CN103591459A - System and method for automatically exhausting bubbles of chemicals - Google Patents
System and method for automatically exhausting bubbles of chemicals Download PDFInfo
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- CN103591459A CN103591459A CN201210286994.9A CN201210286994A CN103591459A CN 103591459 A CN103591459 A CN 103591459A CN 201210286994 A CN201210286994 A CN 201210286994A CN 103591459 A CN103591459 A CN 103591459A
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Abstract
The invention discloses a system and method for automatically exhausting bubbles of chemicals. The method comprises a first step of judging whether a first liquid detector is excited, entering a second step if the first liquid detector is excited, and performing no operation if the first liquid detector is not excited; the second step of opening a pressurization valve, and opening a drain valve after waiting for a first time interval; a third step of waiting for excitation of a second liquid detector, and closing the drain valve and the pressurization valve after the second liquid detector is excited. The drain valve can be automatically opened through a controller so as to achieve bubble exhausting motion, an exhausting finishing state is detected through the second liquid detector, the drain valve is closed timely so as to avoid waste of chemical liquid agents, the purity of the chemicals is high, the whole process is automatically controlled, and accidents caused by human factors are avoided.
Description
Technical field
The present invention relates to chemical liquid agent supply system, relate in particular to a kind of liquid detecting and extraneous chemical product Automatic-exhausting pickle system and method for exerting pressure of utilizing.
Background technique
Along with the develop rapidly of integrated circuit technique, chip integration is improving constantly, and chip area is constantly dwindling, and thus integrated circuit fabrication process is also had higher requirement." etching ", as an important step of current intergrated circuit operation, its raising of level of integration for intergrated circuit plays an important role.In this process, photoresistance liquor is the requisite material of preparing of this procedure, and the step such as the covering by photoresistance, exposure, development completes etching, and then provides possibility for follow-up manufacturing process.
Yet photoresistance liquor in use, must guarantee certain purity, wherein can not be doped with impurity such as air.In the prior art, photoresistance liquor is contained in photoresistance bottle by storage, by manually setting the time of exhaust bubble and controlling exhaust and steep whole process, unstability due to artificial judgment, after often appearing at bottle exhaust having finished into, photoresistance liquor is also in the phenomenon that continues to discharge from the discharge opeing pipe end of bottle, this certainly will cause unnecessary liquor waste, and whether this mode uses sky by the liquor of artificial judgment feed liquor pipe end, unavoidably because thinking carelessness, there is photoresistance bottle rear end drain pipe with empty, cause the impure consequence of photoresistance liquor, finally to production, bring unnecessary loss.
Summary of the invention
For solving the problems of the technologies described above, the object of the present invention is to provide a kind of can automatic detecting and complete the chemical product Automatic-exhausting pickle system of exhaust bubble.
Correspondingly, the present invention also provides a kind of Automatic-exhausting pickle method of applying said system.
For achieving the above object, the technical solution used in the present invention is as follows: a kind of chemical product Automatic-exhausting pickle system, and described system comprises:
One for storing the liquid container of chemical product, on its one end pipeline, is provided with pressurizing valve;
One surge flask, it is connected with described liquid container, and this surge flask is provided with liquid inlet pipe, drain pipe and the liquid-discharging tube being connected with bottle, wherein, at feed liquor pipe end, is provided with first liquid sensor, at discharge opeing pipe end, is provided with second liquid sensor and liquid discharging valve;
One controller, its excited state according to described first, second liquid detecting device is controlled the unlatching of described pressurizing valve and liquid discharging valve or closes.
As a further improvement on the present invention, described liquid inlet pipe, liquid-discharging tube are arranged at the top of described surge flask, and described drain pipe is arranged at the bottom of described surge flask.
As a further improvement on the present invention, described first liquid sensor is arranged in described liquid inlet pipe body or in described surge flask bottle.
As a further improvement on the present invention, described liquid discharging valve is arranged at described second liquid sensor below.
As a further improvement on the present invention, described system also comprises the man-machine interface being connected with described controller.
As a further improvement on the present invention, described chemical product comprises photoresistance liquor.
Correspondingly, a kind of Automatic-exhausting pickle method that the present invention also provides, it comprises the steps:
S1, judge whether first liquid sensor is excited, and if so, enters step S2, if not, does not operate;
S2, unlatching pressurizing valve, and open liquid discharging valve after waiting for very first time interval;
Exciting of S3, wait second liquid sensor, after second liquid sensor is excited, closes described liquid discharging valve and pressurizing valve.
As a further improvement on the present invention, after described step S2, the method also comprises: at liquid discharging valve, be unlocked and constantly rise, set for one second time lag, whether described first, second liquid detecting device of judgement is excited within described second time lag, if so, continues the action of exhaust bubble; If not, system reports an error.
As a further improvement on the present invention, described step S3 also specifically comprises: set for one the 3rd time lag, wait for after described the 3rd time lag, then close described liquid discharging valve and pressurizing valve after second liquid sensor is excited.
As a further improvement on the present invention, the method also comprises: judge that constantly whether current second liquid sensor was excited within the system Automatic-exhausting pickle period, if so, proceed the action of exhaust bubble, if not, system alarm.
Compared with prior art, Automatic-exhausting pickle system of the present invention is by the dummy status of using of first liquid sensor detecting chemical product, and automatically open liquid discharging valve to realize the action of exhaust bubble by controller, and by second liquid sensor detecting exhaust finishing stage, close in time liquid discharging valve to avoid the waste of chemical liquid agent, the purity of chemical product is higher, and whole process implementation controls automatically, the accident of avoiding personal factor to cause.
Accompanying drawing explanation
Fig. 1 is the structural representation of chemical product Automatic-exhausting pickle system in the specific embodiment of the invention;
Fig. 2 is the structural representation of surge flask in the specific embodiment of the invention;
Fig. 3 is view when surge flask row steeps in the specific embodiment of the invention;
Fig. 4 is view when surge flask row bubble finishes in the specific embodiment of the invention;
Fig. 5 is the flow chart of chemical product automatic vent method in the specific embodiment of the invention.
Embodiment
Below with reference to embodiment shown in the drawings, describe the present invention.But these mode of executions do not limit the present invention, the conversion in the structure that those of ordinary skill in the art makes according to these mode of executions, method or function is all included in protection scope of the present invention.
Shown in please refer to the drawing 1, it is for a specific embodiment of chemical product Automatic-exhausting pickle system of the present invention.The present invention take a kind of have corrosive photoresistance liquor as example is described whole technological scheme, certainly, native system is applicable to the exhaust bubble demand of other kinds chemical reagent too.The emphatically improvement to the surge flask in photoresistance supply line device due to technological scheme of the present invention, therefore the following illustrated surge flask of only take in photoresistance feeding mechanism is as main, and the irrelevant device of all the other and surge flask repeats no more.In the present embodiment, described chemical product Automatic-exhausting pickle system comprises liquid container 10, surge flask 20, waste liquid pool 30, controller 50 and the man-machine interface 60 etc. that store photoresistance liquor, wherein, man-machine interface can comprise the input/output device of the forms such as touch screen, keyboard, and above-mentioned liquid container 10, surge flask 20, waste liquid pool 30 threes are communicated with in turn.
In the present invention, in one end of liquid container 10, be provided with a pipeline that is connected with nitrogen, certainly, in other embodiments, also other feasible inert gas, at the other end of liquid container 10, be provided with a pipeline at the bottom of extending into tank, and a pressurizing valve 40 is set being connected with on the pipeline of nitrogen, so when opening above-mentioned pressurizing valve 40, under the High Pressure of nitrogen, photoresistance liquor in liquid container 10 just can push away from that long root pipeline, thereby flows to surge flask.Certainly, in other mode of executions of the present invention, the position of pressurizing valve is also not necessarily arranged at this, it also can be arranged at liquid container 10 for the pipeline of fluid, on air inlet pipeline, be connected with high pressure nitrogen constantly, but because the closing of pressurizing valve, in bottle, a liquor cannot be squeezed out, therefore can reach equally circulation and the inaccessible object of controlling chemical liquid agent on fluid pipeline.
In the present invention, above-mentioned controller 50 can be the intergrated circuit that comprises microcontroller (MCU).Well-known to those skilled in the artly be, microcontroller can comprise central processing unit (Central Processing Unit, CPU), read-only memory module (Read-Only Memory, ROM), random memory module (Random Access Memory, RAM), time block, digital-to-analogue conversion module (A/D Converter) and some input/output end ports.Certainly, controller 50 also can adopt the intergrated circuit of other form, as application-specific IC (Application Specific Integrated Circuits, ASIC) or field programmable gate array (Field-programmable Gate Array, FPGA) etc.
Shown in Fig. 1, Fig. 2, surge flask 20 is connected with described liquid container 10, this surge flask 20 is provided with liquid inlet pipe 21, drain pipe 23 and the liquid-discharging tube 22 being connected with bottle, wherein, at feed liquor pipe end, be provided with first liquid sensor 24, at discharge opeing pipe end, be provided with second liquid sensor 25, described discharge opeing pipe end is also provided with a liquid discharging valve 26.Wherein, in the present embodiment, controller 50 is controlled the unlatching of described pressurizing valve 40 and liquid discharging valve 26 or closes according to the excited state of described first, second liquid detecting device, thereby realize the exhaust bubble action of photoresistance feeding mechanism, wherein, controller 50 is opened pressurizing valve 40 by the first valve driver 41, and controller 50 is opened liquid discharging valve 26 by second valve gate driver 261 again, and the concrete bat bubble process of the present invention below will describe in detail.In the preferred embodiment of the present invention, liquid inlet pipe 21, liquid-discharging tube 22 are arranged to surge flask 20 tops, drain pipe 23 is arranged to the bottom of surge flask 20.Certainly, in other mode of executions of the present invention, liquid inlet pipe 21 and liquid-discharging tube 22 also can be arranged at the sidepiece of bottle, can realize equally the function of exhaust bubble under certain condition.
Be the above, in the present embodiment, described liquid discharging valve 26 is arranged at described second liquid sensor 25 belows, can guarantee when second liquid sensor 25 is excited, the pipeline position of the liquid discharging valve 26 in below is also full of by the liquid of bubbles not, so, even if now close immediately the successful that liquid discharging valve also can guarantee exhaust bubble.
It is worth mentioning that, in the preferred embodiment of the invention, first liquid sensor can be arranged in described liquid inlet pipe body, thereby when in surge flask, liquid level reduces, liquid inlet pipe naturally also can be just empty, thereby first liquid sensor is in the state of being excited, certainly, in other mode of executions, also first liquid sensor can be arranged to (bottle upper wall, sidewall etc.) in described surge flask bottle, can satisfy the demands equally.
Shown in please refer to the drawing 3 and Fig. 4 and Fig. 5, in the specific embodiment of the invention, a kind of Automatic-exhausting pickle method of applying above-mentioned chemical product Automatic-exhausting pickle system, its main performing step is as follows: first, system boot also waits for first, second liquid sensor is excited, after this, if surge flask 20 rear end photoresistance liquor A are with empty, cause liquid inlet pipe 21 also to become after sky, surge flask 20 bottle inside have one section of space and are full of air, first liquid sensor will be excited (step S1) this moment, first liquid sensor 24 after being excited just apprizing system photoresistance liquor has been used sky, and to controller transmitted signal, controller is automatically opened pressurizing valve after receiving signal, and after waiting for very first time interval T 1 (air pressure in surge flask reaches certain number), when keeping again pressurizing valve opening state, open liquid discharging valve to carry out the exhaust bubble action (step S2) of photoresistance liquor, certainly, in other mode of executions of the present invention, system also can be sent alarm signal, to remind the manually opened pressurizing valve of staff.After this, in bottle, bubble and fraction photoresistance liquor are discharged via the liquid-discharging tube 22 of surge flask 20 upper ends, after this need to wait for exciting of second liquid sensor, after second liquid sensor is excited, close described liquid discharging valve and pressurizing valve and finish whole exhaust bubble process (step S3), the benefit of such scheme is also: once when filling system, bottle automatically stops immediately exhaust action, without manual operation, prevent the waste of unnecessary chemical liquid agent, realize energy-saving and emission-reduction.
In the preferred embodiment of the invention, after above-mentioned steps S2, the method also comprises the steps:
At liquid discharging valve, be unlocked and constantly rise, set one second time lag T2, whether described first, second liquid detecting device of judgement is excited in described the second time lag T2, if so, continues the action of exhaust bubble; If not, system reports an error.This step also can guarantee at first, second liquid detecting device, when cisco unity malfunction or sensitivity decline, in time problem to be fed back to staff, to change in time liquid detecting device, guarantees safety in production.
In the present invention, more in preferred embodiment, the step S3 in said method also specifically comprises step: set one the 3rd time lag T3, wait for after described the 3rd time lag T3, then close described liquid discharging valve and pressurizing valve after second liquid sensor is excited.Like this mode, can guarantee not have alveolate existence completely in the liquid of bottle, and the length of the 3rd time lag T3 also can be set as required, generally, is set as 2 seconds.
It is worth mentioning that, in the present invention, preferably in embodiment, said method also comprises the steps:
Judge that constantly whether current second liquid sensor was excited within the system Automatic-exhausting pickle period, if so, proceed the action of exhaust bubble, if not, system alarm.Wherein, because the rear end of surge flask liquid-discharging tube is connected with waste liquid pool, if under certain conditions, because liquid discharging valve is not shut or other faults occur, cause liquid in the waste liquid pool of rear end by suck-back, the second liquid sensor of discharge opeing pipe end is excited equally so this moment, system just can judge that the moment that second liquid sensor is excited not is in the predetermined exhaust bubble action period of system, system is automatic alarm just, and remind maintenance man to keep in repair, the economic loss of avoiding waste liquid water conservancy diversion to cause.It is worth mentioning that, in the preferred embodiment of the invention, find above-mentioned second liquid sensor be excited that (occurring the action of exhaust bubble), the Automatic-exhausting pickle in default was not in the period constantly time, can set one section of the 4th time lag T4, and judge whether this second liquid sensor state of (occur exhaust bubble action) of being excited continues at least T4 time lag, if so, warning always, if not, do not report to the police.In some situation, (Automatic-exhausting pickle period) to detect gas may not be to cause because valve damages the reason of (waste liquid refluence) to second liquid sensor at the appointed time, therefore aforesaid way can be got rid of this type of situation, do not report to the police, thereby maintain normal production.
To sum up, compared with prior art, Automatic-exhausting pickle system of the present invention is by the dummy status of using of first liquid sensor detecting chemical product, and automatically open liquid discharging valve to realize the action of exhaust bubble by controller, and by second liquid sensor detecting exhaust finishing stage, close in time liquid discharging valve to avoid the waste of chemical liquid agent, the purity of chemical product is higher, and whole process implementation is controlled automatically, the accident of avoiding personal factor to cause.Meanwhile, when there is waste liquid water conservancy diversion, system automatic alarm, avoids unnecessary economic loss.
Be to be understood that, although this specification is described according to mode of execution, but not each mode of execution only comprises an independently technological scheme, this narrating mode of specification is only for clarity sake, those skilled in the art should make specification as a whole, technological scheme in each mode of execution also can, through appropriately combined, form other mode of executions that it will be appreciated by those skilled in the art that.
Listed a series of detailed description is above only illustrating for feasibility mode of execution of the present invention; they are not in order to limit the scope of the invention, all disengaging within equivalent mode of execution that skill spirit of the present invention does or change all should be included in protection scope of the present invention.
Claims (10)
1. a chemical product Automatic-exhausting pickle system, is characterized in that, described system comprises:
One for storing the liquid container of chemical product, on its one end pipeline, is provided with pressurizing valve;
One surge flask, it is connected with described liquid container, and this surge flask is provided with liquid inlet pipe, drain pipe and the liquid-discharging tube being connected with bottle, wherein, at feed liquor pipe end, is provided with first liquid sensor, at discharge opeing pipe end, is provided with second liquid sensor and liquid discharging valve;
One controller, its excited state according to described first, second liquid detecting device is controlled the unlatching of described pressurizing valve and liquid discharging valve or closes.
2. chemical product Automatic-exhausting pickle system according to claim 1, is characterized in that, described liquid inlet pipe, liquid-discharging tube are arranged at the top of described surge flask, and described drain pipe is arranged at the bottom of described surge flask.
3. chemical product Automatic-exhausting pickle system according to claim 1, is characterized in that, described first liquid sensor is arranged in described liquid inlet pipe body or in described surge flask bottle.
4. chemical product Automatic-exhausting pickle system according to claim 3, is characterized in that, described liquid discharging valve is arranged at described second liquid sensor below.
5. chemical product Automatic-exhausting pickle system according to claim 1, is characterized in that, described system also comprises the man-machine interface being connected with described controller.
6. chemical product Automatic-exhausting pickle system according to claim 1, is characterized in that, described chemical product comprises photoresistance liquor.
7. application rights requires an Automatic-exhausting pickle method for the chemical product Automatic-exhausting pickle system described in 1, it is characterized in that, the method comprises the steps:
S1, judge whether first liquid sensor is excited, and if so, enters step S2, if not, does not operate;
S2, unlatching pressurizing valve, and open liquid discharging valve after waiting for very first time interval;
Exciting of S3, wait second liquid sensor, after second liquid sensor is excited, closes described liquid discharging valve and pressurizing valve.
8. Automatic-exhausting pickle method according to claim 7, is characterized in that, after described step S2, the method also comprises:
At liquid discharging valve, be unlocked and constantly rise, set for one second time lag, whether described first, second liquid detecting device of judgement is excited within described second time lag, if so, continues the action of exhaust bubble; If not, system reports an error.
9. Automatic-exhausting pickle method according to claim 7, it is characterized in that, described step S3 also specifically comprises: set for one the 3rd time lag, wait for after described the 3rd time lag, then close described liquid discharging valve and pressurizing valve after second liquid sensor is excited.
10. Automatic-exhausting pickle method according to claim 8, is characterized in that, the method also comprises:
Judge that constantly whether current second liquid sensor was excited within the system Automatic-exhausting pickle period, if so, proceed the action of exhaust bubble, if not, system alarm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210286994.9A CN103591459A (en) | 2012-08-14 | 2012-08-14 | System and method for automatically exhausting bubbles of chemicals |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210286994.9A CN103591459A (en) | 2012-08-14 | 2012-08-14 | System and method for automatically exhausting bubbles of chemicals |
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| CN103591459A true CN103591459A (en) | 2014-02-19 |
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| CN201210286994.9A Pending CN103591459A (en) | 2012-08-14 | 2012-08-14 | System and method for automatically exhausting bubbles of chemicals |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1501053A (en) * | 2002-11-15 | 2004-06-02 | 旺宏电子股份有限公司 | Detecting and early-warning system for liquid and liquid level in pipe and its application |
| CN1509199A (en) * | 2001-12-28 | 2004-06-30 | 株式会社小金井 | Chemical Supply device and method thereof |
| JP2007324383A (en) * | 2006-06-01 | 2007-12-13 | Fujifilm Corp | Photoresist supply apparatus |
| CN101246311A (en) * | 2007-02-12 | 2008-08-20 | 中芯国际集成电路制造(上海)有限公司 | Photo resist air bubble eliminating system and method thereof |
| CN201339817Y (en) * | 2009-02-05 | 2009-11-04 | 和舰科技(苏州)有限公司 | Liquid detecting system in pipeline |
| CN202691599U (en) * | 2012-08-14 | 2013-01-23 | 苏州和览电子科技有限公司 | Automatic bubble removing system for chemicals |
-
2012
- 2012-08-14 CN CN201210286994.9A patent/CN103591459A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1509199A (en) * | 2001-12-28 | 2004-06-30 | 株式会社小金井 | Chemical Supply device and method thereof |
| CN1501053A (en) * | 2002-11-15 | 2004-06-02 | 旺宏电子股份有限公司 | Detecting and early-warning system for liquid and liquid level in pipe and its application |
| JP2007324383A (en) * | 2006-06-01 | 2007-12-13 | Fujifilm Corp | Photoresist supply apparatus |
| CN101246311A (en) * | 2007-02-12 | 2008-08-20 | 中芯国际集成电路制造(上海)有限公司 | Photo resist air bubble eliminating system and method thereof |
| CN201339817Y (en) * | 2009-02-05 | 2009-11-04 | 和舰科技(苏州)有限公司 | Liquid detecting system in pipeline |
| CN202691599U (en) * | 2012-08-14 | 2013-01-23 | 苏州和览电子科技有限公司 | Automatic bubble removing system for chemicals |
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Application publication date: 20140219 |