CN103533732A - Device and method for generating high-throughput plane light source - Google Patents

Device and method for generating high-throughput plane light source Download PDF

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CN103533732A
CN103533732A CN201310479767.2A CN201310479767A CN103533732A CN 103533732 A CN103533732 A CN 103533732A CN 201310479767 A CN201310479767 A CN 201310479767A CN 103533732 A CN103533732 A CN 103533732A
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anode
plasma
arc
cylinder
light source
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CN103533732B (en
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夏维东
王城
胡芃
夏维珞
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University of Science and Technology of China USTC
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University of Science and Technology of China USTC
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Abstract

The invention provides a device and a method for generating a high-throughput plane light source. An electrode of the device consists of a cylindrical anode and a round bar-shaped cathode in coaxial arrangement with the cylindrical anode, wherein one end of an anode cylinder is sealed, the other end of the anode cylinder is a quartz transmission window air seal, the wall surface of the anode cylinder positioned near the transmitting end surface of the cathode is provided with a high-temperature gas flowing-out hole seam, the anode cylinder wall surfaces at two sides are provided with cold gas flowing-in hole seams, high-pressure inert gas is filled in the anode cylinder, an axial magnetic field is exerted in the anode cylinder, a direct current constant current power supply is exerted between the anode cylinder and the cathode, and electric arcs are ignited between the transmitting end surface of the cathode and the inner wall surface of the anode cylinder. The generating method has the advantages that through the magnetic field, the electric arcs are driven to rotate, gas is driven to flow and organize, the electric arc plasma configuration, the cathode arc root and the anode arc root configuration are controlled, and the plasma configuration is changed into a round disc shape from a bell jar shape of a short-arc xenon lamp. The expansion of plasmas in the axial direction is limited, the radial current density is improved, and the luminous power and the luminous efficiency are enhanced.

Description

The device and method that a kind of high flux planar light source produces
Technical field
The invention belongs to the technical field of glow discharge spot lamp, be specifically related to the device and method that a kind of high flux planar light source produces, for generation of high flux continuous irradiation light, as the light source of high flux planar light irradiation and high flux solar simulator.
Background technology
High flux light source produces high temperature by direct irradiation device surface, under various varying environments, atmosphere, create thermal extremes condition, be the important scientific instrument that material at high temperature performance study, heat chemistry and Photochemistry Study, solar energy optical-thermal/photoelectricity efficiently utilize the fields such as research, and have special role at the production field of many special materials (as nano material, exotic material etc.).At present, the main path that produces continuous high flux exposure light has: directly pass through out of doors solar tracking focusing system by solar light focusing, adopt the artificial light source that forms array to focus on.The latter mostly be take high pressure xenon short-act lamp as light source.
The solar furnace luminous flux of solar light focusing and facula area can be very large.If the solar furnace system of European Union's solar energy thermal-power-generating Experimental Base (PSA) foundation is [referring to document 1:J.Fern á ndez-Reche, I.
Figure BDA0000395665570000011
m.S á nchez; J.Ballestr í n; L.Yebra; R.Monterreal; J.Rodr í gueza; G.Garc í a, M.Alonso and F.Chenlo.PSA Solar furnace:A facility for testing PV cells under concentrated solar radiation, Solar Energy Materials & Solar Cells, 2006,90:2480 – 2488], spot diameter 20cm, energy-flux density reaches 3000kW/m 2(3000 solar irradiances).But this system is bulky complex too, only speculum area just reaches 140m 2, be difficult to apply.Adopt small-sized dish formula, slot type or Fresnel Lenses formula concentrator, also can obtain the high irradiance of small size.But take nature sunlight as light source affected by environment large, poor stability, spectral characteristic is different because of many factors such as region, weather, season, times, irradiation uniformity and adjustability are poor, use very inconvenience, can not become testing standard light source.
The high flux light source that spectral distribution approaches solar spectrum radiation can be used as high flux solar simulator, it is the important laboratory apparatus of research Photospot solar, it can provide stable, reliably, standard solar energy artificial light source easily, and can become the standard detection equipment of Application of Solar Energy product.Xenon short-act lamp is to meet the artificial highlighted light source that solar spectrum distributes most at present, and the infrared spectral coverage of part is better than solar radiation.The many uses of existing small throughput solar simulator product (lower than 40 solar irradiances) high pressure xenon short-act lamp is light source, through the filtration adjustment to part infrared light spectral coverage, making it meet solar spectrum distributes, through integrator and collimating mirror, make irradiation hot spot evenly and collimation simultaneously, existing standardized product is [referring to document 2:Qing Long, Meng Yuan, Wang Linhua, Zhang.Irradiance characteristics and optimization design of a large-scale solar simulator.Solar Energy.Volume85.Issue92011, referring to document 3:US2010/0027236A1, referring to document 4:US2006/0175973A1].
The high flux solar simulator of continuous radiation is nearly all to adopt xenon short-act lamp to focus on array direct modeling sunlight [referring to document 5:Krueger, K.R.Davidson, J.H.Lipinski, W.Design of a New45kW(e) High-Flux Solar Simulator for High-Temperature Solar Thermal and Thermochemical Research.Journal of Solar Energy Engineering-Transactions of the Asme.Volume133.Issue1.2011], without spectrum adjusting, irradiation hot spot uniform treatment and light collimation are processed.As Switzerland PSI(Paul Scherrer Institute) [referring to document 6:Petrasch, J.Steinfeld, A.Asme, A novel high-flux solar simulator based on an array of xenon arc lamps:Optimization of the ellipsoidal reflector and optical configuration Solar Engineering2005.Page175-180], adopt 10 15kW xenon lamps to form and focus on array, the about 1m of single reflect focalization minute surface diameter, after optical focus, output facula diameter is 60mm, peak value 11000kW/m 2, average energy current density 6800kW/m 2light beam, irradiated material surface theoretical maximum temperature (stagnation temperature) can reach 3300K.
" xenon lamp array high flux solar simulator " remarkable shortcoming is that irradiation face light intensity is very inhomogeneous, be approximately gaussian shaped profile [referring to document 7:J.Petrasch, Coray P, A.Meier, M.Brack, P.Haberling, D.Wuillemin, A.Steinfeld, A Novel50kW11000suns High-Flux Solar Simulator Based on an Array of Xenon Arc Lamps.Journal of Solar Energy Engineering Transactions of the Asme.Vol.129issue Page405-411.2007], use very inconvenience.Its reason is that the electric arc Luminance Distribution of xenon short-act lamp is extremely inhomogeneous, and the luminous flux at focal beam spot place is very strong, is difficult to improve by integrator the uniformity of hot spot.Also there is the problems such as bulky, device systems is complicated simultaneously.Meanwhile, the life-span of high-power short arc xenon lamp is not long, makes " xenon lamp array high flux solar simulator " operating cost too high.
These shortcomings for fear of xenon short-act lamp array, the ETH industrial research of Switzerland has been studied one and take argon gas long arc lamp as light source, adopt the oval grooved of two-stage to focus on, produce the high flux solar simulator of high flux rectangle irradiation hot spot [referring to document 8:D.Hirsch, P.V.Zedtwitz, and T.Osinga.A, New75kW High-Flux Solar Simulator for High-Temperature Thermal and Thermochemical Research.Journal of Solar Energy Engineering.Volume125.Page117-1202003].This system is manufactured by Canadian Vortex Industry Ltd. company, the about 200mm of arc length, and maximum arc power 200kW, maximum radiated power 75kW, irradiation intensity is more even in arc axis parallel direction.Irradiation flux peak value reaches 4250kW/m2, and experiment irradiation spot maximum temperature reaches 3000K.Because electric arc is argon arc, there is more ultra-violet radiation and infrared radiation in electric arc, and colour temperature is higher than sun colour temperature, can not meet the requirement of solar simulator spectral distribution completely, as high temperature photo-thermal, the Photochemistry Study good high flux light source of can yet be regarded as.But this technology also has a very large problem: between argon gas electric arc and quartzy tube wall, adopt moisture film cooling, unavoidably bring steam to be affected the impact on electric arc and electrode, especially electrode life.
As far back as 1954, Bauer has just reported that the xenon lamp of his research is [referring to document 9:A.Bauer, P.Schulz, Elektrodenfalle Und Bogengradienten in Hochdruckentladungen, Insbesondere Bei Xenon.Zeitschrift Fur Physik.Volume139, Issue2, Page197-211.1954].Very ripe series of products to 70~eighties of last century, have been formed, in a large number for the color rendering indexs such as motion picture projection, the projecting apparatus occasion of having relatively high expectations, also for battle wagon headlight.
Xenon short-act lamp structure as shown in Figure 1.Due to arc stability demand, negative electrode is usually designed to taper, and anode is larger planar end surface.Cathode arc root is positioned at cathode point, relies on the negative electrode jet of the Cathode arc root generation of shrinking to carry out stable arc.Therefore, when xenon lamp (electrode axis) horizontal positioned, the convection action being caused by Action of Gravity Field makes electric arc upwards, easily causes that electric arc is unstable, reduces xenon lamp useful life, even burns out cell-shell.Meanwhile, in order to guarantee the stability of xenon lamp, that electric arc can not be drawn is very long.The about 12.5mm of the maximum arc length of xenon short-act lamp product design, power can reach 30kW.
The mechanism of the arc stability of xenon short-act lamp has determined that xenon lamp should select vertically to install, negative electrode under, anode is upper.This restriction makes there is inconvenience in its light path design when application more.
In fact, high-power short arc xenon lamp is " bell shape " light source (Fig. 1 (a)) of the extremely inhomogeneous handstand of a Luminance Distribution.Near cathode point, have a high bright spot, colour temperature is the highest, and radiation is the strongest.Along with leaving cathode distance, lengthen, arc column diameter increases, and colour temperature reduces, and irradiation luminous flux reduces rapidly.At the extreme face of negative electrode to being electrode spacing apart from cathode point 0.07L(L) between optical radiation power account for lamp total radiant power more than 70% [referring to document 10: electric light source research institute of Chen great Hua Fudan University. the technical characteristic of xenon lamp and application thereof. the 4th phase of electric light source and lighting .2002].
A main method that improves xenon short-act lamp power and brightness is to improve operating air pressure, thereby improves current density and plasma density.The operating air pressure maximum of miniature lamp can reach 6MPa, and the operating air pressure of high-power bulb also reaches 2MPa.Due to technologic reason, xenon short-act lamp power is larger, and the operating air pressure of selection is lower.Because xenon lamp colour temperature depends primarily on arc current density (plasma density), and arc current density depends primarily on operating air pressure.Therefore as the light source of solar simulator, the operating air pressure of xenon lamp is approximately 3MPa, and corresponding xenon lamp power is approximately 15kW.
According to minimum energy principle, electric arc is retracted to minimum diameter automatically.Along with electric current increases, arc diameter increases, and arc column current density slightly increases, and colour temperature increase is very little, and the current density of Cathode arc root and Anode arc root also increases to some extent with electric current increase.Therefore xenon short-act lamp colour temperature in larger operating current excursion is almost constant, and brightness increases a little more than 1 power direct ratio and increases with electric current.In fact, impact due to xenon short-act lamp cathode shape, Cathode arc root often presents the form of strong contraction, electric arc and territory, negative contact zone current density are very big, the increase of operating current may make electrode temperature rising reach the critical value that electrode erosion speed increases fast, cause the serious ablation of negative electrode, limited the raising of xenon short-act lamp power.
The Another reason that restriction xenon short-act lamp power improves is the withstand voltage and cooling problem of quartz bulb shell: the increase of output power, required cell-shell area of dissipation (is proportional to r 2) increase larger; And cell-shell volume increases, the suffered stress of cell-shell increases, and requires cell-shell thickness to increase; Cell-shell thickens can reduce heat conductivility, and problem of withstand voltage and heat dissipation problem are conflicting.
Affecting xenon short-act lamp life-span principal element has: electric arc shakiness and striking voltage that (1) electrode erosion causes improve; (2) before cathode point, highlight bar current density reduces, thereby luminosity is reduced; (3) deposition of metallic vapour on cell-shell reduces radiant power and cell-shell heat absorption increase, thereby burns out cell-shell; (4) welded seal between quartz bulb shell and metal electrode damages.
Bibliographical information a kind of magnetic rotation arc-plasma planar light source Preliminary Results [referring to document 11:DAVID SLINKMAN and RICHARDSACKS.Structure and Dynamics of a Magnetron DC Arc Plasma.APPLIED SPECTROSCOPY.Volume44, Number1,1990.Page76-83].The basic structure of device is coaxial electrode arc plasma generator, and bar-shaped interior electrode is negative electrode, and cylindric dispatch from foreign news agency is anode very, and one end of fixed negative pole and anode is that gas imports end, and the other end is gas outflow end, at gas outflow end, is light source output.At anode, apply solenoid outward to produce axial magnetic field in anode cylinder, or adopt permanent magnet in anode cylinder, to produce axial magnetic field.Electric arc produces between bar-shaped negative electrode end face and anode cylinder inner surface, and between magnetic field and electric arc, Lorentz force effect makes electric arc High Rotation Speed, produces and is full of the even arc-plasma in arc chamber cross section, at generator gas outlet end, draws light radiation.This device is not considered arc chamber sealing, arc chamber pressure is atmospheric pressure, plasma cloud sharply expansion in the axial direction simultaneously, current density is very low, therefore this light source irradiation power of report only has several kilowatts, can also provide concrete structure and technical parameter as high flux light source, there is no practical value.
Summary of the invention
, non-uniform light little for light source power in short prior art, short problem of life-span, the present invention proposes production method and the high flux light source light source apparatus of a kind of high-power, high flux, the uniform light source of irradiation.
The object of the present invention is to provide the method and apparatus that produces high brightness flat plasma light source.
The present invention also aims to solve the impact of electrode erosion on light source life.
The technical scheme that the present invention adopts is in order to achieve the above object: a kind of generation device of high flux planar light source, and the electrode of this device is become by a cylindric anode bar-shaped cathode sets of circle coaxially arranged with; One end sealing of the cylinder of described cylindric anode, the other end is gas-tight by quartz transmission window; One end of described negative electrode is arranged on blind end center by insulating supporting, and the other end is cathode emission end, is positioned at the cylinder of described cylindric anode; The cylinder inner wall that axial location is positioned near the described cylindric anode described cathode emission end is Anode arc root adhesion zone; On the anode cylinder wall of Anode arc root adhesion zone, along circumference, have the high-temperature gas tap hole seam connecting with anode cylinder inner chamber, high-temperature gas flows out anode cylinder inner chamber along this high-temperature gas tap hole seam; In high-temperature gas tap hole seam both sides, have the supplementary cold air connecting with anode cylinder inner chamber and flow into the first cold air ostium seam and the second cold air ostium seam, two bursts of supplementary cold air flow into anode cylinder inner chamber from the first cold air ostium seam and the second cold air ostium seam respectively; In anode canister, fill high-pressure inert gas, filling air pressure is 0.1~10MPa; Antianode cylinder bore applies axial magnetic field.
Wherein, between anode and negative electrode, apply with DC power supply, positive source is connected with anode, and power cathode is connected with negative electrode, starting arc plasma between cathode emission end and the anode cylinder inwall of Anode arc root adhesion zone; The Lorentz force that axial magnetic field and electric arc radial current produce drives electric arc High Rotation Speed, produces strong convection current with cold air, disperses electric arc, produces the plasma cloud disperseing near axial location is positioned at cathode emission end; Along with arc current increases and axial magnetic field enhancing, the plasma cloud of dispersion is full of cross section in anode cylinder, forms discoid arc-plasma transmitting illuminant.Wherein, anode cylinder internal face and blind end inner surface plating total reflection film beyond in Anode arc root adhesion zone, form light conducting cylinder.
Wherein, disk plasma resonance light directly or through arc chamber wall light conducting cylinder is collected in the transmissive window outside uniform planar light source of formation or uniform irradiation face.
Wherein, in anode cylinder wall, open gas backstreaming cooling duct, this passage is connected with high-temperature gas tap hole seam, the first cold air ostium seam and the second cold air ostium seam, the high-temperature gas flowing into from high-temperature gas tap hole seam is cooling in this cooling duct, and cooled gas returns to anode cylinder inner chamber through the first cold air ostium seam and the second cold air ostium seam respectively.
Wherein, in order to improve light radiation utilization ratio, at disk plasma, by anode cylinder blind end one side, one speculum is set, thereby the light of disk plasma anode cylinder enclosed end radiation is reflected back to plasma, by plasma absorption, is further strengthened plasma resonance, or see through plasma and directly or through arc chamber wall reflex to outside transmissive window on irradiation face, in order to improve the utilization ratio of light, reflector position should be near plasma, reverberation can major part return to plasma or see through plasma, mirror design becomes the surface of revolution coaxial with electrode, curved surface opening direction is towards light source transmission window, speculum bottom centre leaves a circular hole, bar-shaped negative electrode therefrom passes, speculum any point normal and extended line all intersect at outside cathode emission end with negative electrode axis, allow near the plasma resonance of negative electrode directly or by plating the wall of reflectance coating reflex to transmissive window outside afterwards by mirror-reflection, and be no longer radiated on negative electrode.
Wherein, for transmissive window, anode cylinder wall and speculum, avoiding electrode erosion steam pollutes; the metallic vapour that electrode erosion produces flows out anode cylinder inner chamber with high-temperature gas from anode canister wall high-temperature gas tap hole seam; cooling deposition outside anode cylinder chamber; two bursts of clean cold air that flow into from first, second cold air ostium seam; antianode cylinder wall and speculum play dust insulation blocking effect, also transmissive window are played to hot insulation blocking effect.
Wherein, outside anode cylinder around solenoid, for produce axial magnetic field at anode cylinder inner chamber.
Wherein, by anode cylinder two ends flange design, be permeability magnetic material, in solenoid external application permeability magnetic material Jiang Liang flange UNICOM, form the magnetic circuit outside anode canister, reduce and produce the required magnetic potential of axial magnetic field in anode canister, reduce exciting curent.
Wherein, the Anode arc root adhesion zone embedded with metal annulus of described cylindric anode, opens the described high-temperature gas tap hole seam for water conservancy diversion at described metal ring circumference; Described metal ring can be different from anode cylinder material, made, as tungsten, tungsten alloy etc. by resistant to elevated temperatures electric conducting material.
For the parts that guarantee to contact with high temperature are because plasma high-temperature burns out, near antianode cylinder, cathode support position, negative electrode installation end, anode cylinder two end flanges and the logical high-pressure cooling water of quartz transmission window periphery force cooling.
The present invention provides a kind of production method of high flux planar light source in addition, the method is utilized the generation device of above-mentioned high flux planar light source, this production method is by gas flow organizational controls arc-plasma arc column position shape, Cathode arc root position shape and Anode arc root position shape, Plasma Arc Column position shape is become to flat " disc " from xenon short-act lamp " bell shape ", Cathode arc root is become to diffused " ring " or " face " distribution from " point " that shrink, Anode arc root is evenly distributed on anode cylinder wall surrounding Anode arc root adhesion zone simultaneously, produce a light-emitting area larger, the disc plasma source that radiation intensity is higher, thereby improve radiant power and radiation efficiency, improve the uniformity of light-emitting area, and collect by simple optical cylinder, at radiation window, form uniform planar light source.The flow organization of described gas is to disperse electric arc by the rotation of field drives electric arc, forms the equally distributed discoid plasma of angle in anode cylinder; The electric arc homogeneous heating cathode emission end surface and the periphery that rotate on the one hand, make cathode emission end face temperature increase, reach the condition that produces thermionic emission on the whole surface of cathode emission end periphery or cathode emission end, be combined with circumferential equally distributed disk plasma, be formed on cathode emission end edge in the form of a ring or in cathode end, be the diffused Cathode arc root of planar distribution; On the other hand, High Rotation Speed flows and forms circumferential equally distributed Anode arc root with disk plasma and anode cylinder (2) wall anode arc-root attachment district (20) close contact of Radial Flow; The radial jet of the plasma generation that High Rotation Speed is mobile, flows out from the anode wall high temperature gas flow seam (11) that portals, and has limited near horizontal (axially) of plasma anode wall to develop; Supplementary cold air flows into (14) inflow anode cylinder inner chamber from the first cold air ostium seam (13) and the second cold air respectively, from disk plasma both sides, supplement and enter plasma high-temperature region, with plasma radial Coupled with Flow, further from the discoid plasma cathode arc of axial compression root, arc column and Anode arc root, significantly improve on the whole discoid plasma density, thereby produce the planar light source of high brightness.
Advantage of the present invention and good effect are:
Compare with existing xenon arc lamp technology, owing to having adopted above scheme, can realize following advantage:
1) taper arc-plasma is separated into discoid plasma, from " point " light source, becomes comparatively uniform flat luminous body, can improve arc power, thereby strengthen radiant power and the radiation efficiency of light source, and improve the uniformity of radiation;
2) High Rotation Speed that magnetic rotation arc-plasma produces flows and has limited the axial expansion of plasma with Radial Flow, in addition from plasma both sides anode cylinder wall cold air flow channel, flow into supplementary cold air, the expansion in the axial direction of restriction plasma, improve plasma electrically current density, strengthened luminous efficiency;
3) the total reflection structure of the plasma source of plane and anode inner core has formed uniform planar light source (Lambertian source) at anode cylinder transmission window place, thereby the first optically focused that does not the need common xenon lamp complex optical path system of even light again;
4) the pure cold air outside arc chamber chamber is supplemented, and transmissive window is carried out to cooling and pollution protection, improves the window life-span.
Accompanying drawing explanation
Fig. 1 is theory structure schematic diagram (b), electric arc (plasma) position shape schematic diagram (a) and the radiation profiles schematic diagram (c) of xenon short-act lamp;
Fig. 2 is apparatus of the present invention principle sectional arrangement drawing; In figure: 1, negative electrode, 2, anode cylinder, 3, arc-plasma, 4, cathode emission end, 5, solenoid, 6, insulating supporting, 7, metal flange, 8, metal flange, 9, transmissive window, 10, speculum, 11, tap hole seam, 12, backflow cooling duct, 13, ostium seam, 14, ostium seam, 15, cold air, 16, cold air, 17, magnetic field, 18, the cylinder of magnetic conduction, 19, arc ignition bar, 20, Anode arc root adhesion zone;
Fig. 3 is the tap hole seam 11A-A profile of apparatus of the present invention Fig. 2;
Fig. 4 is arc ignition bar partial cutaway schematic;
Fig. 5 is apparatus of the present invention speculum and magnetic line of force distribution schematic diagram;
Fig. 6 is plasma axial compression schematic diagram;
Fig. 7 is discoid plasma schematic diagram;
Fig. 8 is the arc plasma volume morphing schematic diagram of observing in embodiment.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention.
Of the present invention high-power, high flux, the production method of the uniform light source of irradiation is by gas flow organizational controls arc plasma position shape, Cathode arc root position shape and Anode arc root position shape, Plasma shape is become to " disc " from xenon short-act lamp " bell shape (taper) ", Cathode arc root is become to diffused " ring (or face) " from " point " that shrink to distribute, Anode arc root is evenly distributed on anode cylinder wall surrounding simultaneously, produce a disc plasma source that light-emitting area is larger, thereby improve the uniformity of radiant power and raising light-emitting area, and collect by simple optical cylinder, at radiation window, form uniform planar light source.
Light supply apparatus theory structure: a kind of basic structure of high flux light source of the present invention as shown in Figure 2.
Electrode is comprised of a cylindric anode 2 and a coaxially arranged bar-shaped negative electrode 1 of circle; Anode cylinder one end is sealed by flange 7, and the other end is installed quartz transmission window 9, and quartz window is arranged on metal flange 8, adopts welding or press seal between metal flange 8, quartz window and anode cylinder 2.Anode cylinder 2 inner chambers are with outside airtight, and the working gas of inner filling device is the inert gas of periodic table of elements IIIV family or their mixture.
Negative electrode one end is arranged on anode cylinder blind end metal flange 7 centers by insulating supporting 6, the other end of negative electrode is cathode emission end 4, the material that is positioned at the described negative electrode of anode cylinder be mixed with a small amount of metal oxide (as, contain the oxides such as 1~4% thorium, lanthanum, cerium, zirconium) tungsten.
The metal material of the high heat conduction of material of anode, conduction, low work function is made, as the alloy of copper, copper (copper-silver alloy, copper-zircaloy etc.).Axial location is the Anode arc root adhesion zone 20 of electric arc near being positioned at cathode emission end, on the anode cylinder wall edge of Anode arc root adhesion zone, circumferentially has 8 high-temperature gas tap holes 11, high-temperature gas tap hole 11 and anode cylinder 2 inner chamber UNICOMs; The high-temperature gas of plasma generation and the metal vapors of electrode erosion flow out anode canister inner chamber along this hole, at anode canister cavity, are cooled outward and purify; At anode cylinder two ends, approach the anode cylinder wall of flange along circumferential uniform 8 cold air ostiums 13,14, with anode cylinder inner chamber UNICOM, pure cold air flows into anode canister inner chamber along this hole, supplements and enters plasma high-temperature district.
This embodiment provides cooling method outside a kind of plasma Working medium gas self-loopa arc chamber chamber: circumferential uniform 8 axial gas cooling ducts 12 in high-temperature gas tap hole 11 both sides anode cylinder inwalls, two ends, cooling duct communicate one by one with high-temperature gas tap hole 11 and cold air ostium 13,14 respectively.The plasma promotion high-temperature gas of High Rotation Speed and the metal vapors that electrode erosion produces be 11 outflow anode cylinder inner chambers along hole, enter gas cooled passage 12, high-temperature gas is cooling at this, metal vapors deposits at this, pure cold air 15,16 is along near the cold air ostium 13 metal flange 7,8 afterwards, 14 flow back to anode cylinder inner chamber, supplement and enter plasma high-temperature region.
Outside anode cylinder between two end flanges around a solenoid 5, on solenoid, apply direct current, in anode cylinder, produce constant axial magnetic field 17.Also can replace coil to produce axial magnetic field with permanent magnet.
In order to improve solenoid, be created in the efficiency that anode canister inner chamber produces axial magnetic field, by the flange at anode cylinder two ends 7,8 are designed to ferromagnetic material (as straight carbon steel, electrical pure iron etc.), at solenoid, be surrounded with the cylinder 18 of ferromagnetic material outward, its two ends and feeromagnetic metal flange 7,8 magnetic circuit UNICOMs, reduce the magnetic resistance of solenoid beyond anode cylinder inner chamber.The cylinder 18 of described magnetic conduction also can be substituted by several magnetic conduction bars.
Near high-temperature gas tap hole seam 11, on anode cylinder wall, filling arc ignition bar 19.As shown in Figure 4.Arc ignition bar axis is positioned at anode cylinder 2 cross sections, and arc ignition bar axis extended line meets at cathode emission end face or cathode rod side; At arc ignition bar, pass and open slightly larger in diameter in the aperture of arc ignition bar through anode cylinder wall position; During normal operation, arc ignition bar end is positioned at anode cylinder wall; Between arc ignition bar and anode cylinder, can slide, and keep electric UNICOM, between arc ignition bar rear portion and anode cylinder, require sealing, guarantee that anode cylinder is air tight.One section of material of arc ignition bar front end is tungsten.
Discoid plasma and high brightness planar light source produce principle: between anode 2 and negative electrode 1, apply with DC power supply, positive source is connected with anode, and power cathode is connected with negative electrode.In arc-distribution region, apply axial magnetic field 17.With mechanical drive mode, move arc ignition bar 19, its end is contacted with cathode emission end 4, by passing through arc ignition bar short circuit between anode negative electrode, then arc ignition bar is return in anode cylinder wall; By short-circuiting method starting arc plasma 3 between cathode emission end 4 and the Anode arc root adhesion zone of anode cylinder 2 inwalls; The Lorentz force that axial magnetic field and electric arc radial current produce drives electric arc High Rotation Speed; Electric arc High Rotation Speed and cold air produce strong convection current, disperse electric arc, produce the plasma cloud disperseing near cathode emission end axial location; Along with arc current increases and axial magnetic field enhancing, the plasma cloud of dispersion is full of cross section in anode cylinder, forms discoid arc-plasma 3) [referring to document 12:W.D.Xia, L.C.Li, Y.H.Zhao, Q.Ma, B.H.Du, Q.Chen, and L.Cheng, " Dynamics of large-scale magnetically rotating arc plasmas, " Applied Physics Letters, vol.88, May222006.].4 surfaces, electric arc homogeneous heating cathode emission end and the periphery of High Rotation Speed, make cathode terminal surface temperature increase, reach the condition in cathode end periphery or the whole surface generation of cathode end thermionic emission, be combined with the dispersion plasma of circumferential distribution, be formed on cathode end edge spreads in the form of a ring or be planar distribution in cathode end diffused Cathode arc root [referring to document 13:W.D.Xia, H.L.Zhou, Z.P.Zhou, and B.Bai, " Evolution of cathodic arc roots in a large-scale magnetically rotating arc plasma, " Ieee Transactions on Plasma Science, vol.36, pp.1048-1049, Aug2008.].Disk anode plasma arc root is evenly attached to the Anode arc root adhesion zone 20 of anode canister inwall, form diffusion Anode arc root.[referring to document 14:H.L.Zhou, L.C.Li, L.Cheng, Z.P.Zhou, B.Bai, and W.D.Xia, " ICCD imaging of coexisting arc roots and arc column in a large-area dispersed arc-plasma source, " Ieee Transactions on Plasma Science, vol.36, pp.1084-1085, Aug2008.].Meanwhile, the plasma generation radial jet that High Rotation Speed is mobile and carry the metal vapors that electrode erosion produces, from 11 outflows of portalling of anode wall high temperature gas flow; In gas cooled passage 12 cooling and deposition after, pure cold air 15,16 supplement inflow high-temperature area again, with plasma radial Coupled with Flow, discoid plasma is axially compressed, thereby significantly improve plasma density, form high brightness planar light source, as shown in Figure 6,7.
Except Anode arc root adhesion zone, at anode cylinder surface of internal cavity, comprise anode cylinder wall, two end flanges inner surface plating total reflection films or total scattering film, form light conducting cylinder.Disk plasma resonance light is collected in transmissive window 9 outsides through light conducting cylinder and forms planar light source comparatively uniformly.
In order to improve light radiation utilization ratio, thereby one speculum 10 is set in plasma sealing flange one side, the light of disk plasma directive sealing flange one side is reflected back to plasma, by plasma absorption, is further strengthened plasma resonance, or see through plasma and directly or through arc chamber wall reflex to outside transmissive window on irradiation face.As shown in Figure 5.
In order to improve the utilization ratio of light, speculum 10 positions should be near plasma, and reverberation can major part return to plasma or see through plasma.Mirror design becomes the surface of revolution coaxial with electrode, and curved surface opening direction is towards light source transmission window.Speculum bottom centre leaves a circular hole, and bar-shaped negative electrode 1 therefrom passes.Near disk plasma cathode, radiant light is the strongest, outside speculum any point normal and extended line and negative electrode axes intersect and cathode emission end 4, object be allow near intense radiation negative electrode by after mirror-reflection directly or reflex to transmissive window 9 outsides by light conducting cylinder, and be no longer radiated on negative electrode.
Due to the heat transfer of plasma to arc chamber, need near anode cylinder, two end flanges, negative electrode installation end, cathode insulation support zone, the logical water under high pressure of quartz transmission window periphery is cooling.The water under high pressure type of cooling also can replace by types of cooling such as atomizations.
High-temperature gas tap hole 11 on anode barrel is plural hole, be generally 3 and more than.The cross section in hole can be designed as rectangle or circular or other shapes.The axis in hole and the angle Φ between radius are that between 0~90 degree (shown in Fig. 3), the yawing moment in hole consistent with Plasma Rotation flow direction (as shown in Figure 3), can reduce gas resistance to outflow.
High-temperature gas tap hole 11 on anode barrel also can be annulus one.
It is minimum spacing between the male-female utmost point that 11 axial location centers (0~2) d(d outside cathode emission end face is stitched in hole).
Anode cylinder can be as a whole separately, also can be made up of multiple elements.As inlayed resistant to elevated temperatures metal ring in Anode arc root adhesion zone, the material pure tungsten of described annulus or be mixed with a small amount of metal oxide (as, contain the oxides such as 1~4% thorium, lanthanum, cerium, zirconium) tungsten or tungsten-copper, tungsten-silver alloy etc.Between described metal ring and anode cylinder main body, adopting welding or crimping is an integral body, opens high-temperature gas tap hole seam 3 on metal ring.
Anode cylinder also can be designed as multistage in addition: the light conducting cylinder section of the electrode section of Anode arc root adhesion zone, transmissive window one side and the speculum section relative with transmissive window one side, between each section, can conduct electricity connection, also can mutually with insulating material, separate, now, anode segment and positive source join.Can reduce the possibility of arc erosion speculum or light conducting cylinder like this.
Provide an embodiment of the present invention below:
Device structural dimensions: the long 150mm of bar-shaped negative electrode 1, diameter 18mm; Anode cylinder 2 internal diameter 40mm, arc chamber inner length 300mm.
Electrode material: bar-shaped negative electrode 1 is lanthanum tungsten (containing 3% lanthana); Anode cylinder 2 is T2 red copper.
Inner gas pressure: 0.5Mpa argon gas.
Axial magnetic field: 0.1T.
Arc current: 500A; Arc voltage: 70V, arc power 35kW, arc radiation power surpasses 10kW.
Arc plasma volume morphing: arc-plasma 3 is uniform, to be full of arc chamber cross section " disc " light-emitting area; Cathode emission end 4 presents a diffused " ring-type " arc root.As shown in Figure 8.
Compare with xenon short-act lamp " point " light source, planar light source of the present invention has increased light-emitting area, has improved radiant light total flux; Compare with the horizontal Two Dimensional Free development of xenon short-act lamp electric arc, the mobile plasma of High Rotation Speed of the present invention has improved longitudinal (radially) flowing velocity of electric arc, from the cold air of anode cylinder two ends axial flow, limited horizontal (axially) development of electric arc, plasma axial width is reduced, the increase in constraint current channel cross section, improve the current density of arc column, thereby improved longitudinal distributing homogeneity of arc glow and total radiation intensity.
Compare with the contraction arc root of xenon short-act lamp, the present invention has realized negative electrode diffusion arc root, can effectively increase the contact area of electric arc and negative electrode, reduces current density, slows down the ablation of electric arc to electrode.
Compare with the cooling problem of cell-shell of xenon short-act lamp, the cold air 15,16 that circulation of the present invention flows into can not only prevent that transmissive window 9 from contacting with high-temperature plasma and high-temperature gas effectively, and transmissive window 9 is had to obvious cooling effect, solve preferably heat dissipation problem, thereby improve the life-span of window.
The not detailed disclosed part of the present invention belongs to the known technology of this area.
Although above the illustrative embodiment of the present invention is described; so that the technical staff of present technique neck understands the present invention; but should be clear; the invention is not restricted to the scope of embodiment; to those skilled in the art; as long as various variations appended claim limit and definite the spirit and scope of the present invention in, these variations are apparent, all utilize innovation and creation that the present invention conceives all at the row of protection.

Claims (10)

1. the device that high flux planar light source produces, is characterized in that, the electrode of this device is comprised of a cylindric anode (2) and a coaxially arranged bar-shaped negative electrode of circle (1); One end sealing of the cylinder of described cylindric anode (2), the other end is gas-tight by quartz transmission window (9); One end of described negative electrode (1) is arranged on blind end center by insulating supporting (6), and the other end is cathode emission end (4), is positioned at the cylinder of described cylindric anode (2); The cylinder inner wall that axial location is positioned near the described cylindric anode (2) described negative electrode (1) transmitting terminal is Anode arc root adhesion zone (20); On the anode cylinder wall of Anode arc root adhesion zone, along circumference, have the high-temperature gas tap hole seam (11) connecting with anode cylinder inner chamber, high-temperature gas flows out anode cylinder inner chamber along this high-temperature gas tap hole seam; In high-temperature gas tap hole seam (11) both sides, have the supplementary cold air connecting with anode cylinder inner chamber and flow into the first cold air ostium seam (13) and the second cold air ostium seam (14), two bursts of supplementary cold air (15,16) flow into anode cylinder inner chamber from the first cold air ostium seam (13) and the second cold air ostium seam (14) respectively; Antianode cylinder bore applies axial magnetic field (17); In the cylinder of anode, fill 0.1~10MPa air pressure.
2. the device that a kind of high flux planar light source according to claim 1 produces, is characterized in that: between anode (2) and negative electrode (1), apply with DC power supply, positive source is connected with anode, and power cathode is connected with negative electrode; Starting arc plasma (3) between cathode emission end (4) and the Anode arc root adhesion zone (20) of cylindric anode (2) inwall; Axial magnetic field (17) drives electric arc High Rotation Speed with the Lorentz force that electric arc radial current produces, and produces strong convection current with cold air, disperses electric arc, produces the plasma cloud disperseing near axial location is positioned at cathode emission end; Along with arc current increases and axial magnetic field enhancing, the plasma cloud that makes that plasma High Rotation Speed flows radially and is circumferentially being evenly distributed, be full of cross section in anode cylinder, in the cylinder of anode, form the equally distributed discoid arc-plasma light emitting source of angle.
3. the device that a kind of high flux planar light source according to claim 1 produces, is characterized in that, anode cylinder (2) internal face and blind end (7) inner surface plating total reflection film beyond in Anode arc root adhesion zone, form light conducting cylinder.
4. the device producing according to a kind of high flux planar light source described in claim 1 or 3, is characterized in that, the radiant light in disk luminescence of plasma source directly or through light conducting cylinder is collected in transmissive window (9) the outside uniform planar light source of formation or uniform irradiation face.
5. the device that a kind of high flux planar light source according to claim 1 produces, it is characterized in that, in the cylindrical wall of cylindric anode (2), open gas backstreaming cooling duct (12), this passage and high-temperature gas tap hole seam (11), the first cold air ostium seam (13) and the second cold air ostium seam (14) are connected, the high-temperature gas flowing into from high-temperature gas tap hole seam (11) is cooling in this cooling duct (12), cooled gas stitches through the first cold air ostium seam (13) and the second cold air ostium the inner chamber that (14) return to the cylinder of anode respectively.
6. the device that a kind of high flux planar light source according to claim 1 produces, it is characterized in that, in order to improve light radiation utilization ratio, at disk plasma, by anode cylinder blind end one side, one speculum (10) is set, thereby the light of disk plasma anode cylinder enclosed end radiation is reflected back to plasma, by plasma absorption, is further strengthened plasma resonance, or see through plasma and directly or through arc chamber wall reflex to outside transmissive window on irradiation face; In order to improve the utilization ratio of light, speculum (10) position should be near plasma, and reverberation can major part return to plasma or see through plasma; Mirror design becomes the surface of revolution coaxial with electrode, curved surface opening direction is towards light source transmission window, speculum bottom centre leaves a circular hole, bar-shaped negative electrode (1) therefrom passes, speculum any point normal and extended line all intersect at outside cathode emission end with negative electrode axis, allow near the plasma resonance of negative electrode directly or by plating the wall of reflectance coating reflex to transmissive window (9) outside afterwards by mirror-reflection, and be no longer radiated on negative electrode.
7. the device that a kind of high flux planar light source according to claim 1 produces; it is characterized in that; the metallic vapour that electrode erosion produces flows out anode cylinder inner chamber with high-temperature gas; cooling deposition outside anode cylinder inner chamber; the two bursts of clean cold air (15,16) that flow into from first, second cold air ostium seam (13,14); antianode cylinder wall and speculum play dust insulation blocking effect, and transmissive window is played to heat isolation and dust insulation blocking effect.
8. the device that a kind of high flux planar light source according to claim 1 produces, it is characterized in that, Anode arc root adhesion zone (20) the embedded with metal annulus of described cylindric anode (2), opens the described high-temperature gas tap hole seam (11) for water conservancy diversion radially at described metal ring circumference; Described metal ring is made by resistant to elevated temperatures electric conducting material.
9. the device that a kind of high flux planar light source according to claim 1 produces, is characterized in that, outside anode cylinder around solenoid (5); Anode cylinder two end flanges (7,8) are designed to permeability magnetic material, at solenoid external application permeability magnetic material by two flanges (7,8) UNICOM; For producing axial magnetic field (17) at anode cylinder (2) inner chamber.
10. the method that a high flux planar light source produces, the method is utilized the generation device of the high flux planar light source described in Arbitrary Term in claim 1 and claim 2 to 9, it is characterized in that, this production method is to organize by gas flow, control the arc column position shape of arc-plasma, Cathode arc root position shape and Anode arc root position shape, Plasma Arc Column position shape is become to flat " disc " from xenon short-act lamp " bell shape ", Cathode arc root is become to diffused " ring " or " face " distribution from " point " that shrink, Anode arc root is evenly distributed on anode cylinder wall surrounding simultaneously, produce a light-emitting area larger, the disc plasma source that radiation intensity is higher, thereby improve radiant power and radiation efficiency, improve the uniformity of light-emitting area, and collect by simple optical cylinder, at radiation window, form uniform planar light source.The flow organization of described gas is to disperse electric arc by the rotation of field drives electric arc, forms the equally distributed discoid plasma of angle in anode cylinder; The electric arc homogeneous heating cathode emission end surface and the periphery that rotate on the one hand, make cathode emission end face temperature increase, reach the condition that produces thermionic emission on the whole surface of cathode emission end periphery or cathode emission end, be combined with circumferential equally distributed disk plasma, be formed on cathode emission end edge in the form of a ring or in cathode end, be the diffused Cathode arc root of planar distribution; On the other hand, High Rotation Speed flows and forms circumferential equally distributed Anode arc root with Radial Flow disk plasma and anode cylinder (2) wall anode arc-root attachment district (20) close contact; The radial jet of the plasma generation that High Rotation Speed is mobile, flows out from the anode wall high temperature gas flow seam (11) that portals, and has limited near horizontal (axially) of plasma anode wall to develop; Supplementary cold air flows into (14) inflow anode cylinder inner chamber from the first cold air ostium seam (13) and the second cold air respectively, from disk plasma both sides, supplement and enter plasma high-temperature region, with plasma radial Coupled with Flow, further from the discoid plasma cathode arc of axial compression root, arc column and Anode arc root, significantly improve on the whole discoid plasma density, thereby produce the planar light source of high brightness.
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CN104253013B (en) * 2014-04-15 2018-04-03 中国科学技术大学先进技术研究院 A kind of high flux planar light source device
CN104253013A (en) * 2014-04-15 2014-12-31 夏维东 High-flux plane light source device
CN105487235A (en) * 2015-12-22 2016-04-13 中国科学院长春光学精密机械与物理研究所 High-energy-utilization-rate optical integrator apparatus suitable for large-power solar simulator
CN106783517A (en) * 2016-12-19 2017-05-31 韩婧杰 Face shape illuminating lamp
RU175740U1 (en) * 2017-06-19 2017-12-18 Акционерное общество "Научно-исследовательский институт оптико-электронного приборостроения" АО "НИИ ОЭП" PLASMA SOURCE OF LIGHT RADIATION
CN108966473A (en) * 2018-08-06 2018-12-07 西安太乙鼎生航天环保科技有限公司 A kind of miniaturization magnetic device for direct-current arc constraint control
CN112911778A (en) * 2019-11-19 2021-06-04 核工业西南物理研究院 Plasma generator for powder spheroidizing or fine coating
CN112213261A (en) * 2020-09-14 2021-01-12 长江存储科技有限责任公司 Xenon lamp light source and optical measuring machine
CN112856702A (en) * 2021-02-05 2021-05-28 杭州康蓓净智能科技有限公司 Air purification virus killing device based on plasma high-energy low-temperature technology
CN112856702B (en) * 2021-02-05 2022-07-08 康蓓净(杭州)智能科技有限公司 Air purification virus killing device based on plasma high-energy low-temperature technology
CN113905498A (en) * 2021-08-31 2022-01-07 中国航天空气动力技术研究院 Arc plasma heater with dispersed cathode arc roots and use method
CN113905498B (en) * 2021-08-31 2024-04-09 中国航天空气动力技术研究院 Arc plasma heater with dispersed cathode arc roots and use method
RU211865U1 (en) * 2021-12-07 2022-06-24 АКЦИОНЕРНОЕ ОБЩЕСТВО "Научно-исследовательский институт оптико-электронного приборостроения" (АО "НИИ ОЭП") PLASMA LIGHT SOURCE

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