CN103668122A - Plasma equipment and support plate recovery device thereof - Google Patents
Plasma equipment and support plate recovery device thereof Download PDFInfo
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- CN103668122A CN103668122A CN201210325744.1A CN201210325744A CN103668122A CN 103668122 A CN103668122 A CN 103668122A CN 201210325744 A CN201210325744 A CN 201210325744A CN 103668122 A CN103668122 A CN 103668122A
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- support plate
- travelling belt
- cooling
- retrieving arrangement
- support component
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Abstract
The invention provides a support plate recovery device for plasma equipment. The device comprises a conveyor belt, a conveyor belt support component and a cooling component, wherein the conveyor belt is used for conveying a support plate; the conveyor belt support component is used for supporting the conveyor belt and is in contact with the conveyor belt; the cooling component is arranged in the conveyor belt support component and used for cooling the conveyor belt to cool the support plate on the conveyor belt. According to the support plate recovery device provided by the embodiment of the invention, the cooling component is arranged in the conveyor belt support component to cool the conveyor belt so as to cool the support plate on the conveyor belt, so that the support plate can be placed on the conveyor belt for a long time without scalding the conveyor belt; moreover, the support plate can be placed closer to a loading platform on the conveyor belt when waiting to be conveyed to the loading platform. The structure is simple, and the production efficiency is improved. The invention also provides plasma equipment with the support plate recovery device.
Description
Technical field
The present invention relates to plasma reinforced chemical vapor deposition system field, especially relate to a kind of plasma apparatus and support plate retrieving arrangement thereof.
Background technology
General plasma reinforced chemical vapor deposition system (PECVD system) comprising: loading stage; Load chamber; Process cavity; Unloading chamber; Relieving platform; Retrieving arrangement.In plasma apparatus, substrate is loaded onto on support plate in loading stage region, enters load chamber and carries out thermal pretreatment, is transferred into process cavity and carries out pecvd process after substrate reaches technological temperature requirement, then by unloading chamber, spreads out of chamber system and reaches relieving platform.Relieving platform and loading stage all can liftings, after relieving platform drops to lower floor by support plate, pass to retrieving arrangement, are then transferred to loading stage below, are raised to loading stage upper strata and carry out next one and circulate.In real production, be guaranteed efficiency, conventionally have polylith support plate and on plasma apparatus, move simultaneously.
In retrieving arrangement, usually can adopt the mode of driven by motor belt to transmit support plate.Because support plate is heated to very high temperature when the technique, through a series of cooling measures during to retrieving arrangement, more than temperature still remains on 200 degree.Belt can bear the high temperature of short period of time, can allow support plate pass through fast, but do not allow support plate to wait as long on belt, so have support plate on loading stage just when load, wait is passed to the support plate of loading stage and can only be waited at relieving platform, after loading stage loads, this support plate could transmit by retrieving arrangement, therefore wastes a transmission time.In addition, if be in an emergency need to stop transmission time at retrieving arrangement, support plate will be scalded belt because of Long contact time belt.
The mode adopting is at present that retrieving arrangement adopts and catches up with the roller transmission that layer is the same, can withstand high temperatures, but the shortcoming of which is, is that roller transmission is easily derailed on the one hand; The leveling that is on the other hand roller is more difficult.Another kind of mode is below retrieving arrangement, to increase by one group of cylinder, and when support plate is below retrieving arrangement is transferred to load chamber, cylinder rises, and by the back up pad that connects, by support plate jack-up, departs from belt, can wait as long at this.When if generation emergency situation need to stop, can rise cylinder to depart from belt at closed position, yet owing to having increased the flow process that cylinder rises and declines, thereby increased in time two links, cause the deficiency of efficiency.
Summary of the invention
The present invention is intended at least solve one of technical problem existing in prior art.
For this reason, one object of the present invention is to propose a kind ofly can carry out the support plate retrieving arrangement for plasma apparatus cooling and simple in structure to support plate.
Another object of the present invention is to propose a kind of plasma apparatus with above-mentioned support plate retrieving arrangement.
The support plate retrieving arrangement for plasma apparatus according to first aspect present invention embodiment, comprising: travelling belt, and described travelling belt is used for transmitting support plate; Travelling belt support component, described travelling belt support component is used for supporting described travelling belt and contacts with described travelling belt; And cooling-part, described cooling-part is located in travelling belt support component, for cooling described travelling belt with the support plate on cooling described travelling belt.
According to the support plate retrieving arrangement of the embodiment of the present invention, by be provided with cooling-part in travelling belt support component, thereby cooling conveyer belt, and then the support plate on cooling conveyer belt, support plate can be placed on travelling belt for a long time and can not scald travelling belt, and what make that support plate can more close loading stage when wait is transferred to loading stage is placed on travelling belt, simple in structure, has improved production efficiency.
In one embodiment of the invention, described cooling-part is the cooling medium pass that is formed in described travelling belt support component and has entrance and exit.Thus, make cooling-part simple in structure, and good cooling results.
In another embodiment of the present invention, described cooling-part is the heat-eliminating medium pipe being located in described travelling belt support component.Thus, make cooling-part simple in structure, and good cooling results.
Particularly, described travelling belt support component is made by metallic substance.Thereby, make the heat conduction of transmission belt support component fast, good heat conductivity, has guaranteed the cooling performance to support plate.
Preferably, described metallic substance is aluminium.Thereby, make travelling belt support component light, and heat conduction is fast.
According to some embodiments of the present invention, described travelling belt is layout parallel to each other two, described travelling belt support component for respectively with two travelling belts, two guide plates one to one.Thus, improve the operational throughput of support plate, improved production efficiency.
Further, the two sides of described guide plate are respectively equipped with side guide roller.Thereby, can guarantee the transmission direction of travelling belt.
Preferably, described cooling-part is the cooling medium pass being formed in described travelling belt support component, and the cooling medium pass in described two guide plates is connected in parallel to each other.Thus, make the cooling performance of cooling-part best.
A kind of plasma apparatus according to second aspect present invention embodiment, comprising: the loading stage being disposed in order, load chamber, process cavity, unloading chamber and relieving platform; With support plate retrieving arrangement, described support plate retrieving arrangement is for being transported to described loading stage by the support plate on described relieving platform, and described support plate retrieving arrangement is the support plate retrieving arrangement according to first aspect present invention embodiment.
According to the plasma apparatus of the embodiment of the present invention, by being provided with support plate retrieving arrangement, can carry out cooling to the support plate on travelling belt, thereby can avoid on travelling belt, scalding travelling belt because support plate rests on for a long time, and can allow support plate more close loading stage when wait is transferred to loading stage be placed on travelling belt, improved production efficiency, this plasma body device structure is simple, and production efficiency is high.
Alternatively, described plasma apparatus is CVD or PECVD equipment.
Additional aspect of the present invention and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage accompanying drawing below combination obviously and is easily understood becoming the description of embodiment, wherein:
Fig. 1 is according to the schematic diagram of the support plate retrieving arrangement of the embodiment of the present invention;
Fig. 2 is the vertical view of the travelling belt support component with cooling-part of the support plate retrieving arrangement shown in Fig. 1;
Fig. 3 is according to the schematic diagram of the plasma apparatus of the embodiment of the present invention; With
Fig. 4 is the schematic diagram of plasma apparatus according to another embodiment of the present invention.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " " center ", " longitudinally ", " laterally ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", orientation or the position relationship of indications such as " outward " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second " be only for describing object, and can not be interpreted as indication or hint relative importance.
In description of the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be to be also electrically connected to; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can particular case understand above-mentioned term concrete meaning in the present invention.
Below with reference to accompanying drawing, describe according to the support plate retrieving arrangement 100 for plasma apparatus of the embodiment of the present invention, support plate retrieving arrangement 100 can be for being transferred to loading stage 5 by the support plate 1 through processes from relieving platform 9.
According to the support plate retrieving arrangement 100 for plasma apparatus of the embodiment of the present invention, comprise: travelling belt 2, travelling belt support component 3 and cooling-part 4, wherein, travelling belt 2 is for transmitting support plate 1, travelling belt support component 3 contacts with travelling belt 2, for supporting travelling belt 2.Cooling-part 4 is located in travelling belt support component 3, thereby for the support plate 1 on cooling conveyer belt 2 cooling conveyer belts 2.
When support plate 1 is sent to support plate retrieving arrangement 100 from relieving platform 9, travelling belt 2 is pressed on travelling belt support component 3 by support plate 1, the temperature of travelling belt support component 3 is low, the temperature of support plate 1 is high, the temperature of travelling belt 2 can fall between, cooling-part 4 is arranged in travelling belt support component 3 and by 3 heat conduction of travelling belt support component, takes away the temperature of travelling belt 2, thus the support plate 1 on cooling conveyer belt 2.
According to the support plate retrieving arrangement 100 of the embodiment of the present invention, by at the interior cooling-part 4 that arranges of travelling belt support component 3, thereby cooling conveyer belt 2, and then the support plate on cooling conveyer belt 21, support plate 1 can be placed on travelling belt 2 for a long time and can not scald travelling belt 2, and simple in structure, improved production efficiency.
Particularly, cooling-part 4 can be and is formed in travelling belt support component 3 and has entrance 40 and the cooling medium pass of outlet 41.Certainly the invention is not restricted to this, cooling-part 4 also can be the heat-eliminating medium pipe with entrance 40 and outlet 41 being embedded in travelling belt support component 3.In other words, cooling-part 4 carries out cooling to travelling belt 2 by the heat-eliminating medium through in travelling belt support component 3, and preferably, heat-eliminating medium is water coolant, certainly the invention is not restricted to this, and heat-eliminating medium also can be N2 etc.Thus, good cooling results, and support plate retrieving arrangement 100 is simple in structure.
Further, travelling belt support component 3 can be made by metallic substance.Preferably, metallic substance is aluminium.Thereby this travelling belt support component 3 is light, has again the effect that heat conduction is fast.
According to some embodiments of the present invention, as depicted in figs. 1 and 2, travelling belt 2 is parallel to each other and spaced apart two, travelling belt support component 3 for respectively with two travelling belts 2 one to one 3, two guide plates 3 of two guide plates respectively with the contacting in order to place the lower surface of the epimere of support plate of two travelling belts 2.
In an embodiment of the present invention, travelling belt support component 3 is wrapped up by travelling belt 2 and contacts with transmission belt 2, and " parcel " refers to that travelling belt support component 3 is located in travelling belt 2 here, by transmission belt 2 around.In other words, travelling belt 2 can be divided into placing the upper end of support plate and the hypomere returning, travelling belt support component 3 is located between epimere and hypomere, and travelling belt support component 3 contacts with the lower surface (internal surface) of epimere, the epimere of the placement support plate of travelling belt 2 contacts with travelling belt support component 3 thus, with cooling support plate
Alternatively, the two sides of guide plate 3 are respectively equipped with side guide roller (scheming not shown).Thereby, can guarantee the transmission direction of travelling belt 2, and enhance productivity.Understandable upper, travelling belt 2 can be driven by suitable drive unit, and for example motor drives the driving pulley of travelling belt 2 one end by speed reduction unit.
Preferably, cooling-part 4 is for to be formed on the cooling medium pass in travelling belt support component 3, and the cooling medium pass in two guide plates 3 is connected in parallel to each other.Thus, make the cooling performance of cooling-part 4 better.In the example of Fig. 2, in guide plate 3a, be formed with the first cooling medium pass 4a, in guide plate 3b, be formed with the second cooling medium pass 4b, the left end of the left end of the first cooling medium pass 4a and the second cooling medium pass 4b is connected by pipeline G, and the right-hand member of the right-hand member of the first cooling medium pass 4a and the second cooling medium pass 4b is connected by pipeline G.As shown in the arrow in Fig. 2, heat-eliminating medium enters in cooling medium pass 4 from entrance 40, a part heat-eliminating medium after whole the first cooling medium pass 4a from exporting 41 outflows, another part heat-eliminating medium is successively through piping G-the second cooling medium pass 4b-pipeline G, finally from exporting 41 outflows.Thereby make the cooling performance of cooling-part 4 best.
Heat-eliminating medium can be water coolant, in the example of Fig. 2, is provided with valve 11 to control the flow of water coolant at entrance 40 places, at outlet 41 places, is provided with cooling-water temperature sensor 12 to regulate into the water yield according to the water temperature of outlet 41.Preferably, water inlet water temperature is no more than 35 degree, and hydraulic pressure is greater than 0.4Mpa, and lower than 0.8Mpa, discharge is greater than 8L/min.
Below with reference to Fig. 3 and Fig. 4, describe according to the plasma apparatus 200 of second aspect present invention embodiment.Alternatively, plasma apparatus 200 can be CVD equipment (chemical vapor depsotition equipment) or PECVD equipment (plasma enhanced chemical vapor deposition equipment).
Substrate is loaded onto on support plate 1 at loading stage 5, as shown in the arrow A in Fig. 3, the support plate 1 that substrate is housed enters into load chamber 6 and carries out thermal pretreatment, after substrate reaches technological temperature requirement, be transferred into process cavity 7 and carry out art breading, then by unloading chamber 8, be sent to relieving platform 9, on relieving platform 9, substrate taken out from support plate 1.As shown in the arrow B in Fig. 3, support plate retrieving arrangement 100 is transported to the support plate on relieving platform 91 on loading stage 5.
In the embodiment shown in fig. 3, plasma apparatus 200 is provided with a support plate retrieving arrangement 100, in the example of Fig. 4, plasma apparatus 200 is provided with three support plate retrieving arrangements 100, and support plate 1 is transported on loading stage 5 respectively after three support plate retrieving arrangements 100.
According to the plasma apparatus 200 of the embodiment of the present invention, by above-mentioned support plate retrieving arrangement 100, can carry out cooling to the support plate 1 on travelling belt 2, thereby can avoid on travelling belt 2, scalding travelling belt 2 because support plate 1 rests on for a long time, and improved production efficiency, according to the present invention, plasma apparatus 200 is simple in structure, and production efficiency is high.
In the description of this specification sheets, the description of reference term " embodiment ", " some embodiment ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present invention or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, the schematic statement of above-mentioned term is not necessarily referred to identical embodiment or example.And the specific features of description, structure, material or feature can be with suitable mode combinations in any one or more embodiment or example.
Although illustrated and described embodiments of the invention, those having ordinary skill in the art will appreciate that: in the situation that not departing from principle of the present invention and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, scope of the present invention is limited by claim and equivalent thereof.
Claims (10)
1. a support plate retrieving arrangement, reclaims for the support plate of plasma apparatus, it is characterized in that, comprising:
Travelling belt, described travelling belt is used for transmitting support plate;
Travelling belt support component, described travelling belt support component is used for supporting described travelling belt and contacts with described travelling belt; With
Cooling-part, described cooling-part is located in travelling belt support component, for cooling described travelling belt with the support plate on cooling described travelling belt.
2. support plate retrieving arrangement according to claim 1, is characterized in that, described cooling-part is the cooling medium pass that is formed in described travelling belt support component and has entrance and exit.
3. support plate retrieving arrangement according to claim 1, is characterized in that, described cooling-part is the heat-eliminating medium pipe being located in described travelling belt support component.
4. according to the support plate retrieving arrangement described in any one in claim 1-3, it is characterized in that, described travelling belt support component is made by metallic substance.
5. support plate retrieving arrangement according to claim 4, is characterized in that, described metallic substance is aluminium.
6. support plate retrieving arrangement according to claim 1, is characterized in that, described travelling belt is layout parallel to each other two, described travelling belt support component for respectively with two travelling belts, two guide plates one to one.
7. support plate retrieving arrangement according to claim 6, is characterized in that, the two sides of described guide plate are respectively equipped with side guide roller.
8. support plate retrieving arrangement according to claim 6, is characterized in that, described cooling-part is the cooling medium pass being formed in described travelling belt support component, and the cooling medium pass in described two guide plates is connected in parallel to each other.
9. a plasma apparatus, is characterized in that, comprising:
The loading stage being disposed in order, load chamber, process cavity, unloading chamber and relieving platform; With
Support plate retrieving arrangement, described support plate retrieving arrangement is for being transported to described loading stage by the support plate on described relieving platform, and described support plate retrieving arrangement is according to the support plate retrieving arrangement described in any one in claim 1-8.
10. plasma apparatus according to claim 9, is characterized in that, described plasma apparatus is CVD or PECVD equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210325744.1A CN103668122B (en) | 2012-09-05 | 2012-09-05 | Plasma apparatus and support plate retracting device thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210325744.1A CN103668122B (en) | 2012-09-05 | 2012-09-05 | Plasma apparatus and support plate retracting device thereof |
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| CN103668122A true CN103668122A (en) | 2014-03-26 |
| CN103668122B CN103668122B (en) | 2016-08-31 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0759529A2 (en) * | 1995-08-05 | 1997-02-26 | Dieter Fedder | Thermally conditioned conveyor belt |
| CN1449484A (en) * | 2000-08-25 | 2003-10-15 | 奥托库姆普联合股份公司 | Device for supporting a conveyor belt used in the continuously operated sintering of a material bed |
| CN102220567A (en) * | 2010-04-14 | 2011-10-19 | 中国科学院沈阳科学仪器研制中心有限公司 | Flat PECVD (plasma-enhanced chemical vapor deposition) silicon nitride coating system |
-
2012
- 2012-09-05 CN CN201210325744.1A patent/CN103668122B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0759529A2 (en) * | 1995-08-05 | 1997-02-26 | Dieter Fedder | Thermally conditioned conveyor belt |
| CN1449484A (en) * | 2000-08-25 | 2003-10-15 | 奥托库姆普联合股份公司 | Device for supporting a conveyor belt used in the continuously operated sintering of a material bed |
| CN102220567A (en) * | 2010-04-14 | 2011-10-19 | 中国科学院沈阳科学仪器研制中心有限公司 | Flat PECVD (plasma-enhanced chemical vapor deposition) silicon nitride coating system |
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| CN103668122B (en) | 2016-08-31 |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |