CN103499307B - Laser interference parabola symmetrical measurement device - Google Patents
Laser interference parabola symmetrical measurement device Download PDFInfo
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- CN103499307B CN103499307B CN201310417959.0A CN201310417959A CN103499307B CN 103499307 B CN103499307 B CN 103499307B CN 201310417959 A CN201310417959 A CN 201310417959A CN 103499307 B CN103499307 B CN 103499307B
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Abstract
The invention discloses a kind of laser interference parabola symmetrical measurement device, comprise test equipped section and test section, wherein, test equipped section comprises standard reflection mirror unit and the intercepting screen for receiving interference pattern, the laser column light source that test section comprises grating screen and is fixed thereon, laser column light source is arranged on the intermediate symmetry face of grating screen, and mirror unit to be measured and standard reflection mirror unit are also installed with intermediate symmetry face symmetry; With intermediate symmetry face for symmetry, grating screen is provided with some to be parallel to each other and can the grating of independent opening and closing, a pair symmetrical grating corresponds respectively to curvature fragment identical on mirror unit to be measured, standard reflection mirror unit, some different curvature fragments be corresponding in turn on minute surface symmetrical grating.The light reflection of the present invention's application groove type parabolic mirror, two-slit interference, diffraction and principle of interference, to be reached through the object that symmetric reflective detects wrap-around error piecemeal.
Description
Technical field
The present invention relates to a kind of curved surface of reflector measurement mechanism, especially a kind of laser interference parabola symmetrical measurement device.
Background technology
As the solar electrical energy generation industry of the important component part of new forms of energy industry, condensing thermal power generation is the project with very large potentiality and economic technology competitive edge, and following development prospect is wide.Light gathering reflector mirror assembly use amount in the equipment needed thereby of construction power house of its device is maximum, in large-scale mirror assembly production run, the speed how making on-line checkingi and the speed manufactured a finished product match, namely while not affecting production output, effectively improve the certified products sorting rate of whole system, become the key of problem.The generaI investigation of the normally whole curved surface of general curved surface inspection and pointwise by the Scanning Detction in face, although when every one side is used not necessarily very long accumulative adding up mutually be exactly temporal waste.
Summary of the invention
For prior art Problems existing, the object of the present invention is to provide a kind of structure simple, can utilize mirror unit symmetry to unit piecemeal curved surface carry out the laser interference parabola symmetrical measurement device of manufacturing accuracy measurement.
For achieving the above object, laser interference parabola symmetrical measurement device of the present invention, comprise test equipped section and test section, wherein, test equipped section comprises standard reflection mirror unit and the intercepting screen for receiving interference pattern, the laser column light source that test section comprises grating screen and is fixed thereon, and laser column light source is arranged on the intermediate symmetry face of grating screen, further, mirror unit to be measured and standard reflection mirror unit are also installed with intermediate symmetry face symmetry; With intermediate symmetry face for symmetry, grating screen is provided with some to be parallel to each other and can the grating of independent opening and closing, a pair symmetrical grating corresponds respectively to curvature fragment identical on mirror unit to be measured, standard reflection mirror unit, some different curvature fragments be corresponding in turn on minute surface symmetrical grating; Each curvature fragment reflected light forms interference fringe or picture through after grating on intercepting screen, and the position according to Fringe symmetry or picture judges, and determines mirror unit to be measured and the standard reflection mirror unit Machining of Curved Surface error in same curvature fragment.
Further, described standard reflection mirror unit, mirror unit to be measured are all fixedly mounted on mirror support and form paraboloidal two the symmetric reflective lobes of cylindricality.
Further, described grating screen is parallel to each other with intercepting screen and is equipped on carrying platform, and carrying platform can do three dimensions adjustment location.
Further, described laser column light source center arranges and overlaps with the focal axis of described standard reflection mirror unit, mirror unit to be measured, and its luminescent spectrum can preset adjustment.
Further, described grating screen is set to extinction face towards the one side of described standard reflection mirror unit, and the center line of described grating is arranged in described intermediate symmetry face, and area is greater than and covers catoptron opening.
Further, principle condition is corresponding arranges by two-slit interference, single slit diffraction and pinhole imaging system etc. for the distance between the raster density on the emission spectrum of described laser column light source, described grating screen and slit width, described grating screen shield with described intercepting.
Further, the described screen that intercepts arranges several laser frequency spectrum power sensing unit towards the side of described grating screen, and correspondence arranges the scale mark that the focal axis direction along groove type paraboloid arranges.
Further, described measurement mechanism is arranged in darkroom and works.
The light reflection of the present invention's application groove type parabolic mirror, two-slit interference, diffraction and principle of interference, laser cylindrical wave produces parallel beam by two semi-symmetric mirror unit reflections, then by grating screen by slit is interfered and in intercepting screen on produce striped, the difference of mirror unit to be measured curved surface and standard is piecemeal judged, to be reached through the object that symmetric reflective detects wrap-around error piecemeal according to the symmetry of this provision and power distribution.
Accompanying drawing explanation
Fig. 1 is cross-sectional view of the present invention.
Embodiment
Below, with reference to accompanying drawing, the present invention is more fully illustrated, shown in the drawings of exemplary embodiment of the present invention.But the present invention can be presented as multiple multi-form, and should not be construed as the exemplary embodiment being confined to describe here.But, these embodiments are provided, thus make the present invention comprehensively with complete, and scope of the present invention is fully conveyed to those of ordinary skill in the art.
For ease of illustrating, here can use such as " on ", the space relative terms such as D score " left side " " right side ", for illustration of the element of shown in figure or the feature relation relative to another element or feature.It should be understood that except the orientation shown in figure, spatial terminology is intended to comprise device different azimuth in use or operation.Such as, if the device in figure is squeezed, be stated as the element being positioned at other elements or feature D score will be positioned at other elements or feature " on ".Therefore, exemplary term D score can comprise upper and lower both orientation.Device can otherwise be located (90-degree rotation or be positioned at other orientation), and space used here illustrates relatively can correspondingly explain.
As shown in Figure 1, laser interference parabola symmetrical measurement device of the present invention, comprise test equipped section and test section, wherein, test equipped section comprises mirror support 2, intercepting screen 9 and standard reflection mirror unit 8 for fixing mirror unit 4 to be measured, when testing in darkroom, standard reflection mirror unit 8 and mirror unit to be measured 4 are installed on respectively on mirror support 2 and form paraboloidal two the symmetric reflective lobes of cylindricality.The laser column light source 3 that test section comprises grating screen 7 and is fixed thereon, grating screen 7 and the intercepting receiving interference pattern shields 9 and are parallel to each other and are equipped on carrying platform 10, and carrying platform 10 can do three dimensions adjustment and locate.The center of laser column light source 3 overlaps with slot type catoptron focal axis, and its luminescent spectrum is set to default adjustable.
On grating screen 7 with its center line be symmetrical, be provided with some to be parallel to each other and can the grating 6 of independent opening and closing.A pair symmetrical grating 6 corresponds respectively to curvature fragment identical on mirror unit 4 to be measured, standard reflection mirror unit 8.Some different curvature fragments that symmetrical grating 6 is corresponding in turn on minute surface.Mirror unit 4 to be measured and standard reflection mirror unit 8 are also installed with intermediate symmetry face 1 symmetry.
When measuring, a pair symmetrical grating 6 is opened simultaneously or closes simultaneously, thus measure the Machining of Curved Surface situation of same curvature fragment on mirror unit 4 to be measured, standard reflection mirror unit 8, to obtain this curvature fragment Machining of Curved Surface error on mirror unit 4 to be measured.
Grating screen 7 is set to extinction face towards the one side of standard reflection mirror unit 8, and the center line of grating screen 7 is arranged in intermediate symmetry face 1, and area is greater than and covers slot type catoptron opening.
Intercept screen 9 and several laser frequency spectrum power sensing unit (not shown) are set towards the side of grating screen 7, and correspondence arranges the scale mark (not shown) that the focal axis direction along groove type paraboloid arranges.
Principle of work of the present invention and implementation process illustrate: as shown in Figure 1, apparatus of the present invention are arranged at ground, darkroom 11.
The first step, standard reflection mirror unit 8 and mirror unit to be measured 4 are installed on respectively mirror support 2 and form paraboloidal two the symmetric reflective lobes of cylindricality, by adjustment carrying platform 10, make grating screen 7 and intercept the intermediate symmetry face 1 of screen 9 perpendicular to two symmetric reflective lobes;
Second step, open laser column light source 3 and adjust luminous frequency spectrum and the grating 6 controlled on grating screen 7 successively opens and closes, light (arrow 5) is reflected through standard reflection mirror unit 8 and mirror unit to be measured 4, on intercepting screen 9, forms striped or imaging through after grating screen 7;
3rd step, observe the interference fringe on intercepting screen 9 or picture, position according to Fringe symmetry or picture judges, determine mirror unit 4 to be measured and the Machining of Curved Surface error of standard reflection mirror unit 8 in same curvature fragment, and the different curvature fragment detected successively on minute surface, detected by contrast successively, obtain the overall Machining of Curved Surface error of mirror unit 4 to be measured.
Claims (8)
1. laser interference parabola symmetrical measurement device, it is characterized in that, this measurement mechanism comprises test equipped section and test section, wherein, test equipped section comprises standard reflection mirror unit and the intercepting screen for receiving interference pattern, the laser column light source that test section comprises grating screen and is fixed thereon, and laser column light source is arranged on the intermediate symmetry face of grating screen, further, mirror unit to be measured and standard reflection mirror unit are also installed with intermediate symmetry face symmetry; With intermediate symmetry face for symmetry, grating screen is provided with some to be parallel to each other and can the grating of independent opening and closing, a pair symmetrical grating corresponds respectively to curvature fragment identical on mirror unit to be measured, standard reflection mirror unit, some different curvature fragments be corresponding in turn on minute surface symmetrical grating; Each curvature fragment reflected light forms interference fringe or picture through after grating on intercepting screen, and the position according to Fringe symmetry or picture judges, and determines mirror unit to be measured and the standard reflection mirror unit Machining of Curved Surface error in same curvature fragment.
2. laser interference parabola symmetrical measurement device as claimed in claim 1, it is characterized in that, described standard reflection mirror unit, mirror unit to be measured are all fixedly mounted on mirror support and form paraboloidal two the symmetric reflective lobes of cylindricality.
3. laser interference parabola symmetrical measurement device as claimed in claim 1, is characterized in that, described grating screen is parallel to each other with intercepting screen and is equipped on carrying platform, and carrying platform can do three dimensions adjustment location.
4. laser interference parabola symmetrical measurement device as claimed in claim 1, is characterized in that, described laser column light source center arranges and overlaps with the focal axis of described standard reflection mirror unit, mirror unit to be measured, and its luminescent spectrum can preset adjustment.
5. laser interference parabola symmetrical measurement device as claimed in claim 1, it is characterized in that, described grating screen is set to extinction face towards the one side of described standard reflection mirror unit, and the center line of described grating is arranged in described intermediate symmetry face, and area is greater than and covers catoptron opening.
6. laser interference parabola symmetrical measurement device as claimed in claim 1, it is characterized in that, the distance between the raster density on the emission spectrum of described laser column light source, described grating screen and slit width, described grating screen shield with described intercepting is by two-slit interference, single slit diffraction and pinhole imaging system principle condition is corresponding arranges.
7. laser interference parabola symmetrical measurement device as claimed in claim 1, it is characterized in that, the described screen that intercepts arranges several laser frequency spectrum power sensing unit towards the side of described grating screen, and correspondence arranges the scale mark that the focal axis direction along groove type paraboloid arranges.
8. laser interference parabola symmetrical measurement device as claimed in claim 1, it is characterized in that, described measurement mechanism is arranged in darkroom and works.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310417959.0A CN103499307B (en) | 2013-09-13 | 2013-09-13 | Laser interference parabola symmetrical measurement device |
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| CN201310417959.0A CN103499307B (en) | 2013-09-13 | 2013-09-13 | Laser interference parabola symmetrical measurement device |
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| CN103499307A CN103499307A (en) | 2014-01-08 |
| CN103499307B true CN103499307B (en) | 2016-04-06 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0505623B1 (en) * | 1991-03-27 | 1996-01-31 | Rockwell International Corporation | Off-axis mirror alignment |
| CN102374851A (en) * | 2011-09-22 | 2012-03-14 | 西安工业大学 | Real-time partial zero compensation optical aspheric surface profile detection method |
| CN102589462A (en) * | 2012-01-04 | 2012-07-18 | 西安工业大学 | Heavy-caliber paraboloid measurement system |
| CN103196391A (en) * | 2013-04-16 | 2013-07-10 | 北京理工大学 | Quick surface shape detection method of annular concave aspheric surface near to paraboloid |
| CN203672332U (en) * | 2013-09-13 | 2014-06-25 | 中海阳能源集团股份有限公司 | Laser interference paraboloid symmetry measuring device |
-
2013
- 2013-09-13 CN CN201310417959.0A patent/CN103499307B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0505623B1 (en) * | 1991-03-27 | 1996-01-31 | Rockwell International Corporation | Off-axis mirror alignment |
| CN102374851A (en) * | 2011-09-22 | 2012-03-14 | 西安工业大学 | Real-time partial zero compensation optical aspheric surface profile detection method |
| CN102589462A (en) * | 2012-01-04 | 2012-07-18 | 西安工业大学 | Heavy-caliber paraboloid measurement system |
| CN103196391A (en) * | 2013-04-16 | 2013-07-10 | 北京理工大学 | Quick surface shape detection method of annular concave aspheric surface near to paraboloid |
| CN203672332U (en) * | 2013-09-13 | 2014-06-25 | 中海阳能源集团股份有限公司 | Laser interference paraboloid symmetry measuring device |
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| CN103499307A (en) | 2014-01-08 |
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