CN103528504A - Method and device for calibrating return compensation type four-optical-axis linear displacement laser interferometer - Google Patents
Method and device for calibrating return compensation type four-optical-axis linear displacement laser interferometer Download PDFInfo
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Abstract
A method and a device for calibrating a return compensation type four-optical-axis linear displacement laser interferometer belong to the technical field of laser measurement. The measurement light beams of the calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interferoscope group; the measurement light beams of the calibrated laser interferometer are arranged in the central positions of four parallel standard measurement light beams which are distributed in the form of the lateral edges of a right square prism in parallel; the perpendicular distance between the standard measurement light beams and the measurement light beams of the calibrated laser interferometer is very small, and the air refractive index of the standard measurement light beams is extremely close to that of the measurement light beams of the calibrated laser interferometer; any two-dimensional derived displacements of the four standard measurement light beams relative to a target reflector in a plane which is perpendicular to the standard measurement light beams can be respectively measured by four light beam position detectors; the average value of the derived displacements is measured by a micro-motion device according to the four light beam position detectors to carry out return compensation on the derived displacements in real time, so that the incidence positions of the measurement light beams on the reflecting surface of the target reflector do not vary.
Description
Technical field
The invention belongs to laser measuring technique field, relate generally to a kind of laser interferometer calibration steps and device.
Background technology
Laser interferometry displacement of the lines technology is the canonical measure technology that precision is very high, be widely used in the fields such as accurate and ultraprecise machining, microelectronics equipment, nanometer technology industrial equipment and defence equipment, in order to guarantee the accuracy of laser interferometer measurement displacement of the lines, need scientific and effective displacement of the lines laser interferometer calibration steps and device.The general thinking of lubber-line displacement lasers interferometer is to adopt the higher displacement of the lines laser interferometer of accuracy class to calibrate, and when both precision is close, is called comparison.In actual alignment work, displacement of the lines laser interferometer has suitable precision mostly, thereby the calibration of displacement of the lines laser interferometer is realized by comparison.At present, the general calibration steps of displacement of the lines laser interferometer has parallel type, formula and altogether light path formula (Liao Chengqing face-to-face, Zhu little Ping, Wang Weichen, Du Hua. the research of laser interferometer length measurement precision calibration steps. modern surveying and laboratory room managing, 2005,1:6-7).
Fig. 1 is parallel type laser interferometer calibrating installation structural representation, canonical measure mirror and be calibrated and measure mirror and be arranged on same movable platform, and when sports platform moves, the light paths of two cover laser interferometer measurement light beams increase simultaneously and reduce.Because two cover laser interferometer are parallel, place, two-way light is affected by environment similar, and air refraction is less to two-way influence of light, but because the vertical range between two-way light is larger, when therefore two cover laser interferometer are calibrated, Abbe error is larger.
Fig. 2 is face-to-face formula laser interferometer calibrating installation structural representation, canonical measure mirror and being calibrated measures that mirror is aspectant to be arranged on sports platform, its advantage is that two cover laser interferometer measurement beam axis can tune to almost on same measurement axis, both Abbe errors are very little, shortcoming is that the near-end due to an interferometer is another far-end, both light paths not etc., are not subject to the interference of environment different, and air refraction is inconsistent on the light path impact of two cover laser interferometer.
2011, China National Measuring Science Research Inst. sets up domestic first 80 meters of big-length laser interfering meter measuring device (Leng Yu states, Tao Lei, Xu Jian. two-frequency laser interferometer system accuracy and analysis of Influential Factors based on 80m measurement mechanism. metering and measuring technology, 2011, 38 (9): 47-49), accepted standard device is that the length of three Agilent5530 types is put apart from two-frequency laser interferometer is parallel, become three path laser interferometers, the laser interferometer being calibrated is placed in the middle of them, thereby calibration, this scheme belongs to the derivative schemes of parallel type calibration steps, and measure owing to adopting three road light simultaneously, therefore the Abbe error in the time of can compensating measure, but put owing to being that three laser instruments are parallel, therefore three road sign locating tab assembly light locus are far away, the every road sign locating tab assembly of the measurement electrical distance electrical distance that is calibrated laser interferometer is also far away, all optical paths are subject to the impact of environment different, air refraction is inconsistent on all optical path impacts, cause calibration measurement result inaccurate.
Fig. 3 is common light path formula laser interferometer calibrating installation structural representation, and altogether light path formula is different from parallel type laser interferometer calibrating installation is that two laser instruments become the 90 degree mode of turning back with receiver, and two cover laser interferometer share interference mirror group and measurement mirror.Because two cover laser interferometer share an interference mirror group and measure mirror, cannot determine shared interference mirror group and measure mirror and belong to standard laser interferometer component or belong to and be calibrated standard laser interferometer component, therefore not, that in accurate meaning, two calibrations of overlapping laser interferometer are calibrated.
1985, Dr-Ing H.-H.Schussler makes full use of space distribution (Dr-Ing H.-H.Schussler.Comparison and calibration of laser interferometer systems.Measurement, 1985,3 (4): 175-184), multipair displacement of the lines laser interferometer is carried out to common light path calibration.Owing to just increasing the quantity of light path laser interferometer altogether, so the method also has the shortcoming of light path formula laser interferometer calibrating installation altogether above-mentioned.
Summary of the invention
For Abbe error larger in above-mentioned existing displacement of the lines laser interferometer calibrating installation, serious air refraction inconsistency be not the problem that in accurate meaning, two cover laser interferometer are calibrated, the present invention proposes and has researched and developed compensation four optical axis displacement lasers interferometer calibration steps and the devices of return, this invention makes canonical measure light beam and is calibrated laser interferometer measurement light beam vertical range very little, thereby can reduce Abbe error, reduce the impact of air refraction inconsistency, and be that in accurate meaning, two cover laser interferometer are calibrated.
Object of the present invention is achieved through the following technical solutions:
Compensation four optical axis displacement lasers interferometer calibration stepss, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms four canonical measure light beams that are parallel to each other through four axle hollow laser interference mirror groups, article four, canonical measure light beam incides on the level crossing of interstitial hole with four-prism incline distribution form, part light with level crossing displacement information in every canonical measure light beam is reflected back toward after four axle hollow laser interference mirror groups, according to what obtain, distinguish four corresponding interference signals with four canonical measure light beams from four axle hollow laser interference mirror groups, can obtain four shift values that the level crossing of interstitial hole moves along canonical measure beam direction, the remainder light of every canonical measure light beam is through there being the level crossing of interstitial hole to be transmitted on four light-beam position detectors,
(2) the output light that is calibrated laser interferometer laser instrument forms and is calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated laser interferometer measurement light beam through the intermediate throughholes of four axle hollow laser interference mirror groups, parallel with four canonical measure light beams, and equate with the distance of every canonical measure light beam, being calibrated laser interferometer measurement light beam incides and is calibrated on laser interferometer catoptron, be calibrated after laser interferometer interference mirror group being reflected back toward, according to the interference signal obtaining from be calibrated laser interferometer interference mirror group, can obtain being calibrated the shift value that laser interferometer catoptron moves along canonical measure beam direction,
(3) sports platform along in the reciprocating process of canonical measure beam direction with the derivative displacement of random two-dimensional direction in perpendicular to canonical measure beam plane, being fitted in target mirror random two-dimensional direction in perpendicular to canonical measure beam plane on sports platform has the free displacement of relative telemechanical platform, four light-beam position detectors are measured respectively the derivative displacement of the relative target mirror of canonical measure light beam random two-dimensional direction in perpendicular to canonical measure beam plane, inching gear goes out to derive the mean value of displacement according to four light-beam position detector measurements, to target mirror, real-time return compensation is carried out in derivative displacement, the incoming position that guarantees measuring beam on target mirror reflecting surface does not change,
(4) at sports platform along in canonical measure beam direction to-and-fro movement process, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer four measuring shift value and be calibrated laser interferometer measurement shift value, after the standard laser interferometer four measuring displacement that sampling obtains is at every turn averaged with sampling simultaneously obtain to be calibrated laser interferometer measurement shift value poor, obtain some sampled measurements error amounts.
The compensation four optical axis displacement lasers interferometer calibrating installations of a kind of return, comprising that standard laser interferometer laser instrument and four are configured in can receive the locational receiver of standard laser interferometer interference signal, and wire is connected four receivers respectively with standard laser interferometer signal disposal system; On standard laser interferometer laser instrument output light path, dispose can allowing of intermediate throughholes and be calibrated the four axle hollow standard laser interference mirror groups that laser interferometer measurement light beam passes; Four axle hollow standard laser interference mirror group one side arrangement guide rails, sports platform is fitted on guide rail, the level crossing of interstitial hole is installed by inching gear on sports platform, in level crossing interstitial hole, install and be calibrated laser interferometer catoptron, be calibrated laser interferometer catoptron and form by the level crossing of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; Four light-beam position detector configuration are having after the level crossing regional transmission of interstitial hole, and lay respectively on four parallel standards measuring beam transmitted light paths; In four axle hollow standard laser interference mirror group opposite sides configurations, be calibrated laser interferometer interference mirror group and be calibrated laser interferometer laser instrument, described in be calibrated laser interferometer interference mirror group and be positioned at and be calibrated on laser interferometer laser instrument output light path; Be calibrated laser interferometer receiver and be configured in and can receive on the position that is calibrated laser interferometer interference signal, wire will be calibrated laser interferometer receiver and be calibrated laser interferometer signal disposal system and be connected.
The present invention has following characteristics and good result:
(1) compare with parallel type laser interferometer calibrating installation, owing to being calibrated laser interferometer measurement light beam by the intermediate throughholes of four axle hollow laser interference mirror groups, the vertical range being calibrated between laser interferometer measurement optical axis and parallel standards optical axis is shorter, both light paths are more approaching, and when therefore two cover laser interferometer are calibrated, Abbe error is very little.
(2) compare with face-to-face formula laser interferometer calibrating installation, in the plane perpendicular to four canonical measure light beams, in the square area being formed at this plane projection point by four canonical measure light beams, article four, canonical measure light beam and be calibrated laser interferometer measurement light beam and be subject to the degree difference of environmental interference very little, the air refraction mean value of four canonical measure light beams approaches the air refraction value that is calibrated laser interferometer measurement light beam.
(3) light path formula laser interferometer calibrating installation is compared together, shares interference mirror group and measures mirror, and standard laser interferometer component and to be calibrated standard laser interferometer component ownership clear and definite, is that in accurate meaning, two cover laser interferometer are calibrated.
(4) four light-beam position detectors can be measured respectively the derivative displacement of four relative target mirrors of canonical measure light beam random two-dimensional direction in perpendicular to canonical measure beam plane, inching gear goes out to derive the mean value of displacement according to four light-beam position detector measurements, to target mirror, real-time return compensation is carried out in derivative displacement, the incoming position of measuring beam on target mirror reflecting surface is not changed, the measuring error that on the target mirror reflecting surface that can not induce one while guaranteeing calibration, different-shape eigenwert causes.
Accompanying drawing explanation
Fig. 1 is parallel type laser interferometer calibrating installation structural representation
Fig. 2 is face-to-face formula laser interferometer calibrating installation structural representation
Fig. 3 is for being total to light path formula laser interferometer calibrating installation structural representation
Fig. 4 is the compensation four optical axis displacement lasers interferometer calibrating installation structural representations of return
Fig. 5 for the level crossing by interstitial hole be calibrated hot spot position distribution schematic diagram on the plane of incidence of the target mirror that laser interferometer catoptron forms
In figure: 1 standard laser interferometer laser instrument, 2 four axle hollow standard laser interference mirror groups, 3, 4, 5, article 6 four, parallel standards measuring beam, 7 have the level crossing of interstitial hole, 8, 9, 10, 11 standard laser interferometer receivers, 12 standard signal disposal systems, 13 are calibrated laser interferometer laser instrument, 14 are calibrated laser interferometer interference mirror group, 15 are calibrated laser interferometer measurement light beam, 16 intermediate throughholes, 17 are calibrated laser interferometer catoptron, 18 are calibrated laser interferometer receiver, 19 are calibrated laser interferometer signal disposal system, 20 inching gears, 21 sports platforms, 22 guide rails, 23, 24, 25, 26 4 light-beam position detectors, 27, 28, 29, article 30 4, parallel standards measuring beam facula position, 31 are calibrated laser interferometer beam and focus position.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
The compensation four optical axis displacement lasers interferometer calibrating installations of a kind of return, comprising that standard laser interferometer laser instrument 1 and four are configured in can receive the locational receiver 8,9,10,11 of standard laser interferometer interference signal, and wire is connected four receivers 8,9,10,11 respectively with standard laser interferometer signal disposal system 12; On standard laser interferometer laser instrument 1 output light path, dispose can allowing of intermediate throughholes 16 and be calibrated the four axle hollow standard laser interference mirror groups 2 that laser interferometer measurement light beam 15 passes; Four axle hollow standard laser interference mirror group 2 one side arrangement guide rails 22, sports platform 21 is fitted on guide rail 22, the level crossing 7 of interstitial hole is installed by inching gear 20 on sports platform 21, in level crossing 7 interstitial holes, install and be calibrated laser interferometer catoptron 17, be calibrated laser interferometer catoptron 17 and form by the level crossing 7 of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; Four light- beam position detectors 23,24,25,26 are configured in after level crossing 7 regional transmissions of interstitial hole, and lay respectively on four parallel standards measuring beams, 3,4,5,6 transmitted light paths; In four axle hollow standard laser interference mirror group 2 opposite sides configurations, be calibrated laser interferometer interference mirror group 14 and be calibrated laser interferometer laser instrument 13, described in be calibrated laser interferometer interference mirror group 14 and be positioned at and be calibrated on laser interferometer laser instrument 13 output light paths; Be calibrated laser interferometer receiver 18 and be configured in and can receive on the position that is calibrated laser interferometer interference signal, wire will be calibrated laser interferometer receiver 18 and be calibrated laser interferometer signal disposal system 19 and be connected.
Described four parallel standards measuring beams 3,4,5,6 are with to be calibrated laser interferometer measurement light beam 15 all vertical with the target mirror plane of incidence.
The intermediate throughholes 16 of four described axle hollow standard laser interference mirror groups 2 comprises arbitrary shape, and number is one or more.
Described every parallel standards measuring beam 3,4,5,6 and be calibrated laser interferometer measurement light beam 15 and had respectively the level crossing 7 of interstitial hole and be calibrated laser interferometer catoptron 17 reflection once or once.
The described laser interferometer catoptron 17 that is calibrated comprises level crossing, prism of corner cube, right-angle prism.
Compensation four optical axis displacement lasers interferometer calibration stepss, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument 1 forms through four axle hollow laser interference mirror groups 2 four canonical measure light beams 3 that are parallel to each other, 4, 5, 6, article four, canonical measure light beam 3, 4, 5, 6 incide on the level crossing 7 of interstitial hole with four-prism incline distribution form, part light with level crossing 7 displacement informations in every canonical measure light beam is reflected back toward after four axle hollow laser interference mirror groups 2, according to from four axle hollow laser interference mirror groups 2, obtain with four canonical measure light beams 3, 4, 5, four interference signals corresponding to 6 difference, can obtain the level crossing 7 of interstitial hole along canonical measure light beam 3, 4, 5, four shift values of 6 direction motions, the remainder light of every canonical measure light beam is through there being the level crossing 7 of interstitial hole to be transmitted to four light- beam position detectors 23, 24, 25, on 26,
(2) the output light that is calibrated laser interferometer laser instrument 13 forms and is calibrated laser interferometer measurement light beam 15 through being calibrated laser interferometer interference mirror group 14, be calibrated laser interferometer measurement light beam 15 through the intermediate throughholes 16 of four axle hollow laser interference mirror groups 2, with four canonical measure light beams 3, 4, 5, 6 is parallel, and equate with the distance of every canonical measure light beam, being calibrated laser interferometer measurement light beam 15 incides and is calibrated on laser interferometer catoptron 17, be calibrated after laser interferometer interference mirror group 14 being reflected back toward, according to the interference signal obtaining from be calibrated laser interferometer interference mirror group 14, can obtain being calibrated laser interferometer catoptron 17 along canonical measure light beam 3, 4, 5, the shift value of 6 direction motions,
(3) sports platform 21 is along canonical measure light beam 3, 4, 5, in the reciprocating process of 6 direction with perpendicular to canonical measure light beam 3, 4, 5, the derivative displacement of random two-dimensional direction in 6 planes, be fitted in target mirror on sports platform 21 perpendicular to canonical measure light beam 3, 4, 5, in 6 planes, random two-dimensional direction has the free displacement of relative telemechanical platform 21, four light- beam position detectors 23, 24, 25, 26 measure respectively canonical measure light beam 3, 4, 5, 6 relative target mirrors are perpendicular to canonical measure light beam 3, 4, 5, the derivative displacement of random two-dimensional direction in 6 planes, inching gear 20 is according to four light- beam position detectors 23, 24, 25, 26 measure the mean value of derivative displacement, to target mirror, real-time return compensation is carried out in derivative displacement, the incoming position that guarantees measuring beam on target mirror reflecting surface does not change,
(4) at sports platform 21 along in canonical measure light beam 3,4,5,6 direction to-and-fro movement processes, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer four measuring shift value and be calibrated laser interferometer measurement shift value, after the standard laser interferometer four measuring displacement that sampling obtains is at every turn averaged with sampling simultaneously obtain to be calibrated laser interferometer measurement shift value poor, obtain some sampled measurements error amounts.
Canonical measure beam and focus position 27, 28, 29, 30 is respectively four parallel standards measuring beams 3 successively, 4, 5, 6 incide the position of the level crossing 7 of interstitial hole, being calibrated laser interferometer beam and focus position 31 is to be calibrated the position that 15 incidents of laser interferometer measurement light beam are calibrated laser interferometer catoptron 17, from position distribution, can find out that being calibrated laser interferometer beam and focus position 31 is in canonical measure beam and focus position 27, 28, 29, 30 center point, i.e. four parallel standards measuring beams 3, 4, 5, 6 will be calibrated laser interferometer measurement light beam 15 is clamped in center.
Claims (6)
1. compensation four optical axis displacement lasers interferometer calibration stepss of return, is characterized in that the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms four canonical measure light beams that are parallel to each other through four axle hollow laser interference mirror groups, article four, canonical measure light beam incides on the level crossing of interstitial hole with four-prism incline distribution form, part light with level crossing displacement information in every canonical measure light beam is reflected back toward after four axle hollow laser interference mirror groups, according to what obtain, distinguish four corresponding interference signals with four canonical measure light beams from four axle hollow laser interference mirror groups, can obtain four shift values that the level crossing of interstitial hole moves along canonical measure beam direction, the remainder light of every canonical measure light beam is through there being the level crossing of interstitial hole to be transmitted on four light-beam position detectors,
(2) the output light that is calibrated laser interferometer laser instrument forms and is calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated laser interferometer measurement light beam through the intermediate throughholes of four axle hollow laser interference mirror groups, parallel with four canonical measure light beams, and equate with the distance of every canonical measure light beam, being calibrated laser interferometer measurement light beam incides and is calibrated on laser interferometer catoptron, be calibrated after laser interferometer interference mirror group being reflected back toward, according to the interference signal obtaining from be calibrated laser interferometer interference mirror group, can obtain being calibrated the shift value that laser interferometer catoptron moves along canonical measure beam direction,
(3) sports platform along in the reciprocating process of canonical measure beam direction with the derivative displacement of random two-dimensional direction in perpendicular to canonical measure beam plane, being fitted in target mirror random two-dimensional direction in perpendicular to canonical measure beam plane on sports platform has the free displacement of relative telemechanical platform, four light-beam position detectors are measured respectively the derivative displacement of the relative target mirror of canonical measure light beam random two-dimensional direction in perpendicular to canonical measure beam plane, inching gear goes out to derive the mean value of displacement according to four light-beam position detector measurements, to target mirror, real-time return compensation is carried out in derivative displacement, the incoming position that guarantees measuring beam on target mirror reflecting surface does not change,
(4) at sports platform along in canonical measure beam direction to-and-fro movement process, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer four measuring shift value and be calibrated laser interferometer measurement shift value, after the standard laser interferometer four measuring displacement that sampling obtains is at every turn averaged with sampling simultaneously obtain to be calibrated laser interferometer measurement shift value poor, obtain some sampled measurements error amounts.
2. compensation four optical axis displacement lasers interferometer calibrating installations of return, comprising that standard laser interferometer laser instrument (1) and four are configured in can receive the locational receiver of standard laser interferometer interference signal (8,9,10,11), and wire is connected four receivers (8,9,10,11) respectively with standard laser interferometer signal disposal system (12); It is characterized in that disposing can allowing of intermediate throughholes (16) and be calibrated the four axle hollow standard laser interference mirror groups (2) that laser interferometer measurement light beam (15) passes on standard laser interferometer laser instrument (1) output light path; Four axle hollow standard laser interference mirror group (2) one side arrangement guide rails (22), sports platform (21) is fitted on guide rail (22), at the upper level crossing (7) that interstitial hole is installed by inching gear (20) of sports platform (21), in level crossing (7) interstitial hole, install and be calibrated laser interferometer catoptron (17), be calibrated laser interferometer catoptron (17) and have the level crossing (7) of interstitial hole to form the target mirror that the plane of incidence is coplanar and relative position is fixing; Four light-beam position detectors (23,24,25,26) are configured in after level crossing (7) regional transmission of interstitial hole, and lay respectively on four parallel standards measuring beams (3,4,5,6) transmitted light path; In four axle hollow standard laser interference mirror group (2) opposite sides configurations, be calibrated laser interferometer interference mirror group (14) and be calibrated laser interferometer laser instrument (13), described in be calibrated laser interferometer interference mirror group (14) and be positioned at and be calibrated on laser interferometer laser instrument (13) output light path; Be calibrated laser interferometer receiver (18) and be configured in and can receive on the position that is calibrated laser interferometer interference signal, wire will be calibrated laser interferometer receiver (18) and be calibrated laser interferometer signal disposal system (19) and be connected.
3. compensation four optical axis displacement lasers interferometer calibrating installations of return according to claim 2, is characterized in that described four parallel standards measuring beams (3,4,5,6) and to be calibrated laser interferometer measurement light beam (15) all vertical with the target mirror plane of incidence.
4. compensation four optical axis displacement lasers interferometer calibrating installations of return according to claim 2, the intermediate throughholes (16) that it is characterized in that four described axle hollow standard laser interference mirror groups (2) comprises that arbitrary shape, number are one or more.
5. compensation four optical axis displacement lasers interferometer calibrating installations of return according to claim 2, is characterized in that described every parallel standards measuring beam (3,4,5,6) and are calibrated laser interferometer measurement light beam (15) being had respectively the level crossing (7) of interstitial hole and being calibrated that laser interferometer catoptron (17) reflects once or once.
6. the compensation four optical axis displacement lasers interferometer calibrating installations of return according to claim 2, is characterized in that the described laser interferometer catoptron (17) that is calibrated comprises level crossing, prism of corner cube, right-angle prism.
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| CN1657865A (en) * | 2004-02-20 | 2005-08-24 | 安捷伦科技有限公司 | System and method of using a side-mounted interferometer to acquire position information |
| CN103267581A (en) * | 2013-05-17 | 2013-08-28 | 中山大学 | Spectrum shearing interferometer suitable for measuring shaped pulses |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1657865A (en) * | 2004-02-20 | 2005-08-24 | 安捷伦科技有限公司 | System and method of using a side-mounted interferometer to acquire position information |
| CN103267581A (en) * | 2013-05-17 | 2013-08-28 | 中山大学 | Spectrum shearing interferometer suitable for measuring shaped pulses |
Non-Patent Citations (2)
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| 冷玉国等: "基于80m测量装置的双频激光干涉仪系统精度及影响因素分析", 《计量与测试技术》 * |
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