CN103572231A - Sputtering apparatus - Google Patents
Sputtering apparatus Download PDFInfo
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- CN103572231A CN103572231A CN201310205274.XA CN201310205274A CN103572231A CN 103572231 A CN103572231 A CN 103572231A CN 201310205274 A CN201310205274 A CN 201310205274A CN 103572231 A CN103572231 A CN 103572231A
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- drive shaft
- module
- tubular target
- magnet
- turning axle
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
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- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to a sputtering apparatus which simplifies component replacing process, and reduces apparatus maintenance time and cost. The sputtering apparatus comprises a process chamber for providing process space, a tubular target arranged in the process chamber, a magnetic iron module inserted in the tubular target, a driving portion installed on the inner wall of the process chamber and combined with the tubular target and the magnetic iron module, a rotary driving portion arranged outside the process chamber and providing first and second different rotary motion, and a gear module portion installed on the outer wall of the process chamber to support the rotary driving portion and transfer the first and second rotary motion to the driving portion, wherein the driving portion rotates the tubular target according to the first rotary motion and swings the magnetic iron module at a certain angle according to the second rotary motion.
Description
Technical field
The present invention relates to sputter equipment, more particularly relate to make that part replacement is easy makes to reduce the maintenance time of device and the sputter equipment of expense.
Background technology
Sputter (Sputtering) device, as representational physical vapor deposition (Physical Vapor Deposition) device, is mainly used in depositing making required thin film metal layer or the metal oxide layers such as semi-conductor and display device.
Sputter equipment as above is in operation chamber, to arrange after the target consisting of thin-film material (Target) depositing, relatively arrange after substrate with target, by plasma discharge, make Ionized argon (Ar) particle collide target, by this crash energy, thin-film material is come off from target thus, and then be deposited on substrate, thereby on substrate, form the device of thin film layer.This sputter equipment can form film at short notice with fairly simple structure, is therefore widely used in the making of semiconducter device, solar cell, display panel.
On the other hand, Korea S's publication communique discloses tubulose magnetic control sputtering device No. 10-2007-0108907.
Described tubulose magnetic control sputtering device possesses terminal block, is installed in the vacuum chamber wall of sputter equipment, for rotating tubular target.
Described terminal block, the rotation according to the driving synchronous belt of drive unit, is rotatably mounted on the tubular target on mounting flange.
But described tubulose magnetic control sputtering device, is to use Timing Belt so that the revolving force of drive unit is passed to mounting flange, therefore need to periodically change Timing Belt.When changing this Timing Belt, vacuum and the described terminal block that need to remove vacuum chamber are whole, therefore have the problem of safeguarding (Maintenance) time and expense that increases device.
Summary of the invention
(technical problem that will solve)
The present invention creates in order to solve problem as above, and its object is to provide sputter equipment, makes part replacement easy so that reduce maintenance time and the expense of device.
In addition, another object of the present invention is to provide sputter equipment, simplify for rotating the structure of the driving part of tubular target.
In addition, another object again of the present invention is to provide sputter equipment, when increasing the service efficiency of tubular target, makes to be deposited on the even thickness of the film on substrate.
(means of dealing with problems)
In order to reach object as above, according to sputter equipment of the present invention, comprising: operation chamber, provides operation space; Tubular target, is arranged at described operation space; Magnet module, inserts the inside that is arranged at described tubular target; Driving part, is installed in the interior wall of described operation chamber, in conjunction with described tubular target and described magnet module; Rotary driving part, is arranged at the outside of described operation chamber, provides different first and second to rotatablely move; And comprise gear module portion, be installed in the exterior wall of described operation chamber to support described rotary driving part, described first and second rotatablely moved and be passed to described driving part, described driving part is according to the described first described tubular target of rotation that rotatablely moves, and according to described second, rotatablely moving at a certain angle, to swing be the described magnet module of feature.
In order to reach object as above, according to sputter equipment of the present invention, comprising: operation chamber, provides operation space; Tubular target, is arranged at described operation space; Magnet module, inserts the inside that is arranged at described tubular target; Driving part, is installed in the interior wall of described operation chamber, comprises for rotating the first turning axle of described tubular target and the inside of described the first turning axle of insertion for rotating the second turning axle of described magnet module; Rotary driving part, is arranged at the outside of described operation chamber, and first and second that is provided for respectively described first and second turning axle of independent rotation rotatablely moves; And gear module portion, be installed in the exterior wall of described operation chamber to support described rotary driving part, described first and second rotatablely moved and be passed to described driving part, wherein, described gear module portion, its structure comprises: the first spurn wheel, is incorporated into described the first turning axle; The second spurn wheel, is incorporated into described the second turning axle; The 3rd spurn wheel, the material by wear resistance lower than described the first spurn wheel forms, and according to described first, rotatablely moves and rotates described the first spurn wheel; And the 4th spurn wheel, the material by wear resistance lower than described the second spurn wheel forms, according to described second described the first spurn wheel of rotation that rotatablely moves.
In order to reach object as above, according to sputter equipment of the present invention, comprise and be arranged at the tubular target in described operation space and insert the magnet module of the inside be arranged at described tubular target and be installed in the interior wall of described operation chamber and be incorporated into the driving part of described tubular target and described magnet module, wherein, described driving part comprises: the first turning axle, according to first rotatablely moving and be rotated along with what being arranged on that outside first drive unit of described operation chamber drives; The second turning axle, is inserted in the inside of described the first turning axle, so that according to second rotatablely moving and be rotated along with what being arranged on that the second outside drive unit of described operation chamber drives; The first drive shaft, according to the rotation of described the first turning axle, rotates described tubular target; And second drive shaft, the rotation of described the second turning axle according to being inserted in the inside of described the first drive shaft, swings described magnet module at a certain angle in the inside of described tubular target.
(effect of invention)
By above-mentioned means of dealing with problems, sputter equipment according to the present invention has following effect.
The first, utilize rotatablely moving of gear, rotation tubular target also swings magnet module, thereby when gear is changed, need not remove the vacuum of operation chamber and can under atmospheric condition, change, and therefore can reduce maintenance time and expense.
The second, utilize and there is turning axle and the drive shaft rotation tubular target of dual structure and swing magnet module portion, therefore can simplify the structure of driving part.
The 3rd, with the rotating gang of tubular target so that magnet module straight line back and forth movement, thereby can increase the service efficiency of tubular target, in addition, swing at a certain angle magnet module, thereby can make to be deposited on the even thickness of the film on substrate.
Accompanying drawing explanation
Fig. 1 schematically shows the figure of a part for sputter equipment according to an embodiment of the invention.
Fig. 2 schematically shows the sectional view of a part for sputter equipment according to an embodiment of the invention.
Fig. 3 is the orthographic plan that schematically shows the inside of the gear module portion being illustrated in Fig. 2.
Fig. 4 is the stereographic map that schematically shows a part for the magnet module portion being illustrated in Fig. 2.
Fig. 5 be for explanatory view be shown in Fig. 4 according to the straight-line figure of the link plate of the rotation of eccentric gear.
Fig. 6 schematically shows the sectional view along I-I line being illustrated in Fig. 2.
Fig. 7 is in order to illustrate according to the figure of the etching pattern of the tubular target of the straight line back and forth movement of magnet module of the present invention portion.
Fig. 8 is in order to illustrate according to the figure of the swing of magnet module of the present invention portion.
Embodiment
Below, with reference to accompanying drawing to being described in detail according to a preferred embodiment of the invention.
Fig. 1 schematically shows the figure of a part for sputter equipment according to an embodiment of the invention, and Fig. 2 schematically shows the sectional view of a part for sputter equipment according to an embodiment of the invention.
With reference to Fig. 1 and Fig. 2, sputter equipment comprises according to an embodiment of the invention: operation chamber 100, tubular target 200, magnet module portion 300, driving part 400, gear module portion 500 and rotary driving part 600.
Described operation chamber 100 provides operation space, for using tubular target 200 and magnet module portion 300 to carry out control sputtering process.Now, described operation space, maintains certain vacuum by pumping installation (not shown).The magnetron sputtering operation that carry out in this operation space, carries out under the state of carrying out or moving at substrate under the state that can stop at substrate.
The inside of described operation chamber 100 is provided with substrate supporting portion with supporting substrates (not shown).
Now, while carrying out under the state that described magnetron sputtering operation stops at substrate, described substrate supporting portion can be the operation post that is fixedly installed on the inside of described operation chamber 100.On the other hand, while carrying out under the state that described magnetron sputtering operation moves at substrate, described substrate supporting portion can be, will move into substrate that mouthful (not shown) move into and moves to the substrate mobile module that substrate on another sidewall that is arranged at described operation chamber 100 is taken out of mouthful (not shown) side from being arranged at substrate a sidewall of described operation chamber 100.Now, described substrate mobile module can be conveying belt or a plurality of roller drive shaft.
Described tubular target 200, is incorporated into described driving part 400 and is arranged on described substrate.Described tubular target 200,, for example, rotates with certain direction in a clockwise direction according to the driving of driving part 400.
Described tubular target 200 comprises: cylindrical duct 210, forms certain length so that have hollow bulb; Target substance layer 220, is formed at the periphery of cylindrical duct 210.
One side end of described cylindrical duct 210, is supported on described driving part 400, and the opposite side end of described cylindrical duct 210 is rotatably supported in swivel bearing body (not shown) in the interior wall that is arranged on operation chamber 100.
Described target substance layer 220, comprises and will be deposited on the material of the film on substrate.For example, by sputtering process, on substrate, during the film of deposited copper material, described target substance layer 220 can or comprise that by copper material the alloy material of copper material forms.
Described tubular target 200 arranges at certain intervals a plurality of on substrate.
Described magnet module portion 300, is incorporated into described driving part 400, and inserts the inside that is arranged at described tubular target 200, that is, and and the hollow bulb of described cylindrical duct 210.One side end bearing of described magnet module portion 300 is in described driving part 400, and the opposite side end of described magnet module portion 300 is rotatably supported in described swivel bearing body (not shown).
Described magnet module portion 300, in formation magnetic field, the surface of tubular target 200, to increase the plasma density being formed on tubular target 200, thereby can emit film substrate or target substance effectively from tubular target 200.
Described magnet module portion 300, according to the driving of described driving part 400, links in the rotation of described tubular target 200, along the length direction of described tubular target 200, carries out straight line back and forth movement.In addition, described magnet module portion 300, according to sputtering process mode, swings (Swing) when can carry out described straight line back and forth movement or carrying out described straight line back and forth movement at a certain angle, that is, can repeatedly be rotated in the forward and retrograde rotation.
As embodiment, while carrying out described sputtering process under the state moving at substrate, described magnet module portion 300 can, according to the driving of described driving part 400, link and carry out straight line back and forth movement in the rotation of described tubular target 200.
As another example, while carrying out described sputtering process under the state stopping at substrate, described magnet module portion 300 can link in the rotation of described tubular target 200 according to the driving of described driving part 400, when carrying out straight line back and forth movement, can swing at a certain angle (Swing).Now, the swing of described magnet module portion 300 can be, corresponding with the sense of rotation of described tubular target 200 is rotated in the forward and the retrograde rotation contrary with the sense of rotation of described tubular target 200.Herein, the pendulum angle of described magnet module portion 300, the Z-axis of take between described substrate and described tubular target 200 is be set as ± 45 ° of scopes of benchmark, but be not limited thereto, can change according to the distance of 200 of the distance between described substrate and described tubular target 200 and/or described tubular targets.
In above-mentioned explanation, although be swing while carrying out described sputtering process under the state only stopping at substrate with magnet module portion 300 and be illustrated, but be not limited thereto, while carrying out described sputtering process under the state that magnet module portion 300 moves at substrate, also can swing.
Described driving part 400, is installed in the interior wall of operation chamber 100, to support a side end of described tubular target 200 and a side end of described magnet module portion 300.In addition, described driving part 400, that according to the driving of rotary driving part 600, by gear module portion 500, transmits rotatablely moves, and swings at a certain angle described magnet module portion 300 when rotating described tubular target 200 or rotating described tubular target 200 with certain orientation with certain orientation.Now, the swing of described magnet module portion 300 is carried out selective control according to above-mentioned sputtering process mode.
Described driving part 400 comprises: housing 410, housing closed tube 415, mounting flange 420, the first drive shaft 430, the second drive shaft 440, the first turning axle 450 and the second turning axle 460.
Housing closed tube 415, inserts and is arranged in the external wall of upper portion of the operation chamber 100 overlapping with housing 410, so that UNICOM is in the internal space of housing 410.
Described mounting flange 420, is incorporated into a side end of described tubular target 200, so that rotatably mounted described tubular target 200.
The first drive shaft 430 forms cylinder form to have hollow bulb, and the inside that is arranged at housing 410 is incorporated into described mounting flange 420.That is, a side of the first drive shaft 430 is arranged at the internal space of housing 410, and the opposite side of the first drive shaft 430 connects a side of housing 410 to be incorporated into described mounting flange 420.
One side end of described the first drive shaft 430 is in conjunction with the first cone gear 432.Therefore, described the first drive shaft 430, can be according to the rotation of described the first cone gear 432, and the X-direction of usining is rotated as central shaft.For this reason, between the periphery of described the first drive shaft 430 and housing 410, clutch shaft bearing 434 is set, by clutch shaft bearing 434 so that the first drive shaft 430 in rotatable state.
Described the second drive shaft 440, inserts the hollow bulb of described the first drive shaft 430, with 300 combinations of described magnet module portion.That is, a side of the second drive shaft 440 is protruded certain length from being arranged on the end of the first drive shaft 430 of the internal space of housing 410.The opposite side of the second drive shaft 440 connects the hollow bulb of described tubular target 200, is rotatably supported in above-mentioned swivel bearing body.
One side end of the second drive shaft 440 is combined with the second cone gear 442.Therefore, described the second drive shaft 440, can be according to the rotation of described the second cone gear 442, and the X-direction of usining in the inside of described the first drive shaft 430 is rotated as central shaft.For this reason, between the periphery of the second drive shaft 440 and the first drive shaft 430 hollow bulbs, the second bearing 444 is set, by the second bearing 444 so that the second drive shaft 440 in rotatable state.
Described the first turning axle 450, when being inserted in the internal space of housing closed tube 415, is contacted with gear module portion 500, thereby is rotated according to rotatablely moving of transmitting from gear module portion 500, and then rotates described the first drive shaft 430.For this reason, described the first turning axle 450 forms cylinder form to have hollow bulb, is vertically arranged at the internal space of housing closed tube 415 along Z-direction.The lower side that the internal space of the upper side of the first turning axle 450 by housing closed tube 415 is contacted with gear module portion 500, the first turning axles 450 is arranged at the internal space of housing 410, so that be contacted with the first drive shaft 430.
The lower side of the first turning axle 450 is combined with third hand tap gear 452, with the first cone gear 432 engagements of described the first drive shaft 430.Therefore, described third hand tap gear 452 is according to the rotation of described the first turning axle 450, and the Z direction of usining is rotated as central shaft, thereby rotates the first cone gear 432, and then according to the rotation of the first cone gear 432, the first drive shaft 430 is rotated.Now, between the periphery of the first turning axle 450 and the inside face of housing closed tube 415, the 3rd bearing 454 is set, by the 3rd bearing 454 so that the first turning axle 450 in rotatable state.
Described the second turning axle 460, when being inserted in the hollow bulb of described the first turning axle 450, is contacted with gear module portion 500, thereby is rotated according to rotatablely moving of transmitting from gear module portion 500, and then rotates described the second drive shaft 440.The upper side of the second turning axle 460 is contacted with the lower side of gear module portion 500, the second turning axles 460 from the lower side protrusion certain length of the first turning axle 450, so that be contacted with the second drive shaft 440 by the hollow bulb of described the first turning axle 450.
The lower side of the second turning axle 460 is combined with the 4th cone gear 462, with the second cone gear 442 engagements of described the second drive shaft 440.Therefore, described the 4th cone gear 462 is according to the rotation of described the second turning axle 460, and the Z direction of usining is rotated as central shaft, thereby rotates the second cone gear 442, and then according to the rotation of the 4th cone gear 432, the second drive shaft 440 is rotated.Now, between the periphery of the second turning axle 460 and the hollow bulb of described the first turning axle 450, the 4th bearing 464 is set, by the 4th bearing 464 so that the second turning axle 460 in rotatable state.
Described gear module portion 500, is arranged at the outside of operation chamber 100, so that contact with driving part 400, thereby rotatablely moving of providing from described rotary driving part 600 is passed to driving part 400.For this reason, as shown in Figures 2 and 3, described gear module portion 500 comprises: cabinet 510; The first to the 4th spurn wheel (Spur Gear) 520,530,540,550; And cover 560.
Described cabinet 510 combinations are supported on, the upper side of the housing closed tube 415 of the driving part 400 protruding from the top wall of operation chamber 100.Now, a part of region of the bottom surface of described cabinet 510 forms inserts sky, and the upper side of described housing closed tube 415 is inserted.Thus, insert above-mentioned 450,460 minutes other upper side of first and second turning axle of the internal space of described housing closed tube 415, the inside of inserting described cabinet 510 by described patchhole.Herein, the upper side of the second turning axle 460 is protruded with certain altitude from the upper side of the first turning axle 450.
Described lid 560 forms dull and stereotyped form with above covering cabinet 510.
The first spurn wheel 520 is incorporated into the upper side of the first turning axle 450 protruding from the internal space of described cabinet 510.
The second spurn wheel 530 is arranged on described the first spurn wheel 520, so that be incorporated into the upper side of the second turning axle 460 protruding from the internal space of described cabinet 510.Now, described the second spurn wheel 530 has the external diameter that is less than described the first spurn wheel 520.
Described first and second spurn wheel 520,530 is preferably respectively, carbon alloy material or molybdenum-chrome steel (Steel Chromium Molybdenum, referred to as the SCM) material with outstanding intensity and/or wear resistance, consists of.
The 3rd spurn wheel 540 is arranged on the internal space of described cabinet 510 so that mesh with described the first spurn wheel 520.
The 4th spurn wheel 550 is arranged on the internal space of described cabinet 510 so that mesh with described the second spurn wheel 530.
The the described the 3rd and the 4th spurn wheel 540,550 is preferably respectively, intensity and/or wear resistance, relatively lower than the material of described first and second spurn wheel 520,530, consists of.Particularly, the the described the 3rd and the 4th spurn wheel 540,550 is preferably respectively, by insulativity material, be that engineering plastics (Engin eering plastic) form, with prevent from being applied to target 200 electric current adverse current and cause rotary driving part 600 impaired, prevent described first and second spurn wheel other wearing and tearing in 520,530 minutes simultaneously.For example, the described the 3rd and the 4th spurn wheel 540,550 can consist of monomer moulding casting nylon (Mono mer Cast Nylon, referred to as MC Nylon) or acetal (ACETAL) material respectively.
Be below, for described first and second spurn wheel 520,530, formed respectively by carbon alloy material, the reason that the described the 3rd and the 4th spurn wheel 540,550 is formed by insulativity material is respectively described as follows.
For example, because the first and the 3rd spurn wheel 520,540 is rotated intermeshingly, while therefore being formed by identical material, the first and the 3rd spurn wheel 520,540 respectively can be impaired or wearing and tearing, cause thus the first and the 3rd spurn wheel 520,540 all to need to carry out periodic replacement, and then can cause the increase of maintenance time and expense.But, as mentioned above, when the first spurn wheel 520 is formed by carbon alloy material, when the 3rd spurn wheel 540 is formed by insulativity material on the contrary, only have the 3rd spurn wheel 540 impaired or wearing and tearing, cause thus only changing the 3rd spurn wheel 540, and then can reduce maintenance time and the expense of gear.
With reference to Fig. 2 and Fig. 3, rotary driving part 600 is arranged in gear module portion 500, and comprises: first and second drive unit 610,620, is respectively used to rotate independently tubular target 200 and magnet module portion 300.
Described the first drive unit 610 provides first to rotatablely move, for for example, the 3rd spurn wheel 540 with certain orientation (, clockwise direction) swing pinion module portion 500.This first drive unit 610 consists of drive-motor, and the axle 612 of drive-motor connects the lid 560 of gear module portion 500 and is incorporated into the 3rd spurn wheel 540.Now, described the 3rd spurn wheel 540, can be incorporated into the axle 612 of described the first drive unit 610, and mesh with the first spurn wheel 520.
Described the 3rd spurn wheel 540, rotatablely moves and is rotated according to first of described the first drive unit 610, rotates thus the first spurn wheel 520, and then rotation tubular target 200.; tubular target 200 bases; the subordinate rotation that the first spurn wheel 520, the first turning axle 450, third hand tap gear 452, the first cone gear 432, the first drive shaft 430 and mounting flange 420 carry out according to the driving of described the first drive unit 610, thus with certain orientation, be rotated.
Described the second drive unit 620 provides second to rotatablely move, for the 4th spurn wheel 550 with forward and retrograde rotation gear module portion 500.This second drive unit 620 consists of drive-motor, and the axle 622 of drive-motor connects the lid 560 of gear module portion 500 and is incorporated into the 4th spurn wheel 550.Now, described the 4th spurn wheel 550 can be incorporated into the axle 622 of described the second drive unit 620, and meshes with the second spurn wheel 530.
Described the 4th spurn wheel 550, rotatablely moves according to second of described the second drive unit 620, repeatedly carries out the retrograde rotation with certain angle that is rotated in the forward of certain angle, thereby swings the second spurn wheel 530, and then swing at a certain angle magnet module portion 300.; magnet module portion 300 bases; the subordinate that the second spurn wheel 530, the second turning axle 460, the 4th cone gear 462, the second cone gear 442 and the second drive shaft 440 carry out according to the driving of described the second drive unit 620 swings, thereby swings at a certain angle.
Fig. 4 is the stereographic map that schematically shows a part for the magnet module portion being illustrated in Fig. 2.
With reference to Fig. 2 and Fig. 4, according to magnet module of the present invention portion 300, according to the driving of driving part 400,, according to the rotation of mounting flange 420, corresponding to the X-direction of tubular target 200 length directions, carry out straight line back and forth movement, according to the swing of the second drive shaft 440, carry out at a certain angle.For this reason, described magnet module portion 300 comprises: rotary flange 310, binding modules 320, transfer module 330, magnet handover portion 340, support cap 350, a plurality of magnet tilting member 360 and magnet array 370.
Take described X-direction as benchmark, in the side of described rotary flange 310, be provided with at certain intervals a plurality of protruding pins 312.Described a plurality of protruding pin 312 forms certain length along described X-direction respectively, and to magnet handover portion 340, provides revolving force according to the rotation of rotary flange 310, thereby makes magnet array 370 carry out straight line back and forth movement along described X-direction.
Binding modules 320, the second drive shaft 440 combinations with connecting rotary flange 310, swing in the rotation of the second drive shaft 440 at a certain angle thereby link.
Stuck-module 344, arrange and be fixed on transfer module 330 above.
In Fig. 5, illustrate eccentric gear 342 and be rotated in a clockwise direction 90 degree, but the eccentric rotary of described eccentric gear 342, can according to the sawtooth number of eccentric gear 342 or the number of teeth and protruding pin number ratio determine.
Again, in Fig. 2 and Fig. 4, make described support cap 350 form the end face with " ∩ " font state, thereby be arranged on, can transfer in the handover module 330 that is arranged at the second drive shaft 440, and then cover the top of the second drive shaft 440.In addition, support cap 350, can be by a plurality of partitions (not shown) supporting that is arranged at certain intervals the second drive shaft 440.
As shown in Figure 6, described a plurality of magnet tilting members 360 respectively at certain intervals with the second drive shaft 440 combinations, thereby according to the swing of the second drive shaft 440, and then swinging mounting lid 350.For this reason, a plurality of magnet tilting members 360 comprise respectively: axle communicating pores 361, connects the second drive shaft 440; Top salient 363, forms around support cap 350, connect support cap 350 above and with certain altitude, protrude; Bottom salient 365, is formed on the bottom of top salient 363, so that have the semicircle form corresponding to cylindrical duct 210 internal diameters of tubular target 200; Neck 367, is formed between top salient 363 and bottom salient 365; And magnet through slot 369, hollowly form below bottom salient 367, magnet array 370 is connected.
This plurality of magnet tilting member 360 respectively, is arranged at the binder bolt 368 of the two sides of neck 367, with the second drive shaft 440 combinations by connecting the second drive shaft 440.Thus, a plurality of magnet tilting members 360 respectively, according to the swing of the second drive shaft 440, thereby swing the magnet array 370 that connects magnet through slot 369.
With reference to Fig. 4 and Fig. 6, described magnet array 370 is incorporated into dividing below other with a plurality of partitions of above-mentioned handover module 330 below, thereby in formation magnetic field, the surface of tubular target 200.For this reason, magnet array 370 comprises: supporting plate 372, magnet support strip 374 and a plurality of magnet 376.
Supporting plate 372, is incorporated into and transfers dividing below other with a plurality of partitions of module 330 below, to support magnet support strip 374.This supporting plate 372, links in the straight line back and forth movement of transferring module 330, along X-direction, carries out straight line back and forth movement.
A plurality of magnet 376, is arranged on the bottom of magnet support strip 374 at certain intervals.That is, a plurality of magnet 376 is vertically arranged on the central part below of magnet support strip 374, the two sides with certain obliquity in magnet support strip 374.This plurality of magnet 376, in formation magnetic field, the surface of tubular target 200, is formed at the plasma density of tubular target 200 thereby increase, and then makes effectively to emit film substrate or target substance from tubular target 200.Now, described a plurality of magnet 376 links according to the straight line back and forth movement of the handover module 330 of the driving of magnet handover portion 340, thereby carry out straight line back and forth movement, and then form uniform magnetic field in the whole region, surface of tubular target 200, so that increase the service efficiency of tubular target 200.In addition, the magnet tilting member 360 that described a plurality of magnet 376 swings according to the swing of the second drive shaft 440 by driving part 400, thus in the inside of tubular target 200, swing at a certain angle, and then increase the uniformity coefficient that is deposited on the film on substrate.
Specifically, as shown in Figure 7, described magnet array 370 links and carries out the straight line back and forth movement along X-direction in the rotation of tubular target 200, thereby disperses consumption in two stub areas of tubular target 200, and then increases the service efficiency of tubular target 200.
As shown in Figure 7a, during described tubular target 200 rotations, when described magnet array 370 edge ± X-directions are carried out a back and forth movement, the erosion areas of tubular target 200 can have rough form.Thus, although can disperse consumptions in two stub areas of tubular target 200, cannot use the target substance in region of the protrusion of tubular target 200, so can make the service efficiency of tubular target 200 low.
Thus, as shown in Figure 7a, the present invention sets from eccentric gear 342 tubular target 200 with different speed of rotation, makes thus the erosion areas of tubular target 200 can be not uneven, and is distributed to equably whole region.For this reason, above-mentioned eccentric gear 342 sawtooth or the number of teeth and the number that is formed on the protruding pin 312 of rotary flange 310 are set as to certain proportion.Now, the sawtooth number of eccentric gear 342 is set as relatively more than the number that is formed on the protruding pin 312 of rotary flange 310.For example, the inventor is set as 17:21 by the number of protruding pin 312 and the sawtooth number of eccentric gear 342 that are formed on rotary flange 310, the result demonstration of testing, when described magnet array 370 needs tubular target 200 to rotate 21 times, the path of straight line back and forth movement that could be repeatedly identical.
As shown in Figure 8, described magnet array 370 swings in the inside of tubular target 200 at a certain angle according to the swing of the second drive shaft 440 of driving part 400, thereby be increased in tubular target 200 sputters target substance emit angle (input angle), and then increase the uniformity coefficient that deposits to the film on substrate S.
Specifically, as shown in Figure 8 a, when described magnet array 370 does not swing in the inside of tubular target 200, in tubular target 200 target substance of sputter emit angle or input angle by limited, therefore cannot on substrate S, deposit the film of uniform thickness.
On the contrary, as shown in Figure 8 b, when described magnet array 370 swings at a certain angle in the inside of tubular target 200, in tubular target 200 target substance of sputter emit angle or input angle will increase, therefore can on substrate S, deposit the film of uniform thickness.
Described magnet array 370 can, according to the movement of substrate S whether sputtering process mode, optionally swing.; as mentioned above; the present invention utilizes the driving of the first drive unit 610 so that when tubular target 200 rotation; make magnet array 370 straight line back and forth movements; driving by the second drive unit 620 swings magnet array 370; therefore can pass through the control of the second drive unit 620, optionally swing magnet array 370.
Sputter equipment according to an embodiment of the invention as above, utilize the rotation tubular target 200 that rotatablely moves of gear, swing magnet module portion 300, and then when gear changing more, without the vacuum of removing operation chamber 100, therefore also can under atmospheric condition, change maintenance time and expense that can cutting device.In addition, utilization of the present invention has turning axle and the drive shaft rotation tubular target 200 of dual structure, swings magnet module portion 300, and then simplifies the structure of driving part 400.
In addition, the the 3rd and the 4th spurn wheel 540,550 being rotated according to rotary driving part 600 of the present invention is formed by insulativity material, formed by carbon alloy material with first and second spurn wheel 520,530 of the 3rd and the 4th spurn wheel 540,550 engagements respectively, therefore the 3rd and the 4th spurn wheel 540,550 only can wear and tear, thereby can only change and be arranged at the 3rd and the 4th spurn wheel 540,550 of airspace, thereby can easily carry out part replacement.In addition, the present invention, links magnet module portion 300 and carries out straight line back and forth movement in the rotation of tubular target 200, can increase the service efficiency of tubular target 200, and even by swinging magnet module portion 300, makes to be deposited on the even thickness of the film on substrate.
The practitioner of the technical field of the invention should be appreciated that the present invention is not in the situation that changing its technological thought or essential feature, can implement with other concrete forms.Therefore should be understood to, the embodiment of above record is the illustration going up in all respects, is not for limiting.Scope of the present invention, than above-mentioned detailed explanation, can be revealed in whole technical scope, and all changes of deriving from meaning, the scope of technical scope and the concept that is equal to thereof or the form of distortion should be interpreted as being included in scope of the present invention.
Claims (15)
1. a sputter equipment, comprising:
Operation chamber, provides operation space;
Tubular target, is arranged at described operation space;
Magnet module, inserts the inside that is arranged at described tubular target;
Driving part, is installed in the interior wall of described operation chamber, is incorporated into described tubular target and described magnet module;
Rotary driving part, is arranged at the outside of described operation chamber, provides different first and second to rotatablely move; And
Gear module portion, is installed in the exterior wall of described operation chamber to support described rotary driving part, and described first and second rotatablely moved and be passed to described driving part,
Described driving part, rotatablely moves and rotates described tubular target according to described first, and described magnet module is carried out to straight line back and forth movement along described tubular target length direction, according to described second, rotatablely moves and swings at a certain angle described magnet module.
2. sputter equipment according to claim 1, wherein, described driving part comprises:
The first drive shaft, rotates described tubular target;
The second drive shaft, is inserted into the inside of described the first drive shaft, rotates described magnet module;
The first turning axle, rotatablely moves according to be communicated to described gear module described first, rotates described the first drive shaft; And
The second turning axle, is inserted in the inside of described the first turning axle, according to transmit from described gear module portion described second, rotatablely moves and swings the second turning axle.
3. sputter equipment according to claim 2, wherein, described gear module portion comprises:
The first spurn wheel, is incorporated into described the first turning axle;
The second spurn wheel, is incorporated into described the second turning axle;
The 3rd spurn wheel, rotatablely moves and rotates described the first spurn wheel according to described first; And
The 4th spurn wheel, rotatablely moves and rotates described the second spurn wheel according to described second.
4. sputter equipment according to claim 3, wherein, the described first and the 3rd spurn wheel is formed by different material,
The described second and the 4th spurn wheel is formed by different material.
5. sputter equipment according to claim 3, wherein,
The wear resistance of described first and second spurn wheel is higher than the described the 3rd and the 4th spurn wheel.
6. sputter equipment according to claim 3, wherein, described rotary driving part comprises:
The first drive unit, for rotating described the 3rd spurn wheel; And
The second drive unit, for rotating described the 4th spurn wheel.
7. according to the sputter equipment described in any one in claim 2 to 6, wherein,
Described magnet module,
Link in the rotatablely moving of described the first drive shaft, carry out at a certain distance straight line back and forth movement,
Link in being rotated in the forward and retrograde rotation of described the second drive shaft, swing at a certain angle.
8. sputter equipment according to claim 7, wherein, described magnet module comprises:
Rotary flange, links and is rotated in the rotation of described the first drive shaft, and has a plurality of protruding pins that protrude at certain intervals;
Binding modules, is combined in described the second drive shaft so that adjacent with described rotary flange, according to the rotation of described the second drive shaft, is rotated;
Transfer module, be arranged on movably described the second drive shaft, from described binding modules, keep at a certain distance away.
Magnet handover portion, is arranged between described binding modules and described handover module, and rotatablely moving of described rotary flange is converted to translational motion, thereby makes described handover module carry out straight line back and forth movement;
Support cap, is incorporated into described handover module, to cover described the second drive shaft;
Magnet tilting member, is arranged on the inside of described support cap, so that described the second drive shaft connects, according to the rotation of described the second drive shaft, is rotated; And
Magnet array, be incorporated into described handover module below so that connect described magnet tilting member, in formation magnetic field, the surface of described tubular target, according to the handover of described handover module, carry out straight line back and forth movement, according to the rotation of described magnet tilting member, swing.
9. sputter equipment according to claim 8, wherein, described magnet handover portion comprises:
Eccentric gear, has a plurality of sawtooth that mesh with described protruding pin, and is rotatably incorporated into described binding modules, thereby be rotated according to the rotation of described rotary flange;
Stuck-module, secure bond is in described handover module; And
Link plate, is arranged on described eccentric gear and described stuck-module, according to the eccentric rotary of described eccentric gear, makes described handover module carry out translational motion.
10. a sputter equipment, comprising:
Operation chamber, provides operation space;
Tubular target, is arranged at described operation space;
Magnet module, inserts the inside that is arranged at described tubular target;
Driving part, is installed in the interior wall of described operation chamber, comprises for rotating the first turning axle of described tubular target and the inside that is inserted in described the first turning axle for rotating the second turning axle of described magnet module;
Rotary driving part, is arranged at the outside of described operation chamber, and first and second that is provided for respectively described first and second turning axle of independent rotation rotatablely moves; And
Gear module portion, is installed in the exterior wall of described operation chamber to support described rotary driving part, and described first and second rotatablely moved and be passed to described driving part,
Wherein, described gear module portion comprises:
The first spurn wheel, is incorporated into described the first turning axle;
The second spurn wheel, is incorporated into described the second turning axle;
The 3rd spurn wheel, the material by wear resistance lower than described the first spurn wheel forms, and according to described first, rotatablely moves and rotates described the first spurn wheel; And
The 4th spurn wheel, the material by wear resistance lower than described the second spurn wheel forms, and according to described second, rotatablely moves and rotates described the first spurn wheel.
11. according to the sputter equipment described in any one in 3 to the 6th and the 10th of claim the, wherein,
The the described the 3rd and the 4th spurn wheel is formed by insulativity material or engineering plastics (Engineering plasti c) material.
12. according to the sputter equipment described in any one in 3 to the 6th and the 10th of claim the, wherein,
Described first and second spurn wheel is formed by carbon alloy material or molybdenum-chrome steel (Steel Chromium Mol ybdenum, referred to as SCM) material.
13. according to the sputter equipment described in any one in 3 to the 6th and the 10th of claim the, wherein
The the described the 3rd and the 4th spurn wheel is formed by monomer moulding casting nylon (Monomer Cast Nylon, referred to as MC Nylon) or acetal (ACETAL) material.
14. 1 kinds of sputter equipments, comprise, be arranged at the tubular target in described operation space and insert the magnet module of the inside be arranged at described tubular target and be installed in the interior wall of described operation chamber and be incorporated into the driving part of described tubular target and described magnet module
Wherein, described driving part comprises:
The first turning axle, according to first rotatablely moving and be rotated along with what being arranged on that outside first drive unit of described operation chamber drives;
The second turning axle, is inserted in the inside of described the first turning axle, so that according to second rotatablely moving and be rotated along with what being arranged on that the second outside drive unit of described operation chamber drives;
The first drive shaft, according to the rotation of described the first turning axle, rotates described tubular target; And
The second drive shaft, the rotation of described the second turning axle according to being inserted in the inside of described the first drive shaft, swings described magnet module at a certain angle in the inside of described tubular target.
15. sputter equipments according to claim 14, wherein,
Described magnet module,
Link in the rotatablely moving of described the first drive shaft, carry out at a certain distance straight line back and forth movement,
According to being rotated in the forward and retrograde rotation of described the second drive shaft, swing at a certain angle.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120080454A KR101352379B1 (en) | 2012-07-24 | 2012-07-24 | Sputtering apparatus |
| KR10-2012-0080454 | 2012-07-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103572231A true CN103572231A (en) | 2014-02-12 |
| CN103572231B CN103572231B (en) | 2016-02-03 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310205274.XA Expired - Fee Related CN103572231B (en) | 2012-07-24 | 2013-05-29 | Sputter equipment |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101352379B1 (en) |
| CN (1) | CN103572231B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107889538A (en) * | 2015-05-06 | 2018-04-06 | 攀时奥地利公司 | Connector for pipe target |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109295430B (en) | 2017-07-25 | 2022-07-12 | 索莱尔有限责任公司 | Apparatus and method for adjusting rotation angle of magnet system of tubular magnetron |
| WO2023186295A1 (en) * | 2022-03-30 | 2023-10-05 | Applied Materials, Inc. | Deposition source, deposition source arrangement and deposition apparatus |
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| US5188717A (en) * | 1991-09-12 | 1993-02-23 | Novellus Systems, Inc. | Sweeping method and magnet track apparatus for magnetron sputtering |
| CN1462348A (en) * | 2000-09-21 | 2003-12-17 | 安托万·菲斯特 | Movement transforming device |
| KR20050090723A (en) * | 2004-03-09 | 2005-09-14 | 엘지.필립스 엘시디 주식회사 | An sputtering apparatus |
| CN101956169A (en) * | 2009-07-20 | 2011-01-26 | 北儒精密股份有限公司 | Rotating target for vacuum sputtering equipment |
| CN102239276A (en) * | 2008-12-03 | 2011-11-09 | 佳能安内华股份有限公司 | Plasma processing apparatus, apparatus for manufacturing magnetoresistive element, method for forming magnetic thin film and program for controlling film formation |
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2012
- 2012-07-24 KR KR1020120080454A patent/KR101352379B1/en active IP Right Grant
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2013
- 2013-05-29 CN CN201310205274.XA patent/CN103572231B/en not_active Expired - Fee Related
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| US5188717A (en) * | 1991-09-12 | 1993-02-23 | Novellus Systems, Inc. | Sweeping method and magnet track apparatus for magnetron sputtering |
| CN1462348A (en) * | 2000-09-21 | 2003-12-17 | 安托万·菲斯特 | Movement transforming device |
| KR20050090723A (en) * | 2004-03-09 | 2005-09-14 | 엘지.필립스 엘시디 주식회사 | An sputtering apparatus |
| CN102239276A (en) * | 2008-12-03 | 2011-11-09 | 佳能安内华股份有限公司 | Plasma processing apparatus, apparatus for manufacturing magnetoresistive element, method for forming magnetic thin film and program for controlling film formation |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107889538A (en) * | 2015-05-06 | 2018-04-06 | 攀时奥地利公司 | Connector for pipe target |
| CN107889538B (en) * | 2015-05-06 | 2020-06-16 | 攀时奥地利公司 | Connector for tube target |
| US10854436B2 (en) | 2015-05-06 | 2020-12-01 | Plansee Se | Connector piece for a tubular target |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103572231B (en) | 2016-02-03 |
| KR101352379B1 (en) | 2014-01-20 |
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