CN103531722A - Manufacturing method of flexible display - Google Patents
Manufacturing method of flexible display Download PDFInfo
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- CN103531722A CN103531722A CN201210565095.2A CN201210565095A CN103531722A CN 103531722 A CN103531722 A CN 103531722A CN 201210565095 A CN201210565095 A CN 201210565095A CN 103531722 A CN103531722 A CN 103531722A
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- organic polymer
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/80—Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
Abstract
The invention discloses a manufacturing method of a flexible display, wherein the method comprises the following steps: etching a glass substrate to form a channel used for auxiliary fixation of an organic polymer thin layer, and cleaning the glass substrate; coating one face, provided with the channel, of the glass substrate with an organic polymer potion to form the flattened organic polymer thin layer; machining a TFT device on the organic polymer thin layer; machining an OLED lighting device on the TFT device; pasting a flexible packaging film used for preventing the devices from contacting air on the surface of the organic polymer thin layer provided with the OLED lighting device; and cutting the flexible packaging film along the edges of the flexible display with a designed size, and putting the glass substrate into a liquid or steam environment to enable the flexible display to fall off from the glass substrate, thereby forming the flexible display. The method provided by the invention ensures that the flexible display falls off from the glass substrate very well, operation is convenient, cost is low, and the lighting device is prevented against bad influences.
Description
Technical field
The present invention relates to flexible display preparation field, relate in particular to a kind of preparation method of flexible display.
Background technology
In recent years, it is very fast that monitor market changes, and center is occupied by flat-panel display device, and flat-panel display device is devoted to manufacture large scale, thin and light display device.This class display part comprises liquid crystal display device, plasma display, display of organic electroluminescence etc.But existing liquid crystal display device, plasma display, display of organic electroluminescence form by glass substrate, thereby because not having flexibility, it has not limited its range of application.
And at present, having there is a kind of flexible display that can be crooked, it is that the substrate that adopts flexible material to form is made.The method of preparing this flexible display has two kinds, and the one, adopt the method for existing display and the method for employing Electronic Paper.The method that adopts existing display is to make thin film transistor LCD device, organic elctroluminescent device material etc. become flexible method.And adopt the method for Electronic Paper, be use cholesterol liquid crystal, use microcapsules, the electrophoretic display device (EPD) of the hemispherical distortion ball of electrophoresis and electrostatic charge charging is as display device.The shortcoming of this Electronic Paper is, is difficult to realize true color, and is difficult to realize moving image because operating rate causes very slowly.
Therefore, the focus of current enterprise mostly concentrates on to study and how to adopt existing display to realize flexible display device.And in the preparation process of flexible base, board, the technology that flexible base, board and glass substrate are peeled off does not obtain good result always.The electronic enterprises such as Samsung, LG, Philip are set about the flexible display of research and development, its to flexible base, board the stripping means on glass substrate several below nearly, respectively have its pluses and minuses.Stripping means that Philip is used is Electronics on Plastic by Laser Release(laser lift-off technique), its needed laser energy is high, and its cost is also high, easily causes the damage of luminescent device due to the high-energy of laser simultaneously.The method that Samsung is used is Joule heating induced lift off(resistance heating induction lift-off technology), it uses the method for heating that substrate and glass are departed from, and excess Temperature needs luminescent device to protect simultaneously, causes cost to rise.Stripping means that LG is used is at the bottom of Stainless steel substrate(adopts stainless steel lining), it is peeled off with chemical method, due to corrosivity and the Acidity of Aikalinity of chemicals, will greatly reduce the life-span of flexible display.And De-bonding Layer (DBL) (peel ply) method developing for the Industrial Technology Research Institute of Taiwan (ITRI), although operation is simple, but as a know-how, up to the present also do not announce its concrete technology and material, for the exploitation of flexible base, board brings very large difficulty.
Therefore, prior art has yet to be improved and developed.
Summary of the invention
In view of above-mentioned the deficiencies in the prior art, the object of the present invention is to provide a kind of preparation method of flexible display, the flexible base, board stripping means cost that is intended to solve existing flexible display is high, and can cause to luminescent device the problem of certain influence.
Technical scheme of the present invention is as follows:
A preparation method for flexible display, wherein, comprises the following steps:
One side etching in substrate of glass is used for the auxiliary fixedly raceway groove of organic polymer thin film, cleans described substrate of glass; Described raceway groove encloses the machining area that is formed for processing flexibility display devices on the surface of described substrate of glass;
In one side in described substrate of glass with raceway groove, be coated with organic polymer liquid medicine, form smooth organic polymer thin film layer;
On described organic polymer thin film layer, process TFT device;
On described TFT device, process OLED luminescent device;
On the surface that is processed with described OLED luminescent device and organic polymer thin film layer around thereof, be stained with a flexible package film for preventing that device from contacting with air;
On described flexible package film, along the edge cuts of the designed size of described flexible display, put into liquid or steam ambient, described organic polymer thin film layer and described substrate of glass are departed from, form described flexible display.
The preparation method of described flexible display, wherein, described organic polymer liquid medicine is PET, PC, PES, PEN or PI.
The preparation method of described flexible display wherein, is coated with after organic polymer liquid medicine in described substrate of glass, and described organic polymer liquid medicine forms smooth organic polymer thin film layer through drying; In described drying course, adopt temperature programming.
The preparation method of described flexible display, wherein, described Temperature Programmed Processes is 100 ℃ and dries 2 ~ 4 hours, dries 4 ~ 6 hours at 200 ℃, dries 10 ~ 18 hours at 250 ~ 300 ℃.
The preparation method of described flexible display, wherein, described liquid environment is water or to have pH value be 5 ~ 8 solution; Described steam ambient is the steam ambient of 80 ~ 150 ℃.
The preparation method of described flexible display, wherein, described organic polymer liquid medicine need to be through filtering and deaeration.
The preparation method of described flexible display, wherein, described filter process is that described organic polymer liquid medicine is filtered with sand core funnel; Described deaeration process is, with vacuum pump, described organic polymer liquid medicine is carried out to deaeration.
The preparation method of described flexible display, wherein, the thickness that described organic polymer thin film layer is controlled is 20 ~ 200 μ m.
The preparation method of described flexible display, wherein, the diameter of described raceway groove opening is less than the diameter of inner cavity of channel.
The preparation method of described flexible display, wherein, described raceway groove is set to annular channel.
Beneficial effect: the preparation method of flexible display of the present invention, to adopt the substrate of glass that is etched with raceway groove to prepare flexible display, on substrate of glass, be coated with last layer organic polymer resin solution, dry after film forming, by the active force of raceway groove and the cohesive force between film and glass, acted synergistically, can guarantee well that formed film can not fall down in the flow process of preparation TFT technique and OLED technique, thereby can solve well the adhesion problem in luminescent device preparation process, guarantee carrying out smoothly of all techniques.After all technique completes, in the formed machining area of raceway groove, along flexible package film, scratch, making has a large amount of contact with moistures between substrate of glass and flexible base, board, can make flexible base, board peel off well, easy and simple to handle, cost is low, and can not cause harmful effect to luminescent device.Like this, just can solve well the separation problem of flexible base, board and glass substrate in flexible display preparation process, guarantee carrying out smoothly of all techniques.After to be stripped completing, with the glass substrate of raceway groove, still can reuse, also can reduce production costs better.
Accompanying drawing explanation
Fig. 1 is in the preparation method of flexible display of the present invention, etches the plane graph after raceway groove in substrate of glass.
Fig. 2 is in the preparation method of flexible display of the present invention, etches the sectional view after raceway groove in substrate of glass.
Fig. 3 is in the preparation method of flexible display of the present invention, forms the sectional view after organic complex thin film layer in substrate of glass.
Fig. 4 is in the preparation method of flexible display of the present invention, processes the sectional view after TFT device on organic double compound thin layer.
Fig. 5 is in the preparation method of flexible display of the present invention, processes the sectional view after luminescent device on organic double compound thin layer.
Fig. 6 is in the preparation method of flexible display of the present invention, the sectional view after encapsulation.
Fig. 7 is in the preparation method of flexible display of the present invention, by flexible base, board cutting the sectional view separated with glass substrate.
Embodiment
The invention provides a kind of preparation method of flexible display, for making object of the present invention, technical scheme and effect clearer, clear and definite, below the present invention is described in more detail.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
A kind of preparation method of flexible display is provided in the present invention, and this stripping means is simple, luminescent device is not had any impact, for display provides reliable path by the suitability for industrialized production of flexible base, board simultaneously.
Please refer to Fig. 1 to Fig. 7 of the present invention, in the preparation method that Fig. 1 is flexible display of the present invention, etch the plane graph after raceway groove in substrate of glass, Fig. 2 etches the sectional view after raceway groove in substrate of glass; Fig. 3 is in the preparation method of flexible display of the present invention, forms the sectional view after organic complex thin film layer in substrate of glass; Fig. 4 is in the preparation method of flexible display of the present invention, processes the sectional view after TFT device on organic double compound thin layer; Fig. 5 is in the preparation method of flexible display of the present invention, processes the sectional view after luminescent device on organic double compound thin layer; Fig. 6 is in the preparation method of flexible display of the present invention, the sectional view after encapsulation; Fig. 7 is in the preparation method of flexible display of the present invention, by the flexible base, board cutting sectional view separated with glass substrate.
As shown in Figures 1 to 6, the preparation method of flexible display of the present invention, specifically comprises the following steps:
One side etching in substrate of glass 1 is used for the auxiliary fixedly raceway groove 11 of organic polymer thin film, as depicted in figs. 1 and 2, clean substrate of glass 1, described raceway groove 11 is arranged in the fringe region of described substrate of glass 1, described raceway groove 11 is annular, is formed for the machining area 111 of processing flexibility display devices in described annular channel;
In one side in clean substrate of glass 1 with raceway groove 11, be coated with organic polymer liquid medicine, form smooth organic polymer thin film layer 2, as shown in Figure 3, described organic polymer thin film layer 2 is the flexible base, board of flexible display;
On described organic polymer thin film layer 2, process TFT device 3, as shown in Figure 4;
On described TFT device 3, process OLED luminescent device 4, as shown in Figure 5;
Encapsulation, as shown in Figure 6, wherein this encapsulation process is on the surface of OLED luminescent device 4 and organic polymer thin film layer 2 around thereof, to be stained with a flexible package film 5 for preventing that device from contacting with air; Described flexible package film 5 can be a flexible package lid or other encapsulating material (as package adhesive tape);
On flexible package film 5, big or small edge cuts along flexible display, as shown in Figure 7, put into liquid or steam ambient, described organic polymer thin film layer 2(is the flexible base, board of flexible display) naturally peel off with described substrate of glass 1, whole flexible display device is come off, form flexible display; Wherein, described liquid environment can or have the solution of certain pH value (5 ~ 8) for water, and described steam ambient is the steam ambient of (80 ~ 150 ℃) under specified temp.
Wherein, the raceway groove 11 in described substrate of glass 1 is the wide raceway groove of slot tripe 11, and the diameter of raceway groove 11 openings is less than the diameter of raceway groove 11 inner chambers.Like this, when organic polymer liquid medicine solidify to form after organic polymer thin film layer 2, organic polymer thin film in the wide raceway groove 11 of slot tripe is because the diameter of the film substrate in inner chamber is greater than the opening of raceway groove 11, more difficult disengaging from described raceway groove 11, can play organic polymer thin film is assisted to the effect in substrate of glass 1 that is fixed on.Described raceway groove 11 can be one or more, is arranged on the surrounding of described substrate of glass 1, and the machining area 111 that described raceway groove 11 encloses formation can be used for processing flexibility display devices.TFT device 3 in subsequent step all carries out with 4 processing of OLED luminescent device in described machining area 111.When flexible package film 5 has encapsulated, only need in enclosing the machining area 111 of formation, cut at the edge along flexible display raceway groove 11, and whole flexible display is tear-away, formation flexible display.Wherein, the designed internal diameter of described flexible display should be less than the internal diameter of the formed machining area 111 of raceway groove 11 of described annular, like this, after the edge along flexible display cuts, just can make the organic polymer thin film layer 2(under substrate of glass 1 and flexible display is flexible base, board) between have a large amount of contact with moistures, allow it naturally come off, form flexible display.
Described organic polymer liquid medicine can be PET(poly terephthalic acid diethylester), PC(Merlon), PES(polyether sulfone), the poly-naphthalenedicarboxylic acid diethylester of PEN(), PI(polyimides) etc.Described organic polymer liquid medicine is coated in described substrate of glass 1 and is formed with the process of organic polymer thin layer 2: from initial raw material organic polymer powder, successively by dissolving, filtration, deaeration, the process such as film, dry and peel off.Wherein, described filter process is that organic polymer liquid medicine is filtered with sand core funnel, and bulky grain is wherein removed, and is of value to like this flexible substrates evenness.And described deaeration process is, with vacuum pump, organic polymer liquid medicine is carried out to deaeration, gas is wherein removed, make organic polymer liquid medicine can not produce air blister defect in being dried into membrane process.Due to the cohesive force between organic polymer thin film layer 2 and substrate of glass 1 relatively a little less than, water breakthrough has coming off to a certain degree, can make so follow-up preparation OLED luminescent device 4 processes can cause inconvenience, and the water that can use in the present invention 70 ℃ in TFT preparation technology below cleans, therefore described organic double compound thin layer need to fixedly make it not separated with substrate of glass 1 under to a certain degree by raceway groove 11 auxiliary.
In coating process process, because the last thin polymer film forming needs certain evenness, therefore in being coated with membrane process, its film speed and scraper planeness all need to be controlled at a certain specific value, as the speed of filming is controlled to 0.5 mm/s ~ 10 mm/s, or the roughness of film coated surface is for example controlled at, in 0 ~ 3 %: the thick film of 50 μ m, its roughness 0 ~ 1.5 nm.In coating process process, also need organic polymer thin film to be controlled at certain thickness, preferably thickness is 20 ~ 200 μ m simultaneously.In drying course, because organic polymer is some organic solvent dissolutions, therefore in drying course, need temperature programming, for example: 100 ℃ are dried 2 ~ 4 hours, then under 200 ℃ of conditions, dry 4 ~ 6 hours, then under 250 ~ 300 ℃ of conditions, continue to dry 10 ~ 18 hours.In addition, in the substrate that is coated with organic polymer liquid medicine, just entered in the process of baking oven, need to keep certain levelness, so just can make organic polymer thin film layer 2 more smooth.And the cleannes of glass substrate are determining the quality of last prepared organic polymer thin film layer 2 to a great extent, therefore glass substrate used all needs to clean, dry before use, guarantees clean.
On organic polymer thin film layer 2, continue in processing TFT device 3 and OLED luminescent device 4 processes, carry out the center being preferably on organic polymer thin film layer 2.In this process, OLED luminescent device 4 is preferably in machining area 111 and processes, like this, because having the auxiliary of organic polymer thin film in raceway groove 11, organic polymer thin film layer 2 surrounding fix, therefore, in TFT device 3 and OLED luminescent device 4 preparation process, organic polymer thin film layer 2 can be not separated with substrate of glass 1.And, when the method with cutting sets big or small edge cuts along flexible display on flexible package film 5, can not cause damage to OLED luminescent device 4 yet.
After all device manufacturing process on organic polymer thin film layer 2 complete, just encapsulate.Finally, by the method for cutting, on flexible package film 5, along flexible display, set big or small edge cuts, then put into certain environment, for example put into water or put into the solution of certain pH value (5 ~ 8), or put into the steam ambient of (80 ~ 150 ℃) under a certain specified temp, making has a large amount of contact with moistures between substrate of glass 1 and flexible display, can make flexible display peel off with substrate of glass 1 well, allow it from substrate of glass 1, naturally come off, form flexible display.
The preparation method of flexible display of the present invention, to adopt the substrate of glass that is etched with raceway groove to prepare flexible display, on substrate of glass, be coated with last layer organic polymer resin solution, dry after film forming, by the active force of raceway groove and the cohesive force between film and glass, acted synergistically, can guarantee well that formed film can not fall down in the flow process of preparation TFT technique and OLED technique, thereby can solve well the adhesion problem in luminescent device preparation process, guarantee carrying out smoothly of all techniques.After all technique completes, along flexible package film, scratches in the formed machining area of raceway groove, making has a large amount of contact with moistures between substrate of glass and flexible base, board, can make flexible base, board peel off well, easy and simple to handle, cost is low, and can not cause harmful effect to luminescent device.Like this, just can solve well the separation problem of flexible base, board and glass substrate in flexible display preparation process, guarantee carrying out smoothly of all techniques.And, after to be stripped completing, with the glass substrate of raceway groove, still can reuse, also can reduce production costs better.The technique that invention provides was saved technique one compared with former method used, also further reduced production costs.This kind of technique need not be used glue simultaneously, may be convenient in operating process.
Should be understood that, application of the present invention is not limited to above-mentioned giving an example, and for those of ordinary skills, can be improved according to the above description or convert, and all these improvement and conversion all should belong to the protection range of claims of the present invention.
Claims (10)
1. a preparation method for flexible display, is characterized in that, comprises the following steps:
One side etching in substrate of glass is used for the auxiliary fixedly raceway groove of organic polymer thin film, cleans described substrate of glass, and described raceway groove encloses the machining area that is formed for processing flexibility display devices on the surface of described substrate of glass;
In one side in described substrate of glass with raceway groove, be coated with organic polymer liquid medicine, form smooth organic polymer thin film layer;
On described organic polymer thin film layer, process TFT device;
On described TFT device, process OLED luminescent device;
On the surface that is processed with described OLED luminescent device and organic polymer thin film layer around thereof, be stained with a flexible package film for preventing that device from contacting with air;
On described flexible package film, along the edge cuts of the designed size of described flexible display, put into liquid or steam ambient, described organic polymer thin film layer and described substrate of glass are departed from, form described flexible display.
2. the preparation method of flexible display according to claim 1, is characterized in that, described organic polymer liquid medicine is PET, PC, PES, PEN or PI.
3. the preparation method of flexible display according to claim 1, is characterized in that, is coated with after organic polymer liquid medicine in described substrate of glass, and described organic polymer liquid medicine forms smooth organic polymer thin film layer through drying; In described drying course, adopt temperature programming.
4. the preparation method of flexible display according to claim 3, is characterized in that, described Temperature Programmed Processes is 100 ℃ and dries 2 ~ 4 hours, dries 4 ~ 6 hours at 200 ℃, dries 10 ~ 18 hours at 250 ~ 300 ℃.
5. the preparation method of flexible display according to claim 1, is characterized in that, described liquid environment is water or to have pH value be 5 ~ 8 solution; Described steam ambient is the steam ambient of 80 ~ 150 ℃.
6. according to the preparation method of the flexible display described in claim 1 to 5 any one, it is characterized in that, described organic polymer liquid medicine need to be through filtering and deaeration.
7. the preparation method of flexible display according to claim 6, is characterized in that, described filter process is that described organic polymer liquid medicine is filtered with sand core funnel; Described deaeration process is, with vacuum pump, described organic polymer liquid medicine is carried out to deaeration.
8. the preparation method of flexible display according to claim 1, is characterized in that, the thickness that described organic polymer thin film layer is controlled is 20 ~ 200 μ m.
9. according to the preparation method of the flexible display described in claim 1 ~ 5 any one, it is characterized in that, the diameter of described raceway groove opening is less than the diameter of inner cavity of channel.
10. the preparation method of flexible display according to claim 9, is characterized in that, described raceway groove is set to annular channel.
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| CN105280841A (en) * | 2014-07-18 | 2016-01-27 | Tcl集团股份有限公司 | Flexible AMOLED display device and manufacture method thereof |
| WO2016095643A1 (en) * | 2014-12-19 | 2016-06-23 | 京东方科技集团股份有限公司 | Flexible display substrate mother board and preparation method for flexible display substrate |
| CN106585069A (en) * | 2016-12-23 | 2017-04-26 | 武汉华星光电技术有限公司 | Flexible substrate, panel and method of manufacturing flexible substrate and panel by screen printer |
| CN107068863A (en) * | 2017-06-07 | 2017-08-18 | 深圳市华星光电技术有限公司 | A kind of flexible OLED devices and preparation method thereof |
| CN109471285A (en) * | 2018-11-26 | 2019-03-15 | 惠州市华星光电技术有限公司 | Flexible base board, flexible display panels and display device |
| CN111653205A (en) * | 2020-07-15 | 2020-09-11 | 上海天马微电子有限公司 | Stretchable display panel and display device |
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| CN107068863B (en) * | 2017-06-07 | 2020-05-01 | 深圳市华星光电技术有限公司 | Flexible OLED device and preparation method thereof |
| CN109471285A (en) * | 2018-11-26 | 2019-03-15 | 惠州市华星光电技术有限公司 | Flexible base board, flexible display panels and display device |
| WO2020107630A1 (en) * | 2018-11-26 | 2020-06-04 | 惠州市华星光电技术有限公司 | Flexible substrate, flexible display panel, and display device |
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