CN103499330B - Optical lead-out method for vertex normal of large-caliber concave non-spherical reflector - Google Patents
Optical lead-out method for vertex normal of large-caliber concave non-spherical reflector Download PDFInfo
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- CN103499330B CN103499330B CN201310471180.7A CN201310471180A CN103499330B CN 103499330 B CN103499330 B CN 103499330B CN 201310471180 A CN201310471180 A CN 201310471180A CN 103499330 B CN103499330 B CN 103499330B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C1/00—Measuring angles
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Abstract
The invention discloses an optical lead-out method for a vertex normal of a large-caliber concave non-spherical reflector. The method comprises the following steps: arranging a concave non-spherical surface in front of an optical interferometer which emits parallel light, and arranging a small-caliber standard spherical mirror at a position which is about 1/2 of vertex radius of the non-spherical surface away from the vertex of the non-spherical surface, the concave non-spherical surface, the optical interferometer and the small-caliber standard spherical mirror are coaxially arranged to be used for reflecting light rays reflected by the non-spherical mirror back to the interferometer; substituting beam wavefront data analyzed by the interferometer into optical design software for performing simulating calculation, and obtaining an included angle between the vertex normal of the non-spherical surface and parallel beams of the interferometer; aiming the parallel beams of the interferometer through a theodolite, and guiding the parallel beams to other devices which can characterize the direction; and continuously adjusting the concave non-spherical mirror and a small standard reflector thereof and analyzing and calculating through simulation software, and finally, precisely controlling an angle guided out of a vertex normal direction to be a second order. The method is simple and practicable, is high in precision and has very important application in adjustment and test aspects of spatial optical remote sensors.
Description
Technical field
The present invention relates to the method that a kind of heavy caliber recessed non-spherical reflector vertex normal optics is drawn, particularly adopt the method that optical interference techniques realizes.There is important application relating in the debuging and test of Reflective spatial optics remote sensor.
Background technology
The heavy caliber recessed non-spherical reflector vertex normal optics method of drawing is drawing precision has the precision of level second mainly make use of light wave wavefront coma that interferometer in optical system for testing receives to the recessed non-spherical reflector of heavy caliber relative to the highstrung characteristic of the tilt quantity of the parallel beam of interferometer outgoing, thus achieves the high-precision extraction of vertex normal.Existing technology one is whether the hot spot utilizing comparison to be reflected back by the recessed non-spherical reflector of heavy caliber judges at the center of interferometer CCD, and precision is subject to the restriction of human eye and CCD pixel dimension.Two is the modes being added displacement transducer by centrescope, measured lens is placed on centrescope, the displacement at displacement sensor mirror edges place, rotating table and adjust measured lens make the displacement measurement variable quantity of displacement transducer allow margin tolerance in, after reaching this requirement, the rotor shaft direction of turntable is exactly the vertex normal direction of measured lens, is finally drawn in the direction of turntable rotating shaft.This method weak point draws the restriction that precision is subject to the jumping of turntable end and footpath jumping precision, and the extraction precision of optical axis is generally about 1 '.
Summary of the invention
The technical matters that the present invention solves is: overcome the deficiencies in the prior art part, provide the method that a kind of heavy caliber recessed non-spherical reflector vertex normal optics is drawn; The light wave wavefront coma that the method uses interferometer to receive, to the highstrung characteristic of tilt quantity of tested recessed non-spherical reflector, utilizes optical design software simulation calculation, also has the high precision angle-measuring of transit, improves normal and draws precision.
Technical scheme of the present invention is: a kind of optical lead-out method for vertex normal of large-caliber concave non-spherical reflector, comprises the following steps:
1) optical interdferometer, standard spherical reflector, tested recessed non-spherical reflector, transit are from left to right coaxially placed successively, and the centre of sphere of standard spherical reflector overlaps with the focus of tested recessed non-spherical reflector;
2) pitching, the inclination of tested recessed non-spherical reflector is adjusted, tested recessed non-spherical reflector and standard spherical reflector is adjusted in level and vertical direction translation, the 5th, the 6 term system numerical value making optical interdferometer receive the Zernike coefficient of polynomial fitting of the Beam Wave-Front reflected by tested recessed non-spherical reflector are 0 ~ 0.04 λ, 7th, 8 term system numerical value are 0 ~ 0.02 λ, and wherein λ is the wavelength of the light that optical interdferometer sends;
3) the Zernike coefficient of polynomial fitting of the Beam Wave-Front reflected by tested recessed non-spherical reflector that receives of recording optically interferometer the 5th, 6 term coefficient and the 7th, 8 term coefficient occurrence, set up light path model, by the luffing angle of tested recessed non-spherical reflector, angle of inclination, and the level of tested recessed non-spherical reflector and standard spherical reflector, the translational movement of vertical direction is as variable, by the 5th of the Zernike coefficient of polynomial fitting at model emergent pupil place the, 6 term coefficient and the 7th, 8 term coefficient are optimized as Optimum Operation number, obtain tested recessed non-spherical reflector relative to the pitching in parallel beam direction of optical interdferometer outgoing and the actual angle of inclination, and the level of tested recessed non-spherical reflector relative to the parallel beam direction of optical interdferometer outgoing and the actual translational movement of vertical direction,
4) to step 3) optimize the tested recessed non-spherical reflector that obtains and judge relative to the pitching in parallel beam direction of optical interdferometer outgoing and the actual angle of inclination; If this actual angle does not meet normal draw precision threshold, then skip back to step 2); Until be met the angle that normal draws precision, and enter step 5);
5) transit is utilized to take aim at the parallel beam of optical interdferometer outgoing, the reading of record transit, and as the level in tested recessed non-spherical reflector vertex normal direction and luffing angle.
The present invention's beneficial effect is compared with prior art:
Along with the development of Space Remote Sensors, heavy caliber, long-focus, high-quality picture element become development trend.This means to have higher requirement to the precision of debuging of optical lens.Numerous reflective optic camera lens debug the vertex normal that benchmark is exactly its recessed aspheric surface primary mirror, the extraction precision in vertex normal direction has directly had influence on the quality of optical lens picture element, it draws precision, for high-quality the debuging of reflective optic camera lens is laid a good foundation to utilize this method ensure that.The heavy caliber recessed non-spherical reflector vertex normal optics method of drawing is drawing precision has the precision of level second mainly make use of light wave wavefront coma that interferometer in optical system for testing receives to the recessed non-spherical reflector of heavy caliber relative to the highstrung characteristic of the tilt quantity of the parallel beam of interferometer outgoing, therefore considerably increase normal and draw precision, this method has been applied in debuging of multiple heavy caliber reflective optic camera lens, for the various high-precision test of period provides benchmark, ensure that the quality debug.
Accompanying drawing explanation
Fig. 1 is the enforcement schematic diagram of the inventive method.
Embodiment
As shown in Figure 1, the hardware that the present invention adopts comprises optical interdferometer 1, standard spherical reflector 2, tested recessed non-spherical reflector 3, transit 4.
(1) optical interdferometer 1, tested recessed non-spherical reflector 3, standard spherical reflector 2, transit 4 are coaxially placed, and standard spherical reflector 2 centre of sphere overlaps with the focus of tested recessed non-spherical reflector 3.The parallel beam of paper using ruler measurement optical interdferometer 1 outgoing beats the value of left hand edge apart from tested recessed non-spherical reflector 3 left hand edge of the hot spot on tested recessed non-spherical reflector 3.The parallel beam of paper using ruler measurement optical interdferometer 1 outgoing beats the value of right hand edge apart from tested recessed non-spherical reflector 3 right hand edge of the hot spot on tested recessed non-spherical reflector 3.The parallel beam of paper using ruler measurement optical interdferometer 1 outgoing beats the value of coboundary apart from tested recessed non-spherical reflector 3 coboundary of the hot spot on tested recessed non-spherical reflector 3.The parallel beam of paper using ruler measurement optical interdferometer 1 outgoing beats the value of lower limb apart from tested recessed non-spherical reflector 3 lower limb of the hot spot on tested recessed non-spherical reflector 3.Ensure that the difference that the maximal value of these four measured values deducts minimum value is less than 5mm.
(2) pitching of tested recessed non-spherical reflector 3 is adjusted, tilt, level, the translation of vertical direction, the level of adjustment standard spherical reflector 2, the translation of vertical direction, the light spot shape received according to optical interdferometer 1 and position, the annulus mask concentric with hot spot is made in the software that optical interdferometer 1 is special, continue the pitching of the tested recessed non-spherical reflector 3 of adjustment, tilt, level, the translation of vertical direction, continue the level of adjustment standard spherical reflector 2, the translation of vertical direction, optical interdferometer 1 is made to receive the 5th of the Zernike coefficient of polynomial fitting of the Beam Wave-Front reflected, 6 term system numerical value are 0 ~ 0.04 λ, 7th, 8 term system numerical value are 0 ~ 0.02 λ, wherein λ is the wavelength of the light that optical interdferometer sends.(the relevant polynomial introduction of Zernike refers to " optical workshop inspection ").
(3) recording optically interferometer 1 receive the Zernike coefficient of polynomial fitting of the Beam Wave-Front reflected the 5th, 6 term coefficient and the 7th, 8 term coefficient occurrence.In Zemax, set up this light path model, utilize its optimizational function to calculate the actual misalignment rate of tested recessed non-spherical reflector 3 relative ideal light path.By the translation of the pitching of tested recessed non-spherical reflector 3, inclination, level, vertical direction, the level of standard spherical reflector 2, the translation of vertical direction are as variable, and to the 5th of the Zernike coefficient of polynomial fitting at model emergent pupil place, 6 term coefficient and the 7th, 8 term coefficient are optimized as Optimum Operation number.Finally optimize and obtain tested recessed non-spherical reflector 3 relative to the pitching in parallel beam direction of optical interdferometer 1 outgoing and the actual angle of inclination, the actual translational movement of level and vertical direction.
(4) if optimize the tested recessed non-spherical reflector 3 that obtains in step (3) relative to the pitching in parallel beam direction of optical interdferometer 1 outgoing and the actual angle of inclination, do not meet normal and draw precision threshold, then continue to perform step (2), optical interdferometer 1 is made to receive the 5th, 6 term system numerical value and the 7th, the 8 term system numerical value continuation reduction of the Zernike coefficient of polynomial fitting of the Beam Wave-Front reflected, until obtain the precision wanted.
(5), after obtaining the precision wanted, the parallel beam direction of optical interdferometer 1 outgoing just represents tested recessed non-spherical reflector 3 vertex normal direction.Utilize transit 4 to take aim at the parallel beam of optical interdferometer 1 outgoing, now the reading of transit 4 is exactly level and the luffing angle in tested recessed non-spherical reflector 3 vertex normal direction.
The unspecified part of the present invention belongs to general knowledge as well known to those skilled in the art.
Claims (1)
1. an optical lead-out method for vertex normal of large-caliber concave non-spherical reflector, is characterized in that comprising the following steps:
1) optical interdferometer (1), standard spherical reflector (2), tested recessed non-spherical reflector (3), transit (4) are from left to right coaxially placed successively, and the centre of sphere of standard spherical reflector (2) overlaps with the focus of tested recessed non-spherical reflector (3);
2) pitching, the inclination of tested recessed non-spherical reflector (3) is adjusted, tested recessed non-spherical reflector (3) and standard spherical reflector (2) is adjusted in level and vertical direction translation, the 5th, the 6 term system numerical value making optical interdferometer (1) receive the Zernike coefficient of polynomial fitting of the Beam Wave-Front reflected by tested recessed non-spherical reflector (3) are 0 ~ 0.04 λ, 7th, 8 term system numerical value are 0 ~ 0.02 λ, and wherein λ is the wavelength of the light that optical interdferometer (1) sends;
3) the Zernike coefficient of polynomial fitting of the Beam Wave-Front reflected by tested recessed non-spherical reflector (3) that receives of recording optically interferometer (1) the 5th, 6 term coefficient and the 7th, 8 term coefficient occurrence, set up light path model, by the luffing angle of tested recessed non-spherical reflector (3), angle of inclination, and the level of tested recessed non-spherical reflector (3) and standard spherical reflector (2), the translational movement of vertical direction is as variable, by the 5th of the Zernike coefficient of polynomial fitting at model emergent pupil place the, 6 term coefficient and the 7th, 8 term coefficient are optimized as Optimum Operation number, obtain tested recessed non-spherical reflector (3) relative to the pitching in parallel beam direction of optical interdferometer (1) outgoing and the actual angle of inclination, and the level of tested recessed non-spherical reflector (3) relative to the parallel beam direction of optical interdferometer (1) outgoing and the actual translational movement of vertical direction,
4) the tested recessed non-spherical reflector (3) obtained step 3) optimization judges relative to the pitching in parallel beam direction of optical interdferometer (1) outgoing and the actual angle of inclination; If this actual angle does not meet normal draw precision threshold, then skip back to step 2); Until be met the angle that normal draws precision, and enter step 5);
5) transit (4) is utilized to take aim at the parallel beam of optical interdferometer (1) outgoing, the reading of record transit, and as the level in tested recessed non-spherical reflector (3) vertex normal direction and luffing angle.
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| AT515521B1 (en) * | 2014-07-23 | 2015-10-15 | Trumpf Maschinen Austria Gmbh | Bending angle measuring device and method for measuring a bending angle by means of the bending angle measuring device |
| CN108132042A (en) * | 2017-12-11 | 2018-06-08 | 北京空间机电研究所 | High precision angle-measuring method during a kind of coaxial reflective system adjustment |
| CN108151626B (en) * | 2018-01-19 | 2023-11-28 | 天活松林光学（广州）有限公司 | Spherical surface normal angle quick measuring device of spherical prism |
| CN108761750B (en) * | 2018-08-20 | 2023-07-21 | 中国科学院上海技术物理研究所 | Search and tracking integrated camera |
| CN109613711B (en) * | 2018-12-29 | 2021-03-30 | 深圳航星光网空间技术有限公司 | Method and device for leading out optical axis of emergent light beam of optical antenna |
| CN110554512B (en) * | 2019-08-16 | 2021-09-07 | 北京空间机电研究所 | High-precision secondary off-axis ellipsoidal reflector optical axis leading-out method and optical system thereof |
| CN112525071B (en) * | 2020-11-27 | 2022-08-16 | 南京理工大学 | Method for inhibiting non-uniformity influence of optical material in large-aperture interferometer |
| CN112596259B (en) * | 2020-12-18 | 2022-08-12 | 北京空间机电研究所 | High-precision off-axis aspheric reflector optical axis leading-out method and system |
| CN117091532A (en) * | 2023-08-25 | 2023-11-21 | 同济大学 | Absolute measurement device and method for aspheric surface high-precision interferometer |
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| WO2008055060A2 (en) * | 2006-10-27 | 2008-05-08 | Zygo Corporation | Vibration resistant interferometry |
| CN101261183B (en) * | 2008-04-15 | 2010-09-15 | 中国科学院光电技术研究所 | Heavy caliber aspherical mirror checking system |
| CN103335610B (en) * | 2013-07-18 | 2016-04-27 | 中国科学院光电技术研究所 | The detection system of large-caliber convex high order aspheric surface |
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