CN103592979A - Cleaning fluid flow control system and cleaning fluid flow control method - Google Patents
Cleaning fluid flow control system and cleaning fluid flow control method Download PDFInfo
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- CN103592979A CN103592979A CN201210290586.0A CN201210290586A CN103592979A CN 103592979 A CN103592979 A CN 103592979A CN 201210290586 A CN201210290586 A CN 201210290586A CN 103592979 A CN103592979 A CN 103592979A
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Abstract
The invention discloses a cleaning fluid flow control system, which comprises a control valve, a pressure sensor, a controller, an I/P converter, a flow switch and a pin valve, wherein cleaning fluid flows through the control valve; the pressure sensor measures pressure of the cleaning fluid flowing through the control valve and outputs a pressure value; the controller receives the pressure value outputted by the pressure sensor, compares the pressure value with a target pressure value, generates and sends a current signal according to a comparison result; the controller sends a small current signal if the pressure value is greater than the target pressure value, and sends a large current signal if the pressure value is smaller than the target pressure value; the I/P converter receives the current signal outputted by the controller and delivers compressed air with corresponding pressure to the control valve; the I/P converter reduces the pressure of the compressed air delivered to the control valve when receiving the small current signal, and the I/P converter increases the pressure of the compressed air delivered to the control valve when receiving the large current signal; the flow switch measures the flow rate of the cleaning fluid; and the pin valve regulates the flow rate of the cleaning fluid. The invention further discloses a cleaning fluid flow control method.
Description
Technical field
The present invention relates to process for fabrication of semiconductor device, relate in particular to a kind of wash liquid stream amount control system and control method, the flow of the control cleaning fluid that this control system and control method can be accurate and stable.
Background technology
In process for fabrication of semiconductor device, wafer is easy to be polluted, small pollutant, as particle, organic residue, metallic impurity and the wafer surface oxidation thing etc. that are attached to crystal column surface all can cause very large infringement to the performance of semiconductor devices, and along with the characteristic dimension of semiconductor devices is more and more less, hazards of pollutants will be increasing, and almost each step process is all likely introduced and polluted.Therefore,, in order to obtain high-quality semiconductor devices, it is very necessary and crucial that wafer is cleaned.Along with the fast development of semiconductor technology, at present, there is various cleaning method, wherein, wet-cleaned is a kind of cleaning method being widely used in crystal column surface cleaning.Wet-cleaned utilizes cleaning fluid to come cleaning wafer surface as the chemicals of ultrapure water or heterogeneity conventionally.Cleaning fluid is generally provided in cleaning chambers, in cleaning chambers, wafer is cleaned.
In order to guarantee the quality of cleaning performance and raising semiconductor devices, the flow that is supplied to the cleaning fluid in cleaning chambers needs accurately and stably to control, and that is to say that cleaning fluid will keep stable flow in course of conveying.Traditional wash liquid stream amount control system comprises some operation valves.Generally, each cleaning fluid transfer passage that is connected to cleaning chambers has the flow that an operation valve is controlled this passage cleaning liquid inside.Although the flow of each passage cleaning liquid inside of control that this system can be accurate and stable, but the operation valve that just needs respective numbers during the cleaning fluid transfer passage of Dang Youji road, because the price of operation valve is more expensive, therefore cause the production cost of whole system very high, simultaneously, the volume of operation valve is also larger, need to take very large space, give whole system design and installation band inconvenience.
Therefore, in the supply of assurance cleaning fluid, stablize under controlled prerequisite, simplifying system and reduce system cost will be a quantum jump in Semiconductor Cleaning Technology field.
Summary of the invention
The object of this invention is to provide a kind of cost wash liquid stream amount control system low and simple in structure.
For achieving the above object, a kind of wash liquid stream amount control system provided by the invention comprises: operation valve, and wash liquid stream is through operation valve; Pressure transducer, measures pressure the output pressure value of the cleaning fluid of the operation valve of flowing through; Controller, receive the force value of pressure transducer output also by this force value and target pressure value comparison, according to comparative result, produce the concurrent current signal that send, if this force value is greater than target pressure value, controller sends a less current signal, if this force value is less than target pressure value, controller sends a larger current signal; I/P converter, receive the current signal of controller output and to operation valve, carry the pressurized air with relevant pressure, when I/P converter receives the less current signal of controller output, the reduction of I/P converter flows to the compressed-air actuated pressure of operation valve, when I/P converter receives the larger current signal of controller output, I/P converter increases and flows to the compressed-air actuated pressure of operation valve; Flow switch, measurement flows into the flow velocity of the cleaning fluid of cleaning chambers; And needle-valve, regulate the flow velocity of the cleaning fluid that flows into cleaning chambers to target flow velocity.
For achieving the above object, another kind of wash liquid stream amount control system provided by the invention comprises: operation valve, and wash liquid stream is through operation valve; Pressure transducer, measures pressure the output pressure value of the cleaning fluid of the operation valve of flowing through; Controller, receive the force value of pressure transducer output also by this force value and target pressure value comparison, according to comparative result, produce the concurrent voltage signal that send, if this force value is greater than target pressure value, controller sends a less voltage signal, if this force value is less than target pressure value, controller sends a larger voltage signal; U/P converter, receive the voltage signal of controller output and to operation valve, carry the pressurized air with relevant pressure, when U/P converter receives the less voltage signal of controller output, the reduction of U/P converter flows to the compressed-air actuated pressure of operation valve, when U/P converter receives the larger voltage signal of controller output, U/P converter increases and flows to the compressed-air actuated pressure of operation valve; Flow switch, measurement flows into the flow velocity of the cleaning fluid of cleaning chambers; And needle-valve, regulate the flow velocity of the cleaning fluid that flows into cleaning chambers to target flow velocity.
Another object of the present invention is to provide a kind of wash liquid stream amount control method, comprises the steps:
Provide operation valve, pressure transducer, I/P converter and controller to form PID closed-loop control system;
Flow through pressure the output pressure value of cleaning fluid of operation valve of pressure transducer measurement;
Controller receives the force value of pressure transducer output also by this force value and target pressure value comparison, according to comparative result, produce the concurrent current signal that send, if this force value is greater than target pressure value, controller sends a less current signal, if this force value is less than target pressure value, controller sends a larger current signal;
I/P converter receives the current signal of controller output and to operation valve, carries the pressurized air with relevant pressure, when I/P converter receives the less current signal of controller output, the reduction of I/P converter flows to the compressed-air actuated pressure of operation valve, when I/P converter receives the larger current signal of controller output, I/P converter increases and flows to the compressed-air actuated pressure of operation valve;
Measure the flow velocity of the cleaning fluid that flows into cleaning chambers;
Regulate the flow velocity of the cleaning fluid that flows into cleaning chambers to target flow velocity.
Another object of the present invention is to provide another kind of wash liquid stream amount control method, comprises the steps:
Provide operation valve, pressure transducer, U/P converter and controller to form PID closed-loop control system;
Flow through pressure the output pressure value of cleaning fluid of operation valve of pressure transducer measurement;
Controller receives the force value of pressure transducer output also by this force value and target pressure value comparison, according to comparative result, produce the concurrent voltage signal that send, if this force value is greater than target pressure value, controller sends a less voltage signal, if this force value is less than target pressure value, controller sends a larger voltage signal;
U/P converter receives the voltage signal of controller output and to operation valve, carries the pressurized air with relevant pressure, when U/P converter receives the less voltage signal of controller output, the reduction of U/P converter flows to the compressed-air actuated pressure of operation valve, when U/P converter receives the larger voltage signal of controller output, U/P converter increases and flows to the compressed-air actuated pressure of operation valve;
Measure the flow velocity of the cleaning fluid that flows into cleaning chambers;
Regulate the flow velocity of the cleaning fluid that flows into cleaning chambers to target flow velocity.
In sum, wash liquid stream amount control system of the present invention and control method only utilize an operation valve, pressure transducer, I/P converter or U/P converter and controller to form the pressure of cleaning fluid in PID closed-loop control system adjusting control valve.The cleaning fluid of operation valve and pressure transducer of flowing through is divided into some branches, and each branch utilizes a needle-valve and flow switch to regulate the flow velocity of cleaning fluid in this branch.The wash liquid stream amount control system with San Ge branch of take is example, and this system utilizes an operation valve, pressure transducer, I/P converter or U/P converter, controller, three needle-valves and three flow switches to cleaning chambers supply accurately and the cleaning fluid of regime flow.And traditional wash liquid stream amount control system need adopt three operation valves, three pressure transducers, three I/P converters or three U/P converters, three controllers and three flowmeters.By contrast, wash liquid stream amount control system of the present invention can be saved two operation valves, two pressure transducers, two I/P converters or U/P converter, two controllers, and the flowmeter that the flow switch that adopts of the present invention also adopts than tradition is cheap.Therefore, cost of the present invention can reduce greatly, and the present invention is simple in structure.
Accompanying drawing explanation
Fig. 1 is the block scheme of the first embodiment of wash liquid stream amount control system of the present invention.
Fig. 2 is the block scheme of the second embodiment of wash liquid stream amount control system of the present invention.
Fig. 3 is the process flow diagram of the first embodiment of wash liquid stream amount control method of the present invention.
Fig. 4 is the process flow diagram of the second embodiment of wash liquid stream amount control method of the present invention.
Embodiment
By describing technology contents of the present invention, structural attitude in detail, being reached object and effect, below in conjunction with embodiment and coordinate graphic detailed description in detail.
Refer to Fig. 1, show the first embodiment of wash liquid stream amount control system of the present invention.Wash liquid stream amount control system of the present invention comprises an operation valve 10, a pressure transducer 20, a controller 40 and an I/P converter 30.Operation valve 10, pressure transducer 20, controller 40 and I/P converter 30 form a PID closed-loop control system.Pressure transducer 20 measure the operation valve 10 of flowing through cleaning fluid pressure and export an electric pressure signal.Controller 40 receives after the electric pressure signal of pressure transducer 20 outputs, produces and send a corresponding current signal to I/P converter 30.I/P converter 30 receives the backward operation valve 10 of current signal of controller 40 outputs and carries the pressurized air with relevant pressure, thus the pressure of cleaning fluid in adjusting control valve 10.By the automatic adjusting of PID closed-loop control system, the pressure of the cleaning fluid of flow through operation valve 10 and pressure transducer 20 can remain on a setting value.
Refer to Fig. 2, show the second embodiment of wash liquid stream amount control system of the present invention.Wash liquid stream amount control system of the present invention comprises an operation valve 10, a pressure transducer 20, a controller 40 and a U/P converter 30'.Operation valve 10, pressure transducer 20, controller 40 and U/P converter 30' form a PID closed-loop control system.Pressure transducer 20 measure the operation valve 10 of flowing through cleaning fluid pressure and export an electric pressure signal.Controller 40 receives after the electric pressure signal of pressure transducer 20 outputs, produces and send a corresponding voltage signal to U/P converter 30'.U/P converter 30' receives the backward operation valve 10 of voltage signal of controller 40 outputs and carries the pressurized air with relevant pressure, thus the pressure of cleaning fluid in adjusting control valve 10.By the automatic adjusting of PID closed-loop control system, the pressure of the cleaning fluid of flow through operation valve 10 and pressure transducer 20 can remain on a setting value.
Please continue to refer to Fig. 1 and Fig. 2.The cleaning fluid of operation valve 10 and pressure transducer 20 of flowing through can be divided into some branches according to different process demand, for example, in the first embodiment and the second embodiment, the cleaning fluid of operation valve 10 and pressure transducer 20 of flowing through is divided into Liao Sange branch, and each branch comprises a needle-valve 50, a flow switch 60 and a cleaning chambers 70.The wash liquid stream of each branch flows into cleaning chambers 70 for cleaning wafer after needle-valve 50 and flow switch 60.Flow switch 60 in each branch is measured the flow velocity of cleaning fluid in this branch.The flow velocity of cleaning fluid in this branch of the velocity of flow adjust that needle-valve 50 records according to flow switch 60 until in this branch the flow velocity of cleaning fluid reach the needed flow velocity of technique, needle-valve 50 can be hand valve.Preferably, each branch also comprises that a pressure valve 80 is for allowing or stoping cleaning fluid to flow into cleaning chambers 70.
The first embodiment of wash liquid stream amount control system according to the present invention, briefly introduces the principle of work of wash liquid stream amount control system of the present invention below.Pressure transducer 20 is measured the pressure of operation valve 10 cleaning fluids of flowing through in real time, and the force value recording is transferred to controller 40.Controller 40 receives these force value and by this force value and a default target pressure value comparison, if Pc>Pt, controller 40 sends a less current signal to I/P converter 30, and I/P converter 30 receives after the less current signal of controllers 40 outputs and reduces and flow to the compressed-air actuated pressure of operation valve 10; If Pc<Pt, controller 40 sends a larger current signal to I/P converter 30, and I/P converter 30 receives after the larger current signal of controllers 40 outputs and increases and flow to the compressed-air actuated pressure of operation valve 10; If Pc=Pt, compares the flow velocity of cleaning fluid current in each branch and a target flow velocity, if Fc=Ft completes the adjusting of cleaning fluid pressure and flow velocity so, system will maintain steady state (SS); If Fc>Ft, needle-valve in respective branch 50 need be turned down, thereby turn the flow velocity of cleaning fluid in respective branch down, meanwhile, in operation valve 10, the pressure of cleaning fluid increases, thereby cause Pc>Pt, controller 40 sends a less current signal to I/P converter 30, I/P converter 30 receives after the less current signal of controllers 40 outputs and reduces and flow to the compressed-air actuated pressure of operation valve 10; If Fc<Ft, needle-valve in respective branch 50 need be tuned up, thereby tune up the flow velocity of cleaning fluid in respective branch, meanwhile, the pressure decreased of cleaning fluid in operation valve 10, thereby cause Pc<Pt, controller 40 sends a larger current signal to I/P converter 30, I/P converter 30 receives after the larger current signal of controllers 40 outputs and increases and flow to the compressed-air actuated pressure of operation valve 10.Wherein, the pressure of the cleaning fluid that Pc is the operation valve 10 of flowing through that records in real time, Pt is target pressure value, Fc is the target flow velocity of cleaning fluid in the flow velocity ，FtWei branch of cleaning fluid in the branch recording in real time.
The second embodiment of wash liquid stream amount control system according to the present invention, briefly introduces the principle of work of wash liquid stream amount control system of the present invention below.Pressure transducer 20 is measured the pressure of operation valve 10 cleaning fluids of flowing through in real time, and the force value recording is transferred to controller 40.Controller 40 receives these force value and by this force value and a default target pressure value comparison, if Pc>Pt, controller 40 sends a less voltage signal to U/P converter 30 ', and U/P converter 30' receives after the less voltage signal of controller 40 outputs and reduces and flow to the compressed-air actuated pressure of operation valve 10; If Pc<Pt, controller 40 sends a larger voltage signal to U/P converter 30 ', and U/P converter 30' receives after the larger voltage signal of controller 40 outputs and increases and flow to the compressed-air actuated pressure of operation valve 10; If Pc=Pt, compares the flow velocity of cleaning fluid current in each branch and a target flow velocity, if Fc=Ft completes the adjusting of cleaning fluid pressure and flow velocity so, system will maintain steady state (SS); If Fc>Ft, needle-valve in respective branch 50 need be turned down, thereby turn the flow velocity of cleaning fluid in respective branch down, meanwhile, in operation valve 10, the pressure of cleaning fluid increases, thereby cause Pc>Pt, controller 40 sends a less voltage signal to U/P converter 30 ', U/P converter 30' receives after the less voltage signal of controller 40 outputs and reduces and flow to the compressed-air actuated pressure of operation valve 10; If Fc<Ft, needle-valve in respective branch 50 need be tuned up, thereby tune up the flow velocity of cleaning fluid in respective branch, meanwhile, the pressure decreased of cleaning fluid in operation valve 10, thereby cause Pc<Pt, controller 40 sends a larger voltage signal to U/P converter 30 ', U/P converter 30' receives after the larger voltage signal of controller 40 outputs and increases and flow to the compressed-air actuated pressure of operation valve 10.Wherein, the pressure of the cleaning fluid that Pc is the operation valve 10 of flowing through that records in real time, Pt is target pressure value, Fc is the target flow velocity of cleaning fluid in the flow velocity ，FtWei branch of cleaning fluid in the branch recording in real time.
Refer to Fig. 3, disclosed the first wash liquid stream amount control method of the present invention, the method comprises the steps:
S1, sets the target pressure value of operation valve 10 cleaning fluids of flowing through, and according to this goal pressure value controller 40, produces and send a current signal to I/P converter 30;
S2, I/P converter 30 receives the backward operation valve 10 of current signal of controller 40 outputs and carries the pressurized air with certain pressure;
S3, operation valve 10, under the compressed-air actuated driving with certain pressure, has the wash liquid stream of certain pressure through operation valve 10;
S4, pressure transducer 20 is measured the pressure of the cleaning fluid of the operation valve 10 of flowing through in real time, and the force value recording is transferred to controller 40, and controller 40 receives this force value also by this force value and target pressure value comparison, if Pc=Pt carries out S5 step; If Pc>Pt, controller 40 sends a less current signal to I/P converter 30, and I/P converter 30 receives after the less current signal of controllers 40 outputs and reduces and flow to the compressed-air actuated pressure of operation valve 10, and returns to S3 step; If Pc<Pt, controller 40 sends a larger current signal to I/P converter 30, after the larger current signal of I/P converter 30 reception controller 40 outputs, increase and flow to the compressed-air actuated pressure of operation valve 10, and return to S3 step, wherein, the pressure of the cleaning fluid that Pc is the operation valve 10 of flowing through that records in real time, Pt is target pressure value;
S5, compares the flow velocity of cleaning fluid current in each branch and a target flow velocity, if Fc=Ft completes the adjusting of cleaning fluid pressure and flow velocity so, system will maintain steady state (SS); If Fc>Ft, turns the needle-valve in respective branch 50 down, thereby turn the flow velocity of cleaning fluid in respective branch down, meanwhile, in operation valve 10, the pressure of cleaning fluid increases, thereby causes Pc>Pt, now returns to S4 step; If Fc<Ft, needle-valve in respective branch 50 is tuned up, thereby tune up the flow velocity of cleaning fluid in respective branch, meanwhile, the pressure decreased of cleaning fluid in operation valve 10, thus cause Pc<Pt, now return to S4 step, wherein, Fc is the target flow velocity of cleaning fluid in the flow velocity ，FtWei branch of cleaning fluid in the branch recording in real time.
Refer to Fig. 4, disclosed the second wash liquid stream amount control method of the present invention, the method comprises the steps:
S10, sets the target pressure value of operation valve 10 cleaning fluids of flowing through, and according to this goal pressure value controller 40, produces and send a voltage signal to U/P converter 30';
S20, U/P converter 30' receives the backward operation valve 10 of voltage signal of controller 40 outputs and carries the pressurized air with certain pressure;
S30, operation valve 10, under the compressed-air actuated driving with certain pressure, has the wash liquid stream of certain pressure through operation valve 10;
S40, pressure transducer 20 is measured the pressure of the cleaning fluid of the operation valve 10 of flowing through in real time, and the force value recording is transferred to controller 40, and controller 40 receives this force value also by this force value and target pressure value comparison, if Pc=Pt carries out S50 step; If Pc>Pt, controller 40 sends a less voltage signal to U/P converter 30 ', after the less voltage signal of U/P converter 30' reception controller 40 outputs, reduce and flow to the compressed-air actuated pressure of operation valve 10, and return to S30 step; If Pc<Pt, controller 40 sends a larger voltage signal to U/P converter 30 ', after the larger voltage signal of U/P converter 30' reception controller 40 outputs, increase and flow to the compressed-air actuated pressure of operation valve 10, and return to S30 step, wherein, the pressure of the cleaning fluid that Pc is the operation valve 10 of flowing through that records in real time, Pt is target pressure value;
S50, compares the flow velocity of cleaning fluid current in each branch and a target flow velocity, if Fc=Ft completes the adjusting of cleaning fluid pressure and flow velocity so, system will maintain steady state (SS); If Fc>Ft, turns the needle-valve in respective branch 50 down, thereby turn the flow velocity of cleaning fluid in respective branch down, meanwhile, in operation valve 10, the pressure of cleaning fluid increases, thereby causes Pc>Pt, now returns to S40 step; If Fc<Ft, needle-valve in respective branch 50 is tuned up, thereby tune up the flow velocity of cleaning fluid in respective branch, meanwhile, the pressure decreased of cleaning fluid in operation valve 10, thus cause Pc<Pt, now return to S40 step, wherein, Fc is the target flow velocity of cleaning fluid in the flow velocity ，FtWei branch of cleaning fluid in the branch recording in real time.
From the above, thus the automatic adjusting by PID closed-loop control system of wash liquid stream amount control system of the present invention and control method can be to cleaning chambers 70 supplies accurately and the cleaning fluid of regime flow.Even if the supply of the cleaning fluid of upstream is unstable, under the automatic adjusting of PID closed-loop control system, still can supply accurately and the cleaning fluid of regime flow to cleaning chambers 70.In addition, the pressure valve 80 in one or several branch opens or closes, and under the automatic adjusting of PID closed-loop control system, the flow velocity of the cleaning fluid in other branch can not be affected.
Wash liquid stream amount control system of the present invention and control method only utilize an operation valve 10, pressure transducer 20, I/P converter 30 or U/P converter 30' and controller 40 to form the pressure of cleaning fluid in PI D closed-loop control system adjusting control valves 10.Each branch in system utilizes the flow velocity of cleaning fluid in a needle-valve 50 and flow switch 60 these branches of adjusting.The wash liquid stream amount control system with San Ge branch of take is example, and this system utilizes an operation valve 10, pressure transducer 20, I/P converter 30 or U/P converter 30', controller 40, three needle-valves 50 and three flow switches 60 to cleaning chambers 70 supplies accurately and the cleaning fluid of regime flow.And traditional wash liquid stream amount control system need adopt three operation valves 10, three pressure transducers 20, three I/P converters 30 or three U/P converter 30', three controllers 40 and three flowmeters.By contrast, wash liquid stream amount control system of the present invention can be saved two operation valves 10, two pressure transducers 20, two I/P converters 30 or U/P converter 30', two controllers 40, and the flowmeter that the flow switch 60 that adopts of the present invention also adopts than tradition is cheap.Therefore, cost of the present invention can reduce greatly, and the present invention is simple in structure.
In sum, wash liquid stream amount control system of the present invention and control method illustrate by above-mentioned embodiment and correlative type, the exposure that oneself is concrete, full and accurate correlation technique, those skilled in the art can be implemented according to this.And the above embodiment is just used for illustrating the present invention, rather than be used for limiting of the present invention, interest field of the present invention, should be defined by claim of the present invention.As for the change of described component number or the replacement of equivalence element etc. herein, still all should belong to interest field of the present invention.
Claims (18)
1. a wash liquid stream amount control system, comprising:
Operation valve, wash liquid stream is through described operation valve;
Pressure transducer, measures pressure the output pressure value of the cleaning fluid of the described operation valve of flowing through;
Controller, receive the force value of described pressure transducer output also by this force value and target pressure value comparison, according to comparative result, produce the concurrent current signal that send, if this force value is greater than target pressure value, described controller sends a less current signal, if this force value is less than target pressure value, described controller sends a larger current signal;
I/P converter, receive the current signal of described controller output and to described operation valve, carry the pressurized air with relevant pressure, when described I/P converter receives the less current signal of described controller output, described I/P converter reduction flows to the compressed-air actuated pressure of described operation valve, when described I/P converter receives the larger current signal of described controller output, described I/P converter increases and flows to the compressed-air actuated pressure of described operation valve;
Flow switch, measurement flows into the flow velocity of the cleaning fluid of cleaning chambers; And
Needle-valve, regulates the flow velocity of the cleaning fluid that flows into cleaning chambers to target flow velocity.
2. wash liquid stream amount control system according to claim 1, is characterized in that: the cleaning fluid of flow through described operation valve and described pressure transducer is divided into some branches, and each branch has flow switch, needle-valve and cleaning chambers.
3. wash liquid stream amount control system according to claim 2, it is characterized in that: if the pressure of the cleaning fluid of the described operation valve of flowing through that described pressure transducer records equals target pressure value, the flow velocity of cleaning fluid current in each branch and a target flow velocity are compared, if the flow velocity of current cleaning fluid equates with target flow velocity, so the adjusting of cleaning fluid pressure and flow velocity is completed.
4. wash liquid stream amount control system according to claim 2, it is characterized in that: if the pressure of the cleaning fluid of the described operation valve of flowing through that described pressure transducer records equals target pressure value, the flow velocity of cleaning fluid current in each branch and a target flow velocity are compared, if the flow velocity of current cleaning fluid is greater than target flow velocity, needle-valve in respective branch is turned down, thereby turn the flow velocity of cleaning fluid in respective branch down, meanwhile, in described operation valve, the pressure of cleaning fluid increases, thereby the force value that causes described pressure transducer to record is greater than target pressure value, described controller sends a less current signal to described I/P converter, described I/P converter receives after the less current signal of described controller output and reduces and flow to the compressed-air actuated pressure of described operation valve.
5. wash liquid stream amount control system according to claim 2, it is characterized in that: if the pressure of the cleaning fluid of the described operation valve of flowing through that described pressure transducer records equals target pressure value, the flow velocity of cleaning fluid current in each branch and a target flow velocity are compared, if the flow velocity of current cleaning fluid is less than target flow velocity, needle-valve in respective branch is tuned up, thereby tune up the flow velocity of cleaning fluid in respective branch, meanwhile, the pressure decreased of cleaning fluid in described operation valve, thereby the force value that causes described pressure transducer to record is less than target pressure value, described controller sends a larger current signal to described I/P converter, described I/P converter receives after the larger current signal of described controller output and increases and flow to the compressed-air actuated pressure of described operation valve.
6. wash liquid stream amount control system according to claim 2, is characterized in that: described each branch also further comprises that pressure valve is for allowing or stoping cleaning fluid to flow into described cleaning chambers.
7. wash liquid stream amount control system according to claim 1, is characterized in that: described operation valve, pressure transducer, I/P converter and controller form PID closed-loop control system.
8. a wash liquid stream amount control system, comprising:
Operation valve, wash liquid stream is through described operation valve;
Pressure transducer, measures pressure the output pressure value of the cleaning fluid of the described operation valve of flowing through;
Controller, receive the force value of described pressure transducer output also by this force value and target pressure value comparison, according to comparative result, produce the concurrent voltage signal that send, if this force value is greater than target pressure value, described controller sends a less voltage signal, if this force value is less than target pressure value, described controller sends a larger voltage signal;
U/P converter, receive the voltage signal of described controller output and to described operation valve, carry the pressurized air with relevant pressure, when described U/P converter receives the less voltage signal of described controller output, described U/P converter reduction flows to the compressed-air actuated pressure of described operation valve, when described U/P converter receives the larger voltage signal of described controller output, described U/P converter increases and flows to the compressed-air actuated pressure of described operation valve;
Flow switch, measurement flows into the flow velocity of the cleaning fluid of cleaning chambers; And
Needle-valve, regulates the flow velocity of the cleaning fluid that flows into cleaning chambers to target flow velocity.
9. wash liquid stream amount control system according to claim 8, is characterized in that: the cleaning fluid of flow through described operation valve and described pressure transducer is divided into some branches, and each branch has flow switch, needle-valve and cleaning chambers.
10. wash liquid stream amount control system according to claim 9, it is characterized in that: if the pressure of the cleaning fluid of the described operation valve of flowing through that described pressure transducer records equals target pressure value, the flow velocity of cleaning fluid current in each branch and a target flow velocity are compared, if the flow velocity of current cleaning fluid equates with target flow velocity, so the adjusting of cleaning fluid pressure and flow velocity is completed.
11. wash liquid stream amount control systems according to claim 9, it is characterized in that: if the pressure of the cleaning fluid of the described operation valve of flowing through that described pressure transducer records equals target pressure value, the flow velocity of cleaning fluid current in each branch and a target flow velocity are compared, if the flow velocity of current cleaning fluid is greater than target flow velocity, needle-valve in respective branch is turned down, thereby turn the flow velocity of cleaning fluid in respective branch down, meanwhile, in described operation valve, the pressure of cleaning fluid increases, thereby the force value that causes described pressure transducer to record is greater than target pressure value, described controller sends a less voltage signal to described U/P converter, described U/P converter receives after the less voltage signal of described controller output and reduces and flow to the compressed-air actuated pressure of described operation valve.
12. wash liquid stream amount control systems according to claim 9, it is characterized in that: if the pressure of the cleaning fluid of the described operation valve of flowing through that described pressure transducer records equals target pressure value, the flow velocity of cleaning fluid current in each branch and a target flow velocity are compared, if the flow velocity of current cleaning fluid is less than target flow velocity, needle-valve in respective branch is tuned up, thereby tune up the flow velocity of cleaning fluid in respective branch, meanwhile, the pressure decreased of cleaning fluid in described operation valve, thereby the force value that causes described pressure transducer to record is less than target pressure value, described controller sends a larger voltage signal to described U/P converter, described U/P converter receives after the larger voltage signal of described controller output and increases and flow to the compressed-air actuated pressure of described operation valve.
13. wash liquid stream amount control systems according to claim 9, is characterized in that: described each branch also further comprises that pressure valve is for allowing or stoping cleaning fluid to flow into described cleaning chambers.
14. wash liquid stream amount control systems according to claim 8, is characterized in that: described operation valve, pressure transducer, U/P converter and controller form PID closed-loop control system.
15. 1 kinds of wash liquid stream amount control methods, comprise the steps:
Provide operation valve, pressure transducer, I/P converter and controller to form PID closed-loop control system;
Utilize flow through pressure the output pressure value of cleaning fluid of described operation valve of described pressure transducer measurement;
Utilize described controller to receive the force value of described pressure transducer output and by this force value and target pressure value comparison, according to comparative result, produce the concurrent current signal that send, if this force value is greater than target pressure value, described controller sends a less current signal, if this force value is less than target pressure value, described controller sends a larger current signal;
Utilize described I/P converter to receive the current signal of described controller output and to described operation valve, carry the pressurized air with relevant pressure, when described I/P converter receives the less current signal of described controller output, described I/P converter reduction flows to the compressed-air actuated pressure of described operation valve, when described I/P converter receives the larger current signal of described controller output, described I/P converter increases and flows to the compressed-air actuated pressure of described operation valve;
Measure the flow velocity of the cleaning fluid that flows into cleaning chambers;
Regulate the flow velocity of the cleaning fluid that flows into cleaning chambers to target flow velocity.
16. wash liquid stream amount control methods according to claim 15, is characterized in that: the cleaning fluid of flow through described operation valve and described pressure transducer is divided into some branches, and each branch has a cleaning chambers.
17. 1 kinds of wash liquid stream amount control methods, comprise the steps:
Provide operation valve, pressure transducer, U/P converter and controller to form PID closed-loop control system;
Utilize flow through pressure the output pressure value of cleaning fluid of described operation valve of described pressure transducer measurement;
Utilize described controller to receive the force value of described pressure transducer output and by this force value and target pressure value comparison, according to comparative result, produce the concurrent voltage signal that send, if this force value is greater than target pressure value, described controller sends a less voltage signal, if this force value is less than target pressure value, described controller sends a larger voltage signal;
Utilize described U/P converter to receive the voltage signal of described controller output and to described operation valve, carry the pressurized air with relevant pressure, when described U/P converter receives the less voltage signal of described controller output, described U/P converter reduction flows to the compressed-air actuated pressure of described operation valve, when described U/P converter receives the larger voltage signal of described controller output, described U/P converter increases and flows to the compressed-air actuated pressure of described operation valve;
Measure the flow velocity of the cleaning fluid that flows into cleaning chambers;
Regulate the flow velocity of the cleaning fluid that flows into cleaning chambers to target flow velocity.
18. wash liquid stream amount control methods according to claim 17, is characterized in that: the cleaning fluid of flow through described operation valve and described pressure transducer is divided into some branches, and each branch has a cleaning chambers.
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| CN111613526A (en) * | 2020-06-04 | 2020-09-01 | 无锡亚电智能装备有限公司 | Cleaning method based on wafer optimized arrangement |
| CN111940413A (en) * | 2020-08-31 | 2020-11-17 | 合肥市商巨智能装备有限公司 | Ultrasonic cleaning system and cleaning method |
| CN112859936A (en) * | 2019-11-28 | 2021-05-28 | 上海新微技术研发中心有限公司 | Chemical circulation pipeline flow control system and control method thereof |
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Address after: 201203 building 4, No. 1690, Cailun Road, free trade zone, Pudong New Area, Shanghai Patentee after: Shengmei semiconductor equipment (Shanghai) Co., Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Cailun Road No. 4 1690 Patentee before: ACM (SHANGHAI) Inc. |