CN202084507U - Ultrathin tablet ultraviolet light source - Google Patents
Ultrathin tablet ultraviolet light source Download PDFInfo
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- CN202084507U CN202084507U CN2011201088420U CN201120108842U CN202084507U CN 202084507 U CN202084507 U CN 202084507U CN 2011201088420 U CN2011201088420 U CN 2011201088420U CN 201120108842 U CN201120108842 U CN 201120108842U CN 202084507 U CN202084507 U CN 202084507U
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- ultraviolet source
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Abstract
The utility model discloses an ultrathin tablet ultraviolet light source which comprises a front substrate, a rear substrate and a gridded orifice plate, wherein the front substrate and the rear substrate are made of a light-transmissive material, the gridded orifice plate is arranged between the front substrate and the rear substrate, peripheries of the front substrate, the rear substrate and the gridded orifice plate are sealed in an airtight manner, a plurality of through holes are arranged on the gridded orifice plate and used for dividing the space between the front substrate and the rear substrate into a plurality of discharging spaces, working gas is filled in the discharging spaces, a first electrode set and a second electrode set are arranged in parallel outside the front substrate in a staggered manner, and a third electrode set is arranged outside the rear substrate and vertical to the first electrode set and the second electrode set. In the utility model, electrodes are arranged outside the ultrathin tablet ultraviolet light source, can be assembled with a glass substrate of the light source in a separated manner, are more flexible to produce, and are convenient to adjust.
Description
Technical field
The utility model relates to a kind of ultraviolet source, relates in particular to a kind of dull and stereotyped ultraviolet source that adopts ultra-thin glass to be made into.
Background technology
In recent years, the research of efficient ultraviolet source of large tracts of land long-life has obtained people's extensive concern, and the exploitation of new ultra-violet light source is expected in aspects such as environmental protection, the energy, photocuring, medical sterilization, illumination acquisition important application.Ultra-violet radiation is the electromagnetic radiation of wavelength less than the certain limit of purple light wavelength, wavelength is 1～380nm, can be divided into long wave (code name UV-A, wavelength 315～380nm), medium wave (UV-B, 280～315nm), shortwave (UV-C, 200～280nm), (corresponding ultraviolet source is referred to as long wave, medium wave, shortwave and vacuum ultraviolet light source respectively to vacuum for UV-D, 1～200nm) 4 wave band.The version of ultraviolet source in the market mainly contains straight tube shape, U-shaped etc., and the body of inflating also is mainly the mercury vapour (not environmental protection) of various different pressure, large-area planar is handled have certain limitation.And the dull and stereotyped ultraviolet source of mentioning in the at present domestic and international patent also has the shortcoming of thick partially inclined to one side heaviness, and is inconvenient in the use.
The utility model content
The utility model purpose: the purpose of this utility model is at the deficiencies in the prior art, provides that a kind of volume is light and handy, applying flexible, bending deformed ultra-thin dull and stereotyped ultraviolet source.
Technical scheme: a kind of ultra-thin dull and stereotyped ultraviolet source described in the utility model, comprise by the prebasal plate and the metacoxal plate of light transmissive material preparation, place the grid orifice plate between described prebasal plate and the metacoxal plate; Described prebasal plate, metacoxal plate and grid orifice plate are put in the vacuum cavity together and are bled, and then to hermetic seal all around, the sealing-in frame that preferably adopts low-melting glass to make carries out hermetic seal; Described grid orifice plate is provided with several through holes the separated by spaces between described prebasal plate and the metacoxal plate is several discharge spaces, each discharge space correspondence the third electrode in first electrode, second electrode and the metacoxal plate outside in the prebasal plate outside, and the size of this discharge space is relevant with the number of the size of front-back baseboard and grid hole array; In the described discharge space of hermetic seal forward direction, charge into working gas; The staggered first electrode group and the second electrode group of being arranged with in parallel in the outside of described prebasal plate, the arranged outside of described metacoxal plate have with the described first electrode group and the second electrode prescription to vertical third electrode group.The bleeding of this flat board ultraviolet source, inflation and sealing-in are finished in vacuum cavity.
The working gas that is filled can be inert gas (He, Ne, Ar, Kr, Xe) or inert gas/halogen thing (as Xe/Br, Xe/I, Xe/F, Ar/C1) or their mixed gas, working gas directly produces the ultraviolet light of various wave bands or produces the ultraviolet light of various different-wavebands by the impact fluorescence powder, and air pressure range is at 50-760torr.For example, it is Xe that working gas fills in institute, or Ne-Xe mist (ratio of Xe＞20%), can directly produce the vacuum-ultraviolet light (UV-D) of 147nm and 172nm.Filling working gas as if institute is inert gas/halogen thing, as XeI, then can directly produce the ultraviolet light that wavelength is the UV-C wave band.If utilize fluorescent material, then the vacuum-ultraviolet light that produces can be converted into the ultraviolet light of UV-C or UV-B wave band.As in pure Xe or Ne-Xe mist, on waffle slab, apply fluorescent material (Gd, La) B
3O
6: Bi, then can produce the ultraviolet light of 311nm, this ultraviolet light can be used to do treating for skin disease such as psoriasis.And, then can produce the ultraviolet light about 250nm as on waffle slab, applying fluorescent material YPO4, can be used to carry out sterilizing and handle.
Be manufactured with the first electrode group on this flat-plate light source, the second electrode group and third electrode group.The first electrode group, the second electrode group and third electrode group are made of by the evaporation photoetching process silver, copper or aluminum, also can be made of ITO (indium tin oxide semiconductor) nesa coating or ZnO (zinc oxide) film.The utility model forms airtight discharge space with air seal, and under the alive outside driving, gas discharge produces ultraviolet light.During light source works, the connection that high voltage source is different, can make the gas discharge of discharge space be operated in surface discharge (discharges between the first and second electrode groups), subtend discharge (discharge between first, second electrode group and the third electrode group) or commingle discharging form (surface discharge and subtend discharge mix).Concrete which kind of discharge type that adopts by which kind of discharge more is easy to generate or is had higher brightness and light efficiency decision, finally is that physical dimension and inflation body by the physical dimension of grid hole, electrode many-sided factor that becomes to grade determines.
In order to reduce operating voltage, prebasal plate protective film layer is arranged at the inboard evaporation of described prebasal plate; Also evaporation has metacoxal plate protective film layer in the inboard of described metacoxal plate.The protective film layer is by magnesium oxide, calcium oxide, or other material that can improve secondary electron yield is made.
The working gas that is filled can directly produce UV-D, UV-C, UV-B, the ultraviolet light of the various different-wavebands of UV-A; Also can apply the phosphor powder layer material, the vacuum-ultraviolet light excitated fluorescent powder that is produced by the working gas that is filled produces UV-C, UV-B, the ultraviolet light of different-wavebands such as UV-A; Phosphor material powder can be coated in the through hole inboard of intermediate mesh orifice plate; The inboard of prebasal plate and metacoxal plate also can be coated with phosphor powder layer as required.
Described grid orifice plate can be made for insulating material such as glass, also can make for iron, ferroalloy or other electric conducting materials.For the ease of processing, the through hole of described grid orifice plate is preferably rectangle, and its side size range is 50 μ m～50mm.Certainly, the shape of through hole does not influence the performance of the utility model product, and the shape of through hole can be various geometries, typical shape such as rectangle, circle, rhombus etc.The thickness of described grid orifice plate is 50 μ m～50mm.
Front-back baseboard is except seal operation gas supports as the periphery of dull and stereotyped ultraviolet source, also as the dielectric impedance of gas discharge.For operating voltage that reduces gas discharge and the transmitance that improves ultraviolet light, the thickness of substrate is difficult for excessive, and comparative optimization ground, the thickness of described prebasal plate are 30～500 μ m; The thickness of described metacoxal plate is 30～500 μ m.
The preferred adopting quartz glass of light transmissive material that front-back baseboard is selected, AF45 glass etc. had both had very strong ultraviolet light transmission, can be made into the thickness of tens micron dimensions again.
The utility model compared with prior art, its beneficial effect is:
1, outside the dull and stereotyped ultraviolet source electrode of the utility model is produced on, and can separate assembling with the glass substrate of light source, make more flexibly, electrode structure is easy to adjust.
2, the bleeding of the dull and stereotyped ultraviolet source of the utility model, inflation and sealing-in are all finished in vacuum cavity, therefore do not have the necessary sealing-in pipe of common plasma device sealing-in, and device architecture is more firm.
3, the agent structure of the dull and stereotyped ultraviolet source of the utility model is bending deformed ultra-thin glass, built-in grid hole array board is as being sheet metal, also flexible distortion, therefore this flat-plate light source is lightly convenient, and flexible distortion, use more flexibly, both be fit to large-area treatment, also be fit to have the surface treatment of given shape.
Description of drawings
Fig. 1 is the structural representation of the ultra-thin dull and stereotyped ultraviolet source of the utility model.
Fig. 2 is the elevation cross-sectional view of the ultra-thin dull and stereotyped ultraviolet source of the utility model;
Fig. 3 is a kind of electrode connection diagram of the present utility model.
Fig. 4 is an another kind of electrode connection diagram of the present utility model.
Fig. 5 is an another kind of electrode connection diagram of the present utility model.
Embodiment
Below in conjunction with accompanying drawing, technical solutions of the utility model are elaborated, but protection range of the present utility model is not limited to described embodiment.
Embodiment 1: as shown in Figure 1, 2, a kind of ultra-thin dull and stereotyped ultraviolet source comprises prebasal plate 1, metacoxal plate 2, and place grid orifice plate 3 between the front-back baseboard.Described prebasal plate 1 is made by quartz glass, and the inboard evaporation matcoveredn film 4a at prebasal plate is used for reducing operating voltage, is manufactured with the staggered parallel first electrode group 5 and the second electrode group 6 in the outside of prebasal plate.Described metacoxal plate 2 is made by quartz glass, and the inboard evaporation matcoveredn film 4b at metacoxal plate is manufactured with third electrode group 7 in the outside of metacoxal plate, and the direction of this electrode group is vertical with the direction of first, second electrode group.Place the grid orifice plate between the front-back baseboard, play the effect that front-back baseboard forms a plurality of small discharge spaces of separating.Described grid orifice plate 3 is provided with several through holes 10 separated by spaces between described prebasal plate 1 and the metacoxal plate 2 is several discharge spaces 9, and each discharge space correspondence the third electrode in first electrode, second electrode and the metacoxal plate outside in the prebasal plate outside.Charging into working gas in discharge space is Xe+50%Ne, and air pressure range can be 50torr～760torr, applies phosphor powder layer 8 at the inwall of the through hole of grid orifice plate 3, and this phosphor material powder is (Gd, La) B
3O
6: Bi.The longitudinal section of the through hole 10 of described grid orifice plate 3 is a rectangle, and its side size range is at 50 μ m～50mm; The thickness of grid orifice plate 3 is 50 μ m～50mm.Around metacoxal plate, make the sealing-in frame with glass powder with low melting point, and it is put in the vacuum cavity and bleed with prebasal plate, grid orifice plate, and fill with the laggard promoting the circulation of qi of the required working gas of certain air pressure sealing and connect, just formed dull and stereotyped ultraviolet source provided by the utility model, under the alive outside driving, the excitated fluorescent powder of the vacuum-ultraviolet light that gas discharge produces, the ultraviolet light of generation 311nm.
The operation principle of this flat board ultraviolet source is as follows: with the dull and stereotyped ultraviolet source after the hermetic seal, electrode connection mode according to Fig. 3 connects appropriate, the positive and negative alternating-current pulse HV1 that will produce then is applied on the first electrode group 5, positive and negative alternating-current pulse HV2 is applied on the second electrode group 6, third electrode group 7 ground connection.Frequency and the duty ratio of alternating-current pulse HV1 and HV2 are identical, and just polarity is opposite fully, and when promptly the first electrode group applied positive voltage, the second electrode group applied negative voltage, and vice versa.Under this voltage applying mode, can produce the form of surface and subtend commingle discharging, help improving the brightness and the light efficiency of light source.Another simple type of drive is illustrated in figure 4 as, and the first electrode group and the second electrode group apply unified positive and negative alternating-current pulse, third electrode winding ground.Another simple type of drive is illustrated in figure 5 as, and the first electrode group applies unified positive and negative alternating-current pulse, the second electrode group and third electrode winding ground.
Embodiment 2: as shown in Figure 1, a kind of dull and stereotyped ultraviolet source comprises prebasal plate 1, metacoxal plate 2, and place grid orifice plate 3 between the front-back baseboard.Described prebasal plate is made by quartz glass, and the inboard evaporation matcoveredn film 4a at prebasal plate is used for reducing operating voltage.Described metacoxal plate 2 is made by quartz glass, at the inboard evaporation matcoveredn film 4b of metacoxal plate.Charging into working gas in discharge space is XeI.Make the sealing-in frame with glass powder with low melting point around the metacoxal plate, and it is put in the vacuum cavity and bleed with prebasal plate, grid orifice plate, and fill with the laggard promoting the circulation of qi sealing of the required working gas of certain air pressure and connect.Adopt transparent electrode materials such as ITO (indium tin oxide semiconductor) film or ZnO (zinc oxide) film to produce the first electrode group 5 and the second electrode group, 6 films that are complementary with the grid hole array, and making the transparent electrode thin film of the third electrode group 7 that is complementary, both and glass substrate assembling form the vacuum ultraviolet flat light source device.Under the alive outside driving, gas discharge directly produces the ultraviolet light of 253nm.
Present embodiment has only provided the concrete example application of part, but to those skilled in the art, also can design the various deformation product according to above enlightenment, and this still is considered to be covered by among the utility model.
Claims (9)
1. a ultra-thin dull and stereotyped ultraviolet source is characterized in that: comprise by the prebasal plate (1) and the metacoxal plate (2) of light transmissive material preparation, place the grid orifice plate (3) between described prebasal plate (1) and the metacoxal plate (2); Hermetic seal around described prebasal plate (1), metacoxal plate (2) and the grid orifice plate (3); Described grid orifice plate (3) is provided with several through holes (10) separated by spaces between described prebasal plate (1) and the metacoxal plate (2) is several discharge spaces (9), has charged into working gas in the described discharge space (9); The outside of described prebasal plate (1) is staggered to be arranged with the first electrode group (5) and the second electrode group (6) in parallel, and the arranged outside of described metacoxal plate (2) has and described first electrode group (5) and the vertical third electrode group (7) of second electrode group (6) direction.
2. ultra-thin dull and stereotyped ultraviolet source according to claim 1 is characterized in that: the inboard evaporation of described prebasal plate (1) has prebasal plate protective film layer (4a); The inboard evaporation of described metacoxal plate (2) has metacoxal plate protective film layer (4b).
3. ultra-thin dull and stereotyped ultraviolet source according to claim 1 is characterized in that: through hole (10) inboard of described grid orifice plate (3) is coated with phosphor powder layer (8).
4. ultra-thin dull and stereotyped ultraviolet source according to claim 1 is characterized in that: the inboard of described prebasal plate (1) and metacoxal plate (2) is coated with phosphor powder layer (8).
5. ultra-thin dull and stereotyped ultraviolet source according to claim 1 is characterized in that: the sealing-in frame of making by glass powder with low melting point around described prebasal plate (1), metacoxal plate (2) and the grid orifice plate (3) carries out hermetic seal.
6. ultra-thin dull and stereotyped ultraviolet source according to claim 1 is characterized in that: described through hole (10) is a rectangle, and its length of side is 50 μ m～50mm.
7. ultra-thin dull and stereotyped ultraviolet source according to claim 1 is characterized in that: the thickness of described prebasal plate (1) is 30～500 μ m; The thickness of described metacoxal plate (2) is 30～500 μ m.
8. ultra-thin dull and stereotyped ultraviolet source according to claim 1 is characterized in that: the thickness of described grid orifice plate (3) is 50 μ m～50mm.
9. ultra-thin dull and stereotyped ultraviolet source according to claim 1 is characterized in that: described light transmissive material is quartz glass or AF45 glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201088420U CN202084507U (en) | 2011-04-14 | 2011-04-14 | Ultrathin tablet ultraviolet light source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201088420U CN202084507U (en) | 2011-04-14 | 2011-04-14 | Ultrathin tablet ultraviolet light source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202084507U true CN202084507U (en) | 2011-12-21 |
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ID=45345129
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201088420U Expired - Fee Related CN202084507U (en) | 2011-04-14 | 2011-04-14 | Ultrathin tablet ultraviolet light source |
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| Country | Link |
|---|---|
| CN (1) | CN202084507U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102254782A (en) * | 2011-04-14 | 2011-11-23 | 东南大学 | Ultrathin flat ultraviolet light source |
| CN103681211A (en) * | 2013-11-15 | 2014-03-26 | 南京康桥新港光电有限公司 | Flexible organic flat ultraviolet light source and preparation method thereof |
| CN109767966A (en) * | 2018-12-27 | 2019-05-17 | 西安交通大学 | A kind of microcavity discharge ultraviolet radioactive device and preparation method thereof and microcavity array based on it |
-
2011
- 2011-04-14 CN CN2011201088420U patent/CN202084507U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102254782A (en) * | 2011-04-14 | 2011-11-23 | 东南大学 | Ultrathin flat ultraviolet light source |
| CN102254782B (en) * | 2011-04-14 | 2013-02-13 | 东南大学 | Ultrathin flat ultraviolet light source |
| CN103681211A (en) * | 2013-11-15 | 2014-03-26 | 南京康桥新港光电有限公司 | Flexible organic flat ultraviolet light source and preparation method thereof |
| CN103681211B (en) * | 2013-11-15 | 2016-08-17 | 南京康桥新港光电有限公司 | Flexible organic flat ultraviolet light source and preparation method thereof |
| CN109767966A (en) * | 2018-12-27 | 2019-05-17 | 西安交通大学 | A kind of microcavity discharge ultraviolet radioactive device and preparation method thereof and microcavity array based on it |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111221 Termination date: 20140414 |