CN103645240B - Use ion microprobe to analyze the system and method for nonmetalloid and metallic element simultaneously - Google Patents
Use ion microprobe to analyze the system and method for nonmetalloid and metallic element simultaneously Download PDFInfo
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- CN103645240B CN103645240B CN201310654614.7A CN201310654614A CN103645240B CN 103645240 B CN103645240 B CN 103645240B CN 201310654614 A CN201310654614 A CN 201310654614A CN 103645240 B CN103645240 B CN 103645240B
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Abstract
The invention discloses a kind of system and method using ion microprobe simultaneously to analyze nonmetalloid and metallic element, this system comprises ion microprobe, neutral sputter thing gathering-device, ion gun and small spectrometer, the neutral sputter thing that described ion microprobe produces when analyzing sample collected by described neutral sputter thing gathering-device, and carry out quality analysis by described small spectrometer after being sent to described ion gun ionization, described ion microprobe and described small spectrometer are used for analyzing the metallic element in described sample and nonmetalloid respectively, or, described ion microprobe and described small spectrometer are used for analyzing the nonmetalloid in described sample and metallic element respectively, the object analyzed Gold Samples simultaneously and belong to element and nonmetalloid can be reached by ion microprobe and small spectrometer.
Description
Technical field
The present invention relates to technical field of analytical instruments, particularly a kind of system and method using ion microprobe simultaneously to analyze nonmetalloid and metallic element.
Background technology
Common ion microprobe uses ion pair sample to bombard, and sample is ionized, produces the secondary ion of representative sample composition, and then use mass spectrometer to carry out qualitative and quantitative analysis to secondary ion.The principle of the ion microprobe of mass analyzer is done as shown in Figure 1 in general employing magnetic field, and primary ion source 1 produces primary ions 2.Primary ions 2 is through ion optical lens 3, and 5,6 static focusings produced, to the surface of sample 7, bombard sample 7.Primary ions 2 and ion optical lens 3,5,6 are positioned at vacuum chamber 4.Primary ions 2 pairs of samples 7 bombard, and by sample segment 7 ionization, produce secondary ion 9.Secondary ion 9 is through ion optical lens 10,11,12, and electrostatic field analysis device 13, ion optical lens 15, magnetic field analysis device 16, ion optical lens 18, arrives receiver 19.Sample 7 and ion optical lens 10,11,12 are positioned at the first vacuum cavity 8.Ion optical lens 15 is positioned at vacuum chamber 14.Ion optical lens 18 is positioned at vacuum chamber 17.Electrostatic field analysis device 13 and magnetic field analysis device 16 form double focusing structure, while the mass separation realizing secondary ion 9, realize angle and focus on and Voice segment.Using primary ions 2 to bombard in the sputtering material of sample 7 generation, secondary ion 9 only occupies a very little part, and most of sputtering material is with atom, and the form of molecule or molecule group exists.The secondary ion 9 produced in bombardment process is introduced mass spectrometer.The intensity of magnetic field analysis device 16 determines the ionic species received by receiver 19.According to the signal intensity that receiver 19 receives, just qualitative and quantitative analysis can be carried out to sample 7.
But this traditional ion microprobe can not analyze nonmetalloid and metallic element simultaneously, this is because: when using ion microprobe to analyze sample, if the nonmetalloid in Water demand sample, the metallic ion bombardment samples such as general use Cs+ or Ga+, sample adds negative voltage; Nonmetalloid in sample obtains electronics and becomes negative ion, and due to sample belt negative electricity, the negative ion of generation is pushed into mass spectrometer and carries out quality analysis; If the metallic element in Water demand sample, the nonmetallic ion bombardment samples such as general use O-ion, sample adds positive voltage, and the metallic element in sample loses electronics and becomes positive ion, due to sample belt positive electricity, the positive ion of generation is pushed into mass spectrometer and carries out quality analysis.Because analyzing metal elements and nonmetalloid need to use different ions to bombard, sample adds the voltage of opposed polarity, and the polarity of secondary ion is different, therefore use traditional ion microprobe can not analyze the metallic element in sample and nonmetalloid simultaneously.
Therefore a kind of system and method using ion microprobe simultaneously to analyze nonmetalloid and metallic element is needed.
Summary of the invention
Fundamental purpose of the present invention is to provide a kind of system using ion microprobe simultaneously to analyze nonmetalloid and metallic element.
Another object of the present invention is to provide a kind of method using ion microprobe simultaneously to analyze nonmetalloid and metallic element.
In order to achieve the above object, the invention provides a kind of system using ion microprobe simultaneously to analyze nonmetalloid and metallic element, comprise ion microprobe, neutral sputter thing gathering-device, ion gun and small spectrometer, it is characterized in that, the neutral sputter thing that described ion microprobe produces when analyzing sample collected by described neutral sputter thing gathering-device, and carry out quality analysis by described small spectrometer after being sent to described ion gun ionization, described ion microprobe and described small spectrometer are used for analyzing the metallic element in described sample and nonmetalloid respectively, or, described ion microprobe and described small spectrometer are used for analyzing the nonmetalloid in described sample and metallic element respectively.
In above-mentioned either a program preferably, described neutral sputter thing gathering-device, ion gun and small spectrometer are positioned at the second vacuum cavity, the described front end hand-hole of neutral sputter thing gathering-device is connected with the first vacuum cavity of described ion microprobe, and end portals and to be connected with described ion gun.
In above-mentioned either a program preferably, also comprise the molecular pump be connected with described second vacuum cavity, under the effect of described molecular pump, the pressure in described second vacuum cavity is lower than the pressure in described first vacuum cavity.
In above-mentioned either a program preferably, described neutral sputter thing gathering-device is a funnel structure, the entrance of its front end hand-hole and described second vacuum cavity overlaps, and is connected to described first vacuum cavity by standard flange interface, and its end portals and is positioned at described ion gun inside.
In above-mentioned either a program preferably, described first vacuum cavity, second vacuum cavity and neutral sputter thing gathering-device are all connected to earth potential, described ion gun and small spectrometer are all fixed on described second vacuum cavity by standard flange interface, and are its power supply by this standard flange interface.
In above-mentioned either a program preferably, described neutral sputter thing gathering-device and the second vacuum cavity are that non-magnetic rustproof Steel material is made, described sample is positioned at described first vacuum cavity, described neutral sputter thing gathering-device is between described second vacuum cavity and the first vacuum cavity, and its end portals for the substance channel between described second vacuum cavity and the first vacuum cavity.
In above-mentioned either a program preferably, described ion microprobe adopts an ion microprobe, described ion gun can adopt electronics to bombard or swash light-struck mode by the ionization of described neutral sputter thing, and described small spectrometer comprises quadrupole mass spectrometer or time of-flight mass spectrometer.
Present invention also offers a kind of method using ion microprobe simultaneously to analyze nonmetalloid and metallic element, it is characterized in that, adopt the system comprising ion microprobe, neutral sputter thing gathering-device, ion gun and small spectrometer formation to carry out Realization analysis process, comprise the following steps:
(1) use the primary ions in described ion microprobe to bombard sample and sputter secondary ion and neutral sputter thing;
(2) described ion microprobe is used to analyze described secondary ion, to analyze metallic element in described sample or nonmetalloid;
(3) use described neutral sputter thing gathering-device to collect described neutral sputter thing, and be sent to described ion gun ionization;
(4) described small spectrometer is used to carry out quality analysis to the described neutral sputter thing after ionization: when described ion microprobe is used for analyzing the metallic element in described sample, described small spectrometer is used for analyzing the nonmetalloid in described sample; When described ion microprobe is used for analyzing the nonmetalloid in described sample, described small spectrometer is used for analyzing the metallic element in described sample.
In above-mentioned either a program preferably, described neutral sputter thing gathering-device, ion gun and small spectrometer are positioned at the second vacuum cavity, the described front end hand-hole of neutral sputter thing gathering-device is connected with the first vacuum cavity of described ion microprobe, and end portals and to be connected with described ion gun.
In above-mentioned either a program preferably, described system also comprises the molecular pump be connected with described second vacuum cavity, and under the effect of described molecular pump, the pressure in described second vacuum cavity is lower than the pressure in described first vacuum cavity.
In above-mentioned either a program preferably, described neutral sputter thing gathering-device is a funnel structure, the entrance of its front end hand-hole and described second vacuum cavity overlaps, and is connected to described first vacuum cavity by standard flange interface, and its end portals and is positioned at described ion gun inside.
In above-mentioned either a program preferably, described first vacuum cavity, second vacuum cavity and neutral sputter thing gathering-device are all connected to earth potential, described ion gun and small spectrometer are all fixed on described second vacuum cavity by standard flange interface, and are its power supply by this standard flange interface.
In above-mentioned either a program preferably, described neutral sputter thing gathering-device and the second vacuum cavity are that non-magnetic rustproof Steel material is made, described sample is positioned at described first vacuum cavity, described neutral sputter thing gathering-device is between described second vacuum cavity and the first vacuum cavity, and its end portals for the substance channel between described second vacuum cavity and the first vacuum cavity.
In above-mentioned either a program preferably, described ion microprobe adopts an ion microprobe, described ion gun can adopt electronics to bombard or swash light-struck mode by the ionization of described neutral sputter thing, and described small spectrometer comprises quadrupole mass spectrometer or time of-flight mass spectrometer.
Analyze compared with the technology of sample with only using ion microprobe in prior art, the present invention has the following advantages:
1, while use ion microprobe analysis Gold Samples belongs to element (or nonmetalloid), small spectrometer can analyze the nonmetalloid (or metallic element) in sample simultaneously, thus extend the function of ion microprobe, the object using ion microprobe simultaneously to analyze nonmetalloid and metallic element can be reached.
2, two mass spectrometers (also i.e. ion microprobe and small spectrometer) concurrent working, analyzes sample simultaneously, can promote the ability and efficiency that obtain sample message, thus carries out multianalysis to the nonmetalloid of sample and metallic element.
Accompanying drawing explanation
In order to clearer explanation technical scheme of the present invention, below the accompanying drawing used required in describing embodiment is briefly described, apparent, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of traditional ion microprobe;
Fig. 2 is that the embodiment of the present invention 1 uses ion microprobe to analyze the structural representation of the system of nonmetalloid and metallic element simultaneously.
Fig. 3 is that the embodiment of the present invention 2 uses ion microprobe to analyze the method flow schematic diagram of nonmetalloid and metallic element simultaneously.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention; clear, complete description is carried out to the technical scheme in the embodiment of the present invention; obviously described embodiment is only a part of embodiment of the present invention; it not whole embodiments; based on the embodiment in the present invention; those of ordinary skill in the art, not paying the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
embodiment 1
As shown in Figure 2, the embodiment of the present invention 1 provides a kind of system using ion microprobe simultaneously to analyze nonmetalloid and metallic element, comprise ion microprobe, neutral sputter thing gathering-device 20, ion gun 22 and small spectrometer 24, the neutral sputter thing 21(neutral sputter thing 21 here that the generation when analyzing sample 7 of described ion microprobe collected by described neutral sputter thing gathering-device 20 sputters thing also referred to as electric neutrality, neutral sputter thing gathering-device 20 is also referred to as electric neutrality sputtering thing gathering-device), and carry out quality analysis by described small spectrometer 24 after being sent to the ionization of described ion gun 22, described ion microprobe and described small spectrometer are used for analyzing the metallic element in described sample and nonmetalloid respectively, or, described ion microprobe and described small spectrometer are used for analyzing the nonmetalloid in described sample and metallic element respectively.
In this way, while use ion microprobe analysis Gold Samples belongs to element (or nonmetalloid), small spectrometer can analyze the nonmetalloid (or metallic element) in sample simultaneously, thus extend the function of ion microprobe, the object using ion microprobe simultaneously to analyze nonmetalloid and metallic element can be reached.
Described neutral sputter thing gathering-device 20, ion gun 22 and small spectrometer 24 are positioned at the second vacuum cavity 26, the front end hand-hole 28 of described neutral sputter thing gathering-device 20 is connected with the first vacuum cavity 8 of described ion microprobe, and end portals and 27 to be connected with described ion gun 22.
In this way, described neutral sputter thing gathering-device 20, ion gun 22 and small spectrometer 24 are integrated in the second vacuum cavity 26, described neutral sputter thing gathering-device 20 guides neutral sputter thing to enter in it by front end hand-hole 28 and realizes collecting function, and portalled by end and 27 reached in described ion gun 22 and carry out ionization, be convenient to follow-up small spectrometer 24 and quality analysis is carried out to it.
System of the present invention can also comprise the molecular pump 23(be connected with described second vacuum cavity and such as be fixed on the sidewall of the second vacuum cavity), under the effect of described molecular pump 23, the pressure in described second vacuum cavity 26 such as can lower than the pressure in described first vacuum cavity 8.Now due to the pressure difference of two cavitys, neutral sputter thing 21 portals in 27 ion guns 22 entered in the second vacuum cavity 26 easily through the end of neutral sputter thing gathering-device 20, facilitates ionization.
Neutral sputter thing gathering-device 20 can be such as a funnel structure, its front end hand-hole 28 can overlap (as shown in Figure 2 with the entrance 29 of described second vacuum cavity 26, both share upper opening, make the vacuum structure forming sealing between the two, and neutral sputter thing gathering-device 20 can be connected with the first vacuum cavity 8), and being connected to described first vacuum cavity 8 by standard flange interface, its end portals 27, and can be positioned at described ion gun inner.Neutral sputter thing 21 can be made so directly to enter in ion gun 22, be easy to ionization and become ion 25.
Described first vacuum cavity 8, second vacuum cavity 26 and neutral sputter thing gathering-device 20 are all connected to earth potential (being also namely connected to ground wire), described ion gun 22 and small spectrometer 24 are all fixed on described second vacuum cavity 26 by standard flange interface, and by this standard flange interface for its power supply is (because ion gun 22 and small spectrometer 24 are positioned at the second vacuum cavity 26, for not destroying vacuum environment, need to be powered by the flange-interface both are arranged on the second vacuum cavity 26, such as make electric wire pass flange-interface to enter in the second vacuum cavity 26 and to be electrically connected with ion gun 22 and small spectrometer 24, to realize for its work of electric drive).
Described neutral sputter thing gathering-device 20 and the second vacuum cavity 26 are made for non-magnetic rustproof Steel material, described sample 7 is arranged in described first vacuum cavity 8 (ion microprobe conventional with Fig. 1 is identical), described neutral sputter thing gathering-device 20 between described second vacuum cavity 26 and the first vacuum cavity 8 (as shown in Figure 2, neutral sputter thing gathering-device 20 is in fact clipped between the second vacuum cavity 26 and the first vacuum cavity 8, and the neutral sputter thing in the first vacuum cavity 8 is directed in the ion gun 22 in the second vacuum cavity 26), its end portals 27 for the substance channel (also namely in fact entering the passage of the ion gun 22 in the second vacuum cavity 26 as neutral sputter thing) between described second vacuum cavity and the first vacuum cavity.
Described ion microprobe adopts an ion microprobe, and described ion gun 22 can adopt electronics to bombard or swash light-struck mode by the ionization of described neutral sputter thing, and described small spectrometer 24 comprises quadrupole mass spectrometer or time of-flight mass spectrometer.
embodiment 2
As shown in Figure 2, the embodiment of the present invention 2 provides a kind of system using ion microprobe simultaneously to analyze nonmetalloid and metallic element in sample.This system comprises neutral sputter thing gathering-device 20(such as in funnel-form, and the front end hand-hole of funnel is connected with the first vacuum cavity 8, and end portals and 27 to be connected with ion gun 22), ion gun 22, small spectrometer 24, the second vacuum cavity 26, the effect that molecular pump 23(vacuumizes).Neutral sputter thing gathering-device 20, ion gun 22 and small spectrometer 24 are all positioned at the second vacuum cavity 26.
Neutral sputter thing gathering-device 20 and the second vacuum cavity 26 are made for non-magnetic rustproof Steel material, are connected to the first vacuum cavity 8 by standard flange interface.Neutral sputter thing gathering-device 20 is a funnel structure, is made up of non-magnetic rustproof Steel material, between the second vacuum cavity 26 and the first vacuum cavity 8.It 27 is substance channel between the second vacuum cavity 26 and the first vacuum cavity 8 that the end of neutral sputter thing gathering-device 20 portals.Neutral sputter thing portals 27 by the end of neutral sputter thing gathering-device 20, and to be positioned at ion gun 22 inner, to improve the ionizable probability of neutral sputter thing.First vacuum cavity 8, second vacuum cavity 26, neutral sputter thing gathering-device 20 all connects and earth potential.Ion gun 22 and small spectrometer 24 are all fixed on the second vacuum cavity 26 and (as shown in Figure 2, such as, can be fixed on the inwall of the second vacuum cavity 26), and are its power supply by the flange-interface of standard.Molecular pump 23 is connected to the second vacuum cavity 26 by standard flange interface.
The neutral sputter thing 21 produced in SIMS analysis process is introduced in the second vacuum cavity 26 by the present invention, carries out quality analysis by small spectrometer 24 to it.Such as, can adopt molecular pump 23, under the effect of molecular pump 23, the pressure in the second vacuum cavity 26 is lower than the pressure in the first vacuum cavity 8.Due to the pressure difference of two cavitys, neutral sputter thing 21 portals in 27 ion guns 22 entered in the second vacuum cavity 26 easily through the end of neutral sputter thing gathering-device 20.Neutral sputter thing gathering-device 20 has funnelform structure, and its end portals 27, and such as can be positioned at the ion gun 22 of small volume inner, to make neutral sputter thing 21 directly enter in ion gun 22, is easy to ionization and becomes ion 25.Also be the neutral sputter thing after ionization by the ion 25(generated) send into small spectrometer 24, realize quality analysis.Neutral sputter thing 21 realizes ionization in ion gun 22, and produce ion 25, ioning method can be electron impact ionization or laser bombardment ionization.Small spectrometer 24 can be quadrupole mass spectrometer or time of-flight mass spectrometer.
Such as analyzed sample 7 is zircon mineral.The main chemical compositions of zircon is Zr2SiO4, can containing metallic elements such as Li, Mg, Ti, U, Th, Pb, Hf, Fe, Al, Nb.When using the oxygen isotope in SIMS analysis zircon, use Cs+ to bombard zircon sample, zircon sample adds negative voltage, and electronegative particle of generation is subject to repulsion and leaves sample surfaces, finally enters magnetic field analysis device, realizes quality analysis.Because O16-, O17-, O18-have different quality, there is in magnetic field different movement locus, finally enter different receivers.The intensity of the signal received by each receiver, just can determine the oxygen isotope composition in zircon sample.Using Cs+ to bombard in the process of zircon sample, various metallic element not easily forms negative ion, and their great majority exist with electroneutral form, is a part for neutral sputter thing 21.These electroneutral materials are collected by neutral sputter thing gathering-device 20, introduces in ion gun 22.In ion gun 22, use the laser alignment of the electronics of certain energy or specific wavelength to sputter thing 21 and bombard, be converted into ion 25(and may comprise Li+, Mg+, Ti+, U+, Th+, Pb+, Hf+, Fe+, Al+, Nb+ etc.).Use small spectrometer 24 to determine kind and the quantity of these ions, just can realize the qualitative and quantitative analysis to metallic element in zircon sample.Small spectrometer 24 can adopt widely used quadrupole mass spectrometer or time of-flight mass spectrometer etc.The oxygen isotope in zircon sample analyzed by ion microprobe, and small spectrometer analyzes the metallic element in zircon sample, two mass spectrometer concurrent workings, realizes the object simultaneously analyzing metallic element and nonmetalloid in zircon sample.
embodiment 3
The embodiment of the present invention 3 provides a kind of method using ion microprobe simultaneously to analyze nonmetalloid and metallic element, the system comprising ion microprobe, neutral sputter thing gathering-device 20, ion gun 22 and small spectrometer 24 formation is adopted to carry out Realization analysis process, this system architecture such as can be identical with embodiment 1, shown in Figure 2, the method for the embodiment of the present invention 3 comprises the following steps:
(1) use the primary ions 2 in described ion microprobe to bombard sample 7 and sputter secondary ion 9 and neutral sputter thing 21;
(2) described ion microprobe is used to analyze described secondary ion 9, to analyze metallic element in described sample 7 or nonmetalloid;
(3) use described neutral sputter thing gathering-device to collect described neutral sputter thing 21, and be sent to the ionization of described ion gun 22;
(4) the described neutral sputter thing 25 after the 24 pairs of ionizations of described small spectrometer is used to carry out quality analysis: when described ion microprobe is used for analyzing the metallic element in described sample 7, described small spectrometer is used for analyzing the nonmetalloid in described sample 7; When described ion microprobe is used for analyzing the nonmetalloid in described sample 7, described small spectrometer is used for analyzing the metallic element in described sample 7.
Described neutral sputter thing gathering-device 20, ion gun 22 and small spectrometer 24 are positioned at the second vacuum cavity, the described front end hand-hole of neutral sputter thing gathering-device is connected with the first vacuum cavity of described ion microprobe, and end portals and to be connected with described ion gun.
Described system also comprises the molecular pump be connected with described second vacuum cavity, and under the effect of described molecular pump, the pressure in described second vacuum cavity is lower than the pressure in described first vacuum cavity.
Described neutral sputter thing gathering-device 20 is a funnel structure, and the entrance of its front end hand-hole and described second vacuum cavity overlaps, and is connected to described first vacuum cavity by standard flange interface, and its end portals and is positioned at described ion gun inside.
Described first vacuum cavity 8, second vacuum cavity 26 and neutral sputter thing gathering-device 20 are all connected to earth potential, described ion gun and small spectrometer are all fixed on described second vacuum cavity by standard flange interface, and are its power supply by this standard flange interface.
Described neutral sputter thing gathering-device 20 and the second vacuum cavity 26 are made for non-magnetic rustproof Steel material, described sample is positioned at described first vacuum cavity 8, described neutral sputter thing gathering-device is between described second vacuum cavity and the first vacuum cavity, and its end portals for the substance channel between described second vacuum cavity and the first vacuum cavity.
Described ion microprobe adopts an ion microprobe, and described ion gun 22 can adopt electronics to bombard or swash light-struck mode by the ionization of described neutral sputter thing, and described small spectrometer 24 comprises quadrupole mass spectrometer or time of-flight mass spectrometer.
embodiment 4
As shown in Figure 3, the embodiment of the present invention 4 provides a kind of method using ion microprobe simultaneously to analyze nonmetalloid and metallic element, the system of nonmetalloid and metallic element analyzed by the use ion microprobe that have employed provides in embodiment 2 simultaneously, and the method comprises the following steps:
Step 1, is evacuated to vacuum state by system.
Step 2, adds relevant voltage by each ion optical lens in sample 7 and system (as shown in Figure 1 each ion optical lens).
Step 3, uses the primary ions 2 of certain energy to bombard sample.
Step 4, the secondary ion 9 produced in bombardment process pushed away from sample surfaces, enters ion microprobe, and the neutral sputter thing 21 produced in bombardment process is collected into ion gun 22 by neutral sputter thing gathering-device 20.
Step 5, ion microprobe carries out quality analysis to the secondary ion produced in bombardment process, and the neutral sputter thing 21 produced in bombardment process simultaneously, by ion gun 22 ionization, carries out quality analysis by small spectrometer 24.
Through the above description of the embodiments, those skilled in the art can be well understood to the present invention and can also be realized by other structures, and feature of the present invention is not limited to above-mentioned preferred embodiment.Any personnel being familiar with this technology are in technical field of the present invention, and the change that can expect easily or modification, all should be encompassed within scope of patent protection of the present invention.
Claims (10)
1. the system using ion microprobe simultaneously to analyze nonmetalloid and metallic element, comprise ion microprobe, neutral sputter thing gathering-device, ion gun and small spectrometer, it is characterized in that, the neutral sputter thing that described ion microprobe produces when analyzing sample collected by described neutral sputter thing gathering-device, and carry out quality analysis by described small spectrometer after being sent to described ion gun ionization, described ion microprobe and described small spectrometer are used for analyzing the metallic element in described sample and nonmetalloid respectively, or, described ion microprobe and described small spectrometer are used for analyzing the nonmetalloid in described sample and metallic element respectively.
2. the system as claimed in claim 1, it is characterized in that, described neutral sputter thing gathering-device, ion gun and small spectrometer are positioned at the second vacuum cavity, the described front end hand-hole of neutral sputter thing gathering-device is connected with the first vacuum cavity of described ion microprobe, and end portals and to be connected with described ion gun.
3. system as claimed in claim 2, it is characterized in that, also comprise the molecular pump be connected with described second vacuum cavity, under the effect of described molecular pump, the pressure in described second vacuum cavity is lower than the pressure in described first vacuum cavity.
4. system as claimed in claim 2 or claim 3, it is characterized in that, described neutral sputter thing gathering-device is a funnel structure, the entrance of its front end hand-hole and described second vacuum cavity overlaps, and being connected to described first vacuum cavity by standard flange interface, its end portals and is positioned at described ion gun inside.
5. system as claimed in claim 2 or claim 3, it is characterized in that, described first vacuum cavity, second vacuum cavity and neutral sputter thing gathering-device are all connected to earth potential, described ion gun and small spectrometer are all fixed on described second vacuum cavity by standard flange interface, and are its power supply by this standard flange interface.
6. system as claimed in claim 2 or claim 3, it is characterized in that, described neutral sputter thing gathering-device and the second vacuum cavity are that non-magnetic rustproof Steel material is made, described sample is positioned at described first vacuum cavity, described neutral sputter thing gathering-device is between described second vacuum cavity and the first vacuum cavity, and its end portals for the substance channel between described second vacuum cavity and the first vacuum cavity.
7. the system as described in any one of claim 1-3, it is characterized in that, described ion microprobe adopts an ion microprobe, described ion gun can adopt electronics to bombard or swash light-struck mode by the ionization of described neutral sputter thing, and described small spectrometer comprises quadrupole mass spectrometer or time of-flight mass spectrometer.
8. the method using ion microprobe simultaneously to analyze nonmetalloid and metallic element, it is characterized in that, adopt the system comprising ion microprobe, neutral sputter thing gathering-device, ion gun and small spectrometer formation to carry out Realization analysis process, comprise the following steps:
(1) use the primary ions in described ion microprobe to bombard sample and sputter secondary ion and neutral sputter thing;
(2) described ion microprobe is used to analyze described secondary ion, to analyze metallic element in described sample or nonmetalloid;
(3) use described neutral sputter thing gathering-device to collect described neutral sputter thing, and be sent to described ion gun ionization;
(4) described small spectrometer is used to carry out quality analysis to the described neutral sputter thing after ionization: when described ion microprobe is used for analyzing the metallic element in described sample, described small spectrometer is used for analyzing the nonmetalloid in described sample; When described ion microprobe is used for analyzing the nonmetalloid in described sample, described small spectrometer is used for analyzing the metallic element in described sample.
9. method as claimed in claim 8, it is characterized in that, described neutral sputter thing gathering-device, ion gun and small spectrometer are positioned at the second vacuum cavity, the described front end hand-hole of neutral sputter thing gathering-device is connected with the first vacuum cavity of described ion microprobe, and end portals and to be connected with described ion gun.
10. method as claimed in claim 9, it is characterized in that, described system also comprises the molecular pump be connected with described second vacuum cavity, and under the effect of described molecular pump, the pressure in described second vacuum cavity is lower than the pressure in described first vacuum cavity.
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| CN103983683A (en) * | 2014-04-08 | 2014-08-13 | 中国原子能科学研究院 | SIMS measuring method for oxygen isotopes in semiconductor or conductor nuclear materials |
| CN107438891B (en) * | 2015-02-10 | 2019-11-08 | 诺威量测设备公司 | For using the semiconductor of Secondary Ion Mass Spectrometry to measure and the system and method for surface analysis |
| CN105572216A (en) * | 2015-12-30 | 2016-05-11 | 大连民族大学 | Novel flight time secondary ion mass spectrometer |
| CN106404677B (en) * | 2016-08-31 | 2019-10-25 | 北京埃德万斯离子束技术研究所股份有限公司 | A kind of trace analysis methods and its pre-treating method |
| CN114137010B (en) * | 2021-11-05 | 2024-02-13 | 上海交通大学 | Determination method for trace element distribution state of high-temperature alloy |
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