Organic flat ultraviolet light source of a kind of flexibility and preparation method thereof
Technical field
The present invention relates to a kind of ultraviolet source, relate in particular to a kind of flexible flat ultraviolet source that simultaneously adopts organic polymer and ultra-thin glass to be made.
Background technology
Ultraviolet source is at aspects such as environmental protection, the energy, processing, illumination, medical treatment, as sterilization, laser-excitation source, and the degraded of the solidifying of light-sensitive material, material surface processing, etching, pollutant, biomedical detect and diagnosis and treatment etc. have important application.Ultra-violet radiation refers to that optical wavelength is between the electromagnetic radiation of X ray and visible light wave range, mainly be divided into long wave and (be called UVA, wavelength 315nm~400nm), medium wave (UVB, 280nm~315nm), shortwave (UVC, 200nm~280nm), vacuum ultraviolet (VUV) (VUV, 100nm~200nm) four wave bands, corresponding ultraviolet source is referred to as long wave, medium wave, shortwave and vacuum ultraviolet light source.Narrow spectrum medium wave ultraviolet (NB-UVB) light source in about 312nm for wavelength for example, especially treats aspect skin stubborn disease and is widely used in medical industry.
The version of traditional ultraviolet source mainly contains Straight, the tubular structures such as U-shaped, and working gas has two classes, and a class is mercury vapour, because it has pollution to environment, is progressively reducing such light source of use.Another kind of is to take the ultraviolet source that the inert gases such as Xe, Ne, Ar are working gas.Its working method of the latter is dielectric barrier discharge (DBD), produces excimers luminous, possesses monochromaticjty good, the advantage that ultra-violet light-emitting efficiency is high.By the direct luminous or indirect excitated fluorescent powder emitting ultraviolet light of plasma, radiation covers UVA, UVB, UVC wave band, can be widely used in the aspects such as environmental protection, the energy, processing, illumination, medical treatment.Take at present through long-term research think to the skin diseases such as treatment leucoderma, psoriasis safely and effectively NB-UVB light source be example (2005J.Am.Acad.Dermatol.52 (4), 660-670; 2011J Am Acad Dermatol.64 (5), 936-49), NB-UVB light source is mainly the ultraviolet lamp tube of being researched and developed by Dutch PHILIPS Co. at present, on market, most NB-UVB ultraviolet phototherapy instrument equipment all adopts this kind of fluorescent tube.Due to the similar common fluorescent lamp of tubular structure and energy-saving lamp structure, inflexibility is flexible, and the UVB light skewness that skin receives is difficult for accurately controlling radiation dose, to the space that still has greatly improved for clinical treatment.In addition, the structural volume such as tubulose are comparatively heavy, light-emitting area is disperseed, and large-area planar is processed and had limitation, and use and can increase cost to the high reflecting material of ultraviolet band, otherwise its actual ultra-violet radiation Efficiency Decreasing.Owing to needing the encapsulant of the high permeability of ultraviolet band, thus nearly all ultraviolet source all adopting quartz glass (as 2006J.Phys.D:Appl.Phys.39,3777; CN101540262, CN202084507).
Summary of the invention
The object of the invention: overcome the limitation of existing tubulose ultraviolet source, and the low problem of the ultraviolet permeability of current ultra-thin ultraviolet source, provide that a kind of technique is simple, with low cost, structure light and handy, be widely used, the flat ultraviolet light source of flexible.
Technical solution of the present invention: a kind of flexible flat ultraviolet source, comprise the sandwich construction of being prepared by the high saturating organic polymer of ultraviolet and ultra-thin glass, sandwich construction comprises prebasal plate, metacoxal plate and therebetween organic cavity layer; Described prebasal plate, metacoxal plate, organic cavity layer and blast pipe utilize after organic polymer sealing-in, by blast pipe, are discharged air and are filled with working gas.
Described prebasal plate consists of the electrode on ultra-thin glass, organic polymer and the ultra-thin glass of 30-100 μ m, and metacoxal plate consists of ultra-thin glass, organic polymer and the fluorescent coating on ultra-thin glass that can select.
Organic cavity layer between prebasal plate and metacoxal plate (thickness is at 10 μ m-1mm), use above-mentioned organic polymer, also can use PI(as Kapton) or PET film preparation, inside is provided with the cavity of 10 μ m-5mm width or the discharge space that passage forms.
Ultra-thin glass is by the aluminium Pyrex (as the AF32 of Schott company) of 30-100 μ m or quartz glass etc., and organic polymer layers can be by room temperature vulcanized silicone rubber (RTV) preparation, and cut-off wavelength is in 200nm left and right.
The discharge space length direction correspondence of described organic cavity layer one on prebasal plate glass surface and is formed the electrode being arranged in parallel.A described composition is prepared at ultra-thin glass surface by silk screen printing or electrolytic photoetching by electric conducting materials such as silver, copper the electrode being arranged in parallel, and is covered and formed by the high saturating organic polymer layers of ultraviolet.
Described organic cavity layer contains cavity or channel design, plays the effect of supporting and building discharge space simultaneously, and at the bottom metacoxal plate phosphor powder layer that scribbled on glass.
Ultra-violet radiation is based on luminescence of plasma and excite ultraviolet fluorescence powder luminous.Institute fill working gas mainly by inert gases such as Xe, Ne, Ar, with and halide as ArCl, KrCl, XeCl etc., air pressure, at 400-760torr, can produce the ultra-violet radiation of multiple wave band.Also can excite ultraviolet fluorescence powder by luminescence of plasma, cover wider ultraviolet band, meet flexibly multiple application demand.Xe-Ne mist for example, during work, radiation-curable 147nm, 172nm are main vacuum-ultraviolet light (VUV); And XeCl quasi-molecule can produce the NB-UVB radiation of 308nm; Ultra-violet radiation by VUV excites ultraviolet fluorescence powder, can cover UVA, UVB, UVC wave band, such as adopting ultraviolet fluorescence powder YAl3 (BO3) 4:Gd, can produce 312nm ultra-violet radiation, for the preparation of NB-UVB light source.
Preparation method of the present invention: prepare electrode group at ultra-thin glass surface with silk screen printing or electrolytic photoetching, at metacoxal plate coated phosphor powder layer on glass, between described prebasal plate glass and metacoxal plate glass, add organic cavity layer, make the cavity in organic cavity layer corresponding with electrode group and electrode group, finally by organic polymer, cover sealing prebasal plate glass 1 and metacoxal plate glass, and connection and the blast pipe that organic cavity layer is communicated with, all discharge spaces are effectively inflated and exhaust; Finally be filled with working gas, air pressure is at 400-760torr, then sealing-in exhaust pipe.
Described blast pipe can need to be set to one or two according to application; After exhaust, be filled with Ar gas, power up in servicely by the cleaning action of plasma self, the organic polymer in ultraviolet source prebasal plate and metacoxal plate is reacted, and discharge Ar gas and be filled with again working gas; Reduce after final sealing-in the discharge of its hydrocarbon class gas and aqueous vapor.
Compared with prior art, the invention has the beneficial effects as follows: structure of the present invention and preparation technology are all simple and clear reliable, utilize dielectric barrier discharge principle, by the direct luminous or indirect excitated fluorescent powder emitting ultraviolet light of plasma, utilize organic polymer and ultra-thin glass as substrate simultaneously, and use organic polymer sealing-in, inside organic cavity layer to be set as discharge space.Except making electrode and fluorescent material, 100 degrees Celsius of a needs or following low temperature carry out; Do not need to prepare extra dielectric layer; The relatively general plasma source of the operating voltage needing is lower; By coplanar discharge, design, reduce craft precision and require to increase yields; The high saturating organic polymer of ultraviolet and effective combination of ultra-thin glass, make device flexible, and strengthened air-tightness and the working life of pure organic materials device; It is convenient to reclaim, environmental protection.
Accompanying drawing explanation
Fig. 1 is three-dimensional structure schematic diagram of the present invention;
Fig. 2 is generalized section of the present invention;
Fig. 3 is operation principle schematic diagram of the present invention;
Fig. 4 is the structural representation of the embodiment of the present invention 2.
1. prebasal plate glass in figure, 2. electrode group, 3. metacoxal plate glass, 4. phosphor powder layer, 5. organic cavity layer, 6. cavity, 7. organic polymer, 8. blast pipe, 9. microchannel, 10. passage.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Embodiment 1:
As shown in Figure 1, 2.On prebasal plate glass 1, prepare electrode group 2a and electrode group 2b, on metacoxal plate glass 3, prepare phosphor powder layer 4, between described prebasal plate glass 1 and metacoxal plate glass 3, add organic cavity layer 5, make the cavity 6 in organic cavity layer 5 corresponding with electrode group 2a and electrode group 2b, finally by organic polymer 7, cover prebasal plate glass 1 and metacoxal plate glass 3, and connect blast pipe 8.
In organic cavity layer 5, be prepared with microchannel 9, communicate with cavity 6 and blast pipe 8, all discharge spaces are effectively inflated and exhaust.Can adopt one or two blast pipe 8 to use simultaneously, finally be filled with Ar as working gas, air pressure is at 400-760torr, and then sealing-in exhaust pipe 8.
Operation principle is as follows.Divide and applying reverse positive and negative alternating-current pulse at electrode group 2a and electrode group 2b, or only in electrode group 2a, apply positive and negative alternating-current pulse, and electrode group 2b ground connection, as shown in Figure 3.It is main ultra-violet radiation that Ar gas discharge sends 126nm, excites the phosphor powder layer 4 that is positioned at metacoxal plate glass 3 tops, makes it by prebasal plate glass 1 and organic polymer 7, emitting ultraviolet light.Prebasal plate glass 1 and metacoxal plate glass 3 are the aluminium Pyrex of 30-100 μ m, and as the AF32 glass of Schott company, cut-off wavelength is near 220nm, and organic polymer layers 7 is by room temperature vulcanized silicone rubber (RTV) preparation, and cut-off wavelength is near 200nm.So can see through the ultra-violet radiation of UVA, UVB and UVC wave band.
Embodiment 2:
Working gas in embodiment 1 is changed into Xe(>20%), Ne mist, it is main vacuum-ultraviolet light, then fluorescence excitation layering 4 emitting ultraviolet lights that Xe and Ne mixed gas discharge send 147nm and 172nm.
Embodiment 3:
Working gas in
embodiment 1 is changed into pure Xe body, because air pressure is in 400-760Torr, power up three-body collision between rear ground state Xe atom and excitation state Xe atom (as
) increase, making its gas discharge send 172nm is main vacuum-ultraviolet light, then fluorescence excitation layering 4 emitting ultraviolet lights, see through
prebasal plate glass 1 and
organic polymer 7 ejaculations.
Embodiment 4:
Working gas in embodiment 1 is changed to Ar and Cl
2mist, powers up rear formation ArCl quasi-molecule, sends peak value in the transition of 175nm(B-X state) vacuum ultraviolet, thereby fluorescence excitation bisque 4 emitting ultraviolet lights see through prebasal plate glass 1 and organic polymer 7 penetrates.
Embodiment 5:
As shown in Figure 4, redesign the organic cavity layer 5 in embodiment 1, with continuous passage 10, substitute cavity 6 and microchannel 9.By two blast pipes, 8 interface channels 9, in 1 blast pipe 8, be filled with the Ar gas that relative cost is lower therein, after powering up, by Ar plasma self cleaning action, make the hydrocarbon class gas of generation in organic cavity layer 5 and organic polymer 7 and emitting of aqueous vapor.Be filled with again afterwards working gas, last sealing-in exhaust pipe 8.
Embodiment 6:
The aluminium Pyrex of the prebasal plate glass 1 in embodiment 1 and metacoxal plate glass 3 are changed to near quartz glass (cut-off wavelength is 175nm).Thereby improve the ultraviolet permeability of UVC wave band.But can reduce the flexibility of this flexible flat ultraviolet source.
Embodiment 7:
Structure as shown in Figure 1, is distinguished as removing phosphor powder layer 4.Other structures are identical with above-described embodiment 1, and being filled with working gas is inert gas Xe and Cl
2mist.
Operation principle: apply anti-phase positive and negative alternating-current pulse by electrode group 2a and electrode group 2b, Xe and Cl are excited and form XeCl quasi-molecule, produce the transition of 308nm(B-X state) NB-UVB radiation, directly sees through prebasal plate glass 1 and organic polymer 7 penetrates.
Embodiment 8:
With embodiment 7, be filled with working gas and be changed to Kr and Cl
2mist, sends the transition of 222nm(B-X state by KrCl quasi-molecule after powering up) be main UVC radiation, directly see through prebasal plate glass 1 and organic polymer 7 ejaculations.
While being filled with working gas and being inert gas halide as KrCl, XeCl, the ultraviolet light of generation, in UVB and UVC scope, can directly see through prebasal plate glass 1 and organic polymer 7 and emit, and does not need phosphor powder layer (4).
The present embodiment non-limiting the present invention, for a person skilled in the art, the equivalents that also can obtain according to above enlightenment, this is still considered to be covered by among the present invention.