CN103531509A - Method for precisely positioning circle center on workbench - Google Patents

Method for precisely positioning circle center on workbench Download PDF

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Publication number
CN103531509A
CN103531509A CN201310442252.5A CN201310442252A CN103531509A CN 103531509 A CN103531509 A CN 103531509A CN 201310442252 A CN201310442252 A CN 201310442252A CN 103531509 A CN103531509 A CN 103531509A
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sensor
workbench
center
controller
circle
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杨大蓉
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Suzhou Institute of Trade and Commerce
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Suzhou Institute of Trade and Commerce
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • Numerical Control (AREA)

Abstract

本发明公开了一种工作台上精确定位圆心的方法，它包括工作台、圆形工件、控制器、编码器、传感器a、传感器b和传感器c,所述工作台用来传送所述圆形工件，所述控制器接收所述编码器通过传感器采集到的编码信息，通过运算定位出所述圆形工件的圆心，定位圆心的检验，所述控制器根据圆心来控制和调节所述工作台取送所述圆形工件的方向和距离。本方法可以模拟出一个立体模型，快速准确地计算出圆形工件的圆心位置，以及传输目标点的方向和距离，并且不会影响整个传输系统的传输效率。

Figure 201310442252

The invention discloses a method for accurately locating the center of a circle on a workbench, which includes a workbench, a circular workpiece, a controller, an encoder, a sensor a, a sensor b and a sensor c, and the workbench is used to transmit the circular workpiece Workpiece, the controller receives the coded information collected by the encoder through the sensor, locates the center of the circular workpiece through calculation, and checks the location of the center, the controller controls and adjusts the workbench according to the center of the circle The direction and distance of fetching and sending the circular workpiece. The method can simulate a three-dimensional model, quickly and accurately calculate the center position of the circular workpiece, and the direction and distance of the transmission target point, without affecting the transmission efficiency of the entire transmission system.

Figure 201310442252

Description

A kind of method of accurate positioning centre on workbench
Technical field
The present invention relates to semiconductor device production control navigation system, be specifically related to the method for accurate positioning centre on a kind of workbench.
Background technology
When semiconductor device fabrication, need in crystal, introduce and mix thing, thereby change semi-conductive conductivity, and mix in the process of thing in introducing, circular semiconductor workpiece need to be located accurately, so just can accomplish evenly to mix accurately, therefore a set of effective control positioning table is just most important, if improve stability and the precision that workbench transmits circular semiconductor workpiece, the accurate home position of positioning round workpiece, and then calculate the side-play amount of round piece on workbench, by direction and the position of adjusting operating platform, offset these errors again.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the present invention is achieved through the following technical solutions:
A kind of method of accurate positioning centre on workbench, it comprises workbench, round piece, controller, encoder, transducer a, transducer b and transducer c, described workbench is used for transmitting described round piece, described controller receives the coded message that described encoder collects by transducer, by computing, orient the center of circle of described round piece, the check of positioning centre, described controller is controlled according to the center of circle and is regulated described workbench to fetch and deliver direction and the distance of described round piece.
Further, on described workbench, the method for accurate positioning centre, is characterized in that, comprises the following steps:
Step 1) coding
Three nonoverlapping encoded points are set arbitrarily on the circular arc of described round piece, are respectively A, B and C point, and above-mentioned circular arc is positioned on a concentric circles;
Step 2) capturing and coding information
Three transducers are set on described workbench, are respectively transducer a, transducer b and transducer c, described transducer a, transducer b and transducer c gather respectively the position encoded information that described encoded point A, B and C are ordered;
The transmission of step 3) information
The encoded point information that described transducer a, transducer b and transducer c are collected is delivered in described encoder, and described encoder converts information processing to described controller discernible signal, and is transferred in described controller;
Step 4) computing positioning centre
Described controller is according to code signal, then by a series of computings, finally orients the center of circle of described round piece.
The check of step 5) positioning centre
A radially torque sensor is set on the home position calculating in step 4, and when round piece rotates, described radially torque sensor detects whether there is radial load, if had, carries out described step 1, if not, locates successful ending step.
The invention has the beneficial effects as follows:
Adopt technical solution of the present invention, can simulate a three-dimensional model, calculate rapidly and accurately the home position of round piece, and the direction of transmission objectives point and distance, increase substantially workbench and transmitted stability and the precision of round piece, and can not affect the efficiency of transmission of whole transmission system.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technological means of the present invention, and can be implemented according to the content of specification, below with preferred embodiment of the present invention and coordinate accompanying drawing to be described in detail as follows.The specific embodiment of the present invention is provided in detail by following examples and accompanying drawing thereof.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide a further understanding of the present invention, forms the application's a part, and schematic description and description of the present invention is used for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is control flow chart of the present invention;
Fig. 2 is embodiments of the present invention figure.
Embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, describe the present invention in detail.
Shown in Fig. 2, a kind of method of accurate positioning centre on workbench, it comprises workbench (1), round piece (2), controller (3), encoder (4), transducer a(5), transducer b(6) and transducer c(7), described workbench (1) is used for transmitting described round piece (2), described controller (3) receives the coded message that described encoder (4) collects by transducer, by computing, orient the center of circle of described round piece (2), the check of positioning centre, described controller (3) is controlled according to the center of circle and is regulated described workbench (1) to fetch and deliver direction and the distance of described round piece (2).
Further, shown in seeing figures.1.and.2, on described workbench, the method for accurate positioning centre, is characterized in that, comprises the following steps:
Step 1) coding
Three nonoverlapping encoded points are set arbitrarily on the circular arc of described round piece, are respectively A, B and C point, and above-mentioned circular arc is positioned on a concentric circles;
Step 2) capturing and coding information
Three transducers are set on described workbench, are respectively transducer a, transducer b and transducer c, described transducer a, transducer b and transducer c gather respectively the position encoded information that described encoded point A, B and C are ordered;
The transmission of step 3) information
The encoded point information that described transducer a, transducer b and transducer c are collected is delivered in described encoder, and described encoder converts information processing to described controller discernible signal, and is transferred in described controller;
Step 4) computing positioning centre
Shown in Fig. 2, use mathematical method to connect AB and BC, then make respectively the perpendicular bisector of AB and BC, its intersection point is the center of circle, this phase method compiled program is input in described controller, described controller is according to code signal, then by a series of computings in program, the center of circle of finally orienting described round piece.
The check of step 5) positioning centre
A radially torque sensor 8 is set on the home position calculating in step 4, and when round piece 2 rotation, described radially torque sensor 8 detects whether there is radial load, if had, carries out described step 1, if not, locates successful ending step.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.

Claims (2)

1.一种工作台上精确定位圆心的方法，它包括工作台（1）、圆形工件（2）、控制器（3）、编码器（4）、传感器a（5）、传感器b（6）和传感器c（7），其特征在于，所述工作台（1）用来传送所述圆形工件（2），所述控制器（3）接收所述编码器（4）通过传感器采集到的编码信息，通过运算定位出所述圆形工件（2）的圆心，定位圆心的检验，所述控制器（3）根据圆心来控制和调节所述工作台（1）取送所述圆形工件（2）的方向和距离。 1. A method for accurately positioning the center of a circle on a workbench, which includes a workbench (1), a circular workpiece (2), a controller (3), an encoder (4), a sensor a (5), a sensor b (6 ) and sensor c (7), characterized in that the workbench (1) is used to transmit the circular workpiece (2), and the controller (3) receives the encoder (4) collected by the sensor The coded information of the circular workpiece (2) is located by calculation, and the center of the positioning is inspected. The controller (3) controls and adjusts the workbench (1) to take and deliver the circular workpiece according to the center of the circle. The direction and distance of the workpiece (2). 2.根据权利要求1所述的工作台上精确定位圆心的方法，其特征在于，包括以下步骤： 2. The method for accurately locating the center of circle on the workbench according to claim 1, is characterized in that, comprises the following steps: 步骤1）编码 Step 1) Encoding 在所述圆形工件的圆弧上任意设置三个不重叠的编码点，分别为A、B和C点，且上述圆弧位于一个同心圆上； Arbitrarily set three non-overlapping coding points on the circular arc of the circular workpiece, which are points A, B and C respectively, and the above-mentioned circular arcs are located on a concentric circle; 步骤2）采集编码信息 Step 2) Collect encoding information 在所述工作台上设置三个传感器，分别为传感器a、传感器b和传感器c，所述传感器a、传感器b和传感器c分别采集所述编码点A、B和C点的位置编码信息； Three sensors are arranged on the workbench, respectively sensor a, sensor b and sensor c, and the sensor a, sensor b and sensor c respectively collect the position code information of the code points A, B and C; 步骤3）信息的传递 Step 3) Transfer of information 将所述传感器a、传感器b和传感器c采集到的编码点信息传递到所述编码器中，所述编码器将信息处理转换成所述控制器可识别的信号，并且传输到所述控制器中； The code point information collected by the sensor a, sensor b and sensor c is transferred to the encoder, and the encoder processes and converts the information into a signal recognizable by the controller, and transmits it to the controller middle; 步骤4）运算定位圆心 Step 4) Calculate and locate the center of the circle 所述控制器根据编码信号，再通过一系列运算，最终定位出所述圆形工件的圆心，步骤5）定位圆心的检验 The controller finally locates the center of the circular workpiece through a series of calculations according to the coded signal. Step 5) Inspection of the center of the positioning 在步骤4计算出的圆心位置上设置一个径向力矩传感器（8），在圆形工件（2）旋转时，所述径向力矩传感器（8）检测是否有径向力，如果有则执行所述步骤1，如果没有则定位成功结束步骤。 Set a radial moment sensor (8) at the position of the circle center calculated in step 4. When the circular workpiece (2) rotates, the radial moment sensor (8) detects whether there is a radial force, and if so, executes the Step 1 above, if not, the positioning is successful and the step ends.
CN201310442252.5A 2013-09-26 2013-09-26 Method for precisely positioning circle center on workbench Pending CN103531509A (en)

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CN108213594A (en) * 2018-01-24 2018-06-29 中信戴卡股份有限公司 A kind of high-precision removes wheel circumference burr device
CN113325808A (en) * 2020-02-28 2021-08-31 上海诺基亚贝尔股份有限公司 Control method, apparatus, device, system, and computer-readable medium
CN113804142A (en) * 2021-09-18 2021-12-17 深圳市汇泽激光科技有限公司 Distance measurement positioning method, distance measurement positioning device and distance measurement positioning equipment
CN114046752A (en) * 2021-10-25 2022-02-15 湖南三一石油科技有限公司 Drill rod detection method, electronic equipment and storage medium

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CN1512929A (en) * 2001-05-29 2004-07-14 株式会社荏原制作所 Polishing apparatus and polishing method
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CN113325808A (en) * 2020-02-28 2021-08-31 上海诺基亚贝尔股份有限公司 Control method, apparatus, device, system, and computer-readable medium
CN113804142A (en) * 2021-09-18 2021-12-17 深圳市汇泽激光科技有限公司 Distance measurement positioning method, distance measurement positioning device and distance measurement positioning equipment
CN114046752A (en) * 2021-10-25 2022-02-15 湖南三一石油科技有限公司 Drill rod detection method, electronic equipment and storage medium
CN114046752B (en) * 2021-10-25 2024-05-28 湖南三一石油科技有限公司 Drill rod detection method, electronic equipment and storage medium

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Application publication date: 20140122