CN103499307A - Paraboloid symmetry measuring device through laser interference - Google Patents
Paraboloid symmetry measuring device through laser interference Download PDFInfo
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- CN103499307A CN103499307A CN201310417959.0A CN201310417959A CN103499307A CN 103499307 A CN103499307 A CN 103499307A CN 201310417959 A CN201310417959 A CN 201310417959A CN 103499307 A CN103499307 A CN 103499307A
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Abstract
The invention discloses a paraboloid symmetry measuring device through laser interference. The paraboloid symmetry measuring device through laser interference comprises a test carrying portion and a detection portion, wherein the test carrying portion comprises a standard reflector unit and an intercepting screen used for receiving interference patterns, the detection portion comprises a grating screen and a laser columnar light source fixed to the grating screen, the laser columnar light source is arranged on a middle symmetry plane of the grating screen, a reflector unit to be measured and the standard reflector unit are symmetrically installed about the middle symmetry plane, a plurality of pairs of gratings which are parallel to one another and can be independently opened and be independently closed are symmetrically arranged on the grating screen about the middle symmetry plane, one pair of gratings which are mutually symmetrical correspond to the same curvature fragments on the reflector unit to be measured and the standard reflector unit respectively, and some pairs of gratings which are mutually symmetrical correspond to different curvature fragments on mirror surfaces respectively in sequence. Due to the fact that a groove type parabolic reflector and the principle of light reflection, the principle of light diffraction and the principle of light interference of two-slit interference are used, the purpose that errors of a curved surface are detected fragment by fragment through symmetry reflection is achieved.
Description
Technical field
The present invention relates to a kind of curved surface of reflector measurement mechanism, especially a kind of laser interference parabola symmetrical measurement device.
Background technology
As the solar electrical energy generation industry of the important component part of new forms of energy industry, condensing thermal power generation is the project with very large potentiality and economic technology competitive edge, and following development prospect is wide.The condenser mirror assembly of its device is the use amount maximum in building the power house equipment needed thereby, in large-scale mirror assembly production run, how to make the online speed detected and the speed manufactured a finished product be complementary, effectively improve the certified products sorting rate of whole system when not affecting production output, become the key of problem.The general curved surface inspection normally generaI investigation of whole curved surface is that the scanning that face is pursued in pointwise detects, although when every one side is used not necessarily very long accumulative total to add up mutually be exactly temporal waste.
Summary of the invention
The problem existed for prior art, the object of the present invention is to provide a kind of simple in structure, can utilize the mirror unit symmetry to the unit laser interference parabola symmetrical measurement device that curved surface carries out the manufacturing accuracy measurement piecemeal.
For achieving the above object, laser interference parabola symmetrical measurement device of the present invention, comprise test equipped section and test section, wherein, the test equipped section comprises the standard reflection mirror unit and, for receiving the intercepting screen of interference pattern, test section comprises grating screen and the laser column light source be fixed thereon, and laser column light source is arranged on the middle plane of symmetry of grating screen, and mirror unit to be measured and standard reflection mirror unit are also installed so that the middle plane of symmetry is symmetrical; Take the middle plane of symmetry as symmetrical, be provided with some gratings to being parallel to each other and can independently opening and closing on grating screen, a pair of symmetrical grating corresponds respectively to curvature fragment identical on mirror unit to be measured, standard reflection mirror unit, some to symmetrical grating respectively successively corresponding to the different curvature fragment on minute surface; Each curvature fragment reflected light forms interference fringe or picture after seeing through grating on the intercepting screen, according to the position of striped symmetry or picture, judges, and determines mirror unit to be measured and the standard reflection mirror unit Machining of Curved Surface error on the same curvature fragment.
Further, described standard reflection mirror unit, mirror unit to be measured all are fixedly mounted on mirror support and form paraboloidal two the symmetrical reflection lobes of cylindricality.
Further, described grating screen is parallel to each other and is equipped on carrying platform with the intercepting screen, and carrying platform can be done three dimensions adjustment location.
Further, the setting of described laser column light source center overlaps with the focal axis of described standard reflection mirror unit, mirror unit to be measured, and its luminescent spectrum can be preset adjusting.
Further, described grating screen is set to the extinction face towards the one side of described standard reflection mirror unit, and the center line of described grating is arranged in the described middle plane of symmetry, and area is greater than and covers the catoptron opening.
Further, the emission spectrum of described laser column light source, the raster density on described grating screen and slit width, described grating screen are pressed the corresponding settings of principle condition such as two-slit interference, single slit diffraction and pinhole imaging system with the distance between described intercepting screen.
Further, described intercepting screen arranges several laser frequency spectrum power sensing unit towards a side of described grating screen, and the corresponding scale mark of arranging along the focal axis direction of groove type paraboloid that arranges.
Further, described measurement mechanism is arranged in darkroom and works.
Light reflection, diffraction and the principle of interference of the present invention's application groove type paraboloid catoptron, two-slit interference, the laser cylindrical wave produces parallel beam by two semi-symmetric mirror unit reflections, then by pursuing on grating screen, slit is interfered and above produces striped in the intercepting screen, distribute to judge the mirror unit to be measured difference of curved surface and standard piecemeal according to the symmetry of this clause and power, to reach by symmetry, reflect the purpose that detects piecemeal wrap-around error.
The accompanying drawing explanation
Fig. 1 is cross-sectional view of the present invention.
Embodiment
Below, with reference to accompanying drawing, the present invention is more fully illustrated, shown in the drawings of exemplary embodiment of the present invention.Yet the present invention can be presented as multiple multi-form, and should not be construed as the exemplary embodiment that is confined to narrate here.But, these embodiment are provided, thereby make the present invention comprehensively with complete, and scope of the present invention is fully conveyed to those of ordinary skill in the art.
For ease of explanation, here can use such as " on ", the space relative terms such as D score " left side " " right side ", the relation for element shown in key diagram or feature with respect to another element or feature.It should be understood that except the orientation shown in figure, spatial terminology is intended to comprise the different azimuth of device in using or operating.For example, if the device in figure is squeezed, be stated as the element that is positioned at other elements or feature D score will be positioned at other elements or feature " on ".Therefore, the exemplary term D score can comprise upper and lower orientation both.Device can otherwise be located (90-degree rotation or be positioned at other orientation), and the relative explanation in space used here can correspondingly be explained.
As shown in Figure 1, laser interference parabola symmetrical measurement device of the present invention, comprise test equipped section and test section, wherein, the test equipped section comprises mirror support 2, intercepting screen 9 and the standard reflection mirror unit 8 for fixing mirror unit 4 to be measured, while testing in darkroom, standard reflection mirror unit 8 and mirror unit to be measured 4 are installed on respectively on mirror support 2 and form paraboloidal two the symmetrical reflection lobes of cylindricality.Test section comprises grating screen 7 and the laser column light source 3 be fixed thereon, and grating screen 7 is parallel to each other and is equipped on carrying platform 10 with the intercepting screen 9 that receives interference pattern, and carrying platform 10 can be done three dimensions adjustment location.The center of laser column light source 3 overlaps with slot type catoptron focal axis, and its luminescent spectrum is set to default adjustable.
On grating screen 7, take its center line as symmetrical, be provided with some gratings 6 to being parallel to each other and can independently opening and closing.A pair of symmetrical grating 6 corresponds respectively to curvature fragment identical on mirror unit 4 to be measured, standard reflection mirror unit 8.Some to symmetrical grating 6 respectively successively corresponding to the different curvature fragment on minute surface.Mirror unit 4 to be measured is also installed with the middle plane of symmetry 1 symmetry with standard reflection mirror unit 8.
When measuring, a pair of symmetrical grating 6 is opened simultaneously or closes simultaneously, thereby measure the Machining of Curved Surface situation of same curvature fragment on mirror unit 4 to be measured, standard reflection mirror unit 8, to obtain this curvature fragment Machining of Curved Surface error on mirror unit 4 to be measured.
Grating screen 7 is set to the extinction face towards the one side of standard reflection mirror unit 8, and in the middle of the center line of grating screen 7 is arranged on, in the plane of symmetry 1, area is greater than and covers slot type catoptron opening.
Intercepting screen 9 sides towards grating screen 7 arrange several laser frequency spectrum power sensing unit (not shown), and the corresponding scale mark (not shown) of arranging along the focal axis direction of groove type paraboloid that arranges.
Principle of work of the present invention and implementation process explanation: as shown in Figure 1, apparatus of the present invention are arranged at ground, darkroom 11.
The first step, standard reflection mirror unit 8 and mirror unit to be measured 4 are installed on respectively to paraboloidal two the symmetrical reflection lobes of mirror support 2 formation cylindricality, by adjusting carrying platform 10, make grating screen 7 and the intercepting screen 9 middle planes of symmetry 1 perpendicular to two symmetrical reflection lobes;
Second step, opening laser column light source 3 adjusts luminous frequency spectrum and controls the successively opening and closing of grating 6 on grating screen 7, make light (arrow 5) through standard reflection mirror unit 8 and mirror unit to be measured 4 reflections, through after grating screen 7, on intercepting screen 9, forming striped or imaging;
The 3rd step, observe interference fringe or picture on intercepting screen 9, position according to striped symmetry or picture judges, determine mirror unit 4 to be measured and the Machining of Curved Surface error of standard reflection mirror unit 8 on the same curvature fragment, and detect successively the different curvature fragment on minute surface, by contrast detection successively, obtain the whole Machining of Curved Surface error of mirror unit 4 to be measured.
Claims (8)
1. laser interference parabola symmetrical measurement device, it is characterized in that, this measurement mechanism comprises test equipped section and test section, wherein, the test equipped section comprises the standard reflection mirror unit and, for receiving the intercepting screen of interference pattern, test section comprises grating screen and the laser column light source be fixed thereon, and laser column light source is arranged on the middle plane of symmetry of grating screen, and mirror unit to be measured and standard reflection mirror unit are also installed so that the middle plane of symmetry is symmetrical; Take the middle plane of symmetry as symmetrical, be provided with some gratings to being parallel to each other and can independently opening and closing on grating screen, a pair of symmetrical grating corresponds respectively to curvature fragment identical on mirror unit to be measured, standard reflection mirror unit, some to symmetrical grating respectively successively corresponding to the different curvature fragment on minute surface; Each curvature fragment reflected light forms interference fringe or picture after seeing through grating on the intercepting screen, according to the position of striped symmetry or picture, judges, and determines mirror unit to be measured and the standard reflection mirror unit Machining of Curved Surface error on the same curvature fragment.
2. laser interference parabola symmetrical measurement device as claimed in claim 1, is characterized in that, described standard reflection mirror unit, mirror unit to be measured all are fixedly mounted on mirror support and form paraboloidal two the symmetrical reflection lobes of cylindricality.
3. laser interference parabola symmetrical measurement device as claimed in claim 1, is characterized in that, described grating screen is parallel to each other and is equipped on carrying platform with the intercepting screen, and carrying platform can be done three dimensions adjustment location.
4. laser interference parabola symmetrical measurement device as claimed in claim 1, is characterized in that, the setting of described laser column light source center overlaps with the focal axis of described standard reflection mirror unit, mirror unit to be measured, and its luminescent spectrum can be preset adjusting.
5. laser interference parabola symmetrical measurement device as claimed in claim 1, it is characterized in that, described grating screen is set to the extinction face towards the one side of described standard reflection mirror unit, and the center line of described grating is arranged in the described middle plane of symmetry, and area is greater than and covers the catoptron opening.
6. laser interference parabola symmetrical measurement device as claimed in claim 1, it is characterized in that, the emission spectrum of described laser column light source, the raster density on described grating screen and slit width, described grating screen are pressed the corresponding settings of principle condition such as two-slit interference, single slit diffraction and pinhole imaging system with the distance between described intercepting screen.
7. laser interference parabola symmetrical measurement device as claimed in claim 1, it is characterized in that, described intercepting screen arranges several laser frequency spectrum power sensing unit towards a side of described grating screen, and the corresponding scale mark of arranging along the focal axis direction of groove type paraboloid that arranges.
8. laser interference parabola symmetrical measurement device as claimed in claim 1, is characterized in that, described measurement mechanism is arranged in darkroom works.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310417959.0A CN103499307B (en) | 2013-09-13 | 2013-09-13 | Laser interference parabola symmetrical measurement device |
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| CN201310417959.0A CN103499307B (en) | 2013-09-13 | 2013-09-13 | Laser interference parabola symmetrical measurement device |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0505623B1 (en) * | 1991-03-27 | 1996-01-31 | Rockwell International Corporation | Off-axis mirror alignment |
| CN102374851A (en) * | 2011-09-22 | 2012-03-14 | 西安工业大学 | Real-time partial zero compensation optical aspheric surface profile detection method |
| CN102589462A (en) * | 2012-01-04 | 2012-07-18 | 西安工业大学 | Heavy-caliber paraboloid measurement system |
| CN103196391A (en) * | 2013-04-16 | 2013-07-10 | 北京理工大学 | Quick surface shape detection method of annular concave aspheric surface near to paraboloid |
| CN203672332U (en) * | 2013-09-13 | 2014-06-25 | 中海阳能源集团股份有限公司 | Laser interference paraboloid symmetry measuring device |
-
2013
- 2013-09-13 CN CN201310417959.0A patent/CN103499307B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0505623B1 (en) * | 1991-03-27 | 1996-01-31 | Rockwell International Corporation | Off-axis mirror alignment |
| CN102374851A (en) * | 2011-09-22 | 2012-03-14 | 西安工业大学 | Real-time partial zero compensation optical aspheric surface profile detection method |
| CN102589462A (en) * | 2012-01-04 | 2012-07-18 | 西安工业大学 | Heavy-caliber paraboloid measurement system |
| CN103196391A (en) * | 2013-04-16 | 2013-07-10 | 北京理工大学 | Quick surface shape detection method of annular concave aspheric surface near to paraboloid |
| CN203672332U (en) * | 2013-09-13 | 2014-06-25 | 中海阳能源集团股份有限公司 | Laser interference paraboloid symmetry measuring device |
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| CN103499307B (en) | 2016-04-06 |
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