CN103513309B - LONG WAVE INFRARED inflatable film reflecting mirror main mirror face generation method - Google Patents
LONG WAVE INFRARED inflatable film reflecting mirror main mirror face generation method Download PDFInfo
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- CN103513309B CN103513309B CN201310519164.0A CN201310519164A CN103513309B CN 103513309 B CN103513309 B CN 103513309B CN 201310519164 A CN201310519164 A CN 201310519164A CN 103513309 B CN103513309 B CN 103513309B
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Abstract
LONG WAVE INFRARED inflatable film reflecting mirror main mirror face generation method, belongs to optical technical field.Described film reflecting mirror is made up of the first polyimide film layer and the second polyimide film layer, and realize being tightly connected by O-ring seal between two layers of polyimide film, O-ring seal is provided with air-filled pore, and air-filled pore is connected with aerating device by gas-filled tube; First polyimide film layer is hyaline layer; Second polyimide film layer is as working reflex face, and it is near the surperficial aluminizer of the first polyimide film layer, opposite side plated surface copper film.LONG WAVE INFRARED inflatable film reflecting mirror of the present invention can be used for optical imagery, simple as its structure of system primary mirror, quality is less, cost is low, can be made into heavy-caliber optical system.The present invention realizes the reflecting surface face shape of inflatable film reflecting mirror close to parabola by the change of plated film thicknesses of layers, and this method technique is simple, be easy to realize and large-scale promotion, and the surface figure accuracy generated is higher.
Description
Technical field
The invention belongs to optical technical field, relate to a kind of for as the inflatable film reflecting mirror of heavy caliber space telescope system and main mirror face generation method thereof.
Background technology
Along with the development of aeronautical and space technology, more and more higher to the requirement of optical mirror, low cost, high resolving power, lightweight, being easy to carry becomes important technical indicator.The constraint that traditional catoptron is subject to the weight of mirror body own is difficult to meet bigbore requirement, make imaging resolution be difficult to improve, and along with its portability of increase of bore poor, do not meet the requirement of carrier rocket bearing space.
The main method that current solution space large caliber requires is aperture splicing technology, namely wide-aperture segmented mirror is synthesized with the catoptron that size is little, but the restriction that spacing reflection mirror prepared by this method is subject to catoptron own wt is difficult to realize ultra-large aperture, be difficult to meeting spatial catoptron to more bigbore demand.
The appearance of inflatable film reflecting mirror well solves the contradiction between bore and weight.Because the mechanical property, thermotolerance, corrosion resistance etc. of Kapton all meet the condition preparing catoptron, adopt Kapton as the membraneous material manufacturing catoptron so general.Make inflatable film reflecting mirror with Kapton, than conventional mirror, there is obvious advantage: quality is very little, can be made into large aperture system, solve the problem that catoptron bore and weight restrict mutually.
At present, inflatable film reflecting mirror is mainly used in the field such as space antenna and solar energy sailboard, and this is very difficult owing to manufacturing the film meeting optical imagery requirement.Domestic and international scientific research institutions have carried out a large amount of scientific experiment in Kapton field, demonstrate inflatable film reflecting mirror and can be applicable to optical imagery, but pellicular front shape forming manufacture technique is more loaded down with trivial details, and it is larger to implement difficulty.
Inflatable film reflecting mirror has lot of advantages as heavy caliber space telescope primary mirror, but after inflation, the face shape that obtains is difficult to the requirement ensureing optical imagery, and the film that preparation meets optical imagery requirement becomes the major issue that current gas-filled type reflector faces.
Summary of the invention
In order to solve the main mirror face design difficulty of current heavy caliber space telescopic system, the present invention proposes a kind of LONG WAVE INFRARED gas-filled type reflector device and primary mirror paraboloid surface shape generation method.
The inflatable film reflecting mirror that the present invention proposes is made up of the first polyimide film layer and the second polyimide film layer, realize being tightly connected by O-ring seal between two layers of polyimide film, O-ring seal is provided with air-filled pore, and air-filled pore is connected with aerating device by gas-filled tube; Described first polyimide film layer is transparent; Second polyimide film layer is opaque as working reflex face, near the aluminium film of the even equal thickness of plated surface one deck of the first polyimide film layer, and opposite side plated surface copper film.After film reflecting mirror inflation, actual face shape and desirable parabola have larger difference, in advance film is processed by film plating process, the face shape of film reflecting mirror is made to meet required parabola, namely the copper film plating different-thickness in substrate is adopted to realize the elastic modulus of change film, thus the surperficial face shape of improving film reflector face is approximate close to desirable parabola, to reach optical imaging system requirement.
As follows based on above-mentioned inflatable film reflecting mirror main mirror face generation method:
Step one, the desirable paraboloid surface shape parameter of calculating inflatable film reflecting mirror;
Step 2, according to film reflector minute surface shape size, film is at least divided into 10 impartial annulus, distributes coating film thickness to each annulus;
Step 3, film is put into vacuum coating equipment, use the method for layering plated film, adopt the mode of blocking plated film from inside to outside to carry out preplating respectively;
Step 4, utilize thicknesses of layers instrument control thickness of coating, this thickness is exported and compares with the ideal thickness calculated, and use penalty method to calibrate theoretical model, actual coating film thickness is reached or close to theory calculate film thickness.
Make inflatable film reflecting mirror with Kapton, than conventional mirror, there is obvious advantage: quality is very little, can be made into large aperture system, solve the problem that catoptron bore and weight restrict mutually.Inflatable film reflector lens device designed by inflatable, proposing a kind of method that method based on becoming coating film thickness realizes catoptron primary mirror surface face shape, solving inflatable film reflector minute surface shape and generating difficulty.By the face shape error between theory calculate inflation rear film and desirable parabola and henky-curve curve, being flattened to be placed in vacuum coating equipment by film is divided into 10 endless belt to block plated film, each endless belt corresponding henky-curve curve diverse location, according to the error amount setting coating film thickness of henky-curve curve, reach the object of Changeable elastic modulus, thus the parabolic surface of face shape of realizing ideal, reach the object of optical imagery.The present invention has the following advantages:
1, LONG WAVE INFRARED inflatable film reflecting mirror of the present invention can be used for optical imagery, simple as its structure of system primary mirror, quality is less, cost is low, can be made into heavy-caliber optical system.
2, the present invention realizes the reflecting surface face shape of inflatable film reflecting mirror close to parabola by the change of plated film thicknesses of layers, and this method technique is simple, be easy to realize and large-scale promotion, and the surface figure accuracy generated is higher.
Accompanying drawing explanation
Fig. 1 is the structural representation of LONG WAVE INFRARED gas-filled type reflector of the present invention as wide-aperture telescope;
Fig. 2 is that LONG WAVE INFRARED gas-filled type reflector of the present invention is as wide-aperture telescope primary mirror structural representation;
Fig. 3 is the plated film rete schematic diagram of LONG WAVE INFRARED gas-filled type reflector of the present invention as wide-aperture telescope.
Embodiment
Below in conjunction with accompanying drawing, technical scheme of the present invention is further described; but do not limit to so; everyly technical solution of the present invention modified or equivalent to replace, and not departing from the spirit and scope of technical solution of the present invention, all should be encompassed in protection scope of the present invention.
Embodiment one: as shown in Figure 1-2, LONG WAVE INFRARED inflatable film reflecting mirror described in present embodiment, comprises Kapton 1, O-ring seal 2, aerating device 3, aluminium film 6, copper film 7, rain glass 8, valve 9, U-shaped pipe 10, inflator 11.
Inflatable film reflecting mirror is made up of two layers of polyimide film 1, and the first polyimide film layer 4 is transparent, and this tunic is first primary reflection surface of optical system primary mirror, and as the incidence window of incident beam; Second polyimide film layer 5 is reflectings surface, and this film surface is the primary reflection surface of primary mirror, and this reflecting surface is concave surface, and its front surface plates the aluminium film of the even equal thickness of one deck, rear surface copper plating film 7.
As shown in Figure 1, the left side of Kapton 1 is the first polyimide film layer 4, right side is the second polyimide film layer 5, realize being tightly connected by O-ring seal 2 between first polyimide film layer 4 and the second polyimide film layer 5, complete hermetically-sealed construction can be become, ensure that formed by the rear double-layer films of inflation, curved surface is oblate spheroid instead of sphere.A reserved air-filled pore on O-ring seal 2, be used for connecting gas-filled tube, gas-filled tube is installed rain glass 8, valve 9 and U-shaped pipe 10, first valve 9 is opened, inflated in gas-filled tube by inflator 11, judge aeration quantity size by rain glass 8 reading, then after the inflation of diaphragm seal structure terminates, whether closed by valve 9, carry out detection architecture leak gas by U-shaped pipe 10, the inflatable structure at this moment obtained is inflatable film reflector lens device.
In present embodiment, the wave band of incident light wave is 8-12 μm.
In present embodiment, the thickness of Kapton is 25 μm.
In present embodiment, the first polyimide film layer 4 is transparent, and it is as the projection window of incident beam, at film two plated surface anti-reflection film, increases transmissivity.
In present embodiment, the second polyimide film layer 5 is reflective operation faces, and the front and rear surfaces of the second polyimide film layer 5 plates two kinds of different metal films, respectively at front surface aluminizer 6, at rear surface copper plating film 7.
In present embodiment, the thickness of aluminium film 6 is uniform thickness.
In present embodiment, one side is coated with reflective aluminum film, and reflectivity is not less than 80%.
In present embodiment, the clear aperature size of film reflecting mirror is not less than 400mm.
In present embodiment, maximum 2 μm of copper plating film thickness.
Embodiment two: as shown in Figure 3, present embodiment and embodiment one unlike, described inflatable film reflecting mirror primary mirror parabola (i.e. the second polyimide film layer) face shape generation method is:
Step one, Kapton is fixed on thin film flattening device fixture on pretension, fixture adjusts film and makes its tempering.
Step 2, the film after flattening is divided into 10 equal-sized endless belt, and corresponding design annular blocks mask plate is used for blocking layering plated film.
Step 3, require the good thicknesses of layers of theory calculate in advance according to face shape, the thickness of each endless belt of copper film follows the equation that Henky-curve Curves meets:
I.e. Z
henky=-0.899 × w (0) (u
2-0.871u
4), u=2x/D, x are the radial distance of thin film center to optional position here, and D is the clear aperture of film reflecting mirror, and w (0) is the maximum offset at heart place in the film.
Step 4, film is put into vacuum coating equipment, and in coated surface, crystal oscillator is installed, then require the good thicknesses of layers of theory calculate in advance according to face shape, preplating is carried out to print.
Step 5, carry out thicknesses of layers control with rete controller, calculated value and actual coating film thickness are compared, then use penalty method to calibrate theoretical model, actual coating film thickness is reached or close to theory calculate film thickness.
The pellicular front shape obtained thus can be used for realizing inflating shape below in film reflector lens device and meets parabola requirement.
In present embodiment, what plated film machine adopted is vacuum ionic evaporation coating machine.
In present embodiment, film face type reconditioner flattens.
In present embodiment, film hangs over side, coating machine top, whole coating machine mounting disc axial rotation, ensures the homogeneity of plated film rete.
In present embodiment, during coating thin film, each endless belt completes plated film respectively, and the employing of all the other endless belt is blocked mask plate and blocked.
In present embodiment, the thickness of copper facing rete is with henky-curve curve setting after gas-filled film.The thickness of aluminium film is uniform thickness, and thickness is 1 μm.
In present embodiment, plated film order is for blocking plated film to layering from inside to outside in turn.
In present embodiment, thicknesses of layers controller in coating process, is adopted to control thin film coating thickness.
Embodiment three: the difference of present embodiment and embodiment two is: during plated film, thin layer layering plated film endless belt is not only confined to 10 rings, and the more precision of endless belt are higher.
Embodiment four: the difference of present embodiment and embodiment two is: film is placed on coating machine rotating disk, adopts turntable rotation mode to realize.
Embodiment five: the difference of present embodiment and embodiment two is: coating process crystal oscillator and sensor device carry out the control of coating film thickness.
Embodiment six: the difference of present embodiment and embodiment two is: coating process can adopt magnetron sputtering formula film plating process.
Embodiment seven: the difference of present embodiment and embodiment two is: coating process can adopt vacuum evaporation coating film method.
Claims (3)
1. LONG WAVE INFRARED inflatable film reflecting mirror main mirror face generation method, is characterized in that described main mirror face generates method step as follows:
Step one, the desirable paraboloid surface shape parameter of calculating inflatable film reflecting mirror;
Step 2, according to film reflector minute surface shape size, Kapton is at least divided into 10 impartial annulus, distributes coating film thickness to each annulus;
The method of step 3, utilization layering plated film, adopts the mode of blocking plated film from inside to outside to carry out preplating respectively;
Step 4, utilize thicknesses of layers instrument control thickness of coating, this thickness is exported and compares with the ideal thickness calculated, and use penalty method to calibrate theoretical model, actual coating film thickness is reached or close to theory calculate film thickness.
2. LONG WAVE INFRARED inflatable film reflecting mirror main mirror face generation method according to claim 1, before it is characterized in that described Kapton carries out plated film, flattens by face type reconditioner.
3. LONG WAVE INFRARED inflatable film reflecting mirror main mirror face generation method according to claim 1, is characterized in that described plated film mode adopts magnetron sputtering formula film plating process or vacuum evaporation coating film method.
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| CN104570176B (en) * | 2015-02-10 | 2016-08-24 | 哈尔滨工业大学 | A kind of inflated type film reflecting mirror and assembly tooling thereof and assembly method |
| CN104682170B (en) * | 2015-02-15 | 2017-07-14 | 中国科学院上海光学精密机械研究所 | The array laser gain media face type regulating and controlling mechanism of air pressure driving |
| CN113265881B (en) * | 2020-02-17 | 2022-05-20 | 北京化工大学 | Paraboloid-shaped polyimide/silver composite film and preparation method thereof |
| CN113265080B (en) * | 2020-02-17 | 2022-05-20 | 北京化工大学 | Paraboloidal surface silvered polyimide film and preparation method thereof |
| CN113265075B (en) * | 2020-02-17 | 2022-05-20 | 北京化工大学 | Paraboloid polyimide film and preparation method thereof |
| CN114179483A (en) * | 2021-12-24 | 2022-03-15 | 扬州众想科技绝缘材料有限公司 | Polyimide aluminizer and preparation method thereof |
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| FR2821289B1 (en) * | 2001-02-23 | 2003-05-09 | Mjfi | WHEEL, IN PARTICULAR FOR LIGHT VEHICLES, AND METHOD FOR MANUFACTURING THE SAME |
| CN101216569A (en) * | 2008-01-02 | 2008-07-09 | 姚福来 | Gas-filled type reflector |
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