CN109029635A - A kind of detection device and its detection method of Solid Source - Google Patents
A kind of detection device and its detection method of Solid Source Download PDFInfo
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- CN109029635A CN109029635A CN201710449660.1A CN201710449660A CN109029635A CN 109029635 A CN109029635 A CN 109029635A CN 201710449660 A CN201710449660 A CN 201710449660A CN 109029635 A CN109029635 A CN 109029635A
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
- G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
- G01F23/296—Acoustic waves
- G01F23/2962—Measuring transit time of reflected waves
Abstract
The invention discloses a kind of detection device of Solid Source and its detection methods, for the real-time surplus in detection source bottle internal solid source, detection device includes one or more ultrasonic sensor, is set to source top of bottle, for emitting ultrasonic wave to source bottle lower inside, and receive the ultrasonic wave of reflection；Computing unit calculates ultrasonic measurement distance, and be scaled the height in source bottle internal solid source, and then calculate the real-time surplus in source bottle internal solid source for starting to emit and start the temperature of saturated vapor in time difference and source bottle between reception according to ultrasonic wave.The present invention improves the accuracy of detection by the method for supersonic sounding, can precisely detect the surplus of Solid Source, can also reduce the influence of process contamination bring.
Description
Technical field
The present invention relates to a kind of reaction source bottles applied to atomic layer deposition, are directed to reaction source more particularly, to one kind
The detection device and its detection method of Solid Source in bottle.
Background technique
Currently, film deposition reaction system and method are widely used in the equipment of multiple fields, such as: semiconductor is integrated
Circuit, solar panel, flat-panel screens, microelectronics, light emitting diode etc..Wherein, chemical vapor deposition is utilized
It is to carry out that (Chemical Vapour Deposition, CVD) technology, which forms 10 μm or film less than 10 μm in substrate surface,
A kind of common method of film deposition.Most CVD technologies, which generally requires, provides multiple gases or vapor deposition generation film, with
Just desired performance and chemical component are obtained；Also, reaction gas is usually mixing first to be carried out in reaction chamber and certain
Under the conditions of occur required reaction.
And in other thin film deposition processes, for example, using atomic layer deposition (Atomic Layer Deposition,
ALD) in the membrane deposition method that technology carries out, it is desirable that a variety of reaction gas or steam in a manner of selecting one successively, continuously into
Enter reaction chamber, and cannot react to each other before entering the chamber.Since ALD technique has certain spy with producible
Property, extremely thin film the advantages of, therefore, in the application value that certain application places have CVD technology incomparable, and
To substitute CVD technology.
Either CVD reaction or ALD reaction, the preparation of vapor reaction predecessor, industry mainstream are by anti-
It answers and is passed through carrier gas (generally inert gas) in the bottle of source, and reaction source (including liquid source and Solid Source) is carried by carrier gas and is passed through instead
Answer realization in chamber.Wherein solid-state reaction predecessor, such as Tacl5, PDMAT (five (dimethylamino) tantalums (V)) etc. saturation steam
Vapour pressure is relatively low, in addition to increasing carrier gas and carrying, it is also necessary to increase heating function in outside to improve its saturated vapor pressure.And from
From the point of view of the physical property of Solid Source, form can not be compared with liquid source.Liquid source is due to its fluid behaviour, in gravity shadow
Under sound, a parallel liquid level is had always in the bottle of source, liquid level sensor can be used usually to monitor its surplus in real time in industry；And consolidate
State source is influenced in technical process by external factor such as temperature, pressure, it may appear that multifarious form.This property
Cause the real time monitoring of Solid Source surplus difficult.So in film deposition equipment, the surplus real time monitoring of Solid Source at
It is common in industry and be difficult to solve the problems, such as.
Referring to Fig. 1, Fig. 1 is existing a kind of using the structure of the detecting device for claiming dress mode to detect Solid Source surplus signal
Figure.As shown in Figure 1, the source bottle 5 for needing to claim dress Solid Source is generally placed upon on electronic scale 7, observes by the naked eye and shown on scale
Data come obtain source bottle in Solid Source 6 weight.Some factory automations can be by the communication interface 10 of electronic scale, solid-state
The weight in source is transmitted to host computer in real time, to obtain the real-time surplus of Solid Source.
Wherein, it is tied with heating tape 9 outside source bottle 5, increases the saturated vapor of Solid Source 6 will pass through the promotion of temperature
Pressure is passed through reaction chamber to realize Solid Source saturated vapor needed for technique and the mixed gas of carrier gas 8.Also, it is
It realizes that loss and bring the source bottle due to Solid Source float up and down, therefore is connected with corrugated flexible hose 1 at interface 2 as adjustment；
In technical process, in the state of imported valve 3 and the unlatching of outlet valve 4, with the loss of Solid Source, source bottle quality subtracts
Gently, it can gradually float upwards.
It is above-mentioned that the Solid Source used due to technique generally all only has tens grams of usage amounts for arriving several hectograms in the prior art,
And the weight of electronic scale measurement includes the weight of the devices such as source bottle, valve member, bellows, the precision of existing electronic scale is asked in addition
Topic, the loss of Solid Source can not accurately be measured by causing these combined factors to get up.Moreover, being located at source bottle upper end for adjusting
Bellows during long-term process, can have the particle of Solid Source between ripple, this can bring to subsequent technique can not
The particle issues estimated.
Summary of the invention
It is an object of the invention to overcome drawbacks described above of the existing technology, provide a kind of Solid Source detection device and
Its detection method can precisely detect the surplus of Solid Source by the method for supersonic sounding, and it is inaccurate can not only to solve existing measurement
The problem of, and existing use bellows can be reduced and lead to the problem of particle at the bottle of source, it ensure that the repeatability of technique, and drop
Low process contamination bring influences.
To achieve the above object, technical scheme is as follows:
A kind of detection device of Solid Source, for the real-time surplus in detection source bottle internal solid source, the source bottle is equipped with import
Pipeline and export pipeline, inlet ductwork are used into source bottle be passed through carrier gas, and export pipeline is carried for being passed through into reaction chamber
The saturated vapor generated by the Solid Source that gas carries, which is characterized in that the detection device includes:
One or more ultrasonic sensor is set to source top of bottle, for emitting ultrasonic wave to source bottle lower inside, and receives
The ultrasonic wave of reflection；
Computing unit is steamed for starting to emit and start saturation in time difference and source bottle between reception according to ultrasonic wave
The temperature of vapour calculates ultrasonic measurement distance, and is scaled the height in source bottle internal solid source, and then calculates source bottle internal solid source
Real-time surplus.
Preferably, the ultrasonic sensor is equipped with timer, starts transmitting for recording ultrasonic wave and starts to receive it
Between time difference, and export to computing unit.
Preferably, the timer has the precision for counting down to 1 μ s.
Preferably, the upper and lower surfaces of the source bottle and side wrap have heating unit.
Preferably, cooling unit is equipped with around the ultrasonic sensor.
Preferably, further include thermocouple, for measuring the temperature of saturated vapor in the bottle of source, and export to computing unit.
Preferably, the inlet ductwork and export pipeline are metal tubes, and smooth interior with handling through electrobrightening
Wall.
A kind of detection method of the detection device using above-mentioned Solid Source, comprising the following steps:
Inlet ductwork is opened, carrier gas is continually fed into source bottle, and open export pipeline, is constantly passed through into reaction chamber
The saturated vapor that the Solid Source carried by carrier gas generates；
When needing the surplus in detection source bottle internal solid source, ultrasonic sensor is opened, it is super to source bottle lower inside transmitting
Sound wave, and receive the ultrasonic wave of reflection；
Time difference and source bottle interior saturation that ultrasonic wave starts to emit and start between reception is acquired by computing unit to steam
The temperature of vapour calculates ultrasonic measurement distance, and is scaled the height in source bottle internal solid source, and then calculates source bottle internal solid source
Real-time surplus.
It preferably, further include that source bottle is first heated to set temperature before opening inlet ductwork；And including to ultrasound
Wave sensor is persistently cooled down.
Preferably, when the quantity of ultrasonic sensor is multiple, ultrasound is carried out by the height to source bottle internal solid source
Wave multi-point sampler, and be averaged by computing unit to multi-point sampler data, the average height in source bottle internal solid source is obtained, according to
This calculates the real-time surplus in source bottle internal solid source.
It can be seen from the above technical proposal that the invention has the following advantages that
1) surface that Solid Source is directly measured using ultrasonic wave, improves the accuracy of detection；
2) bottle surrounding in source is all heated, and ensure that the heating temperature of Solid Source and the stabilization of saturated vapour pressure；
3) whole channel interior whole electrobrightenings, reduce bellows bring particles effect, to reduce technique
Pollution；
4) design of cooling unit avoids influence of the high temperature to ultrasonic sensor, it is ensured that ultrasonic sensor
Using safe, and its service life is extended, reduces use cost.
Detailed description of the invention
Fig. 1 is existing a kind of using the structure of the detecting device schematic diagram for claiming dress mode to detect Solid Source surplus；
Fig. 2 is a kind of structure of the detecting device schematic diagram of Solid Source of a preferred embodiment of the present invention；
Fig. 3 is the ultrasonic sensor distributed architecture schematic diagram of a preferred embodiment of the present invention；
Fig. 4 is the source bottle structure schematic diagram with cooling unit of a preferred embodiment of the present invention；
1. corrugated flexible hose in figure, 2/28. interface, 3. imported valves, 4. outlet valves, 5/21. source bottle, 6/20. Solid Source,
7. electronic scale, the mixed gas of 8/32. Solid Source saturated vapor and carrier gas, 9. heating tapes, 10. communication interfaces, 22. ultrasonic waves pass
Sensor, 23. inlet ductwork valves, 24. host computers, 25. inlet ductworks, 26. thermocouples, 27. export pipelines, 29. export pipeline valves
Door, 30. cooling units, 31. top heaters, 33. side heaters, 34. bottom heaters, 35/36. cooling water inlet/outlet
Mouthful, 37/39/40. cooling unit communicating pipe, 38/41/43. cooling unit component, 42. cooling unit fixators.
Specific embodiment
Transmitter and receiver are typically provided in ultrasonic sensor.Ultrasonic transmitter emits ultrasound to a direction
Wave starts timing while emission time；Ultrasonic wave is propagated in gas, is encountered barrier on the way and just is returned to come immediately, surpasses
Acoustic receiver receives back wave and just stops timing immediately.If the aerial spread speed of ultrasonic wave is 340m/s, according to meter
When device record time t, so that it may calculate distance d of the launch point away from barrier, it may be assumed that d=340t/2.Here it is it is so-called when
Between poor telemetry.
The formula of ultrasonic distance measurement may be expressed as: L=v × T formula one
L is measurement distance in formula；V is spread speed of the ultrasonic wave in gas；T is the time difference (T for measuring propagation
For the half for being emitted to receiving time numerical value).
Since ultrasonic wave is easy to that directional transmissions, good directionality, intensity are easy to control, do not need directly to contact with object being measured
The advantages of, it is the promising approach as solid source elevation carrection.In technical process, Solid Source is generally used for tens grams to several
Hectogram.For guarantee Solid Source surface evaporation amount, according to the mass formula of Solid Source:
M=ρ × V=ρ × S × h formula two
Wherein V is solid-state volume source, and ρ is solid-state source density, and S is source bottle cross-sectional area, and h is height of the Solid Source in the bottle of source
Degree；
Under normal circumstances, need to reach millimetre-sized measurement accuracy in Solid Source elevation carrection, but the current country is super
Sound ranging specific integrated circuit is all the measurement accuracy of only Centimeter Level.The present invention is generated by analysis ultrasonic distance measurement error
The reason of, time of measuring difference is improved to Microsecond grade, millimetre-sized measurement accuracy can be reached.
Error analysis of measuring distance with ultrasonic:
According to ultrasonic distance measurement formula L=v × T, it is known that the error of ranging is the velocity-of-propagation errors and survey by ultrasonic wave
Caused by the time error for measuring propagation.
Time error analysis:
When requiring range error to be less than 1mm, it is assumed that known ultrasonic velocity v=344m/s (20 DEG C of room temperatures) is such as ignored
The propagated error of the velocity of sound, then time error s △ t < (0.001/344) the ≈ 0.000002907s, i.e. 2.907 μ propagated when ranging
s。
Therefore, under the premise of the spread speed of ultrasonic wave is accurately, as long as measuring the propagation time difference precision of distance
Reaching Microsecond grade, it is ensured that range error is less than the error of 1mm.So the timer that the present invention uses needs to count down to 1 μ
The precision of s.
Ultrasonic propagation velocity error analysis:
The spread speed of ultrasonic wave is influenced by the density of gas, and the spread speed of the more high then ultrasonic wave of the density of gas is just
It is faster, and the density in the bottle of source has close relationship with temperature.
The relationship of known ultrasonic velocity and temperature is as follows:
V=v0+0.607 × T DEG C of formula three
In formula: the acoustic speed (332m/s) when v0 is zero centigrade；
Actual temperature (DEG C) when T is test.
When requiring to reach 1mm for precision of ultrasonic ranging, the environment temperature that ultrasonic wave is propagated must just be taken into account.
Such as when 0 DEG C of temperature, ultrasonic velocity is 332m/s, and 30 DEG C of whens are 350m/s, and ultrasonic velocity caused by temperature change becomes
Turn to 18m/s.If ultrasonic wave is up to 0 DEG C of acoustic velocity measutement 100m apart from caused measurement error in the environment of 30 DEG C
5m measures 1m apart from caused measurement error and is also up to 5cm.So what to consider in Solid Source bottle design process
Kind Solid Source, the factors such as temperature that best saturated vapor needs.
With reference to the accompanying drawing, specific embodiments of the present invention will be described in further detail.
It should be noted that in following specific embodiments, when describing embodiments of the invention in detail, in order to clear
Ground indicates structure of the invention in order to illustrate, spy does not draw to the structure in attached drawing according to general proportion, and has carried out part
Amplification, deformation and simplified processing, therefore, should be avoided in this, as limitation of the invention to understand.
In specific embodiment of the invention below, referring to Fig. 2, Fig. 2 is one kind of a preferred embodiment of the present invention
The structure of the detecting device schematic diagram of Solid Source.As shown in Fig. 2, a kind of detection device of Solid Source of the invention, is used for detection source
The real-time surplus in bottle internal solid source is passed including one or more ultrasonic sensor 22 being mounted on source bottle 21 and connection ultrasonic wave
The major parts such as the computing unit 24 of sensor.
In source, the top of bottle 21 is equipped with inlet ductwork 25 and export pipeline 27.Inlet ductwork one end is connected to source bottle inside, separately
One end connects carrier gas source, for being passed through carrier gas into source bottle；Export pipeline one end is connected to source bottle inside, and the other end connects reaction chamber
Room, for being passed through the saturated vapor as caused by Solid Source 20 carried by carrier gas into reaction chamber --- i.e. Solid Source is saturated
Steam and the mixed gas of carrier gas 32 carry out technique.Inlet ductwork valve 23 can be respectively provided in inlet ductwork and export pipeline
With export pipeline valve 29, controlled for the carrier gas of carrier gas and output to input, saturated vapor mixed gas.Valve
23, it can be attached respectively by interface 28 between 29 and pipeline 25,27.In addition, may be used also in inlet ductwork and export pipeline
It is respectively provided with the control elements such as pressure gauge and/or flowmeter.
In source, the top of bottle is equipped with one or more ultrasonic sensors 22, connects computing unit 24；Supersonic sensing
Device can be equipped with transmitter and receiver, and the bottom towards source bottle, for passing through transmitter to source bottle lower inside transmitting ultrasound
Wave, and reflected ultrasonic wave is received by receiver.The ultrasonic sensor can be equipped with timer, can by timer with
Transmitter is connected with receiver, starts to emit and start the time difference between reception for recording ultrasonic wave.The timer is adopted
With with the sensor at least counting down to 1 μ s precision.In source, the top of bottle can also be equipped with thermocouple 26, connect computing unit 24,
For measuring the temperature of saturated vapor in the bottle of source.It can also start transmitting using existing other technology acquisition ultrasonic waves and start
The temperature of saturated vapor in time difference between reception, and acquisition source bottle.
In source, the outside of bottle is equipped with computing unit 24, such as can be remotely located host computer, by host computer and ultrasound
Wave sensor and thermocouple are connected, for by acquisition by being sent out at the beginning on timer records and exports ultrasonic sensor
Project ultrasonic wave and receive the time difference between ultrasonic wave at the beginning, and acquisition by thermocouple detect and exports source bottle
The temperature of saturated vapor calculates ultrasonic measurement distance, and is scaled the height in source bottle internal solid source, and then calculates in the bottle of source
The real-time surplus of Solid Source.The surface that Solid Source is directly measured using ultrasonic wave, improves the accuracy of detection.
Specifically, ultrasonic wave under certain saturated-steam temperature can be calculated first according to above-mentioned formula three by host computer
Corresponding speed；For example, ultrasonic wave exists if it is 80 DEG C that a certain Solid Source, which is optimal temperature required when saturated vapor pressure,
It is approximately 380m/s that spread speed at a temperature of this, which is computed,.Then, according to the gate time on timer, one half value is taken,
Further according to formula one, the distance length of measurement is calculated.Due to ultrasonic sensor be at a distance from the bottom of bottle portion of source it is certain, because
This, it is known that the distance L of measurement can be obtained the apparent height h of remaining Solid Source to source bottom of bottle portion.Finally, according to formula two,
The mass M of Solid Source can be calculated (the cross-sectional area S of source bottle is also known).
Since general Solid Source bottle is all to need to heat the evaporation for being just able to achieve Solid Source, temperature range is according to different sources
From 50 DEG C of -250 DEG C of differences, so being all enclosed with heating unit, heating unit in the upper and lower surfaces of source bottle and side in the present invention
Including side heater 33, top heater 31 and bottom heater 34.Source bottle surrounding is all heated, ensure that solid-state
The heating temperature in source and the stabilization of saturated vapour pressure.
The ultrasonic sensor distribution that the present invention uses, can be as shown in figure 3, using 5 points (five ultrasonic sensors 22)
Test mode, comprising being located at 1 test point of source bottle central point and being symmetrically positioned in 4 test points of center point.
In addition to this, according to the size of source bottle, the ultrasonic sensors distribution such as 9 points of tests or 13 points of tests also can be used
Form.Ultrasonic sensor is arranged more, and measurement result is more accurate.As optional embodiment, ultrasonic sensor
Setting quantity point can be distributed from 1 point to 17.
In actual process, as technique carries out, the part of Solid Source 20 close to source 21 side walls of bottle can be because of the shadow of temperature
It rings, rapid evaporation, and intermediate portion will receive the influence of heat-transfer rate itself, slow evaporation；So using a period of time
Afterwards, Solid Source 20 will appear intermediate height, the low situation in both sides.It, at all can not precise measurement source with common peripheral measurement method
Situation inside bottle.
The present invention issues ultrasonic wave using ultrasonic sensor 22, until encountering 20 surface of Solid Source, leads to after then returning
Its recipient is crossed to determine to the ultrasonic wave propagation real time at the point or small area, one or more groups of ultrasonic sensors 22
Test data feeds back to host computer computing unit 24, by the calculating to one group of data or to the average computation of multi-group data, comes
Solid Source surplus in the bottle of acquisition source.Wherein thermocouple 26 provides the actual temperature of saturated vapor, and host computer computing unit can be real
When read thermocouple value, the correct velocity of ultrasonic wave in this case is then obtained according to above-mentioned theory formula, and according to formula L=
V × T obtains accurate solid-state source height.
Ultrasonic sensor is selected on Solid Source bottle, it is necessary to be considered the following factors:
(1) hot environment causes coating material to melt sensor, solder joint becomes civilized, elastomer internal stress recurring structure changes
The problems such as.For the sensor that works under hot environment frequently with high temperature resistant sensor；Further it is necessary to added with heat-insulated, water cooling or
The devices such as air cooling.
It therefore, can be as shown in Fig. 2, cooling unit 30 be arranged around ultrasonic sensor 22.The heating temperature of usual source bottle
Range is spent according to different sources from 50-250 DEG C of difference, so having very high requirement to the temperature tolerance of ultrasonic sensor.To keep away
For no-sensor because the reason of temperature fails, can specifically design as shown in Figure 4 includes cooling unit component 38,41 and 43
Cooling unit 30, coolant liquid is by the inner flow passage of cooling unit component, to ultrasound in a manner of low temperature flow liquid heat transfer
Wave sensor 22 is cooled down.Cooling unit 30 uses split-type design, can be by the cooling unit component that is stitched together
38, it 41 and 43 collectively constitutes, to better conform to the labyrinth of source top of bottle, enhances and the cooling of ultrasonic sensor is imitated
Fruit, and be easily installed and dismantle.Between each cooling unit component 38,41 and 43 can by cooling unit communicating pipe 37,39,40 into
The connection of row inner flow passage；Cooling water can be cycling in and out cooling unit by cooling water inlet/outlet 35/36；Each cooling unit
Between component 38,41 and 43 installation fixation can be carried out for example, by the cooling unit fixator 42 of bayonet type.Cooling unit is set
Meter, avoids influence of the high temperature to ultrasonic sensor, it is ensured that ultrasonic sensor using safe, and extend its use
Service life reduces use cost.
(2) dust, the moist influence that short circuit is caused to sensor.The very high biography of airtightness should be selected under this environmental condition
Sensor.The mode of its sealing of different sensors is different, and there is very big differences for airtightness.
From the point of view of sealing effect, welded seal is best.It works under moist, dust higher environment for some
Sensor should select the sensor of the sealing of diaphragm hot jacket or diaphragm welded seal, vacuum nitrogen filling.
In the present invention, standard VCR interface can be used for ultrasonic sensor 22 or flanged joint is realized and the sealing of source bottle 21,
It can effectively reduce influence of the environment to short circuit sensor.
(3) it under the higher environment of corrosivity, causes elastomer impaired such as moist, acid sensor or generates short circuit
It influences, optional outer surface carried out plastic-spraying or stainless steel outer cover, and corrosion resistance is good and the sensor of good leak tightness.
(4) influence of the electromagnetic field to sensor output disorder signal.In the case, shielded layer is arranged in reply sensor,
And the shielding for coping with sensor endures strict scrutiny, and sees whether it has good anti-electromagnetic capability.
(5) inflammable, the explosive damage that completeness is not only caused to sensor, but also return other equipment and personal safety is made
At very big threat.Therefore, in sensor that is inflammable, working under explosive environments, to explosion-proof performance, more stringent requirements are proposed:
It is inflammable, the explosion-proof sensor with explosion-proof layer must be selected under explosive environments, the sealing cover of this sensor will not only consider
Its airtightness, it is contemplated that explosion-proof intensity and the waterproof of cable leading-out end, moisture-proof, explosion-proof etc..
In addition, also inlet ductwork 25 and export pipeline 27 can be made of hard metal pipeline, and to whole pipelines (packet
Include interface 28 and valve 23,29) it is internal handled through electrobrightening, make it have smooth inner wall.Original adopt can be eliminated in this way
With bring particles effect when bellows, to reduce the pollution of technique.
Detection below in conjunction with specific embodiment, to a kind of detection device using above-mentioned Solid Source of the invention
Method is described in detail.
A kind of detection method of detection device using above-mentioned Solid Source of the invention, comprising the following steps:
By side heater 33, top heater 31 and bottom heater 34, source bottle 21 is heated, it will be in the bottle of source
Solid Source 20 be heated to set temperature, reach optimal saturated vapor pressure, source bottle upper space formed Solid Source
Saturated vapor and the mixed gas of carrier gas 32.It can be carried out by mixed gas 32 of the thermocouple 26 to Solid Source saturated vapor and carrier gas
Thermometric.
Meanwhile cooling water inlet/outlet 35/36 is opened, circulation is passed through cooling water, persistently carries out to ultrasonic sensor 22
It is cooling.
The inlet ductwork valve 23 in inlet ductwork 25 is opened, is continually fed into carrier gas into source bottle 21；Meanwhile opening outlet
Export pipeline valve 29 on pipeline 27 is constantly passed through the saturated vapor that the Solid Source carried by carrier gas generates into reaction chamber
Carry out technique.
When needing the surplus in detection source bottle internal solid source 20, all ultrasonic sensors can be opened by control system
5 ultrasonic sensors in 22, such as Fig. 3 emit ultrasonic wave (down arrow is signified in such as Fig. 2) to source bottle lower inside,
And the ultrasonic wave of reflection is received, carry out ultrasonic wave multi-point sampler.At this point, by each timer record ultrasonic wave start transmitting with
Start the time difference between receiving, and sends a signal to the host computer 24 as computing unit.
The ultrasonic transmitter that host computer collects each timer record launches ultrasonic wave and receiver one at the beginning
Initially receive the time difference between ultrasonic wave, and the temperature by saturated vapor in thermocouple detect and exports source bottle of acquisition
Degree, calculates the ultrasonic measurement distance of multiple spot, and be averaged to test data, is scaled the mean height in source bottle internal solid source
Degree calculates the real-time surplus in source bottle internal solid source accordingly.
By taking 5 points of tests (being equipped with 5 ultrasonic transmitters) of Fig. 3 as an example, host computer passes through 5 ultrasonic sensors of acquisition
Time T data, calculate separately out correspond to every place Solid Source surface height；Then, after by host computer with 5 points of summations
Be averaged, calculate the average value of its apparent height automatically, obtain the surplus of Solid Source in the bottle of whole source finally by formula two.
Above-described to be merely a preferred embodiment of the present invention, the patent that the embodiment is not intended to limit the invention is protected
Range is protected, therefore all with the variation of equivalent structure made by specification and accompanying drawing content of the invention, similarly should be included in
In protection scope of the present invention.
Claims (10)
1. a kind of detection device of Solid Source, for the real-time surplus in detection source bottle internal solid source, the source bottle is equipped with inlet tube
Road and export pipeline, inlet ductwork are used into source bottle be passed through carrier gas, and export pipeline into reaction chamber for being passed through by carrier gas
The saturated vapor generated by the Solid Source carried, which is characterized in that the detection device includes:
One or more ultrasonic sensor is set to source top of bottle, for emitting ultrasonic wave to source bottle lower inside, and receives reflection
Ultrasonic wave；
Computing unit, for starting to emit and start saturated vapor in time difference and source bottle between reception according to ultrasonic wave
Temperature calculates ultrasonic measurement distance, and is scaled the height in source bottle internal solid source, and then calculates the reality in source bottle internal solid source
Shi Yuliang.
2. the detection device of Solid Source according to claim 1, which is characterized in that the ultrasonic sensor is equipped with timing
Device starts to emit and start the time difference between reception, and exports to computing unit for recording ultrasonic wave.
3. the detection device of Solid Source according to claim 2, which is characterized in that the timer, which has, count down to 1 μ s
Precision.
4. the detection device of Solid Source according to claim 1, which is characterized in that the upper and lower surfaces of the source bottle and side
Bread is wrapped with heating unit.
5. the detection device of Solid Source according to claim 1, which is characterized in that be equipped with around the ultrasonic sensor
Cooling unit.
6. the detection device of Solid Source according to claim 1, which is characterized in that further include thermocouple, for measuring source bottle
The temperature of interior saturated vapor, and export to computing unit.
7. the detection device of Solid Source according to claim 1, which is characterized in that the inlet ductwork and export pipeline are
Metal tubes, and there is the smooth inner wall handled through electrobrightening.
8. a kind of detection method of the detection device using Solid Source described in claim 1, which is characterized in that including following step
It is rapid:
Inlet ductwork is opened, carrier gas is continually fed into source bottle, and open export pipeline, is constantly passed through and is carried into reaction chamber
The saturated vapor that the Solid Source that gas carries generates；
When needing the surplus in detection source bottle internal solid source, ultrasonic sensor is opened, emits ultrasonic wave to source bottle lower inside,
And receive the ultrasonic wave of reflection；
Start to emit and start saturated vapor in time difference and source bottle between reception by computing unit acquisition ultrasonic wave
Temperature calculates ultrasonic measurement distance, and is scaled the height in source bottle internal solid source, and then calculates the reality in source bottle internal solid source
Shi Yuliang.
9. the detection method of the detection device of Solid Source according to claim 8, which is characterized in that further include open into
Before mouth pipeline, source bottle is first heated to set temperature；And including persistently being cooled down to ultrasonic sensor.
10. the detection method of the detection device of Solid Source according to claim 8, which is characterized in that work as supersonic sensing
When the quantity of device is multiple, ultrasonic wave multi-point sampler is carried out by the height to source bottle internal solid source, and pass through computing unit pair
Multi-point sampler data are averaged, and the average height in source bottle internal solid source is obtained, and calculate the real-time of source bottle internal solid source accordingly
Surplus.
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Cited By (1)
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Application publication date: 20181218 |