CN103517873B - 硅芯线支架及多晶硅的制造方法 - Google Patents

硅芯线支架及多晶硅的制造方法 Download PDF

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Publication number
CN103517873B
CN103517873B CN201280022814.4A CN201280022814A CN103517873B CN 103517873 B CN103517873 B CN 103517873B CN 201280022814 A CN201280022814 A CN 201280022814A CN 103517873 B CN103517873 B CN 103517873B
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China
Prior art keywords
heart yearn
silicon
patchhole
core wire
wire holder
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CN201280022814.4A
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Chinese (zh)
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CN103517873A (zh
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祢津茂义
黑泽靖志
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Shin Etsu Chemical Co Ltd
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Shin Etsu Chemical Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
CN201280022814.4A 2011-05-09 2012-04-16 硅芯线支架及多晶硅的制造方法 Active CN103517873B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011-104183 2011-05-09
JP2011104183A JP5666983B2 (ja) 2011-05-09 2011-05-09 シリコン芯線ホルダおよび多結晶シリコンの製造方法
PCT/JP2012/002623 WO2012153465A1 (ja) 2011-05-09 2012-04-16 シリコン芯線ホルダおよび多結晶シリコンの製造方法

Publications (2)

Publication Number Publication Date
CN103517873A CN103517873A (zh) 2014-01-15
CN103517873B true CN103517873B (zh) 2016-04-13

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CN201280022814.4A Active CN103517873B (zh) 2011-05-09 2012-04-16 硅芯线支架及多晶硅的制造方法

Country Status (6)

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US (1) US20140030440A1 (de)
EP (1) EP2708508B1 (de)
JP (1) JP5666983B2 (de)
KR (1) KR20140033095A (de)
CN (1) CN103517873B (de)
WO (1) WO2012153465A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5507493B2 (ja) * 2011-05-09 2014-05-28 信越化学工業株式会社 シリコン芯線ホルダおよび多結晶シリコンの製造方法
KR102270479B1 (ko) * 2014-10-15 2021-06-29 삼성전자주식회사 디스플레이 장치, 서버, 및 디스플레이 장치의 제어방법
JP2018065710A (ja) * 2016-10-18 2018-04-26 信越化学工業株式会社 多結晶シリコン塊、多結晶シリコン棒、および単結晶シリコンの製造方法
KR102644667B1 (ko) * 2018-07-23 2024-03-07 가부시끼가이샤 도꾸야마 심선 홀더, 실리콘 제조 장치 및 실리콘 제조 방법
JP7345441B2 (ja) * 2020-07-02 2023-09-15 信越化学工業株式会社 多結晶シリコン製造装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201372204Y (zh) * 2009-03-13 2009-12-30 上海森和投资有限公司 多晶硅还原炉用硅芯夹持装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10101040A1 (de) 2001-01-11 2002-07-25 Wacker Chemie Gmbh Vorrichtung und Verfahren zur Herstellung eines polykristallinen Siliciumstabes
JPWO2009060914A1 (ja) * 2007-11-08 2011-03-24 株式会社Sumco エピタキシャルウェーハ
JP5444860B2 (ja) * 2008-06-24 2014-03-19 三菱マテリアル株式会社 多結晶シリコン製造装置
US8840723B2 (en) * 2009-03-10 2014-09-23 Mitsubishi Materials Corporation Manufacturing apparatus of polycrystalline silicon
DE102009015196A1 (de) * 2009-03-31 2010-10-14 Centrotherm Sitec Gmbh Spann-und Kontaktierungsvorrichtung für Silizium-Dünnstäbe
DE202010002486U1 (de) * 2009-03-31 2010-06-10 Centrotherm Sitec Gmbh Spann- und Kontaktierungsvorrichtung für Silizium-Dünnstäbe
DE102009021825B3 (de) * 2009-05-18 2010-08-05 Kgt Graphit Technologie Gmbh Aufnahmekegel für Silizium-Anzuchtstäbe
JP5560018B2 (ja) * 2009-10-14 2014-07-23 信越化学工業株式会社 多結晶シリコン製造用芯線ホルダおよび多結晶シリコンの製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201372204Y (zh) * 2009-03-13 2009-12-30 上海森和投资有限公司 多晶硅还原炉用硅芯夹持装置

Also Published As

Publication number Publication date
JP2012232878A (ja) 2012-11-29
KR20140033095A (ko) 2014-03-17
EP2708508A1 (de) 2014-03-19
WO2012153465A1 (ja) 2012-11-15
CN103517873A (zh) 2014-01-15
JP5666983B2 (ja) 2015-02-12
EP2708508B1 (de) 2015-11-25
US20140030440A1 (en) 2014-01-30
EP2708508A4 (de) 2014-12-31

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