trying to achieve the quality change of source water in bottle according to formula Δ m=ρ * s * h is 78.5g, wherein bottle internal diameter in source is 140mm.
The changing value that can try to achieve the amount of substance of source water in bottle according to formula one is:
n H 2 O = Δm 18 = 78.5 18 = 4.36 mol
Checking in the saturated vapor pressure of water in the time of 20 ℃ is 2338.8Pa, and by tensimeter, recording bottle internal pressure is 13332Pa, obtains mixing steam flow be according to the formula three ways of calculating:
Q v = Q N 2 × ( P v P HS - P v ) = 0.4255 L / min
The mixing steam volume that calculates duration of test is
V v=Q v×t=0.4255L/min×1400.5min=595.91L
The amount of substance that calculates duration of test mixing steam according to formula two is:
n v = P v R × T × V v = 572.41 mol
Wherein R is perfect gas case constant, 8.31; T is test temperature 293K.
So the amount of substance concentration of water is in mixing steam:
n H 2 O n n 2 = 0.762 %
By above-mentioned two embodiment, can find out, adopt the method for weighing or metering liquid level change, can accurately obtain required critical technical parameter, can select according to practical situation.
Above-described is only the preferred embodiments of the present invention; described embodiment is not in order to limit scope of patent protection of the present invention; therefore the equivalent structure that every utilization specification sheets of the present invention and accompanying drawing content are done changes, and in like manner all should be included in protection scope of the present invention.

Claims (13)

1. for a testing apparatus for reaction source bottle, comprise source bottle bottle, be arranged on inlet pipe, escape pipe, thermocouple on the bottle cap of bottle, it is characterized in that, also comprise a balance, described bottle is placed on balance; Described inlet pipe one end extend in bottle, and the other end connects air feeder; Described escape pipe one end is communicated with bottle, and the other end connects tail gas collecting device; The first tensimeter and liquid level sensor are housed on described bottle cap, the second tensimeter is housed on described escape pipe, in described inlet pipe, under meter is housed; Wherein, on described inlet pipe and escape pipe, have one at least valve is housed.
2. testing apparatus as claimed in claim 1, is characterized in that, the bottleneck of described bottle is flange shape, and described bottle cap is fixedly connected with the upper surface of described bottleneck flange.
3. testing apparatus as claimed in claim 2, is characterized in that, the upper surface of described bottleneck flange has annular seal groove, in described sealing groove, is provided with sealing-ring.
4. the testing apparatus as described in claim 1～3 any one, is characterized in that, described bottle cap is provided with two interfaces that are communicated with bottle, and described inlet pipe, thermocouple are connected with described interface by joint respectively.
5. testing apparatus as claimed in claim 1, is characterized in that, described inlet pipe one end extend in bottle, and the other end connects inlet mouth valve, under meter, air feeder successively.
6. testing apparatus as claimed in claim 5, is characterized in that, the air inlet pipeline section between inlet mouth valve and under meter is flexible pipe.
7. testing apparatus as claimed in claim 1, is characterized in that, described escape pipe one end is communicated with bottle, and the other end connects air outlet valve, tail gas collecting device successively.
8. testing apparatus as claimed in claim 7, is characterized in that, the pipeline section of giving vent to anger between air outlet valve and tail gas collecting device is flexible pipe, and the second tensimeter is housed on described flexible pipe.
9. testing apparatus as claimed in claim 1, is characterized in that, described inlet pipe one end extend in bottle, and the other end connects inlet mouth valve, under meter, air feeder successively, and the air inlet pipeline section between inlet mouth valve and under meter is flexible pipe; Described escape pipe one end is communicated with bottle, and the other end connects air outlet valve, tail gas collecting device successively; The pipeline section of giving vent to anger between air outlet valve and tail gas collecting device is flexible pipe, and the second tensimeter is housed on described flexible pipe.
10. testing apparatus as claimed in claim 1, is characterized in that, described escape pipe one end and bottle cap are welded to connect, and is communicated with bottle, and the other end is connected to tail gas collecting device, and the second tensimeter is housed.
The test method of 11. a kind of testing apparatuss for reaction source bottle as claimed in claim 1, is characterized in that, comprises the following steps successively:
Step S01: first, test is filled in the bottle of reaction source bottle with liquid source, closes the valve on inlet pipe, escape pipe, use balance measurement is the quality of reaction source bottle on balance now;
Step S02: then, the valve of opening on inlet pipe, escape pipe starts test, simultaneously, with stopwatch, record test period, with thermocouple, measure the temperature in liquid source in bottle, and in process of the test the carrier gas flux of recording flowmeter, the escape pipe top hole pressure that the pressure in the reaction source bottle that the first tensimeter shows and the second tensimeter show;
Step S03: when the test period of setting arrives, close the valve on inlet pipe, escape pipe, use the now quality of reaction source bottle on balance of balance measurement, obtain before and after test the quality change value in liquid source in bottle;
Step S04: according to pressure, carrier gas flux, the test period in the quality change value in the liquid source measuring in above-mentioned steps, source bottle, by calculating, draw the amount of substance concentration formula in liquid source in mixing steam, thereby obtain the corresponding relation between pressure in the amount of substance concentration in liquid source in mixing steam and the quality change value in liquid source, source bottle, carrier gas flux, test period.
12. test methods as claimed in claim 11, is characterized in that, in step S04, according to the quality change amount in liquid source in bottle, calculate the amount of substance difference in liquid source in process of the test; According to pressure, the test temperature in carrier gas flux, test period, source bottle, calculate the amount of substance of the mixing steam producing in process of the test; According to the amount of substance of the mixing steam producing in the amount of substance difference in liquid source in process of the test and test, calculate the amount of substance concentration in liquid source in mixing steam, can obtain the relation between reaction source bottle carrier gas charge flow rate and the liquid source amount of carrying.
13. test methods as claimed in claim 11, is characterized in that, in step S01, test are filled in the bottle of reaction source bottle with liquid source, close the valve on inlet pipe, escape pipe, and measure the height of liquid source in bottle; In step S03, when the test period of setting arrives, close the valve on inlet pipe, escape pipe, measure the height of residual solution source in bottle, obtain the height difference of liquid source, test front and back in bottle; In step S04, the height difference of liquid source in bottle, pressure, carrier gas flux, the test period in the bottle of source before and after the test that obtains, again according to the cross-sectional area of bottle, by calculating, draw the amount of substance concentration formula in liquid source in mixing steam, thereby obtain the amount of substance concentration in liquid source in mixing steam and the corresponding relation between carrier gas flux.
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CN106435517A (en) * 2016-12-11 2017-02-22 重庆工业职业技术学院 Device special for providing water vapor for vacuum coating machine and usage method thereof
CN109029635A (en) * 2017-06-12 2018-12-18 北京北方华创微电子装备有限公司 A kind of detection device and its detection method of Solid Source
CN112729620A (en) * 2020-12-30 2021-04-30 杭州堃博生物科技有限公司 Automatic steam energy monitoring devices of moisturizing
CN114911282A (en) * 2022-05-31 2022-08-16 北京北方华创微电子装备有限公司 Temperature control system and method for source bottle
CN115323360A (en) * 2022-10-17 2022-11-11 上海星原驰半导体有限公司 Precursor output system and precursor output method

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CN106435517A (en) * 2016-12-11 2017-02-22 重庆工业职业技术学院 Device special for providing water vapor for vacuum coating machine and usage method thereof
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CN112729620A (en) * 2020-12-30 2021-04-30 杭州堃博生物科技有限公司 Automatic steam energy monitoring devices of moisturizing
CN114911282A (en) * 2022-05-31 2022-08-16 北京北方华创微电子装备有限公司 Temperature control system and method for source bottle
CN115323360A (en) * 2022-10-17 2022-11-11 上海星原驰半导体有限公司 Precursor output system and precursor output method

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