CN103681417B - A kind of semiconductor load direct current generator drives platform - Google Patents
A kind of semiconductor load direct current generator drives platform Download PDFInfo
- Publication number
- CN103681417B CN103681417B CN201310697068.5A CN201310697068A CN103681417B CN 103681417 B CN103681417 B CN 103681417B CN 201310697068 A CN201310697068 A CN 201310697068A CN 103681417 B CN103681417 B CN 103681417B
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- CN
- China
- Prior art keywords
- direct current
- current generator
- screw rod
- adjusting nut
- operating system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
Abstract
A kind of semiconductor load direct current generator drives platform, and it belongs to mechanical automation technical field. This platform comprises Tu Shang mechanism, computer operating system and direct current generator, and direct current generator is fixed on moving-member by direct current support, and is connected with the screw rod that drives prominent upper mechanism kinematic by shaft coupling; Screw rod is supported by bearing and bearing block, and the front end of screw rod is provided with the adjusting nut by adjusting nut seat supports, between bearing block and adjusting nut seat, is provided with stage clip. Button in this platforms through calculation machine operation system drives the mode of direct current generator motion, has reduced the technical ability requirement to operating personnel, has saved a part of manpower cost; Secondly action button is in computer operating system, can see very easily camera image while adjusts Tu Shang mechanism, greatly reduces operation easier; Moreover do not need arm to put in equipment while adjusting, stop because adjusting the Tu Shang mechanism possibility of causing danger.
Description
Technical field
The present invention relates to a kind of semiconductor load direct current generator and drive platform, it belongs to mechanical automation technical field, the position that is mainly applicable to operate inconvenience and requires precise displacement.
Background technology
In semiconductor loading device, Tu Shang mechanism, grasping mechanism and camera three's position directly has influence on the reliability of equipment and the quality of product, and especially the concentricity of Tu Shang mechanism and grasping mechanism is especially important. Wherein any one position changes all needs other two to carry out position corrigendum.
In order to strengthen the versatility of equipment, every equipment can adapt to plurality of specifications lead-in wire, and in the time that the wire widths of changing changes, grasping mechanism need to adjust in the Y direction, and Tu Shang mechanism and camera will be along with adjustment.
Tu Shang mechanism adopts differential head manual mode to regulate directions X and Y-direction now, and this mode is unsatisfactory. First, the adjustment of differential head is had relatively high expectations to operating personnel, need to have enough experiences; Secondly, while adjusting Tu Shang mechanism, operating personnel need to stare at the image of camera always, but Tu Shang mechanism in equipment position on the lower, and image display is on the display of machine the top, has increased the difficulty of practical operation; The 3rd, when adjustment, arm need to put in equipment, has certain danger.
Summary of the invention
In order to solve the problems of the technologies described above, the invention provides a kind of semiconductor load direct current generator and drive platform, this platform operations is simple, dangerous little.
The technical solution adopted in the present invention is: a kind of semiconductor load direct current generator drives platform, comprise the computer operating system JF-1 of Tu Shang mechanism and monitoring Tu Shang mechanism, it also comprises the direct current generator being connected with computer operating system JF-1, described direct current generator is fixed on moving-member by direct current support, and is connected with the screw rod that drives prominent upper mechanism kinematic by shaft coupling; Screw rod is supported by bearing and bearing block, and the front end of screw rod (6) is provided with the adjusting nut by adjusting nut seat supports, between described bearing block and adjusting nut seat, is provided with stage clip. Computer operating system JF-1 can obtain from Dalian Jia Feng Electronics Co., Ltd..
The invention has the beneficial effects as follows: this semiconductor load direct current generator drives platform, comprise Tu Shang mechanism, computer operating system and direct current generator, the rotation of computer operating system control direct current generator also can be monitored the motion of Tu Shang mechanism, direct current generator is fixed on moving-member by direct current support, and is connected with the screw rod that drives prominent upper mechanism kinematic by shaft coupling; Screw rod is supported by bearing and bearing block, and the front end of screw rod is provided with the adjusting nut by adjusting nut seat supports, between bearing block and adjusting nut seat, is provided with stage clip. Button in this platforms through calculation machine operation system drives the mode of direct current generator motion, has reduced the technical ability requirement to operating personnel, has saved a part of manpower cost; Secondly action button is in computer operating system, can see very easily camera image while adjusts Tu Shang mechanism, greatly reduces operation easier; Moreover do not need arm to put in equipment while adjusting, stop because adjusting the Tu Shang mechanism possibility of causing danger.
Brief description of the drawings
Below in conjunction with drawings and Examples, the invention will be further described.
Fig. 1 is a kind of direct current motor driving mechanism figure.
In figure: 1, direct current generator, 2, direct current support, 3, shaft coupling, 4, bearing block, 5, bearing, 6, screw rod, 7, adjusting nut seat, 8, adjusting nut, 9, stage clip.
Detailed description of the invention
Fig. 1 shows a kind of direct current motor driving mechanism figure. This direct current motor driving mechanism comprises the computer operating system of Tu Shang mechanism and monitoring Tu Shang mechanism, computer operating system is connected with direct current generator 1, direct current generator 1 is fixed on moving-member by direct current support 2, be connected with screw rod 6 with shaft coupling 3, screw rod 6 rear portions have bearing 5 to support, there is adjusting nut 8 front portion, and bearing 5 and adjusting nut 8 are separately fixed on bearing block 4 and adjusting nut seat 7, has stage clip to eliminate thread pitch between the two. Stay in the control button in computer operating system with mouse point, direct current generator 1 works on power, and unclamps mouse direct current generator 1 and quits work. The rotation number of turns of direct current generator 1 is controlled by the time length pressing & hold.
The size of screw rod 6 and pitch can be modified according to actual requirement. First can be more flexible when designing apparatus, direct current generator and screw rod are separate form, when design, can in the light of actual conditions lay; Secondly, screw rod 6 can be made multiple nonstandard fine thread, has been equivalent to improve the precision of direct current generator.
Claims (1)
1. a semiconductor load direct current generator drives platform, comprise the computer operating system JF-1 of Tu Shang mechanism and monitoring Tu Shang mechanism, it is characterized in that: also comprise the direct current generator (1) being connected with computer operating system JF-1, described direct current generator (1) is fixed on moving-member by direct current support (2), and is connected with the screw rod (6) that drives prominent upper mechanism kinematic by shaft coupling (3); Screw rod (6) is supported by bearing (5) and bearing block (4), and the front end of screw rod (6) is provided with the adjusting nut (8) being supported by adjusting nut seat (7), between described bearing block (4) and adjusting nut seat (7), is provided with stage clip (9); Stay in the control button on computer operating system JF-1 with mouse point, direct current generator (1) works on power, and unclamps mouse direct current generator (1) and quits work, and the rotation number of turns of direct current generator (1) is controlled by the time length pressing & hold; Screw rod (6) adopts nonstandard fine thread.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310697068.5A CN103681417B (en) | 2013-12-18 | 2013-12-18 | A kind of semiconductor load direct current generator drives platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310697068.5A CN103681417B (en) | 2013-12-18 | 2013-12-18 | A kind of semiconductor load direct current generator drives platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103681417A CN103681417A (en) | 2014-03-26 |
| CN103681417B true CN103681417B (en) | 2016-05-25 |
Family
ID=50318570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310697068.5A Active CN103681417B (en) | 2013-12-18 | 2013-12-18 | A kind of semiconductor load direct current generator drives platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103681417B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5491888A (en) * | 1992-07-01 | 1996-02-20 | Yamaha Hatsudoki Kabushiki Kaisha | Method for mounting component chips and an apparatus therefor |
| CN1241958A (en) * | 1996-12-25 | 2000-01-19 | 松下电器产业株式会社 | Part-holding head, part mounting device and part holding method |
| CN1664601A (en) * | 2005-01-06 | 2005-09-07 | 重庆大学 | Magneto rotor magnetizing and detecting apparatus |
| CN101098618A (en) * | 2006-06-29 | 2008-01-02 | 北京航空航天大学 | High speed full-automatic paster machine array type mounting head |
-
2013
- 2013-12-18 CN CN201310697068.5A patent/CN103681417B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5491888A (en) * | 1992-07-01 | 1996-02-20 | Yamaha Hatsudoki Kabushiki Kaisha | Method for mounting component chips and an apparatus therefor |
| CN1241958A (en) * | 1996-12-25 | 2000-01-19 | 松下电器产业株式会社 | Part-holding head, part mounting device and part holding method |
| CN1664601A (en) * | 2005-01-06 | 2005-09-07 | 重庆大学 | Magneto rotor magnetizing and detecting apparatus |
| CN101098618A (en) * | 2006-06-29 | 2008-01-02 | 北京航空航天大学 | High speed full-automatic paster machine array type mounting head |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103681417A (en) | 2014-03-26 |
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| C14 | Grant of patent or utility model | ||
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