CN103676474A - Split type manufacturing method of micro-imprinting mould - Google Patents
Split type manufacturing method of micro-imprinting mould Download PDFInfo
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- CN103676474A CN103676474A CN201310690969.1A CN201310690969A CN103676474A CN 103676474 A CN103676474 A CN 103676474A CN 201310690969 A CN201310690969 A CN 201310690969A CN 103676474 A CN103676474 A CN 103676474A
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Abstract
The invention discloses a split type manufacturing method of a micro-imprinting mould. The method comprises the following steps: designing required processing modules according to target patterns of an imprinting mould, wherein the distance between the single patterns of the target patterns of the imprinting mould is less than 1 mm, at least one dimension of the sizes of the single patterns is less than 1 mm, the modules comprise modules A and B, and the number of the modules is not less than 1; mechanically processing the modules A and B and module frames corresponding to the modules; finally combining and fixing the modules A and B with the corresponding module frames to form the micro-imprinting mould, wherein the modules A and B are arranged in a staggered manner, no gap is formed between the modules A and B, and the modules A and B are different in height.
Description
Technical field
The present invention relates to a kind of manufacture method of micro-embossing mould, be specifically related to the split type manufacture method of a kind of micro-embossing mould.
Background technology
Micro-embossing technology is micro-one of conventional technology that copies.Micro-embossing technology only need be prepared a template (mould), just can be fast, cheap, process much duplicate easily, also there is the advantages such as machining 3 D structure plan, processing different materials.
In micro-embossing, copying of information is difficult point, and the manufacture of mould is the approach of information reproduction.The method that is usually used at present micro-embossing mould has: all-in-one-piece fine precision optical machinery processing, LIGA technology, accurate LIGA technology.Fine precise machine machining requires expensive precision optical machinery oil (gas) filling device, and the synchrotron radiation X radiant of LIGA Technology Need costliness and X-ray mask and light source are rare, have greatly limited the application of LIGA technology.Accurate LIGA technology needs expensive equipment equally.Accurate LIGA technology comprises UV-LIGA, SI-LIGA and the DEM technology of Laser-LIGA, use silicon deep etching process.The SU8 negative photoresist adopting in UV-LIGA technology is very responsive to photoetching process parameter, and repeatability is poor, and particularly SU photoresist has generated cross-linked polymer after overexposure and electroforming process, is difficult to remove, and has limited application.And it is larger in silicon deep etching process, from silicon, directly to carry out micro-electroforming difficulty.
In addition, all-in-one-piece fine precision optical machinery processing, LIGA technology, accurate LIGA technology, because spacing between each relief pattern of the mould processing is very little, cannot process to improve smooth finish to the sidewall of pattern.Rough sidewall is easy to cause the rear demoulding difficulty of impression, even in knockout course, destroys the rear pattern of mould or impression.
Summary of the invention
The object of the present invention is to provide a kind of method that obtains high precision micro-embossing mould by common process equipment, be specifically related to the split type manufacture method of a kind of micro-embossing mould.
The technical solution that realizes the object of the invention is:
The manufacture method that micro-embossing mould is split type, described method comprises:
(1) according to the module of the processing of the target pattern design of impressing mould; Between the single pattern of target pattern of described impressing mould, spacing is less than 1mm and single pattern dimension has at least one dimension to be less than 1mm, and module comprises A, B module, and quantity is more than or equal to 1;
(2) machining A, B module and the corresponding module rack of module;
(3) fixedly A, B module group and corresponding module rack form micro-embossing mould in combination; Described A, B module arrangement mode be for being staggered, and between A, B module, seamless and A, B module height are not etc.
Wherein, the pattern of the target pattern of step (1) impressing mould for needing to form at body surface after impression, this pattern comprises the single pattern that quantity is greater than 1, as being respectively 0.1mm square by length and width height, each square horizontal direction 0.2mm of being separated by, vertical direction is concordant, and it is exactly a kind of target pattern that the such square of 200 row 150 row is arranged the pattern forming, and wherein length and width height is respectively for the square of 0.1mm is the single pattern in target pattern.
The single pattern dimension of target pattern of described impressing mould is at least less than the length that 1mm refers to single pattern on one dimension and has at least to be less than a 1mm.If single pattern is cylindrical, billiard table, circular cone, refers to its diameter, highly have at least one to be less than 1mm.
Described module comprises A, B module and multimode more, and the kind of module and quantity are determined according to the requirement of the target pattern of required impressing mould.
Step (2) machining refers to all processes that can manufacture a product by mechanical means, includes but not limited to: cut, heavy processing, metal bonding, metal drawing, plasma cutting, precision welding, rolling and forming, sheet metal brake forming, die forging, water spray cutting, precision welding.
Step (3) combination stuck-module and corresponding module rack, mode can be for utilizing fastenings (screw, register pin etc.) by module and the fixing method of module rack, also can fix by the plunging of interference fit, or other modes are fixed, as riveting, the method that the physical characteristics that applied metal material expands with heat and contract with cold is fixed, method for brazing, while utilizing low-melting alloy condensation, the characteristic of volumetric expansion is carried out fastening low-melting alloy method, by the phosphoric acid solution of epoxy adhesive or aluminium hydroxide and cupric oxide powder be mixed in the gap that cementing agent pours into retaining element, solidify after fixing method.
A micro-embossing mould, adopts the split type manufacture method of above-mentioned micro-embossing mould, said method comprising the steps of:
(11) according to the module of the processing of the target pattern design of impressing mould: between the single pattern of target pattern of described impressing mould, spacing is less than 1mm and single pattern dimension has at least one dimension to be less than 1mm, described processing module is comprised of A plate B plate, wherein A plate and B plate are rectangular structure, and length is respectively 5-300mm, 0.01-1mm, 1-200mm;
(12) the corresponding module rack of machining module and module: process according to A plate B plate shape step (11) Suo Shu, the module rack of A plate B plate is placed in processing simultaneously;
(13) combination stuck-module group and corresponding module rack form micro-embossing mould: according to the mode of ABABABABA, arrange A, B plate and be positioned over and in module rack, make together with A plate B plate fits tightly, seamless between A, B plate, with bolt, fixedly A, B plate group form micro-embossing mould to module rack surrounding.
A micro-embossing mould, adopts the split type manufacture method of above-mentioned micro-embossing mould, said method comprising the steps of:
(21) according to the module of the processing of the target pattern design of impressing mould: between the single pattern of target pattern of described impressing mould, spacing is less than 1mm and single pattern dimension has at least one dimension to be less than 1mm, described processing module is comprised of A plate B plate, wherein A plate and B plate are comprised of upper and lower two parts respectively, top and the bottom are wide different long, high rectangular structure and are the integrated design, under described A plate and B plate, part rectangular structure has identical length, and upper part rectangular structure has identical length and width;
(22) the corresponding module rack of machining module and module: process according to A plate B plate shape step (21) Suo Shu, the module rack of A plate B plate is placed in processing simultaneously, and module rack inside has cavity, and the profile of cavity shape and A plate B plate matches;
(23) combination stuck-module group shape is put up micro-embossing mould with corresponding module: according to the mode of ABABABABA, arrange A, B plate and be positioned over and in module rack, make together with A plate B plate fits tightly, seamless between A, B plate, with bolt, fixedly A, B plate group form micro-embossing mould to module rack surrounding.
Wherein, in step (21), under A plate and B plate, the length of part rectangular structure is respectively 5-300mm, 0.01-1mm, 1-200mm, on A plate, the length of part rectangular structure is respectively 5-300mm, 0.01-1mm, 1-10mm, on B plate, the length and width of part rectangular structure is respectively 5-300mm, 0.01-1mm, and short transverse is than the low 0.01-1mm of A plate.
A micro-embossing mould, adopts the split type manufacture method of above-mentioned micro-embossing mould, said method comprising the steps of:
(31) according to the module of the processing of the target pattern design of impressing mould: between the single pattern of target pattern of described impressing mould, spacing is less than 1mm and single pattern dimension has at least one dimension to be less than 1mm, described processing module is comprised of A plate B plate, wherein A plate and B plate are respectively by upper, in, lower three parts form, top and the bottom are wide different long, high rectangular structure, middle part is trapezium structure, part rectangular structure appearance etc. on trapezoidal upper base and plate, go to the bottom with plate under part rectangular structure appearance etc., and on, in, lower three parts are the integrated design, in described A plate and B plate, lower part trapezium structure and rectangular structure have identical length, wide, high, waist, upper part rectangular structure has identical length, wide,
(32) the corresponding module rack of machining module and module: process according to A plate B plate shape step (31) Suo Shu, the module rack of A plate B plate is placed in processing simultaneously, and module rack inside has cavity, and the profile of cavity shape and A plate B plate matches;
(33) combination stuck-module and corresponding module rack group form micro-embossing mould: according to the mode of ABABABABA, arrange A, B plate and be positioned over and in module rack, make together with A plate B plate fits tightly, seamless between A, B plate, fixedly A, B plate group and module rack form micro-embossing mould between each plate, to smear high strength multi-use mucilage.
Wherein, in step (31), under A plate and B plate, the length of part rectangular structure is respectively 5-300mm, 0.01-1mm, 1-200mm, in A plate and B plate, part trapezium structure length, waist are 5-300mm, 0.01-1mm, 1-200mm, 1-200mm, on A plate, the length of part rectangular structure is respectively 5-300mm, 0.01-1mm, 1-10mm, on B plate, the length and width of part rectangular structure is respectively 5-300mm, 0.01-1mm, and short transverse is than the low 0.01-1mm of A plate.
A micro-embossing mould, adopts the split type manufacture method of above-mentioned micro-embossing mould, said method comprising the steps of:
(41) according to the module of the processing of the target pattern design of impressing mould: between the single pattern of target pattern of described impressing mould, spacing is less than 1mm and single pattern dimension has at least one dimension to be less than 1mm, described processing module is comprised of A rod B rod C rod, wherein A rod B rod C rod is rectangular structure, the rectangular structure length and width of described A rod and B rod equate but height not etc., the rectangular structure of described B rod C rod long, high equal but wide not etc.;
(42) the corresponding module rack of machining module and module: process according to A rod B rod C clavate shape step (41) Suo Shu, the module rack of A rod B rod C rod is placed in processing simultaneously, module rack inside has cavity, and the profile of cavity shape and A rod B rod C rod matches;
(43) combination stuck-module group and corresponding module rack form micro-embossing mould: according to
mode arrange A, B rod and be positioned over center in module rack, center surrounding is covered with C rod, and A rod B rod C rod is fitted tightly together, seamless between A, B, C rod, fixing A, the B rod group formation micro-embossing mould of bolt for module rack surrounding.
Wherein, in step (41), the length of A rod rectangular structure is respectively 0.001-1mm, 0.001-1mm, 1-200mm, and the length and width of B rod rectangular structure is respectively 0.01-1mm, 0.01-1mm, and short transverse is than the excellent low 0.01-1mm of A.
A micro-embossing mould, adopts the split type manufacture method of above-mentioned micro-embossing mould, said method comprising the steps of:
(51) according to the module of the processing of the target pattern design of impressing mould: between the single pattern of target pattern of described impressing mould, spacing is less than 1mm and single pattern dimension has at least one dimension to be less than 1mm, described processing module is comprised of A rod B rod, wherein A rod is cylindrical structural, B rod is column structure, on four long limits that described column structure is is foursquare rectangular scapus in bottom surface, slot, the xsect of described groove shape is 1/4 circular arc, its radius and A rod cylindrical cross-section radius of a circle equates, and described A rod and the excellent height of B are not etc.;
(52) the corresponding module rack of machining module and module: process according to A rod B clavate shape step (51) Suo Shu, the module rack of A rod B rod is placed in processing simultaneously, and module rack inside has cavity, and the profile of cavity shape and A rod B rod matches;
(53) combination stuck-module group and corresponding module rack form micro-embossing mould: according to
mode arrange A, B rod and be positioned in module rack A rod B rod is fitted tightly together, seamless between A, B rod, fixing A, the B rod group formation micro-embossing mould of bolt for module rack surrounding.
Wherein, in step (51), the bottom surface radius of circle of A rod cylindrical structural is 0.001-0.5mm, and height is 1-200mm, and 1/4 arc radius of B bar structure is 0.001-0.5mm, and short transverse is than the excellent low 0.01-1mm of A.
Compared with prior art, its remarkable advantage is in the present invention: the present invention proposes a kind of split type job operation of utilizing common process equipment just can manufacture micro-embossing mould.Adopt this method, can use common process equipment to process high precision micro-embossing mould, avoid the demand of fine precision optical machinery processing, LIGA technology, accurate LIGA Technology Need expensive device, solved the problem that the following pitch pattern sidewall of impressing mould 0.5mm cannot polishing simultaneously.
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Accompanying drawing explanation
Fig. 1 is vertical view and the cross-sectional view of micro-groove of 1 one kinds of micro-embossing die marks of embodiment.
Fig. 2 is the structural representation of 1 one kinds of micro-embossing mould A plates of embodiment.
Fig. 3 is the structural representation of 1 one kinds of micro-embossing mould B plates of embodiment.
Fig. 4 is vertical view and the cross-sectional view of 1 one kinds of micro-embossing die module framves of embodiment.
Fig. 5 is vertical view and the cross-sectional view of micro-groove of 2 one kinds of micro-embossing die marks of embodiment.
Fig. 6 is the structural representation of 2 one kinds of micro-embossing mould A plates of embodiment.
Fig. 7 is the structural representation of 2 one kinds of micro-embossing mould B plates of embodiment.
Fig. 8 is vertical view and the cross-sectional view of 2 one kinds of micro-embossing die module framves of embodiment.
Fig. 9 is the vertical view of micro-rectangle of 3 one kinds of micro-embossing die marks of embodiment.
Figure 10 is the structural representation of 3 one kinds of micro-embossing mould A rods of embodiment.
Figure 11 is the structural representation of 3 one kinds of micro-embossing mould B rods of embodiment.
Figure 12 is the structural representation of 3 one kinds of micro-embossing mould C rods of embodiment.
Figure 13 is embodiment 3 one kinds of micro-embossing mould A, B, C rods put in order (except indicating A, outside C, position is B).
Figure 14 is vertical view and the cross-sectional view of 3 one kinds of micro-embossing die module framves of embodiment.
Figure 15 is the vertical view of micro-rectangle of 4 one kinds of micro-embossing die marks of embodiment.
Figure 16 is the structural representation of 4 one kinds of micro-embossing mould A rods of embodiment.
Figure 17 is the structural representation of 4 one kinds of micro-embossing mould B rods of embodiment.
Figure 18 embodiment 4 one kinds of micro-embossing mould A, B rods put in order (except indicating A, position is B).
Figure 19 is vertical view and the cross-sectional view of 4 one kinds of micro-embossing die module framves of embodiment.
Embodiment
The following examples can make the present invention of those skilled in the art comprehend.
Embodiment 1
(1) the basis micro-channel patterns of impression as shown in Figure 1, groove width W is 0.01mm, and height H is 0.5mm, and length L is 190mm, W1 position, interval 0.01mm.The processing module of design mfg. moulding die.Described processing module is comprised of A plate (as shown in Figure 2) B plate (as shown in Figure 3), A plate quantity is 250, B plate quantity is 250, wherein A plate and B plate are comprised of upper and lower two parts respectively, top and the bottom are wide different long, high rectangular structure and are the integrated design, under described A plate and B plate, part rectangular structure has identical length, and upper part rectangular structure has identical length and width; Under A plate, part Ha1, La1 and Wa are respectively 290mm, 200mm and 0.01mm, and under B plate, part Hb1, Lb1 and Wb are respectively 290mm, 200mm and 0.01mm; On A plate, part Ha2 is 10mm, and La2 is 190mm, and Wa is 0.01mm, and on B plate, part Hb2 is 9.5mm, and Lb2 is 190mm, and Wb is 0.01mm.
(2) the corresponding module rack of machining module and module: process according to A plate B plate shape step (11) Suo Shu, the module rack (as shown in Figure 4) of A plate B plate is placed in processing simultaneously, shown in module rack inside have cavity, the profile of cavity shape and A plate B plate matches, cavity is divided into upper and lower two rectangular parallelepipeds, top rectangular structure Lab1, Hab1, Wab are 200mm, 290mm, 5mm, and bottom rectangular structure Lab2, Hab2, Wab are 190mm, 9.9mm, 5mm.
(3) combination stuck-module group forms micro-embossing mould: according to the mode of ABABABABA arrange A, B plate is positioned over and puts into shape module rack as shown in Figure 4, the AA face of A plate, together with the BB face of B plate all fits tightly with the CC of module rack face, and by module rack side (direction of DD shown in Fig. 4), be bolted A, B plate group formation micro-embossing mould, in EE direction, form the staggered impression face of height.
Embodiment 2
The manufacture method that micro-embossing mould is split type, said method comprising the steps of:
(1) the basis micro-channel patterns of impression as shown in Figure 5, groove width 0.3mm, degree of depth 0.5mm, interval 0.3mm.Trench length 100mm, the processing module of design mfg. moulding die.Described processing module is comprised of A plate (as shown in Figure 6) B plate (as shown in Figure 7), A plate quantity is 6, B plate quantity is 7, wherein A plate and B plate are respectively by upper, in, lower three parts form, top and the bottom are wide different long, high rectangular structure, middle part is trapezium structure, part rectangular structure appearance etc. on trapezoidal upper base and plate, go to the bottom with plate under part rectangular structure appearance etc., and on, in, lower three parts are the integrated design, in described A plate and B plate, lower part trapezium structure and rectangular structure have identical length, wide, high, waist, upper part rectangular structure has identical length, wide, under A plate and B plate the length of part rectangular structure be respectively 300,0.3mm, 200mm, part trapezium structure upper base in A plate and B plate, go to the bottom, wide, high, be 100,300,0.3mm, 150mm, on A plate, the length of part rectangular structure is respectively 100mm, 0.3mm, 2.6mm, and on B plate, the length of part rectangular structure is respectively 100mm, 0.3mm, 2.1mm.
(2) the corresponding module rack of machining module and module: process according to A plate B plate shape step (1) Suo Shu, the module rack (as shown in Figure 8) of A plate B plate is placed in processing simultaneously, shown in module rack inside have cavity, the profile of cavity shape and A plate B plate matches, cavity is by upper, in, lower three parts form, top and the bottom are wide different long, high rectangular structure, middle part is trapezium structure, part rectangular structure appearance etc. on trapezoidal upper base and plate, go to the bottom with plate under part rectangular structure appearance etc., top rectangular structure is long, wide, height is 100mm, 3.9mm, 2.1mm, bottom rectangular structure is long, wide, height is 300mm, 3.9mm, 200mm, middle part trapezium structure upper base, go to the bottom, wide, height is 100, 300, 3.9mm, 150mm,
(3) combination stuck-module group forms micro-embossing mould: according to the mode of ABABABABA arrange A, B plate is positioned over and puts into shape module rack as shown in Figure 4, the AA face of A plate, together with the BB face of B plate all fits tightly with the CC of module rack face, and by smearing high strength multi-use mucilage fixedly A, B plate group formation micro-embossing mould between each plate, in EE direction, form the staggered impression face of height.
Embodiment 3
The manufacture method that micro-embossing mould is split type, said method comprising the steps of:
(1) the basis micro-rectangular patterns of impression as shown in Figure 9, rectangle is given prominence to high 0.3mm, and wide length is 0.5mm.Rectangle interval 0.5mm, the processing module of design mfg. moulding die.Described processing module is comprised of A rod (as shown in figure 10) B rod (as shown in figure 11) C rod (as shown in figure 12), wherein A rod and B excellent for bottom surface be foursquare rectangular structure, C rod is rectangular structure, the rectangular structure bottom surface length of side of described A rod B rod C rod equate but height not etc.; The length of A rod rectangular structure is respectively 0.5mm, 0.5mm, 10.3mm, and the length of B rod rectangular structure is respectively 0.5mm, 0.5mm, 10mm, and the length of C rod rectangular structure is respectively 0.5mm, 0.25mm, 10mm.
(2) the corresponding module rack of machining module and module: process according to A rod B rod C clavate shape step (1) Suo Shu, the module rack of A rod B rod C rod is placed in processing simultaneously, module rack inside has cavity, and the profile of cavity shape and A rod B rod C rod matches;
(3) combination stuck-module group and corresponding module rack form micro-embossing mould: according to
mode arrange A, B rod and be positioned over center in module rack, center surrounding is covered with C rod, A rod B rod C rod is fitted tightly together, seamless between A, B, C rod, the AA face of A rod, the BB face of B rod, together with the CC face of C rod all fits tightly with the DD of module rack face, and by smear phosphoric acid solution and the cupric oxide powder of aluminium hydroxide between A, B, C rod, be mixed into cementing agent, after solidifying, fixedly A, B, C rod group form micro-embossing mould, in GG direction, form the staggered impression face of height.
Embodiment 4
The manufacture method that micro-embossing mould is split type, said method comprising the steps of:
(1) the basis micro-rectangular patterns of impression as shown in figure 15, the module of the processing of design: described processing module is comprised of A rod (as shown in figure 16) B rod (as shown in figure 17), wherein A rod is cylindrical structural, B rod is column structure, on four long limits that described column structure is is foursquare rectangular scapus in bottom surface, slot, the xsect of described groove shape is 1/4 circular arc, its radius equates with A rod cylindrical cross-section radius of a circle, the excellent height of described A rod and B is not etc., the bottom surface radius of circle of A rod cylindrical structural is 0.25mm, height is 10.3mm, 1/4 arc radius of B bar structure is 0.25mm, height is 10mm,
(2) the corresponding module rack of machining module and module: process according to A rod B clavate shape step (1) Suo Shu, the module rack (as shown in figure 19) of A rod B rod is placed in processing simultaneously, module rack inside has cavity, and the profile of cavity shape and A rod B rod matches;
(3) combination stuck-module group and corresponding module rack form micro-embossing mould: according to
mode arrange A, B rod and be positioned in module rack A rod B rod is fitted tightly together, seamless between A, B rod, the AA face of A rod, together with the BB face of B rod all fits tightly with the CC of module rack face, and by module rack side (direction of DD/EE shown in Figure 19) by soldering fixedly A, B rod group form micro-embossing mould, in FF direction, form just staggered impression face.
Embodiment 5
(1) the basis micro-channel patterns of impression as shown in Figure 1, groove width W is 1mm, and height H is 1mm, and length L is 1mm, W1 position, interval 0.5mm.The processing module of design mfg. moulding die.Described processing module is comprised of A plate (as shown in Figure 2) B plate (as shown in Figure 3), A plate quantity is 5, B plate quantity is 4, wherein A plate and B plate are comprised of upper and lower two parts respectively, top and the bottom are wide different long, high rectangular structure and are the integrated design, under described A plate and B plate, part rectangular structure has identical length, height, and upper part rectangular structure has identical length and width; Under A plate, part Ha1, La1 and Wa are respectively 3mm, 10mm and 1mm, and under B plate, part Hb1, Lb1 and Wb are respectively 3mm, 10mm and 0.5mm; On A plate, part Ha2, La2, Wa are respectively 2mm, 1mm, 1mm, and on B plate, part Hb2 is 1mm, and Lb2 is 1mm, and Wb is 0.5mm.
(2) the corresponding module rack of machining module and module: process according to A plate B plate shape step (11) Suo Shu, the module rack (as shown in Figure 4) of A plate B plate is placed in processing simultaneously, shown in module rack inside have cavity, the profile of cavity shape and A plate B plate matches, cavity is divided into upper and lower two rectangular parallelepipeds, top rectangular structure Lab1, Hab1, Wab are 10mm, 3mm, 7.5mm, and bottom rectangular structure Lab2, Hab2, Wab are 1mm, 1mm, 7.5mm.
(3) combination stuck-module group forms micro-embossing mould: according to the mode of ABABABABA arrange A, B plate is positioned over and puts into shape module rack as shown in Figure 4, the AA face of A plate, together with the BB face of B plate all fits tightly with the CC of module rack face, and pass through low-melting alloy method fixedly mould bases, A, B plate group group formation micro-embossing mould, in EE direction, form the staggered impression face of height.
Embodiment 6
(1) the basis micro-channel patterns of impression as shown in Figure 1, groove width W is 1mm, and height H is 0.01mm, and length L is 1mm, W1 position, interval 0.5mm.The processing module of design mfg. moulding die.Described processing module is comprised of A plate (as shown in Figure 2) B plate (as shown in Figure 3), A plate quantity is 5, B plate quantity is 4, wherein A plate and B plate are comprised of upper and lower two parts respectively, top and the bottom are wide different long, high rectangular structure and are the integrated design, under described A plate and B plate, part rectangular structure has identical length, height, and upper part rectangular structure has identical length and width; Under A plate, part Ha1, La1 and Wa are respectively 3mm, 10mm and 1mm, and under B plate, part Hb1, Lb1 and Wb are respectively 3mm, 10mm and 0.5mm; On A plate, part Ha2, La2, Wa are respectively 1.01mm, 1mm, 1mm, and on B plate, part Hb2 is 1mm, and Lb2 is 1mm, and Wb is 0.5mm.
(2) the corresponding module rack of machining module and module: process according to A plate B plate shape step (11) Suo Shu, the module rack (as shown in Figure 4) of A plate B plate is placed in processing simultaneously, shown in module rack inside have cavity, the profile of cavity shape and A plate B plate matches, cavity is divided into upper and lower two rectangular parallelepipeds, top rectangular structure Lab1, Hab1, Wab are 10mm, 3mm, 7.5mm, and bottom rectangular structure Lab2, Hab2, Wab are 1mm, 1mm, 7.5mm.
(3) combination stuck-module group forms micro-embossing mould: according to the mode of ABABABABA arrange A, B plate is positioned over and puts into shape module rack as shown in Figure 4, the AA face of A plate, together with the BB face of B plate all fits tightly with the CC of module rack face, and by riveted joint fixedly mould bases, A, B plate group form micro-embossing mould, in EE direction, form the staggered impression face of height.
Claims (10)
1. the split type manufacture method of micro-embossing mould, is characterized in that described method comprises:
(1) according to the module of the processing of the target pattern design of impressing mould; Between the single pattern of target pattern of described impressing mould, spacing is less than 1mm and single pattern dimension has at least one dimension to be less than 1mm, and module comprises A, B module, and quantity is more than or equal to 1;
(2) machining A, B module and the corresponding module rack of module;
(3) fixedly A, B module group and corresponding module rack form micro-embossing mould in combination; Described A, B module arrangement mode be for being staggered, and between A, B module, seamless and A, B module height are not etc.
2. a micro-embossing mould, is characterized in that, according to method manufacture described in claim 1, said method comprising the steps of:
(11) according to the module of the processing of the target pattern design of impressing mould: described processing module is comprised of A plate B plate, and wherein A plate and B plate are rectangular structure, and length is respectively 5-300mm, 0.01-1mm, 1-200mm;
(12) the corresponding module rack of machining module and module: process according to A plate B plate shape step (11) Suo Shu, the module rack of A plate B plate is placed in processing simultaneously;
(13) combination stuck-module group and corresponding module rack form micro-embossing mould: according to the mode of ABABABABA, arrange A, B plate and be positioned over and in module rack, make together with A plate B plate fits tightly, seamless between A, B plate, with bolt, fixedly A, B plate group form micro-embossing mould to module rack surrounding.
3. a micro-embossing mould, is characterized in that, according to method manufacture described in claim 1, said method comprising the steps of:
(21) according to the module of the processing of the target pattern design of impressing mould: described processing module is comprised of A plate B plate, wherein A plate and B plate are comprised of upper and lower two parts respectively, top and the bottom are wide different long, high rectangular structure and are the integrated design, under described A plate and B plate, part rectangular structure has identical length, and upper part rectangular structure has identical length and width;
(22) the corresponding module rack of machining module and module: process according to A plate B plate shape step (21) Suo Shu, the module rack of A plate B plate is placed in processing simultaneously, and module rack inside has cavity, and the profile of cavity shape and A plate B plate matches;
(23) combination stuck-module group shape is put up micro-embossing mould with corresponding module: according to the mode of ABABABABA, arrange A, B plate and be positioned over and in module rack, make together with A plate B plate fits tightly, seamless between A, B plate, by riveted joint, module rack, A, B plate group are fixed and formed micro-embossing mould.
4. micro-embossing mould according to claim 3, it is characterized in that: in step (21), under A plate and B plate, the length of part rectangular structure is respectively 5-300mm, 0.01-1mm, 1-200mm, on A plate, the length of part rectangular structure is respectively 5-300mm, 0.01-1mm, 1-10mm, on B plate, the length and width of part rectangular structure is respectively 5-300mm, 0.01-1mm, and short transverse is than the low 0.01-1mm of A plate.
5. a micro-embossing mould, is characterized in that, according to method manufacture described in claim 1, said method comprising the steps of:
(31) according to the module of the processing of the target pattern design of impressing mould: described processing module is comprised of A plate B plate, wherein A plate and B plate are respectively by upper, in, lower three parts form, top and the bottom are wide different long, high rectangular structure, middle part is trapezium structure, part rectangular structure appearance etc. on trapezoidal upper base and plate, go to the bottom with plate under part rectangular structure appearance etc., and on, in, lower three parts are the integrated design, in described A plate and B plate, lower part trapezium structure and rectangular structure have identical length, wide, high, waist, upper part rectangular structure has identical length, wide,
(32) the corresponding module rack of machining module and module: process according to A plate B plate shape step (31) Suo Shu, the module rack of A plate B plate is placed in processing simultaneously, and module rack inside has cavity, and the profile of cavity shape and A plate B plate matches;
(33) combination stuck-module and corresponding module rack group form micro-embossing mould: according to the mode of ABABABABA, arrange A, B plate and be positioned over and in module rack, make together with A plate B plate fits tightly, seamless between A, B plate, fixedly A, B plate group and module rack form micro-embossing mould between each plate, to smear high strength multi-use mucilage.
6. micro-embossing mould according to claim 5, it is characterized in that: in step (31), under A plate and B plate, the length of part rectangular structure is respectively 5-300mm, 0.01-1mm, 1-200mm, in A plate and B plate, part trapezium structure length, waist are 5-300mm, 0.01-1mm, 1-200mm, 1-200mm, on A plate, the length of part rectangular structure is respectively 5-300mm, 0.01-1mm, 1-10mm, on B plate, the length and width of part rectangular structure is respectively 5-300mm, 0.01-1mm, and short transverse is than the low 0.01-1mm of A plate.
7. a micro-embossing mould, is characterized in that, according to method manufacture described in claim 1, said method comprising the steps of:
(41) according to the module of the processing of the target pattern design of impressing mould: described processing module is comprised of A rod B rod C rod, wherein A rod B rod C rod is rectangular structure, the rectangular structure length and width of described A rod and B rod equate but height not etc., the rectangular structure of described B rod C rod long, high equal but wide not etc.;
(42) the corresponding module rack of machining module and module: process according to A rod B rod C clavate shape step (41) Suo Shu, the module rack of A rod B rod C rod is placed in processing simultaneously, module rack inside has cavity, and the profile of cavity shape and A rod B rod C rod matches;
(43) combination stuck-module group and corresponding module rack form micro-embossing mould: according to
mode arrange A, B rod and be positioned over center in module rack, center surrounding is covered with C rod, and A rod B rod C rod is fitted tightly together, seamless between A, B, C rod, by cast low-temperature alloy stuck-module frame, A, B rod group, forms micro-embossing mould.
8. micro-embossing mould according to claim 7, is characterized in that: A rod rectangular structure in step (41)
Length is respectively 0.001-1mm, 0.001-1mm, 1-200mm, and the length and width of B rod rectangular structure is respectively 0.01-1mm, 0.01-1mm, and short transverse is than the excellent low 0.01-1mm of A.
9. a micro-embossing mould, is characterized in that, according to method manufacture described in claim 1, said method comprising the steps of:
(51) according to the module of the processing of the target pattern design of impressing mould: described processing module is comprised of A rod B rod, wherein A rod is cylindrical structural, B rod is column structure, on four long limits that described column structure is is foursquare rectangular scapus in bottom surface, slot, the xsect of described groove shape is 1/4 circular arc, its radius and A rod cylindrical cross-section radius of a circle equates, and described A rod and the excellent height of B are not etc.;
(52) the corresponding module rack of machining module and module: process according to A rod B clavate shape step (51) Suo Shu, the module rack of A rod B rod is placed in processing simultaneously, and module rack inside has cavity, and the profile of cavity shape and A rod B rod matches;
(53) combination stuck-module group and corresponding module rack form micro-embossing mould: according to
mode arrange A, B rod and be positioned in module rack A rod B rod is fitted tightly together, seamless between A, B rod, fixing A, the B rod group formation micro-embossing mould of bolt for module rack surrounding.
10. micro-embossing mould according to claim 9, it is characterized in that: in step (51), the bottom surface radius of circle of A rod cylindrical structural is 0.001-0.5mm, height is 1-200mm, and 1/4 arc radius of B bar structure is 0.001-0.5mm, and short transverse is than the excellent low 0.01-1mm of A.
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| CN101135843A (en) * | 2006-08-31 | 2008-03-05 | 三星电机株式会社 | Method of manufacturing a stamper |
| US20090194913A1 (en) * | 2008-01-31 | 2009-08-06 | National Taiwan University | Method of micro/nano imprinting |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1474960A (en) * | 2001-05-18 | 2004-02-11 | �ʼҷ����ֵ�������˾ | Lithographic method of manufacturing device |
| CN1581434A (en) * | 2003-08-07 | 2005-02-16 | 株式会社东芝 | Design of pivture, optical mask and photoetching colloid figure, and method for making smiconductor device |
| US20060073425A1 (en) * | 2003-08-07 | 2006-04-06 | Kabushiki Kaisha Toshiba | Pattern designing method, photomask manufacturing method, resist pattern forming method and semiconductor device manufacturing method |
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| US20060222833A1 (en) * | 2005-03-31 | 2006-10-05 | Samsung Electro-Mechanics Co., Ltd. | Imprinting mold for printed circuit board having excellent durability and method of manufacturing printed circuit board using the same |
| CN101135843A (en) * | 2006-08-31 | 2008-03-05 | 三星电机株式会社 | Method of manufacturing a stamper |
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