CN103573894B - Vibration-control system - Google Patents
Vibration-control system Download PDFInfo
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- CN103573894B CN103573894B CN201210276067.9A CN201210276067A CN103573894B CN 103573894 B CN103573894 B CN 103573894B CN 201210276067 A CN201210276067 A CN 201210276067A CN 103573894 B CN103573894 B CN 103573894B
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Abstract
A kind of vibration-control system, comprising: the first hard elastics layer, the 2nd hard elastics layer, and the 3rd hard elastics layer, and described hard elastics layer is also arranged at interval to lower and upper longitudinally arrangement; First elastic layer, is arranged between described first hard elastics layer and described 2nd hard elastics layer; 2nd elastic layer, is arranged between described 2nd hard elastics layer and described 3rd hard elastics layer; 3rd elastic layer, is arranged on described 2nd hard elastics layer and is positioned at described 3rd hard elastics layer periphery; And the 4th elastic layer, the 5th elastic layer, described 4th elastic layer, the 5th elastic layer are arranged between described first hard elastics layer and described 3rd hard elastics layer. Vibration-control system of the present invention is by being arranged in series described first elastic layer and described 2nd elastic layer, and the 3rd elastic layer, the 4th elastic layer and the 5th elastic layer are set, namely strengthen effectiveness in vibration suppression and again reduce the performance requriements to rubber shock absorber, thus reduce cost, and play obvious buffering, effectiveness in vibration suppression in X-direction and Y-direction.
Description
Technical field
The present invention relates to the transportation unit technical field of precision equipment, particularly relate to a kind of vibration-control system.
Background technology
It is well known that rubber has following characteristic: (1) snappiness and viscoelasticity; (2) elasticity distortion is big, and Young's modulus is little; (3) shock stiffness is greater than dynamic stiffness, and dynamic stiffness is greater than Static stiffness; (4) stress-strain curve is oval delayed line, and its area equals the energy that shakes that each vibrational period is changed into heat, by formula adjustment; (5) hardness adjusts by formulating of recipe.
The rubber shock absorber manufactured by described rubber has that natural frequency is low, subsidence ratio is suitable, good stability and to the features such as peak rejection ability is strong of shaking. When being subject to greater impact, the self-vibration that transient impact causes can be decayed rapidly by described rubber shock absorber. Relation between the distortion amount of described rubber shock absorber and pressure represents by rigidity usually:Under same load, rubber hardness is big, then distortion amount is little; Hardness is little, then distortion amount is big.
Chinese invention patent CN102116359A discloses a kind of two level damper mechanisms being cooperatively interacted by ellipsoid shape rubber pad and spring and being formed, one end of the spring of described bipolar damper mechanism is plugged in the groove of described ellipsoid shape rubber pad lower metal pallet, the other end of described spring be plugged in lower support seat cavity in. Described pair of damper mechanism effectiveness in vibration suppression on compression direction significantly improves, but only can realize the vibration damping of single direction, and practicality is not good enough.
Chinese invention patent CN1773139A discloses a kind of viscoelastic vibration reducer being made up of two groups of symmetrical up and down damping buffering pads. Described damping buffering pad by elasticity restraint layer, basis rubber layer, intermediate rubber layer rubber layer is formed with contacting. Described viscoelastic vibration reducer good damping result, but manufacturing cost is too high, and it is unsuitable for the multidimensional vibration reduction of big mass objects.
Therefore for prior art Problems existing, this case design people is by means of being engaged in the industry experience for many years, and active research improves, so there is a kind of vibration-control system of invention.
Summary of the invention
The present invention be directed in prior art, traditional double damper mechanism only can realize the vibration damping of single direction, and practicality is not good enough, and manufacturing cost is too high, is unfavorable for that the defects such as popularization provide a kind of vibration-control system.
In order to solve the problem, the present invention provides a kind of vibration-control system, described vibration-control system comprises: the first hard elastics layer, the 2nd hard elastics layer, and the 3rd hard elastics layer, described first hard elastics layer, the 2nd hard elastics layer, and the 3rd hard elastics layer to lower and upper longitudinally arrangement and interval setting successively, described 3rd hard elastics layer is described load-carrying face; First elastic layer, described first elastic layer is arranged between described first hard elastics layer and described 2nd hard elastics layer; 2nd elastic layer, described 2nd elastic layer is arranged between described 2nd hard elastics layer and described 3rd hard elastics layer; 3rd elastic layer, described 3rd elastic layer is arranged on described 2nd hard elastics layer and is positioned at described 3rd hard elastics layer periphery; And the 4th elastic layer, the 5th elastic layer, the side of described 4th elastic layer is arranged on described first hard elastics layer, and another side of described 4th elastic layer is arranged on described 3rd hard elastics layer side; The side of described 5th elastic layer is arranged on described first hard elastics layer, and another side of described 5th elastic layer is arranged on described 3rd hard elastics layer side.
Optionally, the quantity of the first elastic layer of described vibration-control system designs according to the weight of described load, and described first elastic layer also distributes according to the centroid position symmetric parallel of described load.
Optionally, described in the size of the 2nd elastic layer of described vibration-control system and quantity basis, the size of load, thickness design, and do not collide with the 2nd hard elastics layer described in ensureing when being subject to moment impact and described 3rd hard elastics layer.
Optionally, described first elastic layer and described 2nd elastic layer have identical thickness.
Optionally, the distribution mode of described first elastic layer and described 2nd elastic layer is march-past distribution, annular spread, or the distribution of star type.
Optionally, described first hard elastics layer, the 2nd hard elastics layer, the 3rd hard elastics layer are wooden or plastics bolster.
Optionally, described first elastic layer is rubber shock absorber.
Optionally, described rubber shock absorber has following technical indicator: load range 800��3600N, level are to rigidity 600��700N/m, vertical stiffness 250��300N/mm, distortion scope 3��12mm, range of frequency 5��7.5Hz.
Optionally, described 2nd elastic layer is the cotton anti-vibration pad of EPE bubble.
Optionally, the cotton anti-vibration pad of described EPE bubble has following technical indicator: density 0.03g/cm2, unit elongation 125%, tensile strength 3.40kg/cm2, shearing resistance 1.8��3kg/cm2.
Optionally, described 3rd elastic layer is stopper, and described stopper is wood materials preparation.
Optionally, described 4th elastic layer side is fixedly installed on described first hard elastics layer by mounting plate and bolt, and another side of described 4th elastic layer is fixedly installed on described 3rd hard elastics layer bottom side by mounting plate and bolt.
Optionally, described 5th elastic layer side is fixedly installed on described first hard elastics layer by mounting plate and bolt, and another side of described 5th elastic layer is fixedly installed on described 3rd hard elastics layer bottom side by mounting plate and bolt.
In sum, vibration-control system of the present invention is by being arranged in series described first elastic layer and described 2nd elastic layer, and the 3rd elastic layer is set in described 2nd elastic layer periphery, and the 4th elastic layer and the 5th elastic layer are set between described first hard elastics layer and described 3rd hard elastics layer, namely strengthen effectiveness in vibration suppression and again reduce the performance requriements to rubber shock absorber, thus reduce cost, and play obvious buffering, effectiveness in vibration suppression in X-direction and Y-direction.
Accompanying drawing explanation
Fig. 1 show the three-dimensional arrangement decomposing schematic representation of vibration-control system of the present invention;
Fig. 2 show the front view of vibration-control system of the present invention;
Fig. 3 show the vertical view of vibration-control system of the present invention;
Fig. 4 show the schematic diagram of vibration-control system carry load of the present invention;
Fig. 5 show each test point acceleration-time chart of load that vibration-control system of the present invention carries.
Embodiment
By technology contents, the structural attitude of the invention being described in detail, is reached object and effect, below in conjunction with embodiment and coordinate accompanying drawing to be described in detail.
Referring to Fig. 1, Fig. 2, Fig. 3, Fig. 1 show the three-dimensional arrangement decomposing schematic representation of vibration-control system of the present invention. Fig. 2 show the front view of vibration-control system of the present invention. Fig. 3 show the vertical view of vibration-control system of the present invention. Described vibration-control system 1 comprises the first hard elastics layer 11, the 2nd hard elastics layer 12, and the 3rd hard elastics layer 13, described first hard elastics layer 11, the 2nd hard elastics layer 12, and the 3rd hard elastics layer 13 to lower and upper longitudinally arrangement and interval setting successively, described 3rd hard elastics layer 13 is described load (not shown) loading end; First elastic layer 14, described first elastic layer 14 is arranged between described first hard elastics layer 11 and described 2nd hard elastics layer 12; 2nd elastic layer 15, described 2nd elastic layer 15 is arranged between described 2nd hard elastics layer 12 and described 3rd hard elastics layer 13; 3rd elastic layer 16, described 3rd elastic layer 16 is arranged on described 2nd hard elastics layer 12 and is positioned at described 3rd hard elastics layer 13 periphery; And the 4th elastic layer 17, the 5th elastic layer 18, the side of described 4th elastic layer 17 is arranged on described first hard elastics layer 11, and another side of described 4th elastic layer 17 is arranged on described 3rd hard elastics layer 13 side; The side of described 5th elastic layer 18 is arranged on described first hard elastics layer 11, and another side of described 5th elastic layer 18 is arranged on described 3rd hard elastics layer 13 side.
Wherein, the quantity of described first elastic layer 14 designs according to the weight of described load, and described first elastic layer 14 also distributes according to the centroid position symmetric parallel of described load. Described in the size of described 2nd elastic layer 15 and quantity basis, the size of load, thickness design, and do not collide with the 2nd hard elastics layer 12 described in ensureing when being subject to moment impact and described 3rd hard elastics layer 13. Preferably, in the present invention, described first elastic layer 14 and described 2nd elastic layer 15 have identical thickness. The distribution mode of described first elastic layer 14 and described 2nd elastic layer 15 includes but not limited to march-past distribution, annular spread, or the distribution of star type. It is peripheral that described 3rd elastic layer 16 is arranged on described 2nd elastic layer 15, and carry out cushioning in X-direction and Y-direction for described vibration-control system 1 superstructure, vibration damping. Described 4th elastic layer 17 is arranged on described first hard elastics layer 11 and the X-direction of described 3rd hard elastics layer 13, and carry out cushioning in X-direction for described vibration-control system 1, vibration damping. Described 5th elastic layer 18 is arranged on described first hard elastics layer 11 and the Y-direction of described 3rd hard elastics layer 13, and carry out cushioning in the Y direction for described vibration-control system 1, vibration damping.
Specifically, in the present invention, described first hard elastics layer 11 includes but not limited to wooden or plastics bolster. Described 2nd hard elastics layer 12 includes but not limited to wooden or plastics bolster. Described 3rd hard elastics layer 13 includes but not limited to wooden or plastics bolster. Described first elastic layer 14 is rubber shock absorber. Described 2nd elastic layer 15 is EPE(ExpandAplePolyEphylene, EPE) the cotton anti-vibration pad of bubble. Described 3rd elastic layer 16 is stopper, and described stopper is wood materials preparation.
Preferably, described 4th elastic layer 17 side is fixedly installed on described first hard elastics layer 11 by mounting plate (not shown) and bolt (not shown), and another side of described 4th elastic layer 17 is fixedly installed on described 3rd hard elastics layer 13 side by mounting plate (not shown) and bolt (not shown). Described 5th elastic layer 18 side is fixedly installed on described first hard elastics layer 11 by mounting plate (not shown) and bolt (not shown), and another side of described 5th elastic layer 18 is fixedly installed on described 3rd hard elastics layer 13 side by mounting plate (not shown) and bolt (not shown). Described vibration-control system 1 cushions in X-direction and Y-direction, vibration damping for realizing for described 4th elastic layer 17 and described 5th elastic layer 18.
Referring to Fig. 4, Fig. 4 show the schematic diagram of vibration-control system carry load of the present invention. In order to describe the technical scheme of vibration-control system 1 of the present invention in detail, the lithography machine using weight as 5 tons is set forth as load 2. It is only and enumerates, be not considered as the restriction to technical solution of the present invention.
Enumerating ground, described first elastic layer 14 is rubber shock absorber. Described first elastic layer 14 has following technical indicator: load range 800��3600N, level are to rigidity 600��700N/m, vertical stiffness 250��300N/mm, distortion scope 3��12mm, range of frequency 5��7.5Hz, height 60mm, diameter 75mm; Adopt 40 rubber shock absorbers based on the centroid position evenly distribution in parallel of described lithography machine load 2 in the present embodiment. Now, the quiet distortion about 5mm of every rubber shock absorber also produces the anchorage force of 1250��1500N, and described 40 rubber shock absorber parallel connections just can carry 5 tons of loads. In addition, the distortion allowed band of described rubber shock absorber can reach 12mm, therefore described first elastic layer 14 can meet the safety coefficient of more than 1.5 times.
Meanwhile, the 2nd elastic layer 15 of described vibration-control system 1 is the cotton anti-vibration pad of EPE bubble. Described EPE steeps cotton anti-vibration pad and has following technical indicator: density 0.03g/cm2, unit elongation 125%, tensile strength 3.40kg/cm2, shearing resistance 1.8��3kg/cm2. It is 4 that described EPE steeps the quantity of cotton anti-vibration pad. Described each EPE steeps cotton anti-vibration pad length to be 1800mm, width be 200mm, thickness are 60mm. It is 200 �� 200mm that described EPE steeps the rigidity of cotton anti-vibration pad2Area is about 2000N/mm. The supporting capacity of the cotton anti-vibration pad of described EPE bubble when compressing 1mm can reach 7.3 tons.
The technician of this area is it will be seen that in vibration-control system of the present invention 1, the vertical stiffness K1=10000��12000N/mm of described 40 rubber shock absorbers, described 4 pieces of EPE steep the vertical stiffness K of cotton anti-vibration pad2=72000N/mm. ByKnown K=8780��10285N/mm. That is, after described first elastic layer 14 and described 2nd elastic layer 15 are connected, global stiffness reduces, and under the prerequisite meeting supporting capacity, damping property improves.
Referring to Fig. 5, Fig. 5 show each test point acceleration-time chart of load that vibration-control system of the present invention carries. As can be seen from Figure 5, under constrained place, bottom applies the transient state acceleration shock action that amplitude is 30g, the acceleration amplitude of lithography machine load 2 framework and object lens mounting points is about 6g. The present embodiment is by being arranged in series described first elastic layer 14 with described 2nd elastic layer 15, namely strengthen effectiveness in vibration suppression and again reduce the performance requriements to rubber shock absorber, thus reduce cost, and play obvious buffering, effectiveness in vibration suppression in X-direction and Y-direction.
Please continue to refer to Fig. 4, and combining and consult Fig. 5, described lithography machine load 2 is carried on described first elastic layer 14 being arranged in series and described 2nd elastic layer 15. Described first elastic layer 14 and described 2nd elastic layer 15 can realize in the land route of transportation unit without, under cushion transport and air transport operating mode, making described lithography machine load 2 decay to by external impact acceleration and meet moment impact��7g, bump��2g.
In sum, vibration-control system of the present invention is by being arranged in series described first elastic layer and described 2nd elastic layer, and the 3rd elastic layer is set in described 2nd elastic layer periphery, and the 4th elastic layer and the 5th elastic layer are set between described first hard elastics layer and described 3rd hard elastics layer, namely strengthen effectiveness in vibration suppression and again reduce the performance requriements to rubber shock absorber, thus reduce cost, and play obvious buffering, effectiveness in vibration suppression in X-direction and Y-direction.
Those skilled in the art are all it is understood that without departing from the spirit or scope of the present invention, it is possible to the present invention is carried out various modifications and variations. Thus, if any amendment or modification fall into appended claims and etc. jljl protection domain in time, it is believed that the present invention contain these amendment and modification.
Claims (13)
1. a vibration-control system, it is characterised in that, described vibration-control system comprises:
First hard elastics layer, the 2nd hard elastics layer, and the 3rd hard elastics layer, described first hard elastics layer, the 2nd hard elastics layer, and the 3rd hard elastics layer are longitudinally arranged and interval setting successively to lower and upper, and described 3rd hard elastics layer is load-carrying face;
First elastic layer, described first elastic layer is arranged between described first hard elastics layer and described 2nd hard elastics layer;
2nd elastic layer, described 2nd elastic layer is arranged between described 2nd hard elastics layer and described 3rd hard elastics layer, and described first elastic layer and described 2nd elastic layer are arranged in series;
3rd elastic layer, described 3rd elastic layer is arranged on described 2nd hard elastics layer and is positioned at described 3rd hard elastics layer periphery; And,
4th elastic layer, the 5th elastic layer, the side of described 4th elastic layer is arranged on described first hard elastics layer, and another side of described 4th elastic layer is arranged on described 3rd hard elastics layer side; The side of described 5th elastic layer is arranged on described first hard elastics layer, and another side of described 5th elastic layer is arranged on described 3rd hard elastics layer side.
2. vibration-control system as claimed in claim 1, it is characterised in that, the quantity of the first elastic layer of described vibration-control system designs according to the weight of described load, and described first elastic layer distributes according to the centroid position symmetric parallel of described load.
3. vibration-control system as claimed in claim 1, it is characterized in that, described in the size of the 2nd elastic layer of described vibration-control system and quantity basis, the size of load, thickness design, and do not collide with the 2nd hard elastics layer described in ensureing when being subject to moment impact and described 3rd hard elastics layer.
4. vibration-control system as described in claims 1 to 3 any claim, it is characterised in that, described first elastic layer and described 2nd elastic layer have identical thickness.
5. vibration-control system as described in claims 1 to 3 any claim, it is characterised in that, the distribution mode of described first elastic layer and described 2nd elastic layer is march-past distribution, annular spread, or the distribution of star type.
6. vibration-control system as described in claims 1 to 3 any claim, it is characterised in that, described first hard elastics layer, the 2nd hard elastics layer, the 3rd hard elastics layer are wooden or plastic support plate.
7. vibration-control system as described in claims 1 to 3 any claim, it is characterised in that, described first elastic layer is rubber shock absorber.
8. vibration-control system as claimed in claim 7, it is characterized in that, described rubber shock absorber has following technical indicator: load range 800��3600N, level are to rigidity 600��700N/m, vertical stiffness 250��300N/mm, distortion scope 3��12mm, range of frequency 5��7.5Hz.
9. vibration-control system as described in claims 1 to 3 any claim, it is characterised in that, described 2nd elastic layer is the cotton anti-vibration pad of EPE bubble.
10. as right wants the vibration-control system as described in 9, it is characterised in that, described EPE steeps cotton anti-vibration pad and has following technical indicator: density 0.03g/cm2, unit elongation 125%, tensile strength 3.40kg/cm2, shearing resistance 1.8��3kg/cm2��
11. vibration-control systems as described in claims 1 to 3 any claim, it is characterised in that, described 3rd elastic layer is stopper, and described stopper is wood materials preparation.
12. vibration-control systems as described in claims 1 to 3 any claim, it is characterized in that, described 4th elastic layer side is fixedly installed on described first hard elastics layer by mounting plate and bolt, and another side of described 4th elastic layer is fixedly installed on described 3rd hard elastics layer bottom side by mounting plate and bolt.
13. vibration-control systems as described in claims 1 to 3 any claim, it is characterized in that, described 5th elastic layer side is fixedly installed on described first hard elastics layer by mounting plate and bolt, and another side of described 5th elastic layer is fixedly installed on described 3rd hard elastics layer bottom side by mounting plate and bolt.
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| CN201210276067.9A CN103573894B (en) | 2012-08-03 | 2012-08-03 | Vibration-control system |
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| CN201210276067.9A CN103573894B (en) | 2012-08-03 | 2012-08-03 | Vibration-control system |
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| CN103573894A CN103573894A (en) | 2014-02-12 |
| CN103573894B true CN103573894B (en) | 2016-06-01 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201187546Y (en) * | 2008-05-22 | 2009-01-28 | 深圳市林格曼环保机电技术开发有限公司 | Combined type vibration damping noise reducer of elevator |
| CN101535677A (en) * | 2006-09-21 | 2009-09-16 | 株式会社普利司通 | Vibration-proof structure |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000031436A1 (en) * | 1998-11-26 | 2000-06-02 | Bando Chemical Industries, Ltd. | Seismic isolation device |
| JP2009204077A (en) * | 2008-02-27 | 2009-09-10 | Yokohama Rubber Co Ltd:The | Rubber bearing device |
| JP2009236164A (en) * | 2008-03-26 | 2009-10-15 | Bridgestone Corp | Laminated support |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101535677A (en) * | 2006-09-21 | 2009-09-16 | 株式会社普利司通 | Vibration-proof structure |
| CN201187546Y (en) * | 2008-05-22 | 2009-01-28 | 深圳市林格曼环保机电技术开发有限公司 | Combined type vibration damping noise reducer of elevator |
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| CN103573894A (en) | 2014-02-12 |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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