CN103185771A - Liquid sample vaporizing system, diagnosis system and diagnosis program - Google Patents
Liquid sample vaporizing system, diagnosis system and diagnosis program Download PDFInfo
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- CN103185771A CN103185771A CN2012105761372A CN201210576137A CN103185771A CN 103185771 A CN103185771 A CN 103185771A CN 2012105761372 A CN2012105761372 A CN 2012105761372A CN 201210576137 A CN201210576137 A CN 201210576137A CN 103185771 A CN103185771 A CN 103185771A
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- gas concentration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
- G01K13/12—Thermometers specially adapted for specific purposes combined with sampling devices for measuring temperatures of samples of materials
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- Chemical Vapour Deposition (AREA)
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Abstract
The invention provides a liquid sample vaporizing system, diagnosis system and diagnosis program, without the need of preparing a reference gas and tubes and time series dedicated to the reference gas, the judgment of whether a gas concentration meter is abnormal can be performed. According to the diagnosis system of the gas concentration meter in a liquid sample vaporizing device, the liquid sample vaporizing device comprises: a sample liquid tank; a gas discharging tube for exporting gas vaporized through the sample liquid tank to the outside; and the gas concentration meter arranged at the gas discharging tube, and measuring a gas concentration measurement value. The diagnosis system comprises: a gas concentration calculation unit, based on the temperature measured by a thermometer for measuring the temperature inside the sample liquid tank, and the pressure obtained by a gauge for measuring the pressure inside the sample liquid tank, calculating the gas concentration calculated value of the vaporized gas in the sample liquid tank; and a state determining unit for determining whether the gas concentration meter is abnormal based on the gas concentration measurement value measured by the gas concentration meter and the gas concentration calculated value calculated from the gas concentration calculation unit.
Description
Technical field
The present invention relates to a kind of unusual system and method thereof of diagnosing whole sample liquid gasification installation, described sample liquids gasification installation comprises various sensors such as gas concentration meter, the flow controller flow-control equipments such as (flow controller) that is arranged in the sample liquids gasification installation.
Background technology
As existing sample liquids gasification installation, shown in patent documentation 1, have beneath member, it comprises: sample liquids groove, stored sample liquid; Gas introduction tube is directed into the carrier gas that makes the gasification of this sample liquids the sample liquids of this sample liquids groove; And gas eduction tube, derive from described sample liquids groove and to comprise sample gas that the sample liquids gasification forms and the mixed gas of carrier gas.And, in described sample liquids gasification installation, for example gas concentration meter such as ultrasonic gas concentration meter is set sometimes, with flow through sample gas concentration in the mixed gas of described gas eduction tube of mensuration.
And, whether accurate in order to judge the measured value that is obtained by described gas concentration meter, by flowing into the known reference gas of concentration, the concentration known of reference gas and the measured value of gas concentration meter are compared to carry out.
Yet, in order to make reference gas inflow gas densimeter, must in the sample liquids gasification installation, be provided for flowing into the pipe arrangement of reference gas, thus the problem that exists pipe arrangement space enlargement, cost to increase.And, owing to must in the sample liquids gasification installation, prepare be used for to flow into the sequential (sequence) (processing sequence) of reference gas, so have user's the operation complicated problems that becomes.
In addition, owing under the state that has produced sample gas by the sample liquids gasification installation, can't flow into reference gas, so must make the generation of sample gas flow into reference gas after stopping by the sample liquids gasification installation temporary transient.As mentioned above in the state of the generation that the has stopped sample gas unusual words that judge, must vacate the time interval and judge the unusual of gas concentration meter, thereby there be unusual delay that detects the gas concentration meter, before this problem of the deviation of concentration desirable value of the sample gas of Sheng Chenging.
In described sample liquids gasification installation, except described gas concentration meter unusual, also there is the problem of the deviation of concentration desirable value of sample gas in various sensors such as the thermometer in being arranged at the sample liquids gasification installation, pressure gauge or be arranged at flow-control equipments such as mass flow controller in the gas introduction tube and take place when unusual.And, in order to judge the unusual of described each one, must individually set the judgement sequential to each one.
[prior art document]
[patent documentation]
[patent documentation 1] Jap.P. spy opens the 2004-149925 communique
Summary of the invention
Therefore, the present invention develops in order to address the above problem, the whether unusual judgement of special-purpose pipe arrangement and individual other sequential that its major subjects is to need not to prepare reference gas and flows into reference gas, the total system (device) that just can comprise each one such as gas concentration meter.
That is, sample liquids gasification system of the present invention is characterised in that and comprises: the sample liquids groove, and stored sample liquid, and make this sample liquids gasification; Gas eduction tube will export to the outside of described sample liquids groove by the gas that described sample liquids groove gasification forms; The gas concentration meter is measured the gas concentration measuring value of the described gas eduction tube of flowing through; Thermometer is measured the temperature in the described sample liquids groove; Pressure gauge is measured the pressure in the described sample liquids groove; The gas concentration calculating part reaches the pressure that is obtained by described pressure gauge according to the temperature that is obtained by described thermometer, calculates the gas concentration calculated value through gasifying in the described sample liquids groove; And the state judging part, the gas concentration calculated value that will be calculated by described gas concentration calculating part and the gas concentration measuring value that obtained by described gas concentration meter be as parameter, judgement sample liquid gasification system unusual.
Aforesaid sample liquids gasification system, the gas concentration calculated value that temperature in the liquid tank per sample and the pressure in the sample liquids groove are calculated and the gas concentration measuring value that obtained by the gas concentration meter are as parameter, judge the unusual of whole sample liquid gasification system, therefore need not to prepare reference gas separately, be used for flowing into the pipe arrangement of reference gas and other sequential etc.And, when the sample gas that generates sample gas generates running, also can judge to comprise whether unusual state of sample liquids gasification system.
Temperature in the liquid tank and the pressure in the sample liquids groove and the gas concentration calculated value of calculating are to change according to the liquid measure of the interior sample liquids of gasification efficiency, the material behavior of sample liquids, the sample liquids groove of the sample liquids that for example produces because of bubble (bubbling) etc. per sample.Therefore, preferably, whether whether described state judging part is contained in according to described gas concentration measuring value is implemented to come judgement sample liquid gasification system unusual in the scope of higher limit that the computing of regulation obtains and lower limit to described gas concentration calculated value.
And diagnostic system of the present invention is the diagnostic system of the gas concentration meter in the sample liquids gasification installation, and described sample liquids gasification installation comprises: the sample liquids groove, and stored sample liquid, and make this sample liquids gasification; Gas eduction tube will export to the outside by the gas that described sample liquids groove gasification forms; And the gas concentration meter, measure the gas concentration measuring value of the described gas eduction tube of flowing through; Described diagnostic system is characterised in that and comprises: the gas concentration acquisition unit, obtain the gas concentration calculated value, described gas concentration calculated value is to calculate according to the temperature that is obtained by the thermometer of measuring the temperature in the described sample liquids groove and by the pressure that the pressure gauge of measuring the pressure in the described sample liquids groove obtains, and represents the interior gas concentration through gasification of described sample liquids groove; And the state judging part, the gas concentration calculated value that will be obtained by described gas concentration acquisition unit and the gas concentration measuring value that obtained by described gas concentration meter are judged the unusual of described sample liquids gasification installation as parameter.
In addition, diagnostic method of the present invention is the diagnostic method of sample liquids gasification installation, and described sample liquids gasification installation comprises: the sample liquids groove, and stored sample liquid, and make this sample liquids gasification; Gas eduction tube will export to the outside by the gas that described sample liquids groove gasification forms; And the gas concentration meter, measure the gas concentration measuring value of the described gas eduction tube of flowing through; Described diagnostic method is characterised in that: make computing machine bring into play a plurality of functions, described function comprises: as the function of gas concentration acquisition unit, obtain the gas concentration calculated value, described gas concentration calculated value is to calculate according to the temperature that is obtained by the thermometer of measuring the temperature in the described sample liquids groove and by the pressure that the pressure gauge of measuring the pressure in the described sample liquids groove obtains, and represents the interior gas concentration through gasification of described sample liquids groove; And as the function of state judging part, the gas concentration calculated value that will be obtained by the gas concentration acquisition unit and the gas concentration measuring value that obtained by described gas concentration meter are judged the unusual of described sample liquids gasification installation as parameter.
And sample liquids gasification system of the present invention is characterised in that and comprises: the sample liquids groove, and stored sample liquid, and make this sample liquids gasification; The carrier gas ingress pipe will be directed in the sample liquids that is stored in the described sample liquids groove carrier gas of this sample liquids gasification; Gas eduction tube, the sample gas that will form by the gasification of described sample liquids groove and the mixed gas of described carrier gas export to the outside of described sample liquids groove; The gas concentration meter is measured the gas concentration measuring value in the mixed gas of the described gas eduction tube of flowing through; The 1st flowmeter is arranged at described carrier gas ingress pipe, measures the carrier gas flux of this carrier gas ingress pipe of flowing through; The 2nd flowmeter is arranged at described gas eduction tube, measures the mixed gas flow of this gas introduction tube of flowing through; The gas concentration calculating part reaches the mixed gas flow that is obtained by described the 2nd flowmeter according to the carrier gas flux that is obtained by described the 1st flowmeter, calculates the gas concentration calculated value; And the state judging part, the gas concentration calculated value that will be calculated by described gas concentration calculating part and the gas concentration measuring value that obtained by described gas concentration meter be as parameter, judgement sample liquid gasification system unusual.
And sample liquids gasification system of the present invention is characterised in that and comprises: the sample liquids groove, and stored sample liquid, and make this sample liquids gasification; Gas eduction tube will export to the outside of described sample liquids groove by the gas that described sample liquids groove gasification forms; The gas concentration meter is measured the dividing potential drop of the sample gas in the gas of the described gas eduction tube of flowing through, and is measured gas concentration; Thermometer is measured the temperature in the described sample liquids groove; The saturated vapour pressure of described sample liquids according to the temperature that is obtained by described thermometer, is calculated by calculation of pressure portion; And the state judging part, the saturated vapour pressure that will be calculated by described calculation of pressure portion and the dividing potential drop that obtained by described gas concentration meter be as parameter, judgement sample liquid gasification system unusual.By the dividing potential drop that is obtained by the gas concentration meter and the comparison that utilizes the saturated vapour pressure of being calculated by the temperature of thermometer acquisition, also can obtain and above-mentioned same effect as mentioned above.
[effect of invention]
According to the present invention who constitutes as mentioned above, judge according to gas concentration calculated value and gas concentration measuring value whether the total system (device) that comprises each one such as gas concentration meter is unusual, described gas concentration calculated value is the temperature in the liquid tank and the pressure in the sample liquids groove and calculate per sample, described gas concentration measuring value is to be obtained by the gas concentration meter, therefore special-purpose pipe arrangement and individual other sequential of need not to prepare reference gas and flowing into reference gas just can comprise the whether unusual judgement of state of total system (device).
Description of drawings
Fig. 1 is the schematic pie graph of the sample liquids gasification system of one embodiment of the present invention.
Fig. 2 is the process flow diagram of the gas concentration meter diagnostic process in the above-mentioned embodiment of expression.
Fig. 3 is the schematic pie graph of the sample liquids gasification system of distortion embodiment.
[explanation of symbol]
2: the sample liquids groove
3: the carrier gas ingress pipe
4: gas eduction tube
5: arithmetic unit
21: thermometer
22: pressure gauge
31: mass flow controller
41: the gas concentration meter
42: gas meter
51: the gas concentration calculating part
52: state judging part (unusual judging part)
100: the sample liquids gasification system
200: the sample liquids gasification installation
C
C: the gas concentration calculated value
C
C2: the gas concentration modified value
C
M: the gas concentration measuring value
P
0: stagnation pressure
S1～S7: step
T
B: the temperature of sample liquids
Embodiment
Below, with reference to accompanying drawing, an embodiment of sample liquids gasification system of the present invention is described.
To be the sample liquids that will become the film forming raw material by foam-forming method gasified to be supplied to the sample liquids gasification system 100 of present embodiment has for example used employed chemical vapor deposition in the semiconductor manufacturing process (process) (Chemical Vapor Deposition is CVD) in the film formation device of method etc.
Particularly, described sample liquids gasification system 100 comprises as shown in Figure 1: sample liquids groove 2, stored sample liquid; Carrier gas ingress pipe 3 is directed into carrier gas in the sample liquids that is stored in the sample liquids groove 2, makes its foaming; And gas eduction tube 4, the sample gas that will form by sample liquids groove 2 gasification and the mixed gas of carrier gas export to the outside of sample liquids groove 2.
On carrier gas ingress pipe 3, (Mass Flow Controller, MFC) 31 as the flow-control equipment for the carrier gas flux of controlling this carrier gas ingress pipe 3 of flowing through to be provided with mass flow controller.And, on gas eduction tube 4, being provided with for example gas concentration meter 41 of ultrasonic type, gas concentration meter 41 is in order to flow through sample gas concentration in the mixed gas of this gas eduction tube 4 of mensuration.Moreover, by these formations, constitute sample liquids gasification installation 200.
In addition, in sample liquids groove 2, be provided with the thermometer 21 of measuring the temperature be stored in the sample liquids in this sample liquids groove 2 and the pressure gauge 22 of the pressure (stagnation pressure) in the working sample liquid tank 2.
And in the present embodiment, comprise the arithmetic unit 5 with following function: obtain temperature detection signal from thermometer 21, and obtain pressure detecting signal from pressure gauge 22, diagnosis comprises whether unusual state of described gas concentration meter 41.
Described arithmetic unit 5 is to comprise central processing unit (Central Processing Unit, CPU), storer, IO interface, analog to digital (Analog-to-Digital, AD) the general or special purpose computing machine (computer) of converter etc., control program (program) according to the regulation zone that is stored in described storer makes co-operation such as CPU, peripheral equipment, plays a role as gas concentration calculating part 51 and state judging part 52 etc. thus.Moreover the state judging part 52 of present embodiment is as judging whether unusual unusual judging part and playing a role of gas concentration meter 41.
Below, with gas concentration calculating part 51 and state judging part 52 are described the diagnostic process of the gas concentration meter of implementing by arithmetic unit 5 41 is described in the lump.Moreover the diagnostic process of the gas concentration meter 41 of present embodiment is often carried out when common sample gas generates running.
At first, gas concentration calculating part 51 obtains the temperature (T of expression sample liquids from thermometer 21
B) temperature detection signal (step S1), calculate the vapor pressure (dividing potential drop (P of the sample gas in the sample liquids groove 2
T)) (step S2).And, the pressure (stagnation pressure (P of gas concentration calculating part 51 in pressure gauge 22 obtains expression sample liquids groove 2
0)) pressure detecting signal (step S3), the stagnation pressure (P in the liquid tank 2 per sample
0) and the vapor pressure (P of described sample gas
T) calculation sample gas concentration (gas concentration calculated value (C
C)) (step S4).
The gas concentration calculating part 51 of present embodiment is at described gas concentration calculated value (C
C) on multiply by fixed coefficient (K
F: the fixing coefficient of the regulations such as gasification efficiency that produce by the characteristic of fluid sample groove 2, carrier gas ingress pipe 3 and because of foaming), liquid level coefficient (K
L: the coefficient that changes according to the liquid measure that is stored in the sample liquids in the sample liquids groove 2), time coefficient (K
T: per sample the service time of liquid gasification system 100, foaming time etc. and the change coefficient), calculate gas concentration modified value (C
C2) (step S5).Moreover, fixed coefficient K
FIt is by input element etc. and the manual coefficient of input in advance.And, the liquid level COEFFICIENT K
LCan be made as by automatic measurement liquid measure and be calculated by gas concentration calculating part 51, also can manually import.In addition, time coefficient K
TBoth can be made as by automatic measurement service time etc. and calculated by gas concentration calculating part 51, also can manually import.
Secondly, state judging part 52 obtains the expression gas concentration modified value (C that calculates by described gas concentration calculating part 51
C2) modified value data (step S6), and obtain expression gas concentration measuring value (C from gas concentration meter 41
M) the gas concentration measuring Value Data, with described gas concentration modified value (C
C2) and gas concentration measuring value (C
M) as parameter, judge unusual (the step S7) of described gas concentration meter 41.
Particularly, state judging part 52 passes through at the gas concentration modified value (C by 51 acquisitions of gas concentration calculating part
C2) on multiply by the range factor X of regulation, calculate upper limit of concentration value (XC
C2) and concentration limit value (XC
C2), the gas concentration measuring value (C of judgement gas concentration meter 41
M) whether be contained in this upper limit of concentration value (XC
C2) and concentration limit value (XC
C2) between.
Then, state judging part 52 is at the gas concentration measuring value (C of gas concentration meter 41
M) not at described higher limit (XC
C2) and lower limit (XC
C2) scope in the time, judge that gas concentration meter 41 be (step S7) unusually.On the other hand, if gas concentration measuring value (C
M) be in upper limit of concentration value (XC
C2) and concentration limit value (XC
C2) scope in, then proceed diagnostic process.Moreover arithmetic unit 5 is judged as when unusual at state judging part 52, carries out abnormal show etc. at display, utilize notification element to user notification gas concentration meter 41 for unusual.In addition, arithmetic unit 5 can also stop the sample gas generation running that sample liquids gasification system 100 carries out.
According to the sample liquids gasification system 100 of the present embodiment that constitutes as mentioned above, will be according to the temperature (T that is stored in the sample liquids in the sample liquids groove 2
B) and sample liquids groove 2 in pressure (stagnation pressure (P
0)) and the gas concentration calculated value (C that calculates
C) and the gas concentration measuring value (C that obtained by gas concentration meter 41
M) as parameter, judge the unusual of gas concentration meter 41, therefore need not to prepare reference gas separately, be used for flowing into the pipe arrangement of reference gas and sequential etc.And, can when having generated sample gas common, judge the unusual of gas concentration meter 41, therefore can often judge the unusual of gas concentration meter 41.
Moreover the present invention is not limited to described embodiment.
For example, as shown in Figure 3, except the formation of described embodiment, also can on gas eduction tube 4, gas meter 42 (the 2nd flowmeter) be set in the downstream of gas concentration meter 41, utilize the mixed gas flow (Q that is obtained by this gas meter 42
2) with the carrier gas flux (Q that is obtained by the mass flow controller 31 (the 1st flowmeter) that is arranged on the carrier gas ingress pipe 3
1) poor (Q
2-Q
1) calculate sample gas concentration (C
C3).At this moment, not only pass through according to temperature (T
B) and pressure (P
0) and the gas concentration calculated value (C that calculates
C) and gas concentration measuring value (C
M) comparison, judge the unusual of gas concentration meter 41, and can be by according to carrier gas flux (Q
1) and mixed gas flow (Q
2) and the gas concentration calculated value (C that calculates
C3) and gas concentration measuring value (C
M) comparison, judge the unusual of gas concentration meter 41, can improve the reliability of the diagnosis of gas concentration meter 41 whereby.Moreover, can not carry out by temperature (T yet
B) and pressure (P
0) and the gas concentration calculated value (C that calculates
C) and gas concentration measuring value (C
M) comparison, and utilize according to carrier gas flux (Q
1) and mixed gas flow (Q
2) and the gas concentration calculated value (C that calculates
C3) and gas concentration measuring value (C
M) comparison, judge the unusual of gas concentration meter 41.
In said embodiment, be at gas concentration calculated value (C
C) on multiply by fixed coefficient K
F, the liquid level COEFFICIENT K
L, time coefficient K
TRevise, but any coefficient that also can multiply by in the described coefficient revises, can also multiply by other coefficients and revise, also can not revise and utilize gas concentration calculated value (C
C) itself judge unusually.
And, in said embodiment, be whether state judgement section judges gas concentration meter is unusual, but in addition, can also judge the state of gas concentration meter whereby according to the difference of described gas concentration measuring value and gas concentration calculated value to state divided rank (rank) of gas concentration meter etc.
And in said embodiment, the state judging part is judge the gas concentration meter unusual, but the state judging part also can be considered as the gas concentration meter normally, and judges the unusual of other various sensors or mass flow controller etc.For example, the gas concentration meter is being considered as under the normal situation, when the gas concentration calculated value is not between upper limit of concentration value and the concentration limit value, can be judged as for temperature or the pressure anomaly of calculating the gas concentration calculated value.That is, thus, thermometer can be judged as or pressure gauge is unusual.In addition, can be considered as under the normal situation at thermometer or pressure gauge, can be judged as other mass flow controller, the pipe arrangement of sample liquids gasification installation etc. unusually.
In addition, if the gas concentration meter of described embodiment is the dividing potential drop of measuring the sample gas in the gas of gas coming through delivery line, and measure the gas concentration of this sample gas, so also can be made as following formation, that is, comprising: the temperature in the thermometer, working sample liquid tank; The saturated vapour pressure of described sample liquids according to the temperature that is obtained by thermometer, is calculated by calculation of pressure portion; And the state judging part, the saturated vapour pressure that will be calculated by calculation of pressure portion and the dividing potential drop that obtained by described gas concentration meter be as parameter, judgement sample liquid gasification system unusual.Even if for as mentioned above, also can obtain the effect same with described embodiment.And, can not need pressure gauge, therefore can simplify formation.
In addition, in said embodiment, arithmetic unit air inclusion concentration calculating part, described gas concentration calculating part is according to the temperature that is obtained by the thermometer of the temperature in the working sample liquid tank and the pressure that obtained by the pressure gauge of the pressure in the working sample liquid tank, and calculates the gas concentration calculated value; But arithmetic unit also can comprise the gas concentration acquisition unit of obtaining the gas concentration calculated value, described gas concentration calculated value is to calculate according to the temperature that is obtained by the thermometer of the temperature in the working sample liquid tank and by the pressure that the pressure gauge of the pressure in the working sample liquid tank obtains, and represents in the described sample liquids groove gas concentration through gasification.So words are effective under the situation of utilizing outside arithmetic element calculating gas concentration calculated value.
In addition, the present invention is not limited to described embodiment certainly, can carry out various distortion in the scope that does not break away from its purport.
Claims (7)
1. sample liquids gasification system is characterized in that comprising:
The sample liquids groove, stored sample liquid, and make described sample liquids gasification;
Gas eduction tube will export to the outside of described sample liquids groove by the gas that described sample liquids groove gasification forms;
The gas concentration meter is measured the gas concentration measuring value of the described gas eduction tube of flowing through;
Thermometer is measured the temperature in the described sample liquids groove;
Pressure gauge is measured the pressure in the described sample liquids groove;
The gas concentration calculating part reaches the described pressure that is obtained by described pressure gauge according to the described temperature that is obtained by described thermometer, calculates the gas concentration calculated value through gasifying in the described sample liquids groove; And
State judging part, the described gas concentration calculated value that will be calculated by described gas concentration calculating part and the described gas concentration measuring value that obtained by described gas concentration meter be as parameter, judgement sample liquid gasification system unusual.
2. sample liquids gasification system according to claim 1 is characterized in that:
Whether described state judging part is contained in according to described gas concentration measuring value is implemented to judge whether described sample liquids gasification system is unusual in the scope of higher limit that the computing of regulation obtains and lower limit to described gas concentration calculated value.
3. sample liquids gasification system according to claim 1 and 2 is characterized in that also comprising:
The carrier gas ingress pipe will be directed in the described sample liquids that is stored in the described sample liquids groove carrier gas of described sample liquids gasification.
4. diagnostic system, described diagnostic system are the diagnostic systems of the gas concentration meter in the sample liquids gasification installation, and described sample liquids gasification installation comprises: the sample liquids groove, and stored sample liquid, and make described sample liquids gasification; Gas eduction tube will export to the outside by the gas that described sample liquids groove gasification forms; And described gas concentration meter, measure the gas concentration measuring value of the described gas eduction tube of flowing through; Described diagnostic system is characterised in that and comprises:
The gas concentration acquisition unit, obtain the gas concentration calculated value, described gas concentration calculated value is to calculate according to the described temperature that is obtained by the thermometer of measuring the temperature in the described sample liquids groove and by the described pressure that the pressure gauge of measuring the pressure in the described sample liquids groove obtains, and represents the gas concentration through gasifying in the described sample liquids groove; And
The state judging part, the described gas concentration calculated value that will be obtained by described gas concentration acquisition unit and the described gas concentration measuring value that obtained by described gas concentration meter are judged the unusual of described sample liquids gasification installation as parameter.
5. diagnostic method, described diagnostic method is the diagnostic method of sample liquids gasification installation, described sample liquids gasification installation comprises: the sample liquids groove, stored sample liquid, and make described sample liquids gasification; Gas eduction tube will export to the outside by the gas that described sample liquids groove gasification forms; And the gas concentration meter, measure the gas concentration measuring value of the described gas eduction tube of flowing through; Described diagnostic method is characterised in that:
Make computing machine bring into play a plurality of functions, described function comprises: as the function of gas concentration acquisition unit, described gas concentration acquisition unit is obtained the gas concentration calculated value, described gas concentration calculated value is to calculate according to the described temperature that is obtained by the thermometer of measuring the temperature in the described sample liquids groove and by the described pressure that the pressure gauge of measuring the pressure in the described sample liquids groove obtains, and represents the gas concentration through gasifying in the described sample liquids groove; And as the function of state judging part, the described gas concentration calculated value that described state judging part will be obtained by described gas concentration acquisition unit and the described gas concentration measuring value that obtained by described gas concentration meter are judged the unusual of described sample liquids gasification installation as parameter.
6. sample liquids gasification system is characterized in that comprising:
The sample liquids groove, stored sample liquid, and make described sample liquids gasification;
The carrier gas ingress pipe will be directed in the described sample liquids that is stored in the described sample liquids groove carrier gas of described sample liquids gasification;
Gas eduction tube, the sample gas that will form by the gasification of described sample liquids groove and the mixed gas of described carrier gas export to the outside of described sample liquids groove;
The gas concentration meter is measured the gas concentration measuring value in the described mixed gas of the described gas eduction tube of flowing through;
The 1st flowmeter is arranged at described carrier gas ingress pipe, measures the carrier gas flux of the described carrier gas ingress pipe of flowing through;
The 2nd flowmeter is arranged at described gas eduction tube, measures the mixed gas flow of the described gas introduction tube of flowing through;
The gas concentration calculating part reaches the described mixed gas flow that is obtained by described the 2nd flowmeter according to the described carrier gas flux that is obtained by described the 1st flowmeter, calculates the gas concentration calculated value; And
State judging part, the described gas concentration calculated value that will be calculated by described gas concentration calculating part and the described gas concentration measuring value that obtained by described gas concentration meter be as parameter, judgement sample liquid gasification system unusual.
7. sample liquids gasification system is characterized in that comprising:
The sample liquids groove, stored sample liquid, and make described sample liquids gasification;
Gas eduction tube will export to the outside of described sample liquids groove by the gas that described sample liquids groove gasification forms;
The gas concentration meter is measured the dividing potential drop of the sample gas in the gas of the described gas eduction tube of flowing through, and is measured gas concentration;
Thermometer is measured the temperature in the described sample liquids groove;
The saturated vapour pressure of described sample liquids according to the temperature that is obtained by described thermometer, is calculated by calculation of pressure portion; And
The state judging part, the described saturated vapour pressure that will be calculated by described calculation of pressure portion and the described dividing potential drop that obtained by described gas concentration meter are judged the unusual of described sample liquids gasification system as parameter.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011286803A JP5739320B2 (en) | 2011-12-27 | 2011-12-27 | Sample liquid vaporization system, diagnostic system and diagnostic program |
| JP2011-286803 | 2011-12-27 |
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| Publication Number | Publication Date |
|---|---|
| CN103185771A true CN103185771A (en) | 2013-07-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012105761372A Pending CN103185771A (en) | 2011-12-27 | 2012-12-26 | Liquid sample vaporizing system, diagnosis system and diagnosis program |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5739320B2 (en) |
| KR (1) | KR20130075675A (en) |
| CN (1) | CN103185771A (en) |
| TW (1) | TW201331585A (en) |
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| CN103710681A (en) * | 2014-01-09 | 2014-04-09 | 北京七星华创电子股份有限公司 | Testing apparatus and testing method for reaction source bottle |
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| CN106435517A (en) * | 2016-12-11 | 2017-02-22 | 重庆工业职业技术学院 | Device special for providing water vapor for vacuum coating machine and usage method thereof |
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- 2012-12-26 TW TW101150224A patent/TW201331585A/en unknown
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| CN101479402A (en) * | 2006-06-27 | 2009-07-08 | 株式会社富士金 | Vaporizer/supplier of material and automatic pressure regulator for use therein |
| CN101568666A (en) * | 2006-12-26 | 2009-10-28 | 株式会社Cowindst | Metal gas supply apparatus and remaining gas removal apparatus used for thin film depositing apparatus and method thereof |
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| CN103454383A (en) * | 2013-09-05 | 2013-12-18 | 长三角(嘉兴)纳米科技产业发展研究院 | Dynamic response performance test system for gas sensor |
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| CN103710681B (en) * | 2014-01-09 | 2016-03-02 | 北京七星华创电子股份有限公司 | A kind of test method for reaction source bottle |
| CN106370455A (en) * | 2016-09-29 | 2017-02-01 | 国网吉林省电力有限公司电力科学研究院 | Recorder applicable to in-situ sampling and working method thereof |
| CN106435517A (en) * | 2016-12-11 | 2017-02-22 | 重庆工业职业技术学院 | Device special for providing water vapor for vacuum coating machine and usage method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5739320B2 (en) | 2015-06-24 |
| TW201331585A (en) | 2013-08-01 |
| KR20130075675A (en) | 2013-07-05 |
| JP2013133542A (en) | 2013-07-08 |
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