CN103559916B - A kind of position, Three Degree Of Freedom fine motion angle platform of manual alignment - Google Patents
A kind of position, Three Degree Of Freedom fine motion angle platform of manual alignment Download PDFInfo
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- CN103559916B CN103559916B CN201310564104.0A CN201310564104A CN103559916B CN 103559916 B CN103559916 B CN 103559916B CN 201310564104 A CN201310564104 A CN 201310564104A CN 103559916 B CN103559916 B CN 103559916B
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Abstract
Position, a Three Degree Of Freedom fine motion angle platform for manual alignment, comprises base, table top, fixed station, connected unit, micrometer, angular slope plate and hinged steel disc, and described base comprises Z-direction base and XY to base; Described fixed station comprises Z-direction fixed station and XY to fixed station, and described Z-direction fixed station is arranged on Z-direction base, and described XY is arranged on XY on base to fixed station; Described connected unit comprises the first connected unit and the second connected unit, this device is applicable to the mechanical hook-up of integrated photon chip and array fibre manual alignment, and it is ingenious utilizes that steel disc supports, the mode of micrometer fine setting reaches the fine motion angular displacement of platform at X-axis, Y-axis and Z axis.Topology layout of the present invention is reasonable, easy to use, and range of movement is large, and degree of regulation is high, can slightly adjust for various different high precision.
Description
Technical field
The present invention relates to a kind of position, Three Degree Of Freedom fine motion angle platform of manual alignment.
Background technology
The progress of the development pusher telecommunications of optical information technology, along with the development of optical fiber communication and optical fiber sensing technology, the key be prepared in order to optical information technology further develops of optoelectronic device.The encapsulation technology of integrated opto-electronics device affects the reliability of optoelectronic device, and crucial packaging technology and sealed in unit significantly can be enhanced productivity, ensure the quality of device.
Existing sealed in unit mainly contains full-automatic sealed in unit and manual sealed in unit two kinds, the former is applicable to production line balance in enormous quantities, the latter is suitable for the many specifications of short run and produces, so while full-automatic sealed in unit high speed development, the alignment stage that how general the especially sextuple high precision of manual platform is still occupies very large market.
The current how general alignment stage of sextuple high precision many employings single-degree-of-freedom micromotion platform combines, and unitized construction is complicated, and processing request is high, and price is also higher.
Summary of the invention
The present invention overcomes the deficiencies in the prior art and provides a kind of compact conformation, processing request is relatively simple, positioning precision is high, succinctly easy to operate, can improve position, the Three Degree Of Freedom fine motion angle platform of the work efficiency of integrated photon chip and array fibre manual alignment and the manual alignment of product quality.
Position, a Three Degree Of Freedom fine motion angle platform for manual alignment, comprises base, table top, fixed station, connected unit, micrometer, angular slope plate and hinged steel disc, and described base comprises Z-direction base and XY to base; Described fixed station comprises Z-direction fixed station and XY to fixed station, and described Z-direction fixed station is arranged on Z-direction base, and described XY is arranged on XY on base to fixed station; Described connected unit comprises the first connected unit and the second connected unit;
Described angular slope plate comprises the first angular slope plate, second angular slope plate, 3rd angle hang plate, 4th angle hang plate the 5th angular slope plate and hexagonal degree hang plate, described first angular slope plate and the second angular slope plate are symmetricly set on the both sides of the first connected unit along Z axis, one end of described first angular slope plate and the second angular slope plate is fixed on Z-direction fixed station by hinged steel disc, the other end is fixed by the support end of hinged steel disc by the first connected unit, described 3rd angle hang plate and the 4th angle hang plate are symmetricly set on the both sides of described second connected unit along X-axis, one end of described 3rd angle hang plate and the 4th angle hang plate is fixed on XY on fixed station by hinged steel disc, the other end is fixed by the support end of hinged steel disc by the second connected unit, described 5th angular slope plate and described hexagonal degree hang plate are symmetricly set on the both sides of XY to base along Y-axis, one end of described 5th angular slope plate and described hexagonal degree hang plate is fixed on XY on base by hinged steel disc, the other end is fixed on below table top by hinged steel disc,
Described second connected unit is fixed in described first connected unit;
Described micrometer comprises the first micrometer, the second micrometer and the 3rd micrometer; Described first micrometer is arranged on Z-direction base, and the movable end of described first micrometer is connected with the movable end of described first connected unit, described first micrometer promotes described first connected unit and rotates around Y-axis, described second micrometer is arranged on XY on base, and the movable end of described second micrometer is connected with the movable end of described second connected unit, described second micrometer promotes described second connected unit and rotates around Z axis, the movable end of described 3rd micrometer is connected with the movable end of described table top, and described 3rd micrometer promotes described table top and rotates around X-axis.
Also comprise baffle plate, described baffle plate comprises the first block and the second block, described first block and the second block adopt flexible hinge structure, described first block is arranged on XY on the side of base, described second micrometer is connected with one end of the first block, and the other end of described first block is connected with multidiameter, and described multidiameter is fixed on the movable end of the second connected unit, described second micrometer promotes the first block and rotarily drives multidiameter and move, thus drives the second connected unit to rotate around Z axis;
Described second block is arranged on XY on the opposite side of base, be connected with the rolling bearing be arranged on table top by web joint, the movable end of described 3rd micrometer is connected with the second block, described 3rd micrometer promotes the second block and rotates, stir rolling bearing rotate and drive web joint, thus table top is rotated around X-axis.
Described first micrometer movable end and the first connected unit, described second micrometer movable end and the first block, between the 3rd micrometer movable end and the second block, be point cantact.
Described micrometer is precision auger micrometer head, and the type of drive of described micrometer is manual rotation.
Owing to adopting said structure, this patent adopts position, the Three Degree Of Freedom fine motion angle platform of manual alignment, remove the labyrinth that single-degree-of-freedom micromotion platform combines mutually from, this platform has compact conformation, processing request is relatively simple, positioning precision is high, succinctly easy to operate, can improve work efficiency and the product quality of integrated photon chip and array fibre manual alignment.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of Z-direction base portion of the present invention:
Fig. 3 is the structural representation of XY of the present invention to base portion;
Fig. 4 is the structural representation of the present invention second micrometer, the 3rd micrometer, the second connected unit;
Fig. 5 is the left side schematic diagram of XY of the present invention to base portion;
Fig. 6 is the right side schematic view of XY of the present invention to base portion.
Embodiment
Below in conjunction with accompanying drawing and concrete embodiment, the invention will be further described.
As shown in Figures 1 to 6, a kind of position, Three Degree Of Freedom fine motion angle platform of manual alignment, comprise X-axis Y-axis universal stage and the upper and lower two parts of Z axis universal stage, specifically comprise base 1, table top 2, fixed station 3, connected unit 4, very small amount deck 5, micrometer 6, angular slope plate 7, hinged steel disc 8, block 9, multidiameter 10, sphere holding screw 11, rolling bearing 12, web joint 13.Described base 1 comprises Z-direction base 111 and XY to base 112, described fixed station 3 comprises Z-direction fixed station 31 and XY to fixed station 32, and described Z-direction fixed station 31 is arranged on Z-direction base 111, and described XY is arranged on XY on base 112 to fixed station 32, described very small amount deck 5 comprises the first very small amount cutting ferrule 51, second very small amount deck 52, the 3rd very small amount deck 53, described first very small amount cutting ferrule 51 is fixed on the right side of Z-direction base 111, second very small amount deck 52 is fixed on XY on the left of base 112, and the 3rd very small amount deck 53 is fixed on XY on the right side of base 112, described micrometer 6 comprises the first micrometer 61, second micrometer 62 and the 3rd micrometer 63, and they connect with corresponding very small amount deck respectively, described angular slope plate 7 comprises the first angular slope plate 71, second angular slope plate 72, 3rd angle hang plate 73, 4th angle hang plate 74 the 5th angular slope plate 75 and hexagonal degree hang plate 76, described first angular slope plate 71 and the second angular slope plate 72 symmetrically form that is all connected with hinged steel disc 8 is fixed on Z-direction fixed station 31, described 3rd angle hang plate 73 and the 4th angle hang plate 74 symmetrically form that is all connected with hinged steel disc 8 is fixed on XY on fixed station 32, described 5th angular slope plate 75 is fixedly connected at XY to base 112 front end with hinged steel disc 8, described hexagonal degree hang plate 76 is fixedly connected at XY to base 112 rear end with hinged steel disc 8, described connected unit 4 comprises the first connected unit 41 and the second connected unit 42, described first connected unit 41 is fixed on the first angular slope plate 71 and the second angular slope plate 72 through hinged steel disc 8, and described second connected unit 42 is fixed on the 3rd angle hang plate 73 and the 4th angle hang plate 74 through hinged steel disc 8, described table top 2 two ends are separately fixed on the 5th angular slope plate 75 and hexagonal degree hang plate 76 by hinged steel disc 8, described baffle plate comprises the first link stopper 91 and the second link stopper 92, and described first link stopper 91 is fixed on the second very small amount deck 52, and described second link stopper 92 is fixed on web joint 13, multidiameter 10 is fixed on XY on the right side of base 112, sphere holding screw 11 is fixed on the left of Z-direction base 111, rolling bearing 12 is fixed on the right side of table top 2, web joint 13 is fixed on XY on the right side of base 112.
Adopt between first connected unit 41 with the second connected unit 42 and to be screwed and mutually vertical.
Described sphere holding screw 11 and the first angular slope plate 71 one-tenth point cantact forms, first micrometer 61 forms point cantact through its top after the second angular slope plate 72 and the first connected unit 41, first connected unit 41 that moves through of the first micrometer 61 passes to the first angular slope plate 71 and the second connected unit 42, and order about platform relative to base realize rotate around Z axis fine motion.
Described multidiameter 10 is fixed as one through interior hexagonal flush end holding screw and the second connected unit 42, and its top and the first link stopper 91 form point cantact.
Described first link stopper 91 is flexible hinge structure, and described flexible hinge structure one end and the second micrometer 62 form point cantact, and the other end and multidiameter 10 top form point cantact, also hinged with the second very small amount deck 52 and can do fine motion around it and rotate.When the second micrometer 62 feeding, promote the first block 91 and rotate and drive multidiameter 10.
Described second link stopper 92 is flexible hinge structure, the movable end of described flexible hinge structure one end and the 3rd micrometer 63 forms point cantact, on the other end projecting shaft be arranged on 12 one-tenth, rolling bearing linear contact lay on table top, also hingedly with web joint 13 can do fine motion around it and rotate.When the 3rd micrometer 63 feeding, promote the second block 92 and stir rolling bearing to rotate, drive web joint that table top is rotated around X-axis thus.
Moving through of second micrometer 62 becomes with it the first link stopper 91 of point cantact to pass to multidiameter 10 and the second connected unit 42, and order about platform relative to base realize rotate around Z axis fine motion.
Moving through of 3rd micrometer 63 becomes with it the second link stopper 92 of point cantact to pass to the rolling bearing 12 be fixed on table top 2, drive the motion of the 5th angular slope plate 75 and hexagonal degree hang plate 76, order about platform with this and realize rotating around X-axis fine motion relative to base.
Relative position between base 1 and angular slope plate 7 ensures to have position-limiting action and make platform realize low-angle fine motion by the block 9 of hinged steel disc 8, flexible hinge structure and sphere holding screw 11.
The described micrometer 6 i.e. type of drive of precision auger micrometer head is all manual rotation, replaces according to electric precise actuator position, the Three Degree Of Freedom fine motion angle platform then becoming electronic aligning.
Above-mentioned base 1, table top 2, fixed station 3, connected unit 4, angular slope plate 7, block 9, multidiameter 10, web joint 13 adopt material to be LY12 (a kind of high strength duralumin), and through surface sand-blasting process, ensure its fastness to rubbing, through the black process of satin, ensure its surperficial corrosion resistivity.
The contact form of above-mentioned micrometer 6 is point cantact, and wearing and tearing are little flexibly, ensures high precision and the stationarity of Platform movement.
Be interference fit between two above-mentioned connected units 4, ensure the degree of accuracy of Movement transmit.
When the second above-mentioned block 92 is fixed on web joint 13, construction opening back-up ring, prevents play.
The axle center of the first above-mentioned micrometer 61 is mutually vertical with the first connected unit 41 end face, the axle center of the second micrometer 62, the 3rd micrometer 63 is mutually vertical with the second block 92 end face with the first block 91 respectively, described base corner is provided with the boss of area 10*10, height 0.2, boss requires the surfaceness of 1.6, reduce finishing area, reduce platform cost.
Above-mentioned micrometer 6 all adopts manual selection mode to drive.
As Fig. 1, shown in Fig. 2, hinged steel disc 8 is by angular slope plate 7, fixed station 3 and connected unit connect as one, sphere holding screw 11 is provided with in chassis left side, right side is provided with the first very small amount cutting ferrule 51, the movable end of the first micrometer 61 is contacted with the first connected unit 41 by the second angular slope plate 72, when first very small amount 61 card march forward to time, promote the first connected unit 41 drives the first angular slope plate 71 and the second angular slope plate 72 to move simultaneously, drive the second connected unit 42 be connected with the first connected unit 41 to make micro-angle around Y-axis thus to rotate, when the amount of feeding is increased to design load, the angular displacement of sphere holding screw and steel disc restriction platform, with should the first micrometer 61 backward feeding time, first connected unit 41 drives the first angular slope plate 71 and the second angular slope plate 72 to get back to original position simultaneously.In XY axle rotational structure, hinged steel disc 8 is by the 3rd angle hang plate 73, 4th angle hang plate 74, XY connects as one to fixed station 32 and the second connected unit 42, also by the 5th angular slope plate 75, hexagonal degree hang plate 76, table top 2 and XY connect as one to base 112, when the second micrometer 62 movable end march forward to time, promote the first block 91 drives multidiameter 10 and the second connected unit 42 fixed with it and table top 2 to rotate simultaneously, thus realize table top 2 around Z axis do micro-angle rotate, with should the second micrometer 62 backward feeding time, first block 91 drives multidiameter 10 and the second connected unit 42 fixed with it and table top 2 to get back to original position simultaneously.When the 3rd micrometer 63 march forward to time, promote the second block 92 and drive the rolling bearing 12 contacted with block projecting shaft simultaneously, table top 2 is driven to rotate under the support of the 5th angular slope plate 75 and hexagonal degree hang plate 76 by rolling bearing 12, finally realize table top 2 and do the rotation of micro-angle around X-axis, with should the 3rd micrometer backward feeding time, promote the second block and drive other linkage structures simultaneously, final table top 2 gets back to original position.
Claims (4)
1. position, the Three Degree Of Freedom fine motion angle platform of a manual alignment, it is characterized in that, comprise base (1), table top (2), fixed station (3), connected unit (4), micrometer (6), angular slope plate (7) and hinged steel disc (8), described base (1) comprises Z-direction base (111) and XY to base (112); Described fixed station (3) comprises Z-direction fixed station (31) and XY to fixed station (32), described Z-direction fixed station (31) is arranged on Z-direction base (111), and described XY is arranged on XY on base (112) to fixed station (32); Described connected unit (4) comprises the first connected unit (41) and the second connected unit (42);
Described angular slope plate (7) comprises the first angular slope plate (71), second angular slope plate (72), 3rd angle hang plate (73), 4th angle hang plate (74) the 5th angular slope plate (75) and hexagonal degree hang plate (76), described first angular slope plate (71) and the second angular slope plate (72) are symmetricly set on the both sides of the first connected unit (41) along Z axis, one end of described first angular slope plate (71) and the second angular slope plate (72) is fixed on Z-direction fixed station (31) by hinged steel disc (8), the other end is fixed by the support end of hinged steel disc (8) by the first connected unit (41), described 3rd angle hang plate (73) and the 4th angle hang plate (74) are symmetricly set on the both sides of described second connected unit (42) along X-axis, one end of described 3rd angle hang plate (73) and the 4th angle hang plate (74) is fixed on XY on fixed station (32) by hinged steel disc (8), the other end is fixed by the support end of hinged steel disc (8) by the second connected unit (42), described 5th angular slope plate (75) and described hexagonal degree hang plate (76) are symmetricly set on the both sides of XY to base (112) along Y-axis, one end of described 5th angular slope plate (75) and described hexagonal degree hang plate (76) is fixed on XY on base (112) by hinged steel disc (8), the other end is fixed on table top (2) below by hinged steel disc (8),
Described second connected unit (42) is fixed on described first connected unit (41);
Described micrometer (6) comprises the first micrometer (61), the second micrometer (62) and the 3rd micrometer (63), described first micrometer (61) is arranged on Z-direction base (111), and the movable end of described first micrometer (61) is connected with the movable end of described first connected unit (41), described first micrometer (61) promotes described first connected unit (41) and rotates around Y-axis, described second micrometer (62) is arranged on XY on base, and the movable end of described second micrometer (62) is connected with the movable end of described second connected unit (42), described second micrometer (62) promotes described second connected unit (42) and rotates around Z axis, the movable end of described 3rd micrometer (63) is connected with the movable end of described table top (2), described 3rd micrometer (63) promotes described table top (2) and rotates around X-axis.
2. according to position, the Three Degree Of Freedom fine motion angle platform of the manual alignment described in claim 1, it is characterized in that: also comprise baffle plate (9), described baffle plate (9) comprises the first block (91) and the second block (92), described first block (91) and the second block (92) adopt flexible hinge structure, described first block (91) is arranged on XY on the side of base (112), described second micrometer (62) is connected with one end of the first block (91), the other end of described first block (91) is connected with multidiameter (10), described multidiameter (10) is fixed on the movable end of the second connected unit (42), described second micrometer (62) promotes the first block (91) and rotarily drives multidiameter (10) movement, thus drive the second connected unit (42) to rotate around Z axis,
Described second block (92) is arranged on XY on the opposite side of base (112), be connected with the rolling bearing (12) be arranged on table top (2) by web joint (13), the movable end of described 3rd micrometer (63) is connected with the second block (92), described 3rd micrometer (63) promotes the second block (92) and rotates, stir rolling bearing (12) rotate and drive web joint (13), thus table top (2) is rotated around X-axis.
3. according to position, the Three Degree Of Freedom fine motion angle platform of the manual alignment described in claim 2, it is characterized in that: described first micrometer (61) movable end and the first connected unit (41), described second micrometer (62) movable end and the first block (91), between the 3rd micrometer (63) movable end and the second block (92), be point cantact.
4. according to position, the Three Degree Of Freedom fine motion angle platform of the manual alignment one of claims 1 to 3 Suo Shu, it is characterized in that: described micrometer (6) is precision auger micrometer head, the type of drive of described micrometer (6) is manual rotation.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310564104.0A CN103559916B (en) | 2013-11-14 | 2013-11-14 | A kind of position, Three Degree Of Freedom fine motion angle platform of manual alignment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310564104.0A CN103559916B (en) | 2013-11-14 | 2013-11-14 | A kind of position, Three Degree Of Freedom fine motion angle platform of manual alignment |
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| CN103559916A CN103559916A (en) | 2014-02-05 |
| CN103559916B true CN103559916B (en) | 2015-08-19 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106887258A (en) * | 2015-12-16 | 2017-06-23 | 北京空间技术研制试验中心 | The general accurate measurement micro-adjusting mechanism of spacecraft and method |
| CN105716554B (en) * | 2016-03-16 | 2018-05-08 | 大连理工大学 | A kind of high-precision positioner for the measurement of straight-tooth master gear helix |
| CN105945841B (en) * | 2016-06-28 | 2017-12-26 | 深圳睿晟自动化技术有限公司 | Three Degree Of Freedom pivot platform |
| CN107965485B (en) * | 2016-10-20 | 2019-09-17 | 北京精密机电控制设备研究所 | A kind of accurate positioning device for the debugging of local derviation jet servo valve prestage |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63271191A (en) * | 1987-04-28 | 1988-11-09 | 三菱電機株式会社 | Three-point support stage device |
| CN2466767Y (en) * | 2001-02-23 | 2001-12-19 | 北京远泰通达科技开发有限责任公司 | Six-freedom super-precision location and fine operating platform |
| CN1645518A (en) * | 2004-12-28 | 2005-07-27 | 华南理工大学 | Planar three freedom meek precisively positioning platform |
| CN2840265Y (en) * | 2005-11-11 | 2006-11-22 | 李屹 | Three-freedom regulator and imaging assembly with the same regulator |
| CN201069661Y (en) * | 2007-07-08 | 2008-06-04 | 中国航天科技集团公司第五研究院第五一八研究所 | 3-dimenstion adjustable supporting device |
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