CN103531509A - Method for precisely positioning circle center on workbench - Google Patents
Method for precisely positioning circle center on workbench Download PDFInfo
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- CN103531509A CN103531509A CN201310442252.5A CN201310442252A CN103531509A CN 103531509 A CN103531509 A CN 103531509A CN 201310442252 A CN201310442252 A CN 201310442252A CN 103531509 A CN103531509 A CN 103531509A
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- workbench
- round piece
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- circle center
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
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- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
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- Automation & Control Theory (AREA)
- Numerical Control (AREA)
Abstract
The invention discloses a method for precisely positioning the circle center on a workbench. The method for precisely positioning the circle center on the workbench comprises a workbench, a round workpiece, a controller, a coder, a first sensor, a second sensor and a third sensor, wherein the workbench is used for conveying the round workpiece; the controller is used for receiving coding information collected by the coder via the sensors; the circle center of the round workpiece is positioned by operation; the positioned circle center is checked; and according to the circle center, the controller is used for controlling and regulating the direction and the distance for the workbench to take and send the round workpiece. According to the method disclosed by the invention, a stereoscopic model can be simulated, the circle center position of the round workpiece can be quickly and accurately calculated, and the direction and the distance of a transmission target point can be quickly and accurately calculated without affecting the transmission efficiency of the whole transmission system.
Description
Technical field
The present invention relates to semiconductor device production control navigation system, be specifically related to the method for accurate positioning centre on a kind of workbench.
Background technology
When semiconductor device fabrication, need in crystal, introduce and mix thing, thereby change semi-conductive conductivity, and mix in the process of thing in introducing, circular semiconductor workpiece need to be located accurately, so just can accomplish evenly to mix accurately, therefore a set of effective control positioning table is just most important, if improve stability and the precision that workbench transmits circular semiconductor workpiece, the accurate home position of positioning round workpiece, and then calculate the side-play amount of round piece on workbench, by direction and the position of adjusting operating platform, offset these errors again.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the present invention is achieved through the following technical solutions:
A kind of method of accurate positioning centre on workbench, it comprises workbench, round piece, controller, encoder, transducer a, transducer b and transducer c, described workbench is used for transmitting described round piece, described controller receives the coded message that described encoder collects by transducer, by computing, orient the center of circle of described round piece, the check of positioning centre, described controller is controlled according to the center of circle and is regulated described workbench to fetch and deliver direction and the distance of described round piece.
Further, on described workbench, the method for accurate positioning centre, is characterized in that, comprises the following steps:
Step 1) coding
Three nonoverlapping encoded points are set arbitrarily on the circular arc of described round piece, are respectively A, B and C point, and above-mentioned circular arc is positioned on a concentric circles;
Step 2) capturing and coding information
Three transducers are set on described workbench, are respectively transducer a, transducer b and transducer c, described transducer a, transducer b and transducer c gather respectively the position encoded information that described encoded point A, B and C are ordered;
The transmission of step 3) information
The encoded point information that described transducer a, transducer b and transducer c are collected is delivered in described encoder, and described encoder converts information processing to described controller discernible signal, and is transferred in described controller;
Step 4) computing positioning centre
Described controller is according to code signal, then by a series of computings, finally orients the center of circle of described round piece.
The check of step 5) positioning centre
A radially torque sensor is set on the home position calculating in step 4, and when round piece rotates, described radially torque sensor detects whether there is radial load, if had, carries out described step 1, if not, locates successful ending step.
The invention has the beneficial effects as follows:
Adopt technical solution of the present invention, can simulate a three-dimensional model, calculate rapidly and accurately the home position of round piece, and the direction of transmission objectives point and distance, increase substantially workbench and transmitted stability and the precision of round piece, and can not affect the efficiency of transmission of whole transmission system.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technological means of the present invention, and can be implemented according to the content of specification, below with preferred embodiment of the present invention and coordinate accompanying drawing to be described in detail as follows.The specific embodiment of the present invention is provided in detail by following examples and accompanying drawing thereof.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide a further understanding of the present invention, forms the application's a part, and schematic description and description of the present invention is used for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is control flow chart of the present invention;
Fig. 2 is embodiments of the present invention figure.
Embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, describe the present invention in detail.
Shown in Fig. 2, a kind of method of accurate positioning centre on workbench, it comprises workbench (1), round piece (2), controller (3), encoder (4), transducer a(5), transducer b(6) and transducer c(7), described workbench (1) is used for transmitting described round piece (2), described controller (3) receives the coded message that described encoder (4) collects by transducer, by computing, orient the center of circle of described round piece (2), the check of positioning centre, described controller (3) is controlled according to the center of circle and is regulated described workbench (1) to fetch and deliver direction and the distance of described round piece (2).
Further, shown in seeing figures.1.and.2, on described workbench, the method for accurate positioning centre, is characterized in that, comprises the following steps:
Step 1) coding
Three nonoverlapping encoded points are set arbitrarily on the circular arc of described round piece, are respectively A, B and C point, and above-mentioned circular arc is positioned on a concentric circles;
Step 2) capturing and coding information
Three transducers are set on described workbench, are respectively transducer a, transducer b and transducer c, described transducer a, transducer b and transducer c gather respectively the position encoded information that described encoded point A, B and C are ordered;
The transmission of step 3) information
The encoded point information that described transducer a, transducer b and transducer c are collected is delivered in described encoder, and described encoder converts information processing to described controller discernible signal, and is transferred in described controller;
Step 4) computing positioning centre
Shown in Fig. 2, use mathematical method to connect AB and BC, then make respectively the perpendicular bisector of AB and BC, its intersection point is the center of circle, this phase method compiled program is input in described controller, described controller is according to code signal, then by a series of computings in program, the center of circle of finally orienting described round piece.
The check of step 5) positioning centre
A radially torque sensor 8 is set on the home position calculating in step 4, and when round piece 2 rotation, described radially torque sensor 8 detects whether there is radial load, if had, carries out described step 1, if not, locates successful ending step.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (2)
1. the accurate method of positioning centre on a workbench, it comprises workbench (1), round piece (2), controller (3), encoder (4), transducer a(5), transducer b(6) and transducer c(7), it is characterized in that, described workbench (1) is used for transmitting described round piece (2), described controller (3) receives the coded message that described encoder (4) collects by transducer, by computing, orient the center of circle of described round piece (2), the check of positioning centre, described controller (3) is controlled according to the center of circle and is regulated described workbench (1) to fetch and deliver direction and the distance of described round piece (2).
2. the method for accurate positioning centre on workbench according to claim 1, is characterized in that, comprises the following steps:
Step 1) coding
Three nonoverlapping encoded points are set arbitrarily on the circular arc of described round piece, are respectively A, B and C point, and above-mentioned circular arc is positioned on a concentric circles;
Step 2) capturing and coding information
Three transducers are set on described workbench, are respectively transducer a, transducer b and transducer c, described transducer a, transducer b and transducer c gather respectively the position encoded information that described encoded point A, B and C are ordered;
The transmission of step 3) information
The encoded point information that described transducer a, transducer b and transducer c are collected is delivered in described encoder, and described encoder converts information processing to described controller discernible signal, and is transferred in described controller;
Step 4) computing positioning centre
Described controller is according to code signal, then by a series of computings, finally orients the center of circle of described round piece, the check of step 5) positioning centre
A radially torque sensor (8) is set on the home position calculating in step 4, when round piece (2) rotates, described radially torque sensor (8) detects whether there is radial load, if had, carries out described step 1, if not, locates successful ending step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201310442252.5A CN103531509A (en) | 2013-09-26 | 2013-09-26 | Method for precisely positioning circle center on workbench |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310442252.5A CN103531509A (en) | 2013-09-26 | 2013-09-26 | Method for precisely positioning circle center on workbench |
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| CN103531509A true CN103531509A (en) | 2014-01-22 |
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| CN201310442252.5A Pending CN103531509A (en) | 2013-09-26 | 2013-09-26 | Method for precisely positioning circle center on workbench |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108213594A (en) * | 2018-01-24 | 2018-06-29 | 中信戴卡股份有限公司 | A kind of high-precision removes wheel circumference burr device |
| CN113325808A (en) * | 2020-02-28 | 2021-08-31 | 上海诺基亚贝尔股份有限公司 | Control method, apparatus, device, system, and computer-readable medium |
| CN113804142A (en) * | 2021-09-18 | 2021-12-17 | 深圳市汇泽激光科技有限公司 | Distance measurement positioning method, distance measurement positioning device and distance measurement positioning equipment |
| CN114046752A (en) * | 2021-10-25 | 2022-02-15 | 湖南三一石油科技有限公司 | Drill rod detection method, electronic equipment and storage medium |
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| CN113804142A (en) * | 2021-09-18 | 2021-12-17 | 深圳市汇泽激光科技有限公司 | Distance measurement positioning method, distance measurement positioning device and distance measurement positioning equipment |
| CN114046752A (en) * | 2021-10-25 | 2022-02-15 | 湖南三一石油科技有限公司 | Drill rod detection method, electronic equipment and storage medium |
| CN114046752B (en) * | 2021-10-25 | 2024-05-28 | 湖南三一石油科技有限公司 | Drill rod detection method, electronic equipment and storage medium |
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