CN103570336A - High-density LTCC (Low Temperature Co-Fired Ceramic) substrate applicable to ultrahigh frequency condition and preparation method thereof - Google Patents

High-density LTCC (Low Temperature Co-Fired Ceramic) substrate applicable to ultrahigh frequency condition and preparation method thereof Download PDF

Info

Publication number
CN103570336A
CN103570336A CN201310482706.1A CN201310482706A CN103570336A CN 103570336 A CN103570336 A CN 103570336A CN 201310482706 A CN201310482706 A CN 201310482706A CN 103570336 A CN103570336 A CN 103570336A
Authority
CN
China
Prior art keywords
ltcc
preparation
glass
substrate
curtain coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201310482706.1A
Other languages
Chinese (zh)
Other versions
CN103570336B (en
Inventor
邵辉
简刚
王小京
胡庆贤
王凤江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu University of Science and Technology
Original Assignee
Jiangsu University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu University of Science and Technology filed Critical Jiangsu University of Science and Technology
Priority to CN201310482706.1A priority Critical patent/CN103570336B/en
Publication of CN103570336A publication Critical patent/CN103570336A/en
Application granted granted Critical
Publication of CN103570336B publication Critical patent/CN103570336B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Glass Compositions (AREA)

Abstract

The invention relates to a high-density LTCC (Low Temperature Co-Fired Ceramic) substrate which is applicable to an ultrahigh frequency condition, and a preparation method of the substrate. The LTCC substrate consists of a glass ceramic material and an organic curtain coating system, wherein the glass ceramic material consists of 45-48wt% of alpha-Al2O3, 50-53wt% of lanthanum-aluminum-borosilicate glass and 1-3wt% of ceramic pigment; the organic curtain coating system consists of 8-10wt% of a binding agent, 80-83wt% of a solvent, 3-4wt% of a dispersing agent, 5-6wt% of a plasticizer and 0-1wt% of rosin. The preparation method comprises the following steps: adding the organic curtain coating system into the glass ceramic material, preparing the materials into curtain coating slurry with solid content of 50-70wt%, performing ball milling so as to obtain an LTCC raw material tape, shearing, overlapping and hot-pressing the LTCC raw material tape, putting the LTCC raw material tape into a silicon carbide rod furnace, removing rubber and roasting so as to obtain the LTCC substrate with ultrahigh frequency low consumption and low dielectric constant. The blank in the technical field of ultrahigh frequency low-temperature cofired ceramic materials is made up.

Description

Be applicable to high-density LTCC substrate under ultra-high frequency condition and preparation method thereof
Technical field
The present invention relates to a kind of ultra-high frequency LTCC porcelain and raw material band preparation method, can be applicable to the technical fields such as wireless network, satellite transmission, CDMA, radar, Wireless USB transmission, microwave device.
Background technology
Along with the increase of backhaul HD video to video flowing demand in mobile phone and broadcast and closed-circuit television, people are very interested in the frequently available abundant bandwidth of millimeter wave.LTE service is in mobile network's deploy, and each base station needs the backhaul ability of 100Mbps, and at millimeter wave frequency band, total nearly 7GHz bandwidth can be for these application.Abundant bandwidth in these hyper bands also can be radar and imaging system provides more high resolving power.Moving launching system depends on the sweep method of similar radar conventionally, and the passive system only receiving requires near W frequency range about 100GHz, surpass in the bandwidth of 20GHz and all will have good sensitivity and high gain; In addition, the auxiliary accurate millimeter wave radar of applying that waits of adaptive cruise control and lane changing, frequency range is 77 and 79GHz frequency range.The deployment of millimeter-wave systems and the use of these frequency ranges, in the restriction to some extent of encapsulation and manufacture view.Problem is that module package designs and how to adjust assembly, how in suitable place, to add absorbing material so that module works and optimizes its aspect of performance, has run into numerous difficulties.By integrated various very high frequency(VHF) monolithic devices, successfully realize millimeter wave module and subsystem often needs the low-loss LTCC material of ultra-high frequency.
At present, the ultra-high frequency LTCC porcelain that domestic applicable microcircuit is used and meticulous technology of preparing thereof are still the first stage of research.Especially meeting frequency, be that the millimeter wave hyper band packaged material LTCC system of 10GHz and higher hundred G frequencies is very few.Because LTCC technology relates to materialogy and the large subject of microtronics two, material aspect also relates to porcelain, organic ink mates with three kinds of different kind of material of metal paste, porcelain relates to again technology controlling and process, and raw material band curtain coating, silk screen printing and the equipment such as low temperature co-fired.The restriction of above-mentioned all factors, makes LTCC material have a lot of problem in science that need research.The invention discloses a kind of ultra-high frequency microwave LTCC porcelain and substrate preparation method.
Summary of the invention
The object of the present invention is to provide a kind of high-density LTCC substrate being applicable under ultra-high frequency condition.
Another object of the present invention is to provide this to be applicable to the preparation method of the high-density LTCC substrate under ultra-high frequency condition.
A LTCC substrate for high density packing, is prepared into substrate by glass-ceramic material through the organic curtain coating system of different solid contents curtain coating;
Described beramic color be vanadium zirconium yellow, take flutter your Huang, cobalt ultramarine, cobalt blue, zinc titan yellow, peacock blue, cobalt powder is red, victoria green, chromium titanium tea or vanadium zirconium indigo plant;
Wherein glass-ceramic material is by the following component that accounts for overall weight percent: α-Al of 45～48wt% 2o 3, the lanthanum aluminium boron glass of 50～53wt% and the beramic color of 1～2wt% form;
Described lanthanum aluminium boron glass is by La 2o 329～32wt%; B 2o 327～29wt%; Al 2o 319～21wt%; CaO14～16wt%; BaO0～2wt%; P 2o 54～6wt%; MgO0.3～1wt%; R 2o (R=Li, Na or K) 0.5～1.6wt% forms;
Organic curtain coating system is comprised of following component: binding agent 8～10%; Solvent 80～83%; Dispersion agent 3～4wt%; Softening agent 5～6wt%; Rosin 0～1wt%.
Described solvent is the mixture of trichloroethane 60～65wt%, methylethylketone 25～28wt%, Virahol 12～15wt%; Described dispersion agent is menhaden fish oil; Described softening agent is butyl benzyl phthalate;
Described binding agent is to take the methacrylic acid of 0.5～0.6wt%, the methyl acrylate of the β-dimethyl-aminoethylmethacrylate of 64%～66wt%, 33%～35wt% is monomer, the Diisopropyl azodicarboxylate of 0.4%～0.6wt% is initiator, adopts solution polymerization process to make relative molecular weight (Mn) for the copolymer binder of 65000-75000.
A high-density LTCC substrate for ultra-high frequency condition, preparation process is as follows:
(1) preparation of binding agent:
Take methacrylic acid, β-dimethyl-aminoethylmethacrylate, methyl acrylate is monomer, and Diisopropyl azodicarboxylate is initiator, adopts solution polymerization process to make the multipolymer that relative molecular weight (Mn) is 65000～75000.
Concrete operations are: methacrylic acid (0.5～0.6wt%), β-dimethyl-aminoethylmethacrylate (64wt%～66wt%), methyl acrylate (33wt%～35wt%) are mixed and be placed in reactor; Diisopropyl azodicarboxylate (0.4wt%～0.5wt%) is dissolved in acetone solvent, slowly splashes in reactor; By repeatedly filling nitrogen-vacuumize the oxygen in the system of removing, and under nitrogen protection, at 70-80 ℃, adopt magnetic force or mechanical stirring to carry out copolyreaction; Reaction finishes rear underpressure distillation removes product, obtains copolymer binder.
(2) preparation of lanthanum aluminium boron glass:
Pressing lanthanum aluminium boron glass formula forms: La 2o 329～32wt%; B 2o 327～29wt%; Al 2o 319～21wt%; CaO14～16wt%; BaO0～2wt%; P 2o 54～6wt%; MgO 0.3～1wt%; R 2o0.5～2wt%R is Li, Na, K any two kinds, prepares its mixture blend 8～12h; Be placed in platinum crucible, at 1350～1500 ℃, be incubated 0.5～2h and make its complete melting and homogenizing, pour quenching in deionized water into and obtain transparent glass.Through roller mill coarse crushing, adopt after quick abrading-ball mill 0.5h～1h, to dry, it is 0.5～3 μ m powder that mistake 100 mesh sieves obtain median size.
(3) preparation of glass-ceramic material:
According to α-Al 2o 3account for 45～48wt% of glass-ceramic material gross weight, lanthanum aluminium boron glass accounts for 50～53wt% of glass-ceramic material gross weight, and beramic color accounts for 1～3wt% of glass-ceramic material gross weight, by α-Al 2o 3powder, lanthanum aluminium boron glass powder and beramic color, mix 7～8h and obtain green powder.
(4) preparation of LTCC raw material band:
In polytetrafluoroethyltank tank, take a certain amount of porcelain powder prepared by step (3), add organic curtain coating system, the casting slurry that preparation solid content is 50～70wt%; Use appropriate zirconia ball as grinding medium, with 150r/min ball milling 8h, through froth in vacuum, by controllable thickness casting machine flow casting molding, obtain LTCC raw material band; Made raw material band circuit substrate area>=100 * 100mm 2, individual layer standard thickness 0.100 ± 0.05mm and controlled, the substrate number of plies>=10 layer, angularity≤100 μ m/100mm;
(5) preparation of LTCC substrate:
By LTCC raw material band, carry out cutting, superimposed, hot pressing, be placed in silicon carbide rod furnace; Temperature rise rate with 1 ℃/min is warming up to 200 ℃, is incubated after 1～2h; With 1 ℃/min, be warming up to 400 ℃, be incubated 1～2h; With 1 ℃/min, be warming up to 500 ℃, be incubated 1～2h; With 2 ℃/min, be warming up to 850 ℃, insulation 15min; After furnace cooling, take out, obtain ultra-high frequency high density packing LTCC substrate.The sintering temperature of LTCC substrate is lower, at 850 ℃; Percent of firing shrinkage: X, Y-axis shrinking percentage 10～12%, Z axis shrinking percentage 8～10%; The dielectric properties of sintering porcelain body: at 10GGHz, specific inductivity low (7.0～8.0), dielectric loss <0.2%; Voltage breakdown >1000V/Mil, insulation resistivity 1 * 10 12Ω.
The material of ultra-high frequency low-loss low-k provided by the invention has been filled up the blank of China in ultra-high frequency low-temperature co-burning ceramic material technical field.
Accompanying drawing explanation
The DSC/TG curve of Fig. 1 embodiment of the present invention 1 gained lanthanum boron glass.As seen from the figure, at 760.7 ℃, having 1 sagging endotherm(ic)peak, is the glass transition temp (Tg point) of lanthanum aluminium boron glass.From 760.7 ℃ to 1000 ℃, occurring three exothermic peaks, is the crystallization peak of lanthanum aluminium boron glass glass.Warm area from glass transition to devitrification of glass is wider, and the time of glassy phase generation viscous flow is relatively long, contributes to the densified sintering product of glass ceramic material;
Fig. 2 is that 850 ℃ of glass-ceramic of the present invention (number 1 component) are burnt till rear section SEM figure.Can find out that the sample section after sintering is fine and close, pore-free or hole phenomenon.
Embodiment
The preparation of lanthanum aluminium boron glass:
Table 1 is each component concentration of lanthanum aluminium boron glass in the specific embodiment of the invention.By taking each component shown in table 1, after 8-12h mixes, in Platinum crucible, at 1350-1500 ℃, be incubated 0.5-5h and make its complete melting and homogenizing, pour into and in deionized water, obtain transparent lanthanum aluminium boron glass, after oven dry, through roller mill coarse crushing, arrive 0.3mm, press the pellet quality ratio of 1:4:1, adopt the quick mill that rotating speed is 500r/min, after ball milling 0.5h～1h, dry, it is 0.5～3 μ m lanthanum aluminium boron glass powder that mistake 100 mesh sieves obtain median size, to embodiment 1 lanthanum aluminium boron glass powder differential thermal analysis as shown in Figure 1.
Each component concentration of lanthanum aluminium boron glass (wt%) in table 1 specific embodiment of the invention
The preparation of binding agent:
Take methacrylic acid, β-dimethyl-aminoethylmethacrylate, methyl acrylate is monomer, and Diisopropyl azodicarboxylate is initiator, adopts solution polymerization process to make multipolymer that relative molecular weight (Mn) is 70000 as the binding agent of curtain coating system.
Concrete preparation method is: methacrylic acid, β-dimethyl-aminoethylmethacrylate (65wt%), methyl acrylate are mixed and be placed in reactor; Diisopropyl azodicarboxylate is dissolved in acetone solvent, and uses separating funnel slowly to splash in reactor; By repeatedly filling nitrogen-vacuumize the oxygen in the system of removing, and under nitrogen protection, at 75 ℃, adopt magnetic force or mechanical stirring to carry out copolyreaction; Reaction finishes rear underpressure distillation removes product, obtains copolymer binder.Component is in Table 2.
The content (wt%) of table 2 each component of binding agent of the present invention
The preparation of raw material band:
The slurry that is 55wt% by the formulated solid content of table 3, carry out flow casting molding dry after, obtain the raw material band that the present invention uses.
The content (wt%) of table 3 each component of raw material band of the present invention (in this table mark red inadequate 100%)
Figure 1
Indicate: solvent (trichloroethane 60wt%; Methylethylketone 26wt%; Virahol 14wt%)
The preparation of LTCC substrate:
To raw material band cut into slices, lamination, and waiting (100MPa) compression moulding under static pressure.Then from room temperature, with 1 ℃/min, be warming up to 200 ℃, be incubated after 1～2h; With 1 ℃/min, be warming up to 400 ℃, be incubated 1～2h; With 1 ℃/min, be warming up to 500 ℃, be incubated 1～2h; With 2 ℃/min, be warming up to 850 ℃, insulation 15min; After furnace cooling, taking-up obtains LTCC and burns till substrate.To the photo of substrate profile scanning Electronic Speculum as shown in Figure 3, can find out that the sample section after sintering is fine and close, without hole phenomenon.Performance test to substrate is as shown in table 4.The unit of each parameter is as follows: density: gcm -3, shrinking percentage: %, dielectric properties: 10GHz.
Table 4LTCC substrate material sintering character
Figure BDA0000395709620000081

Claims (5)

1. be applicable to the high-density LTCC substrate under ultra-high frequency condition, by glass-ceramic material, through the organic curtain coating system of different solid contents curtain coating, formed;
Wherein glass-ceramic material is by the following component that accounts for overall weight percent: α-Al of 45～48wt% 2o 3, the lanthanum aluminium boron glass of 50～53wt% and the beramic color of 1～2wt% form;
Described lanthanum aluminium boron glass is by La 2o 329～32wt%; B 2o 327～29wt%; Al 2o 319～21wt%; CaO14～16wt%; BaO0～2wt%; P 2o 54～6wt%; MgO0.3～1wt%; R 2o0.5～1.6wt% forms, and wherein R is Li, Na, K any two kinds;
Organic curtain coating system is comprised of following component: binding agent 8～10%; Solvent 80～83%; Dispersion agent 3～4wt%; Softening agent 5～6wt%; Rosin 0～1wt%;
Described binding agent is to take the methacrylic acid of 0.5～0.6wt%, the methyl acrylate of the β-dimethyl-aminoethylmethacrylate of 64%～66wt%, 33%～35wt% is monomer, the Diisopropyl azodicarboxylate of 0.4%～0.5wt% is initiator, adopts solution polymerization process to make the copolymer binder that relative molecular weight is 65000-75000.
2. the high-density LTCC substrate being applicable under ultra-high frequency condition according to claim 1, it is characterized in that described beramic color be vanadium zirconium yellow, take flutter your Huang, cobalt ultramarine, cobalt blue, zinc titan yellow, peacock blue, cobalt powder is red, victoria green, chromium titanium tea or vanadium zirconium indigo plant.
3. the high-density LTCC substrate being applicable under ultra-high frequency condition according to claim 1, is characterized in that the solvent of described organic curtain coating system is the mixture of trichloroethane 60～65wt%, methylethylketone 25～28wt%, Virahol 12～15wt%; Described dispersion agent is menhaden fish oil; Described softening agent is butyl benzyl phthalate.
4. the preparation method who is applicable to the high-density LTCC substrate under ultra-high frequency condition claimed in claim 1, comprises the following steps:
(1) preparation of binding agent:
Methacrylic acid, β-dimethyl-aminoethylmethacrylate, methyl acrylate are mixed and be placed in reactor; Diisopropyl azodicarboxylate is dissolved in acetone solvent, slowly splashes in reactor; By repeatedly filling nitrogen-vacuumize the oxygen in the system of removing, and under nitrogen protection, under agitation condition, copolymerization at 70-80 ℃; Reaction finishes rear underpressure distillation takes out product, obtains copolymer binder;
(2) preparation of lanthanum aluminium boron glass:
Press the formula of lanthanum aluminium boron glass, by each component blend 8～12h; At 1350～1500 ℃, be incubated 0.5～2h and make its complete melting and homogenizing, pour quenching in deionized water into and obtain transparent glass; Through roller mill coarse crushing, adopt after quick abrading-ball mill 0.5h～1h, to dry, it is 0.5～3 μ m powder that mistake 100 mesh sieves obtain median size;
(3) preparation of glass-ceramic material:
By α-Al 2o 3powder, lanthanum aluminium boron glass powder and beramic color, mix the green powder that 7～8h obtains glass-ceramic material;
(4) preparation of LTCC raw material band:
In polytetrafluoroethyltank tank, take the green powder of glass-ceramic material prepared by step (3), add organic curtain coating system, the casting slurry that preparation solid content is 50～70wt%; Use zirconia ball as grinding medium, ball milling, froth in vacuum, through controllable thickness casting machine flow casting molding, obtains LTCC raw material band; Made raw material band circuit substrate area>=100 * 100mm 2, individual layer standard thickness 0.100 ± 0.05mm and controlled, the substrate number of plies>=10 layer, angularity≤100 μ m/100mm.
(5) preparation of ultra-high frequency LTCC substrate: get the LTCC raw material band that step (4) obtains, after cutting, superimposed, hot pressing, be placed in silicon carbide rod furnace, after binder removal, sintering, obtain ultra-high frequency LTCC substrate, X, Y-axis shrinking percentage 10～12%, Z axis shrinking percentage 8～10%; The dielectric properties of sintering porcelain body: at 10GHz, specific inductivity 7.0～8.0, dielectric loss <0.2%; Voltage breakdown >1000V/Mil, insulation resistivity 1 * 10 12Ω.
5. the preparation method who is applicable to the high-density LTCC substrate under ultra-high frequency condition according to claim 4, is characterized in that described sintering process is that temperature rise rate with 1 ℃/min is warming up to 200 ℃ from room temperature, is incubated after 1～2h; Temperature rise rate with 1 ℃/min is warming up to 400 ℃, is incubated 1～2h; Temperature rise rate with 1 ℃/min is warming up to 500 ℃, is incubated 1～2h; Temperature rise rate with 2 ℃/min is warming up to 850 ℃, insulation 15min; After furnace cooling, take out, obtain ultra-high frequency high density packing LTCC substrate.
CN201310482706.1A 2013-10-15 2013-10-15 High-density LTCC (Low Temperature Co-Fired Ceramic) substrate applicable to ultrahigh frequency condition and preparation method thereof Active CN103570336B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310482706.1A CN103570336B (en) 2013-10-15 2013-10-15 High-density LTCC (Low Temperature Co-Fired Ceramic) substrate applicable to ultrahigh frequency condition and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310482706.1A CN103570336B (en) 2013-10-15 2013-10-15 High-density LTCC (Low Temperature Co-Fired Ceramic) substrate applicable to ultrahigh frequency condition and preparation method thereof

Publications (2)

Publication Number Publication Date
CN103570336A true CN103570336A (en) 2014-02-12
CN103570336B CN103570336B (en) 2015-04-01

Family

ID=50043136

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310482706.1A Active CN103570336B (en) 2013-10-15 2013-10-15 High-density LTCC (Low Temperature Co-Fired Ceramic) substrate applicable to ultrahigh frequency condition and preparation method thereof

Country Status (1)

Country Link
CN (1) CN103570336B (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105174733A (en) * 2015-08-31 2015-12-23 中国人民解放军国防科学技术大学 Low-temperature co-fired ceramic material and preparation method thereof
CN105271758A (en) * 2015-09-21 2016-01-27 江苏科技大学 3D packaging LTCC substrate material and preparation method
CN105622169A (en) * 2015-12-30 2016-06-01 潮州三环（集团）股份有限公司 Colorful ceramic and preparing method thereof
CN105646005A (en) * 2015-12-30 2016-06-08 潮州三环（集团）股份有限公司 Dyeing slurry for preparing color ceramics
CN112390534A (en) * 2019-08-12 2021-02-23 浙江矽瓷科技有限公司 Low-temperature co-fired low-voltage anodically-bonded microcrystalline glass material for airtight packaging and preparation method and application thereof
CN114276152A (en) * 2022-01-22 2022-04-05 中国振华集团云科电子有限公司 Adhesive for tape casting of low-temperature co-fired ceramic material and preparation method thereof
CN115557788A (en) * 2022-03-23 2023-01-03 中国科学院上海硅酸盐研究所 BSZT/BBSMZ/flake Al 2 O 3 Low-temperature co-fired material and preparation method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101077835A (en) * 2007-06-25 2007-11-28 南京工业大学 High-frequency low-loss low-temperature co-fired ceramic raw material belt and preparation method thereof
CN102030471A (en) * 2010-10-18 2011-04-27 南京工业大学 Low-temperature co-fired glass and ceramic multilayer microcircuit substrate and preparation method thereof
CN102390985A (en) * 2011-08-06 2012-03-28 江苏华兴电子有限公司 Broadband and high-magnetic-permeability ferrite teflon tape and production method thereof
CN102412059A (en) * 2011-08-06 2012-04-11 江苏华兴电子有限公司 Method for manufacturing chip inductance element from low-temperature cofired ferrite raw material belt
CN102875159A (en) * 2012-09-20 2013-01-16 广东风华高新科技股份有限公司 Method for preparing low-temperature cofired dielectric ceramic and material and sintering aid of low-temperature cofired dielectric ceramic

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101077835A (en) * 2007-06-25 2007-11-28 南京工业大学 High-frequency low-loss low-temperature co-fired ceramic raw material belt and preparation method thereof
CN102030471A (en) * 2010-10-18 2011-04-27 南京工业大学 Low-temperature co-fired glass and ceramic multilayer microcircuit substrate and preparation method thereof
CN102390985A (en) * 2011-08-06 2012-03-28 江苏华兴电子有限公司 Broadband and high-magnetic-permeability ferrite teflon tape and production method thereof
CN102412059A (en) * 2011-08-06 2012-04-11 江苏华兴电子有限公司 Method for manufacturing chip inductance element from low-temperature cofired ferrite raw material belt
CN102875159A (en) * 2012-09-20 2013-01-16 广东风华高新科技股份有限公司 Method for preparing low-temperature cofired dielectric ceramic and material and sintering aid of low-temperature cofired dielectric ceramic

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
张一源等: "保温时间对钙钡硼硅复相陶瓷性能的影响", 《电子元件与材料》 *
胡晓侠等: "LTCC基片流延浆料流变性能研究", 《电子元件与材料》 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105174733A (en) * 2015-08-31 2015-12-23 中国人民解放军国防科学技术大学 Low-temperature co-fired ceramic material and preparation method thereof
CN105174733B (en) * 2015-08-31 2017-11-21 中国人民解放军国防科学技术大学 Low-temperature co-burning ceramic material and preparation method thereof
CN105271758A (en) * 2015-09-21 2016-01-27 江苏科技大学 3D packaging LTCC substrate material and preparation method
CN105622169A (en) * 2015-12-30 2016-06-01 潮州三环（集团）股份有限公司 Colorful ceramic and preparing method thereof
CN105646005A (en) * 2015-12-30 2016-06-08 潮州三环（集团）股份有限公司 Dyeing slurry for preparing color ceramics
CN105622169B (en) * 2015-12-30 2018-11-06 潮州三环（集团）股份有限公司 A kind of chromatic ceramics and preparation method thereof
CN112390534A (en) * 2019-08-12 2021-02-23 浙江矽瓷科技有限公司 Low-temperature co-fired low-voltage anodically-bonded microcrystalline glass material for airtight packaging and preparation method and application thereof
CN114276152A (en) * 2022-01-22 2022-04-05 中国振华集团云科电子有限公司 Adhesive for tape casting of low-temperature co-fired ceramic material and preparation method thereof
CN115557788A (en) * 2022-03-23 2023-01-03 中国科学院上海硅酸盐研究所 BSZT/BBSMZ/flake Al 2 O 3 Low-temperature co-fired material and preparation method thereof

Also Published As

Publication number Publication date
CN103570336B (en) 2015-04-01

Similar Documents

Publication Publication Date Title
CN103570336B (en) High-density LTCC (Low Temperature Co-Fired Ceramic) substrate applicable to ultrahigh frequency condition and preparation method thereof
CN107602088B (en) Low-temperature co-fired ceramic material highly matched with high-temperature conductive silver paste and preparation method thereof
CN104774005B (en) Low-temperature sintered lead-free microwave dielectric ceramic and preparation method thereof
CN105873248A (en) Low-temperature sintering paste for heating film and preparation method thereof
CN107555992B (en) Microwave dielectric ceramic material and preparation method thereof
CN105418068B (en) A kind of niobate glass ceramics energy storage material and its preparation method and application
CN110357419B (en) Glass composition, millimeter wave low-temperature co-fired ceramic material and preparation method thereof
CN110217998B (en) Lead-free conductive silver paste capable of being sintered at low temperature and preparation method and application thereof
CN105271758A (en) 3D packaging LTCC substrate material and preparation method
US20240246863A1 (en) Low-dielectric wollastonite based low-temperature co-fired ceramic material and preparation method therefor
Ren et al. Investigation on low-temperature sinterable behavior and tunable dielectric properties of BLMT glass-Li2ZnTi3O8 composite ceramics
CN113354399A (en) Low-temperature co-fired composite ceramic material and preparation method thereof
CN109650871A (en) A kind of ZnAl2O4Ceramic systems material and preparation method thereof
CN112164488B (en) Silver paste for ceramic filter and preparation method thereof
WO2023159896A1 (en) Silicate-based low-temperature sintered microwave dielectric ceramic material and preparation method therefor
CN115691855A (en) Conductive silver paste for low-temperature co-fired ceramic surface electrode and preparation method thereof
CN113372103B (en) Low-dielectric low-high-frequency-loss LTCC ceramic material and preparation method thereof
CN110171962A (en) A kind of low-temperature co-fired ceramics microwave and millimeter wave material
CN105130418A (en) Li-Nb-Ti-based microwave dielectric ceramic material
JP3838541B2 (en) Low-temperature fired porcelain and electronic components
CN107555986A (en) A kind of low-loss salt mine structure microwave-medium ceramics and preparation method
CN112010650A (en) Low-temperature sintered high-quality factor microwave dielectric ceramic and preparation method thereof
CN108033785A (en) A kind of high dielectric microwave medium ceramic material of low-temperature sintering and preparation method and application
KR102189481B1 (en) Dielectric ceramics composition for high frequency device, ceramic substrate thereby and manufacturing method thereof
WO2005073146A1 (en) Composition for ceramic substrate, ceramic substrate, process for producing ceramic substrate and glass composition

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant