CN103499830A - Method for measuring effective focus size of microfocus X-ray source - Google Patents
Method for measuring effective focus size of microfocus X-ray source Download PDFInfo
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- CN103499830A CN103499830A CN201310489357.6A CN201310489357A CN103499830A CN 103499830 A CN103499830 A CN 103499830A CN 201310489357 A CN201310489357 A CN 201310489357A CN 103499830 A CN103499830 A CN 103499830A
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Abstract
The invention discloses a method for measuring the effective focus size of a microfocus X-ray source. The method comprises the steps: firstly, placing a flat panel which is made of high-density materials such as tungsten, tungsten alloy and platinum and has stronger X-ray absorption capability at a position before a focus f, drilling a micropore with the diameter d (the diameter can be properly greater than the size of the focus f) at a position above the flat panel dead against the focus; placing a detector (or a film) at a position having distance g away from the micropore, so as to acquire the size D of an image, formed through the micropore, of the focus f; then keeping the distance between the focus f and the detector (or the film) unchanged, moving the flat panel to the detector (or the film) by small distance, and measuring the distance g' between the micropore and the detector (or the film) and the image size D' of the focus f; and finally calculating the size of the focus f according to the acquired data. The method is applicable to measurement on the effective focus size of a microfocus X-ray source with effective focus size of less than 50[mu]m and voltage of less than 225kV.
Description
Technical field
The present invention relates to the x-ray source field, particularly a kind of method of measuring the microfocus X-ray source Effective focus size.
Background technology
The X ray detection technique, as radiography techniques, DR, Industrial Computed Tomography etc., all trades and professions have been widely used in, not only at each industrial circles such as machinery, weapons, boats and ships, nuclear industry, Aeronautics and Astronautics, electronics, major contribution is arranged, also give birth to and apply in fields such as thing, medical science, agricultural and materialogies.
X-ray source is the vitals in x-ray detection system, and the physical dimension of its focus is one of the key factor that affects the quality of image.X-ray source focal spot size is less, and the geometric unsharpness of generation is also less, and image is more clear.Simultaneously, microfocus X-ray source can have larger image amplification ratio than conventional radiographic source, thereby the more ability of high detection tiny defect is arranged.Based on this advantage, the increasingly extensive use in micro-focus source should be in Non-Destructive Testing and the quality assessment of the high-tech sectors such as biology, electronics, new material.
The method that multiple measurement focal spot size is arranged both at home and abroad, as standard EN 12543 provides the measuring method of five kinds of focal spot sizes of the x-ray source for Non-Destructive Testing: scanning method (Scanningmethod), pin hole method (Pinholecameraradiographic method), slit method (Slit cameraradiographicmetho) d, edge method (Edgemethod), microfocus X-ray pipe Effective focus size measuring method (Measurementoftheeffectivefocalspotsizeofminian microfocusX-raytubes).Scanning method, pin hole method, slit method, edge method are for measuring the conventional ray source focus dimensional measurement that focal spot size is greater than 0.1mm.Microfocus X-ray pipe Effective focus size measuring method (Measurementofthe effectivfeocalspotsizeofminiandmicrofocuXs-raytubes) is based on the geometric unsharpness principle of ray source focus to the imaging of thin platinum silk, measures micro-focal spot size.Due to after the ray source focus size is less than 50 μ m, the geometric unsharpness of imaging is very little, simultaneously, and due to the edge of the thin platinum silk transition shade that also can be shaped itself, so in the gray scale of platinum silk is dissectd curve (as Fig. 4), the gray scale edge
that edge and geometric unsharpness by thin platinum silk itself forms jointly.Therefore there is defect in theory in this method itself, and many documents are also pointed out, the very large error of measurement result existence of this method.
Summary of the invention
In view of this, technical matters to be solved by this invention is to provide a kind of measuring method of microfocus X-ray source Effective focus size.
The object of the present invention is achieved like this:
A kind of method of measuring the microfocus X-ray source Effective focus size provided by the invention comprises the following steps:
Step 1: put the flat board of an energy absorption of x-rays in somewhere, focus f the place ahead, at it, over against the focus place, bore the micropore that a diameter is d;
Step 2: from dull and stereotyped distance for putting a detector or film in the g place;
Step 3: obtain focus f by the dimension D of the picture of micropore postforming;
Step 4: keep the distance of focus f and detector or film constant, flat board is moved to a bit of distance;
Step 5: measure flat board after mobile to detector or film apart from g ';
Step 6: measure the dimension D of focus f by the picture of micropore postforming ';
Step 7: calculate the size of focus f by step 1 to the data of obtaining in step 6.
Further, the calculating in described step 7 is carried out as follows:
Wherein, g means the distance between dull and stereotyped mobile front flat board and detector or film; G ' means the distance between dull and stereotyped mobile rear plate and detector or film; D means the size of the picture that dull and stereotyped mobile front focus f is shaped on detector or film by micropore; D ' means the size of dull and stereotyped mobile back focus f picture; D means the diameter of dull and stereotyped upper micropore.
Further, the micro-pore diameter d on described flat board is slightly larger than the size of focus f.
Further, the moving direction of described flat board is that flat board is moved to a bit of distance to detector or film direction.
Further, the size of the picture that focus f is shaped on detector or film by micropore, be using gray scale dissect edge gray-scale value in curve 10% as focus f by the dimension D of the picture of micropore postforming or the dimension D of dull and stereotyped mobile back focus f picture ' the Measured Boundary value.
Further, described flat board is a flat board of being made by tungsten, tungalloy or platinum high density material.
The invention has the advantages that: the present invention adopts twice micro-pore imaging to measure microfocus X-ray pipe Effective focus size method.The diameter of the micropore that adopts can be suitably large than focal spot size, and ray, by micropore, obtains the imaging of focus, then by geometric relationship, can calculate the size of focus f size.The invention provides a kind of microfocus X-ray source Effective focus size method of comparatively accurately measuring, overcome the large shortcoming of current micro-focus radiographic source Effective focus size measuring error.
The accompanying drawing explanation
In order to make the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing, the present invention is described in further detail, wherein:
Fig. 1 is dull and stereotyped and detector (or film) distance is the index path of g;
Fig. 2 moves a segment distance by flat board toward detector (or film) direction, and dull and stereotyped and detector (or film) distance is the index path of g ';
Fig. 3 is the method flow diagram of measuring the microfocus X-ray source Effective focus size;
Fig. 4 is that the gray scale of platinum silk image is dissectd curve.
Embodiment
Below with reference to accompanying drawing, the preferred embodiments of the present invention are described in detail; Should be appreciated that preferred embodiment is only for the present invention is described, rather than in order to limit the scope of the invention.
Embodiment 1
Fig. 1 is dull and stereotyped and detector (or film) distance is the index path of g, Fig. 2 moves a segment distance by flat board toward detector (or film) direction, dull and stereotyped and detector (or film) distance is the index path of g ', Fig. 3 is the method flow diagram of measuring the microfocus X-ray source Effective focus size, as shown in the figure: the measuring method of a kind of microfocus X-ray source focal spot size provided by the invention comprises the following steps:
Step 1: put one in somewhere, focus the place ahead and be manufactured with byer force by high density materials such as tungsten, tungalloy or platinum, absorb the flat board of ray ability, be drilled with the micropore that a diameter is d at it over against the focus place;
Step 2: from dull and stereotyped distance for putting a detector (or film) in the g place;
Step 3: obtain focus f by the dimension D of the picture of micropore postforming;
Step 4: keep the distance of focus f and detector (or film) constant, flat board is moved to a bit of distance;
Step 5: measure flat board after mobile to detector (or film) apart from g ';
Step 6: measure the dimension D of focus f by the picture of micropore postforming ';
Step 7: calculate the size of focus f by step 1 to the data of obtaining in step 6.
Calculating in described step 7 is carried out as follows:
Wherein, g means the distance between dull and stereotyped mobile front flat board and detector (or film); G ' means the distance between dull and stereotyped mobile rear plate and detector (or film); D means the size of the picture that dull and stereotyped mobile front focus f above is shaped at detector (or film) by micropore; D ' means the size of dull and stereotyped mobile back focus f picture; D means the diameter of dull and stereotyped upper micropore.
Micro-pore diameter d on described flat board can suitably be greater than the size of focus.
The moving direction of described flat board is that flat board is moved to a bit of distance to detector (or film) direction.
Described focus f is the size at the upper picture be shaped of detector (or film) by micropore, be using gray scale dissect edge gray-scale value in curve 10% as focus f by the dimension D of the picture of micropore postforming or the dimension D of dull and stereotyped mobile back focus f picture ' the Measured Boundary value, in the present embodiment, adopt using 8%-12% that gray scale dissects edge gray-scale value in curve as focus f by the dimension D of the picture of micropore postforming or the dimension D of dull and stereotyped mobile back focus f picture ' the Measured Boundary value.
Embodiment 2
The difference of the present embodiment and embodiment 1 only is:
Step 1: be H(the unknown in the focal point distance) locate to put a flat board, open a micropore over against the place of focus on flat board, the size in hole (d) can suitably be greater than the size of focus, then, from dull and stereotyped distance, for the g place, putting a detector (or film), obtains the dimension D of focus picture.The distance of focus and detector (or film) is L.Measure respectively the size of g, D, d;
Step 2: by geometric relationship, express the size of focal spot size f to the distance L of detector (or film) and d, g and D by focus; Fig. 1 is dull and stereotyped and detector (or film) distance is the index path of g, in this figure, has geometric relationship to have;
Because β is very little,
D≈(H+g)×β-f (1)
By (1) and (2), obtained:
Cause: L=H+g is obtained by (3):
Step 3: similar with step 1, keep the distance of L constant, flat board is moved to a bit of distance toward detector (or film) direction, now, dull and stereotyped to detector (or film) apart from being designated as g ', the dimension D of focus by micro-pore imaging ', the size d of micropore is constant;
Step 4: by geometric relationship, express the size of focal spot size f to the distance L of detector (or film) and d, g ' and D ' by focus; Fig. 2 moves a segment distance by flat board toward detector (or film) direction, and dull and stereotyped and detector (or film) distance is the index path of g ';
Because β ' is very little,
D′≈L(H′+g′)×β′-f (5)
By (5) and (6), obtained:
Cause: a L=H ' g ' is obtained by (3):
Step 5: two linear equation in two unknowns that are unknown number about focus f and focus to detector (or film) distance L by step 2 and 4 foundation, solving equations, can obtain the size of focus f;
In reality, because the X-ray tube inner structure is unclear, L is difficult to accurate measurement, but can obtain focal spot size by (4) and (8) formula, has avoided calculating by measuring L the size of focus.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, obviously, those skilled in the art can carry out various changes and modification and not break away from the spirit and scope of the present invention the present invention.Like this, if within of the present invention these are revised and modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention also is intended to comprise these changes and modification interior.
Claims (6)
1. a method of measuring the microfocus X-ray source Effective focus size is characterized in that: comprise the following steps:
Step 1: put the flat board of an energy absorption of x-rays in somewhere, focus f the place ahead, at it, over against the focus place, bore the micropore that a diameter is d;
Step 2: from dull and stereotyped distance for putting a detector or film in the g place;
Step 3: obtain focus f by the dimension D of the picture of micropore postforming;
Step 4: keep the distance of focus f and detector or film constant, flat board is moved to a bit of distance;
Step 5: measure flat board after mobile to detector or film apart from g ';
Step 6: measure the dimension D of focus f by the picture of micropore postforming ';
Step 7: calculate the size of focus f by step 1 to the data of obtaining in step 6.
2. the method for measurement microfocus X-ray source Effective focus size according to claim 1, it is characterized in that: the calculating in described step 7 is carried out as follows:
Wherein, g means the distance between dull and stereotyped mobile front flat board and detector or film; G ' means the distance between dull and stereotyped mobile rear plate and detector or film; D means the size of the picture that dull and stereotyped mobile front focus f is shaped on detector or film by micropore; D ' means the size of dull and stereotyped mobile back focus f picture; D means the diameter of dull and stereotyped upper micropore.
3. the method for measurement microfocus X-ray source Effective focus size according to claim 1, it is characterized in that: the micro-pore diameter on described flat board suitably is greater than the size of focus.
4. the method for measurement microfocus X-ray source Effective focus size according to claim 1, it is characterized in that: the moving direction of described flat board is that flat board is moved to a bit of distance to detector or film direction.
5. the method for measurement microfocus X-ray source Effective focus size according to claim 1, it is characterized in that: the size of the picture that focus f is shaped on detector or film by micropore, be using gray scale dissect edge gray-scale value in curve 10% as focus f by the dimension D of the picture of micropore postforming or the dimension D of dull and stereotyped mobile back focus f picture ' the Measured Boundary value.
6. the method for measurement microfocus X-ray source Effective focus size according to claim 1 is characterized in that: described flat board is a flat board of being made by tungsten, tungalloy or platinum high density material.
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Cited By (5)
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| CN106405621A (en) * | 2016-08-31 | 2017-02-15 | 兰州大学 | Focus size measuring method |
| CN106526654A (en) * | 2017-01-09 | 2017-03-22 | 中国工程物理研究院激光聚变研究中心 | Temporal-spatial resolution radiant flux diagnosis system |
| CN109269774A (en) * | 2018-09-17 | 2019-01-25 | 浙江万森电子科技有限公司 | Using the X-ray tube Microfocus X-ray tester of digital photographing technique |
| CN113587862A (en) * | 2021-06-22 | 2021-11-02 | 上海奕瑞光电子科技股份有限公司 | Device and method for measuring focus size of X-ray tube |
| CN115046505A (en) * | 2022-07-29 | 2022-09-13 | 重庆大学 | X-ray focal spot measuring device and method for high-energy electron linear accelerator |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106405621A (en) * | 2016-08-31 | 2017-02-15 | 兰州大学 | Focus size measuring method |
| CN106405621B (en) * | 2016-08-31 | 2019-01-29 | 兰州大学 | A kind of focal spot size measurement method |
| CN106526654A (en) * | 2017-01-09 | 2017-03-22 | 中国工程物理研究院激光聚变研究中心 | Temporal-spatial resolution radiant flux diagnosis system |
| CN106526654B (en) * | 2017-01-09 | 2023-08-04 | 中国工程物理研究院激光聚变研究中心 | Space-time resolution radiation flow diagnosis system |
| CN109269774A (en) * | 2018-09-17 | 2019-01-25 | 浙江万森电子科技有限公司 | Using the X-ray tube Microfocus X-ray tester of digital photographing technique |
| CN113587862A (en) * | 2021-06-22 | 2021-11-02 | 上海奕瑞光电子科技股份有限公司 | Device and method for measuring focus size of X-ray tube |
| CN115046505A (en) * | 2022-07-29 | 2022-09-13 | 重庆大学 | X-ray focal spot measuring device and method for high-energy electron linear accelerator |
| CN115046505B (en) * | 2022-07-29 | 2024-08-02 | 重庆大学 | High-energy electron linear accelerator X-ray focal spot measuring device and method |
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Inventor after: Zhou Rifeng Inventor after: Zhou Yaling Inventor before: Hou Wensheng Inventor before: Wu Xiaoying Inventor before: Xia Nan |
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Application publication date: 20140108 |