CN103676138A - Multi-layer combined thin deformable mirror body structure - Google Patents
Multi-layer combined thin deformable mirror body structure Download PDFInfo
- Publication number
- CN103676138A CN103676138A CN201310741234.7A CN201310741234A CN103676138A CN 103676138 A CN103676138 A CN 103676138A CN 201310741234 A CN201310741234 A CN 201310741234A CN 103676138 A CN103676138 A CN 103676138A
- Authority
- CN
- China
- Prior art keywords
- mirror body
- mirror
- leg
- distorting lens
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention discloses a multi-layer combined thin deformable mirror body structure, which comprises a first mirror body and a second mirror body, wherein the upper surface of the first mirror body is formed into a reflecting surface; the lower surface of the first mirror body is provided with a plurality of mirror legs which are arranged at certain intervals; the second mirror body is thicker than the first mirror body; the second mirror body is provided with a plurality of through holes passing through the upper surface and the lower surface of the second mirror body; the mirror legs of the first mirror body pass through the through holes, and the lower surface of the first mirror body is jointed to the upper surface of the second mirror body. In the multi-layer combined thin deformable mirror body structure according to the embodiment of the invention, the second thicker mirror body can be used for supporting the first thinner mirror body during polishing of the upper surface of the first mirror body, thereby preventing the mirror face of the first mirror body from being deformed easily during polishing and contributing to enhancing the polishing effect of the first mirror body; moreover, the second mirror body is provided with the through holes, thereby reducing the eight of a deformable mirror and facilitating installation and debugging during splicing of a large-aperture deformable mirror.
Description
Technical field
The present invention relates to the polishing technology field of distorting lens mirror body, more specifically, relate to the thin distorting lens mirror structure of a kind of multiple layer combination.
Background technology
Distorting lens, claim again deformation reflection mirror, mainly apply among various ADAPTIVE OPTICS SYSTEMS, as wavefront correction device, proofread and correct wavefront error, in ADAPTIVE OPTICS SYSTEMS, play an important role, be one of vitals in ADAPTIVE OPTICS SYSTEMS, the research and development of distorting lens is related to calibration capability and the correction accuracy of whole ADAPTIVE OPTICS SYSTEMS.
Deformation reflection mirror formula is carried out phase distortion before compensated wave by changing own surperficial face shape, can be divided into two types of continuous surface shape and discrete surface.Continuous surface deformable mirror, its advantage is to obtain continuous face shape, and correction accuracy is high, and its shortcoming is that the deflection of face shape is smaller.The deformation reflection mirror of continuous surface can be divided into again whole actuating and two kinds of discrete actuatings.Whole actuating mainly contains two piezoelectric deforming mirrors and Bao Mo distorting lens, be characterized in when control voltage acts on a certain actuating unit, whole mirror surface all will produce distortion, and this class distorting lens is mainly used in coordinating with curvature Wavefront sensor the low step mode part of proofreading and correct wavefront distortion.A feature of discrete actuating distorting lens is when control voltage acts on an actuator, only has this actuator adjacent area to produce local deformation.When wherein direction of actuation is parallel to minute surface, actuator acts on catoptron edge, can only be for proofreading and correct the particular aberration such as defocus and astigmatism, and therefore the application in ADAPTIVE OPTICS SYSTEMS has been subject to limitation.Direction of actuation can be proofreaied and correct each rank aberration perpendicular to the continuous surface deformable mirror of minute surface, and can reach very high correction accuracy, therefore becomes a kind of wave-front corrector most widely used in ADAPTIVE OPTICS SYSTEMS.
The optical technology of carrying out real time correction by a deformable minute surface by atmospheric corrugated error is called adaptive optics.First adaptive optics will detect wavefront distortion situation, and then a small-sized deformable mirror by being arranged on telescope focal plane rear is corrected in real time in the face of wavefront.Actuator is installed after deformable minute surface.Adaptive optics is different from active optics, the picture element distortion that the latter causes because of factors such as gravity deformation by changing the shape adjustments of primary mirror, the impact that the former brings for compensating atmospheric turbulence.The deformable minute surface being arranged at present on the ground large optics astronomical telescope of 8 meters of left and right of bore is of a size of 8 to 20 centimetres, actuator quantity be hundreds of to thousands of not etc., each adjustment will complete within the time of 0.5 to 1 millisecond, otherwise atmospheric agitation will cause wavefront distortion situation to change.Adaptive optics need to be adjusted mirror shape with very high frequency, thereby deformable minute surface size is generally smaller, very high to the requirement of material.Once there is distorting lens and cannot bear high frequency adjustment and cracked accident.In addition, also require the quantity of actuator abundant, the series of problems such as also can bring thus cost to improve, operand is excessive.
Summary of the invention
The present invention is intended to solve at least to a certain extent one of above-mentioned technical matters of the prior art.
For this reason, one object of the present invention is to propose the thin distorting lens mirror structure of a kind of multiple layer combination simple in structure, that can improve polishing effect.
According to the thin distorting lens mirror structure of the multiple layer combination of the embodiment of the present invention, comprising: first mirror body, the upper surface of described first mirror body forms reflective surface, and the lower surface of described first mirror body is provided with a plurality of mirror legs arranged spaced apart; With the second mirror body, the thickness of described the second mirror body is greater than the thickness of described first mirror body, described the second mirror body is provided with described second upper surface of mirror body of a plurality of perforations and the through hole of lower surface, and the mirror leg of described first mirror body is through the fit upper surface of described the second mirror body of the lower surface of described through hole and described first mirror body.
According to the thin distorting lens mirror structure of the multiple layer combination of the embodiment of the present invention, by the upper surface laminating of the lower surface of first mirror body and the second mirror body is formed as one, can improve the mirror thickness rate of distorting lens, the thickness of first mirror body is little compared with the thickness of the second mirror body, when the upper surface of first mirror body is carried out to polishing, the second thicker mirror physical efficiency provides support for thinner first mirror body, make first mirror body minute surface when polishing be difficult for occurring out of shape, be conducive to improve the flatness of first mirror body polishing, improve polishing effect; And second mirror body be provided with a plurality of through holes, can alleviate the weight of distorting lens, when splicing heavy caliber distorting lens, be easy to Installation and Debugging.
In addition, the thin distorting lens mirror structure of multiple layer combination according to the above embodiment of the present invention, can also have following additional technical characterictic:
According to one embodiment of present invention, the axial length of described mirror leg is less than the thickness of described the second mirror body.
According to one embodiment of present invention, the diameter of described through hole is greater than the diameter of described mirror leg.
According to one embodiment of present invention, the upper end of described through hole is provided with the circular hole that diameter is greater than the diameter of described through hole, described circular hole and the coaxial setting of described through hole and the upper end of described circular hole and the upper surface conducting of described the second mirror body.
According to one embodiment of present invention, the thickness of described circular hole is less than the thickness of described first mirror body.
According to one embodiment of present invention, the lower surface of described first mirror body is provided with a plurality of location legs arranged spaced apart, and the upper surface of described the second mirror body is provided with pilot hole corresponding to leg position, a plurality of and described location.
According to one embodiment of present invention, the upper surface of described first mirror body and lower surface form rectangle substantially, and described mirror leg is evenly arranged on the lower surface of described first mirror body.
According to one embodiment of present invention, described location leg is located at respectively the position of contiguous four angles on the lower surface of described first mirror body.
According to one embodiment of present invention, the diameter of described location leg is less than the diameter of described mirror leg and equals the diameter of described pilot hole.
According to one embodiment of present invention, described mirror leg and described first mirror body are integrally formed.
Additional aspect of the present invention and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage accompanying drawing below combination obviously and is easily understood becoming the description of embodiment, wherein:
Fig. 1 is according to the sectional view of the thin distorting lens mirror structure of the multiple layer combination of the embodiment of the present invention;
Fig. 2 is according to the structural representation of the first mirror body of the thin distorting lens mirror structure of the multiple layer combination of the embodiment of the present invention;
Fig. 3 is according to the structural representation of the second mirror body of the thin distorting lens mirror structure of the multiple layer combination of the embodiment of the present invention;
Fig. 4 is according to the explosive view of the thin distorting lens mirror structure of the multiple layer combination of the embodiment of the present invention and pedestal;
Fig. 5 is according to the sectional view of the thin distorting lens mirror structure of the multiple layer combination of the embodiment of the present invention and pedestal.
Reference numeral:
The thin distorting lens mirror structure 100 of multiple layer combination;
The second mirror body 20; Through hole 21; Circular hole 22; Pilot hole 23;
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, be intended to for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " " center ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " vertically ", " level ", " top ", " end " " interior ", orientation or the position relationship of indications such as " outward " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.
In addition, term " first ", " second " be only for describing object, and can not be interpreted as indication or hint relative importance or the implicit quantity that indicates indicated technical characterictic.Thus, one or more these features can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the invention, the implication of " a plurality of " is two or more, unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, the terms such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or be integral; Can be mechanical connection, can be to be also electrically connected to; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals or the interaction relationship of two elements.For the ordinary skill in the art, can understand as the case may be above-mentioned term concrete meaning in the present invention.
Below in conjunction with accompanying drawing, specifically describe according to the thin distorting lens mirror structure 100 of the multiple layer combination of the embodiment of the present invention.
As shown in Figures 1 to 5, according to the thin distorting lens mirror structure 100 of the multiple layer combination of the embodiment of the present invention, comprise first mirror body 10 and the second mirror body 20.Particularly, the upper surface of first mirror body 10 forms reflective surface 11, the lower surface of first mirror body 10 is provided with a plurality of mirror legs 12 arranged spaced apart, the thickness of the second mirror body 20 is greater than the thickness of first mirror body 10, the second mirror body 20 is provided with a plurality of perforation second upper surfaces of mirror body 20 and the through hole of lower surface 21, and the mirror leg of first mirror body 10 12 is through the fit upper surface of the second mirror body 20 of the lower surface of through hole 21 and first mirror body 10.
Thus, according to the thin distorting lens mirror structure 100 of the multiple layer combination of the embodiment of the present invention, by the upper surface laminating of the lower surface of first mirror body 10 and the second mirror body 20 is formed as one, can improve the mirror thickness rate of distorting lens, the thickness of first mirror body 10 is little compared with the thickness of the second mirror body 20, when the upper surface of first mirror body 10 is carried out to polishing, the second thicker mirror body 20 can provide support for thinner first mirror body 10, make first mirror body 10 minute surface when polishing be difficult for occurring out of shape, be conducive to improve the flatness of first mirror body 10 polishings, improve polishing effect; And second mirror body 20 be provided with a plurality of through holes 21, can alleviate the weight of distorting lens, when splicing heavy caliber distorting lens, be easy to Installation and Debugging.
Wherein, as depicted in figs. 1 and 2, a plurality of mirror legs 12 are along the lower surface of first mirror body 10 to downward-extension, and the cross section of mirror leg 12 forms circle.As shown in figures 1 and 3, be formed with the through hole 21 with mirror leg 12 adaptations on the second mirror body 20, through hole 21 is circular port.The mirror leg 12 of first mirror body 10 from top penetrates the through hole 21 of the second mirror body 20, the fit upper surface of the second mirror body 20 of the lower surface of first mirror body 10.
There is the normal use together with pedestal 30 of distorting lens of the thin distorting lens mirror structure 100 of multiple layer combination, actuator (not shown) on pedestal 30 can activate having the distorting lens of the thin distorting lens mirror structure 100 of this multiple layer combination, thereby distorting lens is adjusted.As shown in Figure 5, pedestal 30 is provided with actuation channel 31, and the top of actuation channel 31 is provided with connector 32, and the distribution of each actuation channel 31, each connector 32 is consistent with the distribution of each mirror leg 12.Meanwhile, in each actuation channel 31 of pedestal 30, be also provided with actuator, a plurality of actuators activate by connector 32 and 12 pairs of first mirror bodies of mirror leg 10.
The reflective surface 11 of first mirror body 10 is used for reflecting laser, therefore its requirement has higher flatness, if directly first mirror body 10 is carried out to polishing,, because first mirror body 10 thickness are less, can not obtain higher flatness, and if to the second thicker mirror body 20 polishings, enable to obtain desirable polishing effect, but when actuator activates distorting lens, its actuation effect of bringing is poor, and distorting lens weight is also larger.According to the thin distorting lens mirror structure 100 of the multiple layer combination of the embodiment of the present invention, thinner first mirror body 10 and the second thicker mirror body 20 laminatings form the thin distorting lens of multiple layer combination, again the thin distorting lens of multiple layer combination is placed on glass polishing machine, the reflective surface of first mirror body 10 11 is carried out to polishing, the second mirror body 20 of below can provide support for the first mirror body 10 of top, first mirror body 10 is not occurred when polishing out of shape, improve the polishing effect of first mirror body 10; And the second thicker mirror body 20 is difficult broken in actuation process, in the serviceable life of having improved distorting lens, has strengthened dependability.
The mirror leg 12 of first mirror body 10 inserts the through hole 21 on the second mirror bodies 20, and after first mirror body 10 and the second mirror body 20 fit and form as one, the lower end of mirror leg 12 coordinates with the upper end of connector 32.According to one embodiment of present invention, the axial length of mirror leg 12 is less than the thickness of the second mirror body 20.That is to say, when connector 32 and 12 assembling of mirror leg, a part for connector 32 is positioned at the inside of through hole 21.
According to one embodiment of present invention, the diameter of through hole 21 is greater than the diameter of mirror leg 12.Thus, mirror leg 12 can easily insert through hole 21.
Further, in embodiments more of the present invention, the upper end of through hole 21 is provided with the circular hole 22 that diameter is greater than the diameter of through hole 21, circular hole 22 and the coaxial setting of through hole 21 and the upper end of circular hole 22 and the upper surface conducting of the second mirror body 20.Further, the thickness of circular hole 22 is less than the thickness of first mirror body 20.Thus, the weight that is provided with the second mirror body 20 of circular hole 22 is further reduced, and is conducive to improve actuation effect.
The diameter of the mirror leg 12 of first mirror body 10 is less than the diameter of the through hole of the second mirror body 20 21, when mirror leg 12 inserts through hole 21, between first mirror body 10 and the second mirror body 20, can shake, first mirror body 10 and the second mirror body 20 are difficult to accurately locate, for head it off, in one embodiment of the invention, the upper surface that the lower surface of first mirror body 10 is provided with a plurality of leg 13, the second mirror bodies 20 in location arranged spaced apart is provided with a plurality of pilot holes 23 corresponding with leg 13 positions, location.
Particularly, the second thicker mirror body 20 upper surfaces are coated with to gluing, when the lower surface of first mirror body 10 being placed in to the upper surface of gluing of the second mirror body 20, corresponding being plugged together of pilot hole 23 of the location leg 13 of first mirror body 10 lower surfaces and the second mirror body 20 upper surfaces, first mirror body 10 and the second mirror body 20 can be realized location as requested.Thus, first mirror body 10 and the second mirror body 20 can be respectively accurately be located by location leg 13 and pilot hole 23, and good positioning effect, location are convenient.
According to one embodiment of present invention, the upper surface of first mirror body 10 and lower surface form rectangle substantially, and mirror leg 12 is evenly arranged on the lower surface of first mirror body 10.Particularly, first mirror body 10 forms the rectangular parallelepiped that thickness is less, and mirror leg 12 is uniformly distributed at length direction and the Width of the lower surface along first mirror body 10.Correspondingly, the second mirror body 20 also forms rectangular parallelepiped, and length and width are identical with first mirror body 10, different from first mirror body 10, and the thickness of the second mirror body 20 is larger.When first mirror body 10 and the second mirror body 20 fit into one, the associative perception of first mirror body 10 and the second mirror body 20 is strong.
According to one embodiment of present invention, the diameter of location leg 13 is less than the diameter of mirror leg 12 and equals the diameter of pilot hole 23.Thus, location leg 13 and pilot hole 23 equal diameters can not produce gap when coordinating, and first mirror body 10 and the second mirror body 20 can not rock, and have guaranteed the effect of location.
In embodiments more of the present invention, mirror leg 12 is integrally formed with first mirror body 10.Thus, mirror leg 12 is integrally formed with first mirror body 10, has not only guaranteed the structural intergrity of first mirror body 10, and first mirror body 10 convenient formation of this structure, has reduced preparation cost.
It should be noted that, as shown in Figure 4 and Figure 5, at the upper surface of the second mirror body 20, be coated with after gluing four jiaos of four jiaos of second mirror bodies 20 that align of first mirror body 10, the lower surface of first mirror body 10 is placed on the coated face of the second mirror body 20, and pilot hole 23 and location leg 13 are realized location.Meanwhile, mirror leg 12 is concordant with the lower surface of the second mirror body 20.Deng glue dry after, confirm first mirror body 10 and the second mirror body 20 gummeds firmly, place it on glass polishing machine, the reflective surface 11 of first mirror body 10 is carried out to polishing plated film.Afterwards the upper end of the connector 32 of the lower end of the mirror leg 12 of first mirror body 10 and pedestal 30 is installed, alternatively, the diameter of connector 32 is consistent with the diameter of mirror leg 12, that is to say that the diameter of connector 32 is less than the diameter of through hole 21.A plurality of actuators just can activate by connector 32 and mirror leg 12.
Generally speaking, in the thin distorting lens mirror structure 100 of multiple layer combination of the embodiment of the present invention, thinner first mirror body 10 and the second thicker mirror body 20 are combined into one, the second mirror body 20 can provide support for first mirror body 10, make first mirror body 10 minute surface when polishing not occur out of shape, improve polishing effect, the second simultaneously thicker mirror body 20 is difficult for broken in actuation process, has improved dependability; And the second mirror body 20 is provided with the weight reducing of through hole 21 and circular hole 22, the second mirror bodies 20, also alleviated the weight of distorting lens integral body, improved actuation effect, when splicing heavy caliber distorting lens, be easy to Installation and Debugging.Therefore, the thin distorting lens mirror structure 100 of multiple layer combination is conducive to the polishing of heavy caliber minute surface when not reducing smooth finish, and can obtain desirable polishing effect, and is conducive to improve the actuation effect of each actuator.
According to other formations of the thin distorting lens mirror structure 100 of the multiple layer combination of the embodiment of the present invention and operation, be all known for those of ordinary skills, be not described in detail here.
In the description of this instructions, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present invention or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, to the schematic statement of above-mentioned term not must for be identical embodiment or example.And the specific features of description, structure, material or feature can be with suitable mode combinations in any one or more embodiment or example.In addition, those skilled in the art can engage the different embodiment that describe in this instructions or example and combine.
Although illustrated and described embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, and those of ordinary skill in the art can change above-described embodiment within the scope of the invention, modification, replacement and modification.
Claims (10)
1. the thin distorting lens mirror structure of multiple layer combination, is characterized in that, comprising:
First mirror body, the upper surface of described first mirror body forms reflective surface, and the lower surface of described first mirror body is provided with a plurality of mirror legs arranged spaced apart; With
The second mirror body, the thickness of described the second mirror body is greater than the thickness of described first mirror body, described the second mirror body is provided with described second upper surface of mirror body of a plurality of perforations and the through hole of lower surface, and the mirror leg of described first mirror body is through the fit upper surface of described the second mirror body of the lower surface of described through hole and described first mirror body.
2. the thin distorting lens mirror structure of multiple layer combination according to claim 1, is characterized in that, the axial length of described mirror leg is less than the thickness of described the second mirror body.
3. the thin distorting lens mirror structure of multiple layer combination according to claim 1, is characterized in that, the diameter of described through hole is greater than the diameter of described mirror leg.
4. the thin distorting lens mirror structure of multiple layer combination according to claim 1, it is characterized in that, the upper end of described through hole is provided with the circular hole that diameter is greater than the diameter of described through hole, described circular hole and the coaxial setting of described through hole and the upper end of described circular hole and the upper surface conducting of described the second mirror body.
5. the thin distorting lens mirror structure of multiple layer combination according to claim 4, is characterized in that, the thickness of described circular hole is less than the thickness of described first mirror body.
6. the thin distorting lens mirror structure of multiple layer combination according to claim 1, it is characterized in that, the lower surface of described first mirror body is provided with a plurality of location legs arranged spaced apart, and the upper surface of described the second mirror body is provided with pilot hole corresponding to leg position, a plurality of and described location.
7. the thin distorting lens mirror structure of multiple layer combination according to claim 6, is characterized in that, the upper surface of described first mirror body and lower surface form rectangle substantially, and described mirror leg is evenly arranged on the lower surface of described first mirror body.
8. the thin distorting lens mirror structure of multiple layer combination according to claim 7, is characterized in that, described location leg is located at respectively the position of contiguous four angles on the lower surface of described first mirror body.
9. the thin distorting lens mirror structure of multiple layer combination according to claim 7, is characterized in that, the diameter of described location leg is less than the diameter of described mirror leg and equals the diameter of described pilot hole.
10. according to the thin distorting lens mirror structure of the multiple layer combination described in any one in claim 1-9, it is characterized in that, described mirror leg and described first mirror body are integrally formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310741234.7A CN103676138A (en) | 2012-12-28 | 2013-12-26 | Multi-layer combined thin deformable mirror body structure |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210586663.7 | 2012-12-28 | ||
| CN201210586663 | 2012-12-28 | ||
| CN201310741234.7A CN103676138A (en) | 2012-12-28 | 2013-12-26 | Multi-layer combined thin deformable mirror body structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103676138A true CN103676138A (en) | 2014-03-26 |
Family
ID=50314211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310741234.7A Pending CN103676138A (en) | 2012-12-28 | 2013-12-26 | Multi-layer combined thin deformable mirror body structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103676138A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005099086A (en) * | 2003-09-22 | 2005-04-14 | Ricoh Co Ltd | Wavefront aberration correction mirror and optical pickup |
| CN101183174A (en) * | 2006-11-17 | 2008-05-21 | 船井电机株式会社 | Deformable mirror |
| US20090059340A1 (en) * | 2004-10-12 | 2009-03-05 | Centre National De La Recherche Scientifique-Cnrs | Deformable mirror |
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
| US20110211268A1 (en) * | 2008-08-14 | 2011-09-01 | Camet Sebastien | Deformable mirror having force actuators and distributed stiffness |
-
2013
- 2013-12-26 CN CN201310741234.7A patent/CN103676138A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005099086A (en) * | 2003-09-22 | 2005-04-14 | Ricoh Co Ltd | Wavefront aberration correction mirror and optical pickup |
| US20090059340A1 (en) * | 2004-10-12 | 2009-03-05 | Centre National De La Recherche Scientifique-Cnrs | Deformable mirror |
| CN101183174A (en) * | 2006-11-17 | 2008-05-21 | 船井电机株式会社 | Deformable mirror |
| US20110211268A1 (en) * | 2008-08-14 | 2011-09-01 | Camet Sebastien | Deformable mirror having force actuators and distributed stiffness |
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103558675B (en) | Reflective mirror regulating device and optical instrument | |
| JP6641974B2 (en) | Virtual image display | |
| US11640050B2 (en) | Microdisplay-based head-up display system | |
| US10684470B2 (en) | Array-based floating display | |
| CN102354051B (en) | Light beam deflection control device with superhigh frequency response and high sensitivity based on reflecting mirror translation | |
| CN105157578A (en) | System and method of measuring off-axis amount and off-axis angle of off-axis paraboloid main reflector | |
| CN102323656A (en) | High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge | |
| JP5804881B2 (en) | Semiconductor laser module for direct writing exposure equipment | |
| KR20170049562A (en) | Dmd projector with tir prism | |
| CN104155758A (en) | Large-view-field curved surface focal plane imaging method and system based on image transmitting optical fiber bundle | |
| CN103293662A (en) | Reflecting mirror surface shape control device | |
| CN103744177A (en) | Combined wavefront corrector | |
| JP2013161050A (en) | Optical element holder | |
| CN105527721A (en) | Star simulator optical system with long distance of exit pupil | |
| CN104977710A (en) | Optical system image quality compensating apparatus | |
| CN106918330B (en) | Laser module and laser line marking instrument | |
| CN103676138A (en) | Multi-layer combined thin deformable mirror body structure | |
| CN102279473B (en) | Optical system of star simulator | |
| US20120275043A1 (en) | Laser projection module with conical reflector supported by thin walls | |
| US8876306B2 (en) | Mirror comprising mechanical means for generating primary geometrical aberrations | |
| CN102422494B (en) | Folded lasers system | |
| US20160116755A1 (en) | Optical Mechanism | |
| CN103837981B (en) | A kind of method improving segmented micro deformable mirror fill factor, curve factor | |
| CN103645556A (en) | Deformable mirror | |
| CN102914869B (en) | Imaging optical system, lens unit and image projection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20140326 |