CN103684315A - Processing technique of quartz-crystal resonator - Google Patents

Processing technique of quartz-crystal resonator Download PDF

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Publication number
CN103684315A
CN103684315A CN201310646697.5A CN201310646697A CN103684315A CN 103684315 A CN103684315 A CN 103684315A CN 201310646697 A CN201310646697 A CN 201310646697A CN 103684315 A CN103684315 A CN 103684315A
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CN
China
Prior art keywords
crystal
resonator
polishing
washing
brilliant
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201310646697.5A
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Chinese (zh)
Inventor
华前斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TONGLING MAIWEI ELECTRONIC TECHNOLOGY Co Ltd
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TONGLING MAIWEI ELECTRONIC TECHNOLOGY Co Ltd
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Application filed by TONGLING MAIWEI ELECTRONIC TECHNOLOGY Co Ltd filed Critical TONGLING MAIWEI ELECTRONIC TECHNOLOGY Co Ltd
Priority to CN201310646697.5A priority Critical patent/CN103684315A/en
Publication of CN103684315A publication Critical patent/CN103684315A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention relates to the technical field of quartz product production, in particular to a processing technique of a quartz-crystal resonator. The method comprises the following steps of slice separation, grinding, polishing, corrosion washing, vacuum coating, racking glue dispensing, frequency adjustment, packaging, lettering and measurement in sequence. The processing technique is characterized in that a crystal needs to be washed before the polishing, the crystal is heated and washed firstly through washing liquor, and then the crystal is soaked in hydrofluoric acid with the concentration below 40% for 5-10 minutes; according to the corrosion washing, heating and washing are firstly carried out through the cleaning liquor, then the crystal is soaked in saturated ammonium fluoride solutions for 40-60 minutes, the heating and washing are carried out through the cleaning liquor at last, the crystal is heated 3-5 times through deionized water, and the crystal is cleaned up ultrasonically. The processing technique is simple and convenient to control, and good in washing effect, crystal polishing and corrosion processing are facilitated, the crystal polishing and corrosion effect is good, and product quality can be improved conveniently.

Description

The processing technology of quartzy brilliant resonator
Technical field:
The present invention relates to quartzy production technical field, specifically the processing technology of quartzy brilliant resonator.
Background technology:
Quartz-crystal resonator, is a piezoelectric element, millions of times of energy conversion per second under electric energy and mechanical energy state.Quartz-crystal resonator can produce stabilized frequency.The standardized element of output, if CPU regards human heart as, it is cardiac pacemaker that quartzy essence is shaved resonator, purposes is very extensive, almost permeates each corner in everybody life.The product that the processing technology of the brilliant resonator of existing quartz is manufactured, its thickness grinds also needs its surface to carry out polishing and corrosion treatment, make the surface of wafer can be smooth, thickness and precision is higher, but in prior art, cleaning method during polishing and while corroding is simpler, can greatly reduce like this effect of polishing and corrosion.
Summary of the invention:
Technical problem to be solved by this invention is to provide a kind of cleaning performance good, is convenient to the processing technology of the brilliant resonator of quartz of wafer polishing and corrosion treatment.
The technical problem solving adopts following technical scheme:
The processing technology of quartzy brilliant resonator, comprise the following steps: successively workprint sorting, grinding, polishing, the vacuum coating of cleaning burn into, shelve a glue, frequency modulation, encapsulation, lettering and measurement, it is characterized in that: before described polishing, need crystal to clean, first use washing lotion heated wash, rear is hydrofluoric acid dips below 40% 5~10 minutes by concentration; Washing lotion heated wash is first used in described cleaning corrosion, and the saturated ammonium fluoride solution of rear use soaks 40~60 minutes, finally uses washing lotion heated wash again, with deionized water, carries out 3~5 heating, and excusing from death cleans up.
Described washing lotion be configured to deionized water 55~60 weight portions, the concentrated sulfuric acid 35~40 weight portions, and potassium bichromate 3~6 weight portions.
During described grinding, each, all need mill to clean while changing abrasive material.
Described frequency modulation carries out under vacuum.
Described grinding comprises that in 6S, mill, 4S wash mill and 3B fine grinding sequentially.
The invention has the beneficial effects as follows: the present invention is simple and convenient, be convenient to control, cleaning performance is good, is convenient to wafer polishing and corrosion treatment, and wafer polishing and corrosive effect are good, are conducive to improve the quality of product.
Embodiment:
For technological means, creation characteristic that the present invention is realized, reach object and effect is easy to understand, below in conjunction with instantiation, further set forth the present invention.
The processing technology of quartzy brilliant resonator, comprise the following steps: successively workprint sorting, grinding, polishing, the vacuum coating of cleaning burn into, shelve a glue, frequency modulation, encapsulation, lettering and measurement, before polishing, need crystal to clean, first use washing lotion heated wash, rear is hydrofluoric acid dips below 40% 5~10 minutes by concentration; Clean corrosion and first use washing lotion heated wash, the saturated ammonium fluoride solution of rear use soaks 40~60 minutes, finally uses washing lotion heated wash again, with deionized water, carries out 3~5 heating, and excusing from death cleans up.
Washing lotion be configured to deionized water 55~60 weight portions, the concentrated sulfuric acid 35~40 weight portions, and potassium bichromate 3~6 weight portions.During grinding, when each replacing abrasive material, all need mill to clean.Frequency modulation carries out under vacuum.Grind and comprise that sequentially in 6S, mill, 4S wash mill and 3B fine grinding.
More than show and described basic principle of the present invention and principal character and advantage of the present invention.The technical staff of the industry should understand; the present invention is not restricted to the described embodiments; that in above-described embodiment and specification, describes just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.

Claims (5)

1. the processing technology of quartzy brilliant resonator, comprise the following steps: successively workprint sorting, grinding, polishing, the vacuum coating of cleaning burn into, shelve a glue, frequency modulation, encapsulation, lettering and measurement, it is characterized in that: before described polishing, need crystal to clean, first use washing lotion heated wash, rear is hydrofluoric acid dips below 40% 5~10 minutes by concentration; Washing lotion heated wash is first used in described cleaning corrosion, and the saturated ammonium fluoride solution of rear use soaks 40~60 minutes, finally uses washing lotion heated wash again, with deionized water, carries out 3~5 heating, and excusing from death cleans up.
2. the processing technology of the brilliant resonator of quartz according to claim 1, is characterized in that: described washing lotion be configured to deionized water 55~60 weight portions, the concentrated sulfuric acid 35~40 weight portions, and potassium bichromate 3~6 weight portions.
3. the processing technology of the brilliant resonator of quartz according to claim 1, is characterized in that: during described grinding, each, all need mill to clean while changing abrasive material.
4. the processing technology of the brilliant resonator of quartz according to claim 1, is characterized in that: described frequency modulation carries out under vacuum.
5. the processing technology of the brilliant resonator of quartz according to claim 1, is characterized in that: described grinding comprises that in 6S, mill, 4S wash mill and 3B fine grinding sequentially.
CN201310646697.5A 2013-12-04 2013-12-04 Processing technique of quartz-crystal resonator Pending CN103684315A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310646697.5A CN103684315A (en) 2013-12-04 2013-12-04 Processing technique of quartz-crystal resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310646697.5A CN103684315A (en) 2013-12-04 2013-12-04 Processing technique of quartz-crystal resonator

Publications (1)

Publication Number Publication Date
CN103684315A true CN103684315A (en) 2014-03-26

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105141271A (en) * 2015-09-25 2015-12-09 江苏海峰电子有限公司 Processing method for manufacturing crystal base plate of quartz-crystal resonator
CN106209006A (en) * 2016-08-01 2016-12-07 安徽贝莱电子科技有限公司 A kind of production technology of quartz-crystal resonator
CN106826408A (en) * 2017-02-09 2017-06-13 同济大学 A kind of lbo crystal polishing method based on crystal oxidant
CN111112018A (en) * 2019-12-10 2020-05-08 廊坊中电熊猫晶体科技有限公司 Direct-insertion type quartz crystal resonator dispensing device and using method thereof
CN112008501A (en) * 2020-08-14 2020-12-01 苏州珂玛材料科技股份有限公司 Method for improving aluminum nitride ceramic grinding surface flatness

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105141271A (en) * 2015-09-25 2015-12-09 江苏海峰电子有限公司 Processing method for manufacturing crystal base plate of quartz-crystal resonator
CN106209006A (en) * 2016-08-01 2016-12-07 安徽贝莱电子科技有限公司 A kind of production technology of quartz-crystal resonator
CN106826408A (en) * 2017-02-09 2017-06-13 同济大学 A kind of lbo crystal polishing method based on crystal oxidant
CN111112018A (en) * 2019-12-10 2020-05-08 廊坊中电熊猫晶体科技有限公司 Direct-insertion type quartz crystal resonator dispensing device and using method thereof
CN112008501A (en) * 2020-08-14 2020-12-01 苏州珂玛材料科技股份有限公司 Method for improving aluminum nitride ceramic grinding surface flatness
CN112008501B (en) * 2020-08-14 2021-10-29 苏州珂玛材料科技股份有限公司 Method for improving aluminum nitride ceramic grinding surface flatness

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Application publication date: 20140326