CN103698108A - Height transfer function testing device and method of spherical wavefront testing interferometer - Google Patents

Height transfer function testing device and method of spherical wavefront testing interferometer Download PDF

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Publication number
CN103698108A
CN103698108A CN201410016063.6A CN201410016063A CN103698108A CN 103698108 A CN103698108 A CN 103698108A CN 201410016063 A CN201410016063 A CN 201410016063A CN 103698108 A CN103698108 A CN 103698108A
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interferometer
sphere
test
testing
spherical
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CN103698108B (en
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马冬梅
张海涛
孙鸽
于杰
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

The invention discloses a height transfer function testing device and method of a spherical wavefront testing interferometer, belonging to the field of optical tests and aiming to solve the problem that an interferometer transfer function cannot be tested during spherical surface testing in the prior art. The testing method comprises the steps: mounting an interferometer spherical surface testing datum lens on a host of the interferometer; turning on power switches of the host of the phase shift interferometer and a mating computer; placing a height transfer function testing datum plate at an included angle of 45 DEG behind the centre of the sphere of the interferometer spherical surface testing datum lens to enable a light path to be reflected, placing a high-precision spherical reflector behind the height transfer function testing datum plate, and enabling the centre of the sphere of the high-precision spherical reflector to be superposed with the centre of the sphere of the interferometer spherical surface testing datum lens; obtaining an image of the height transfer function testing datum plate on the host of the interferometer, testing the collected phase shift image through the host of the interferometer to obtain a surface shape testing image of the height transfer function testing datum plate, and testing a height test result hi of the datum plate; and testing a height value h0 of a corresponding frequency domain of the datum plate to obtain a height test transfer function value H=hi/h0 of the interferometer.

Description

Spherical wave front test interferometer height transport function proving installation and method of testing thereof
Technical field
The present invention relates to a kind of spherical wave front test interferometer height transport function proving installation and method of testing thereof, belong to optic test field.
Background technology
Phase shift optical wavefront test interferometer is mainly used in face shape and the wavefront test of optical element and system.
Interferometer height transport function be characterize interferometer in different spaces frequency-domain segment the valuation functions to height tolerance measuring accuracy, be one of leading indicator of evaluating its measuring accuracy.While containing medium and low frequency face shape error in tested optical wave-front, its measuring accuracy will be limited by the height transport function of interferometer, therefore, the test and appraisal of its height transport function can guides user correctly be used and choose reasonable interferometer product, guarantee the reliability of test data.
At present, the work of carrying out in this regard is in the world mainly to adopt with different frequency domains, benchmark flat board or the stepped plate of sustained height, see Fig. 1, by interferometer, its interference imaging is obtained to wave surface height information, light by 1 outgoing of interferometer main frame, a part is reflected and is formed reference light by test reference level crossing 2, another part sees through test reference level crossing 2 by the rear test light that forms of height transport function test benchmark plate 3 reflections, form interferogram with reference light interference, pass through phase shift algorithm and then calculate the highly face shape test pattern of transport function test benchmark plate 3, highly distribute.The height transport function test of interferometer in the time of can realizing by this method test plane.But during to Spherical Test, the test of interferometer transport function can not directly be applied.
Summary of the invention
For solving the test problem of prior art interferometer height transport function cannot be to Spherical Test time, the invention provides spherical wave front test interferometer height transport function proving installation and method of testing thereof.
The technical scheme solving the problems of the technologies described above is:
Sphere phase shift interferometer height transport function proving installation, it is characterized in that, light by the outgoing of phase shift interferometer main frame forms spherical wave after Spherical Test basic lens, 45 ° of placing height transport function test benchmark plates after the centre of sphere of Spherical Test basic lens, light reflexes to high precision sphere catoptron by height transport function test benchmark plate, then is back to interferometer main frame and the reference light interference being formed by Spherical Test basic lens by high precision sphere catoptron reflection Hou Yuan road.
Sphere phase shift interferometer height transport function method of testing, comprises the following steps:
Step 1, installs interferometer Spherical Test basic lens on interferometer main frame;
Step 2, opens phase shift interferometer main frame and the computer power switch supporting with it;
Step 3, after the centre of sphere of interferometer Spherical Test basic lens, 45 ° of placing height transport function test benchmark plates are turned back light path, thereafter, place high precision sphere catoptron, and its centre of sphere is overlapped with the centre of sphere of interferometer Spherical Test basic lens;
Step 4 can obtain the highly image of transport function test benchmark plate on interferometer main frame, by interferometer host test, gathers the face shape test pattern that phase shifted images will obtain height transport function test benchmark plate, the high measure result hi of test benchmark plate;
Step 5, sets up computation model, by the height value h of high measure result hi and the corresponding frequency domain of datum plate 0compare, record interferometer high measure transfer function values H=h i/ h 0.
Sphere phase shift interferometer height transport function proving installation, it is characterized in that, light by the outgoing of phase shift interferometer main frame forms spherical wave after Spherical Test basic lens, after the centre of sphere of Spherical Test basic lens, place high precision sphere diaphotoscope head, light is transmitted to test benchmark plate reflection Hou Yuan road and is back to interferometer main frame and the reference light interference being formed by Spherical Test basic lens after high precision sphere diaphotoscope head.
Sphere phase shift interferometer height transport function method of testing, comprises the following steps:
Step 1, installs interferometer Spherical Test basic lens on interferometer main frame;
Step 2, opens phase shift interferometer main frame and the computer power switch supporting with it;
Step 3, places high precision sphere diaphotoscope head, makes its focus consistent with centre of sphere coincidence, the optical axis of Spherical Test basic lens, after high precision sphere diaphotoscope head by outgoing directional light; Placing height transport function test benchmark plate after high precision sphere diaphotoscope head;
Step 4 can obtain the highly image of transport function test benchmark plate on interferometer main frame, by interferometer host test, gathers the face shape test pattern that phase shifted images will obtain height transport function test benchmark plate, the high measure result hi of test benchmark plate;
Step 5, sets up computation model, by the height value h of high measure result hi and the corresponding frequency domain of datum plate 0compare, record interferometer high measure transfer function values H=h i/ h 0.
The invention has the beneficial effects as follows: placing height transport function test benchmark plate is turned back light path in light path, and form optical system for testing by high precision sphere mirror, or adopt high-precise ball ground roll transmission mode to generate optical system for testing.Reference light and test light interference form interferogram, by calculation interferogram, realized the transport function of sphericity interferometer is tested.
Accompanying drawing explanation
Fig. 1: existing interferometer plane wave front test transport function schematic diagram.
Fig. 2: sphere phase shift interferometer height transport function proving installation schematic diagram of the present invention.
Fig. 3: another sphere phase shift interferometer height transport function proving installation schematic diagram of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further details.
Spherical wave test interferometer high measure transfer function method, during due to test sphere wavefront, respective production is large with the spherical reflector difficulty of a plurality of frequency domain little height poor (35nm left and right), therefore, adopting plane test benchmark plate to realize by the light path mode of turning back that interferometer wavefront transport function when spherical wave front test tests is a kind of simple and direct, high efficiency method.Can need and cost budgeting selection according to actual conditions.
Embodiment one:
As shown in Figure 2, sphere phase shift interferometer height transport function proving installation, light by 1 outgoing of phase shift interferometer main frame forms spherical wave after Spherical Test basic lens 4,45 ° of placing height transport function test benchmark plates 3 after the centre of sphere of Spherical Test basic lens 4, light reflexes to high precision sphere catoptron 5 by height transport function test benchmark plate 3, then is back to interferometer main frame and the reference light interference being formed by Spherical Test basic lens 4 by high precision sphere catoptron 5 reflection Hou Yuan roads.
Sphere phase shift interferometer height transport function method of testing, comprises the following steps:
Step 1, installs interferometer Spherical Test basic lens 4 on interferometer main frame 1;
Step 2, opens phase shift interferometer main frame 1 and the computer power switch supporting with it;
Step 3, after the centre of sphere of interferometer Spherical Test basic lens 4,45 ° of placing height transport function test benchmark plates 3 are turned back light path, thereafter, place high precision sphere catoptron 5, and its centre of sphere is overlapped with the centre of sphere of interferometer Spherical Test basic lens 4;
Step 4 can obtain the highly image of transport function test benchmark plate 3 on interferometer main frame 1, by 1 test of interferometer main frame, gathers the face shape test pattern that phase shifted images will obtain height transport function test benchmark plate 3, the high measure result hi of test benchmark plate;
Step 5, sets up computation model, by the height value h of high measure result hi and the corresponding frequency domain of datum plate 0compare, record interferometer high measure transfer function values H=h i/ h 0.
Embodiment two:
As shown in Figure 3, another sphere phase shift interferometer height transport function proving installation, comprises phase shift interferometer main frame 1, test benchmark plate 3, Spherical Test basic lens 4 and high precision sphere diaphotoscope head 6.
Light by 1 outgoing of phase shift interferometer main frame forms spherical wave after Spherical Test basic lens 4, after the centre of sphere of Spherical Test basic lens 4, place high precision sphere diaphotoscope head 6, light is transmitted to test benchmark plate 3 reflection Hou Yuan roads and is back to interferometer main frame 1 and the reference light interference being formed by Spherical Test basic lens 4 after high precision sphere diaphotoscope head 6.
This sphere phase shift interferometer height transport function method of testing, concrete steps and embodiment one are similar, and because each optical element optical axis of this method of testing is on same straight line, so the method comprises the following steps:
Step 1, installs interferometer Spherical Test basic lens 4 on interferometer main frame 1;
Step 2, opens phase shift interferometer main frame 1 and the computer power switch supporting with it;
Step 3, places high precision sphere diaphotoscope head 6, makes that its focus overlaps with the centre of sphere of Spherical Test basic lens 4, optical axis is consistent, after camera lens 6 by outgoing directional light; At the rear placing height transport function of camera lens 6 test benchmark plate 3 45 ° of placing height transport function test benchmark plates 3 after the centre of sphere of interferometer Spherical Test basic lens 4, light path is turned back, thereafter, place high precision sphere catoptron 5, its centre of sphere is overlapped with the centre of sphere of interferometer Spherical Test basic lens 4;
Step 4 can obtain the highly image of transport function test benchmark plate 3 on interferometer main frame 1, by 1 test of interferometer main frame, gathers the face shape test pattern that phase shifted images will obtain height transport function test benchmark plate 3, the high measure result hi of test benchmark plate;
Step 5, sets up computation model, by the height value h of high measure result hi and the corresponding frequency domain of datum plate 0compare, record interferometer high measure transfer function values H=h i/ h 0.

Claims (4)

1. sphere phase shift interferometer height transport function proving installation, it is characterized in that, light by phase shift interferometer main frame (1) outgoing forms spherical wave after Spherical Test basic lens (4), 45 ° of placing height transport function test benchmark plates (3) after the centre of sphere of Spherical Test basic lens (4), light reflexes to high precision sphere catoptron (5) by height transport function test benchmark plate (3), then is back to interferometer main frame (1) and the reference light interference being formed by Spherical Test basic lens (4) by high precision sphere catoptron (5) reflection Hou Yuan road.
2. the sphere phase shift interferometer height transport function method of testing based on claim 1, is characterized in that, comprises the following steps:
Step 1, installs interferometer Spherical Test basic lens (4) on interferometer main frame (1);
Step 2, opens phase shift interferometer main frame (1) and the computer power switch supporting with it;
Step 3, after the centre of sphere of interferometer Spherical Test basic lens (4), 45 ° of placing height transport function test benchmark plates (3) are turned back light path, thereafter, place high precision sphere catoptron (5), its centre of sphere is overlapped with the centre of sphere of interferometer Spherical Test basic lens (4);
Step 4, on interferometer main frame (1), can obtain the image of height transport function test benchmark plate (3), by interferometer main frame (1) test, gather the face shape test pattern that phase shifted images will obtain height transport function test benchmark plate (3), the high measure result hi of test benchmark plate;
Step 5, sets up computation model, by the height value h of high measure result hi and the corresponding frequency domain of datum plate 0compare, record interferometer high measure transfer function values H=h i/ h 0.
3. sphere phase shift interferometer height transport function proving installation, it is characterized in that, light by phase shift interferometer main frame (1) outgoing forms spherical wave after Spherical Test basic lens (4), after the centre of sphere of Spherical Test basic lens (4), place high precision sphere diaphotoscope head (6), light is transmitted to test benchmark plate (3) reflection Hou Yuan road and is back to interferometer main frame (1) and the reference light interference being formed by Spherical Test basic lens (4) after high precision sphere diaphotoscope head (6).
4. the sphere phase shift interferometer height transport function method of testing based on claim 3, is characterized in that, comprises the following steps:
Step 1, installs interferometer Spherical Test basic lens (4) on interferometer main frame (1);
Step 2, opens phase shift interferometer main frame (1) and the computer power switch supporting with it;
Step 3, places high precision sphere diaphotoscope head (6), makes its focus consistent with centre of sphere coincidence, the optical axis of Spherical Test basic lens (4), at high precision sphere diaphotoscope head (6) below by outgoing directional light; Placing height transport function test benchmark plate (3) after high precision sphere diaphotoscope head (6);
Step 4, on interferometer main frame (1), can obtain the image of height transport function test benchmark plate (3), by interferometer main frame (1) test, gather the face shape test pattern that phase shifted images will obtain height transport function test benchmark plate (3), the high measure result hi of test benchmark plate;
Step 5, sets up computation model, by the height value h of high measure result hi and the corresponding frequency domain of datum plate 0compare, record interferometer high measure transfer function values H=h i/ h 0.
CN201410016063.6A 2014-01-14 2014-01-14 Spherical wave front test interferometer height transfer function proving installation and method of testing thereof Expired - Fee Related CN103698108B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105021137A (en) * 2015-06-30 2015-11-04 西安空间无线电技术研究所 Dynamic surface shape test system for rapid rotating mirror
CN109724532A (en) * 2018-12-17 2019-05-07 中国科学院长春光学精密机械与物理研究所 A kind of precise testing device and method of complexity optical surface geometry parameter

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CN101644606A (en) * 2009-07-28 2010-02-10 中国科学院长春光学精密机械与物理研究所 Method for testing wave phase difference of optical imaging system
CN102353341A (en) * 2011-06-13 2012-02-15 天津大学 Phase-modulating synchronous-integral phase-shifting interference-measuring method and device
CN102393255A (en) * 2011-10-24 2012-03-28 中国科学院西安光学精密机械研究所 System capable of solving inclination problem of narrow field of view lens in wave aberration detection and method thereof
CN103063125A (en) * 2012-12-26 2013-04-24 中国地震局地震研究所 Extensometer transfer function test system and method thereof

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Publication number Priority date Publication date Assignee Title
CN2435735Y (en) * 2000-07-28 2001-06-20 浙江舜宇光电股份有限公司 Mechanism for testing of optical lens tranfer function
CN101644606A (en) * 2009-07-28 2010-02-10 中国科学院长春光学精密机械与物理研究所 Method for testing wave phase difference of optical imaging system
CN102353341A (en) * 2011-06-13 2012-02-15 天津大学 Phase-modulating synchronous-integral phase-shifting interference-measuring method and device
CN102393255A (en) * 2011-10-24 2012-03-28 中国科学院西安光学精密机械研究所 System capable of solving inclination problem of narrow field of view lens in wave aberration detection and method thereof
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Publication number Priority date Publication date Assignee Title
CN105021137A (en) * 2015-06-30 2015-11-04 西安空间无线电技术研究所 Dynamic surface shape test system for rapid rotating mirror
CN105021137B (en) * 2015-06-30 2017-11-07 西安空间无线电技术研究所 A kind of test system of quick tilting mirror dynamic shape
CN109724532A (en) * 2018-12-17 2019-05-07 中国科学院长春光学精密机械与物理研究所 A kind of precise testing device and method of complexity optical surface geometry parameter

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