CN103489943A - Terahertz absorption layer of carbon nano tube and metamaterial composite structure and preparation method of terahertz absorption layer - Google Patents
Terahertz absorption layer of carbon nano tube and metamaterial composite structure and preparation method of terahertz absorption layer Download PDFInfo
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract
The invention discloses a terahertz absorption layer of a carbon nano tube and metamaterial composite structure and a preparation method of the terahertz absorption layer. The terahertz absorption layer sequentially comprises a top absorption layer, a dielectric layer, a metal reflection layer and a carbon nano tube film layer from top to bottom. According to special optical properties of the carbon nano tube film and the absorption rate close to 100 percent of the metamaterial composite structure on terahertz radiation, the absorption rate of a detection unit on terahertz waveband radiation is obviously enhanced, and the terahertz detection performance of a detector is improved. Meanwhile, because the carbon nano tube has high thermal conductivity, the absorbed heat energy can be rapidly transmitted to the detection unit, and the response speed of the detector is improved.
Description
Technical field
The invention belongs to terahertz detection and technical field of imaging, be specifically related to a kind of terahertz emission absorbed layer and preparation method thereof.
Background technology
Terahertz detector is one of Primary Component of THz imaging technology application.In the development and application of terahertz detector, detect terahertz signal and there is very important meaning.Because on the one hand, with the optical region electromagnetic wave phase ratio of shorter wavelength, the terahertz emission photon energy is low, background noise occupies space of prominence usually; On the other hand, along with the terahertz detection technology in each field carrying out in a deep going way of the application in military field particularly, improving constantly receiving sensitivity becomes inevitable requirement.Because the thermo-responsive film in the terahertz detector probe unit is very weak to the terahertz emission absorption, make the difficulty of terahertz emission input larger.Traditional Infrared Detectors, as pyroelectric detector, be only 2.5% left and right of INFRARED ABSORPTION to the absorption of Terahertz, even also low than the unevenness of device material, therefore extremely difficult noise and the tested signal distinguished.Therefore, need to increase independent terahertz emission absorbed layer to strengthen the absorbent properties of detector.Require the reflectivity of terahertz emission absorbed layer low, will get well with the adhesiveness of subsurface material.Terahertz emission absorbing material commonly used is organic black matrix, dark fund, CNT(carbon nano-tube at present) and super material, compare other different materials, the mature preparation process of carbon nano-tube, easily and the compound formation homogeneous film of other organic substances, so the application of carbon nano-tube in the Terahertz field has better prospect.
Carbon nano-tube is the accurate one dimension tubular structure that the hexagonal mesh by class graphite forms, and pipe is divided into single wall and multi-walled carbon nano-tubes by the difference of the number of plies, and diameter is in several nanometers between tens nanometers, and length can reach several microns.Since carbon nano-tube, since within 1991, being found [Nature 354,56 (1991) for S. Iijima, Helical microtubules of graphitic carbon], the characteristic based on it on electronics and photonic propulsion has evoked researcher's interest.The electronics aspect, carbon nano-tube shows metal and characteristic of semiconductor, its helical structure had particularly, this has caused special electromagnetic property.The optics aspect, carbon nano-tube has good microwave absorbing property at visible ray and infrared band.Research to its wave-absorbing mechanism shows: to the absorption of visible ray come from can interband band-to-band transition, and to absorption the exciting corresponding to diaphragm of infrared band.At present, the research range of carbon nano-tube has expanded terahertz wave band to.The people such as Tae-ln Jeon have studied electricity and optical property [the Tae-ln Jeon of carbon nano-tube under the Terahertz frequency, Optical and electrical properties of preferentially anisotropic single-walled carbon-nanotube films in terahertz region, J.Appl.Phys.95, 5736 (2004)], the people such as M.A.Seo have analyzed the time-domain spectroscopy [M.A.Seo of single wall carbon nano-tube film at terahertz wave band, Terahertz electromagnetic interference shielding using single-walled-carbon nanotube flexible films, Applie, Appl.Phys.Lett.93, 231905 (2008)].Simple carbon nano-tube can be used as absorbed layer and absorbs terahertz emission, face problems but apply it on detector, as carbon nano-tube is easy to occur agglomeration, make the film surface out-of-flatness, and the adhesiveness of carbon nano-tube is also poor, is unfavorable for being attached on device.So in the urgent need to proposing a kind of feasible technique, carbon nano-tube is applied on device.
The size of its less of metamaterial structure, narrow frequency range response has important application in the Terahertz thermal imaging.Within 2008, the people such as the H.Tao of Boston Univ USA have designed the terahertz plane adsorbing material of the first kind based on super material.This material has three-decker, and bottom is the rectangle bonding jumper, and the second layer is the polyimides dielectric layer, and the 3rd layer is super material medium layer.First kind absorbing material needs two step photoetching and alignment procedures in preparation process, and absorption maximum is 70 ﹪.H.Tao has proposed the Equations of The Second Kind terahertz plane adsorbing material subsequently, and this structure is still a kind of three-decker, but bottom is the continuous metal film, and the second layer is still the polyimides dielectric layer, the artificial unit of the 3rd layer of super material medium layer.The Equations of The Second Kind absorbing material only needs one lithography step in preparation, simplified photoetching process and alignment procedures, thereby preparation is more prone to.At document (Yongzheng Wen, etc, ＂ Polarization-independent dual-band terahertz metamaterial absorbers based on gold/paryle-C/silicide structure ＂, 2013) in, the author is used as the Terahertz absorber with medium/metal layer/metal sandwich structure, the cyclic array that top layer is comprised of square and cross structure, material is gold, bottom is cobalt-silicon alloy, middle dielectric layer is paryle-C, the THz wave that the THz wave absorber energy absorption frequency of this structure is 0.83THz and 2.38THz, measure absorptivity efficiency through simulation and experiment and can take respectively 54 ﹪ and 94 ﹪ to.But they only absorb absorber for the experiment measuring Terahertz at present, are not actually used in the research of terahertz imaging.
Summary of the invention
Problem to be solved by this invention is: terahertz emission how to break through absorbed layer absorbs restriction, improves the terahertz emission detection performance of detector.Simultaneously, select suitable composite material increase carbon nano-tube evenness and with the adhesiveness of device.
Technical scheme of the present invention is:
The Terahertz absorbed layer of carbon nano-tube and super Material cladding structure, described Terahertz absorbed layer is followed successively by from top to bottom: top layer absorbed layer, dielectric layer, metallic reflector and carbon nano-tube film layer.
Further, described top layer absorbed layer is by periodicity metallic pattern cell formation; Periodically the metallic pattern unit consists of the circular metal circle, and the thickness of quoit is 300nm, and radius is 70um, and the cycle is 75um.
Further, described top layer absorbed layer employing material is aluminium.
Further, it is silicon nitride that described dielectric layer adopts material, and thickness is 2um.
Further, it is aluminium that described metallic reflector adopts material, and thickness is 100nm.
Further, the thickness of described carbon nano-tube film layer is 3.5 microns.
The preparation method of the Terahertz absorbed layer of a kind of carbon nano-tube and super Material cladding structure, preparation technology comprises the following steps:
1. take carbon nano-tube as raw material, use dimethyl formamide (DMF) as dispersant, epoxy resin, polyurethane or polyvinyl butyral resin (PVB) are as film-forming resin, and the preferably polyethylene butyral, be mixed into solution;
2. measure a certain amount of carbon nano-tube mixed solution on the detector probe unit, control the rotating speed of spin coater, it evenly is spin-coated on components and parts, above technique, until arrive thickness and the evenness requirement needed, form the carbon nano-tube film layer repeatedly;
3. prepare metallic reflector with magnetron sputtering method on the carbon nano-tube film layer, the thickness of film is in 0.1 ~ 1.5um scope;
4. prepare dielectric layer with PECVD equipment and mixing sputtering technology on metallic reflector;
5. prepare the top layer absorbed layer with photoetching and magnetron sputtering method on dielectric layer, form the Terahertz absorbed layer of carbon nano-tube and super Material cladding structure.
Carbon nano-tube film has good conductivity and thermal conductivity, as the terahertz emission absorbed layer of probe unit simultaneously rapidly by thermal energy transfer to probe unit, and can not affect the collection of output signal;
The surfacing of carbon nano-tube film layer, better with the adhesiveness of probe unit.
Use dimethyl formamide can solve the carbon nano-tube agglomeration as dispersant, make the film surface after spin coating smooth.Polyvinyl butyral can allow carbon nano-tube film be attached to preferably on probe unit, increases tack.
The metamaterial structure of top layer can have to the THz wave of certain special frequency channel the absorptivity of 100 ﹪ nearly by the size of regulating size, simultaneously, be arranged in the carbon nano-tube lack of alignment of the laminated film of super material underneath, terahertz emission interacts with carbon nano-tube after entering film, absorbed layer produces heat after absorbing terahertz emission, then passes to probe unit.
Terahertz absorbed layer of the present invention is in the frequency range of 0.1THz-1.2THz, and the average absorption rate is 70%, and, can surpass 90 ﹪ to the Terahertz absorptivity of certain frequency range.
The present invention compared with prior art has following beneficial effect:
The present invention proposes a kind of Terahertz absorbed layer that carbon nano-tube film and metamaterial structure are combined, wherein, prepare the preparation method of carbon nano-tube film based on spin coating proceeding, solved simple carbon nano-tube film poor flatness, the bad problem of adhesiveness.And the Terahertz absorbed layer that carbon nano-tube film and metamaterial structure combine, significantly strengthened the absorptivity of probe unit to the terahertz wave band radiation, also improved the terahertz detection performance of detector.Their technique advantages of simple, easily the large tracts of land preparation, with integrated, can be widely used in various terahertz detections and technical field of imaging.
The accompanying drawing explanation
The structural representation of Fig. 1 Terahertz absorbed layer;
Fig. 2 Terahertz absorbed layer vertical view;
Fig. 3 carbon nano-tube film layer surface topography;
The step instrument test result of Fig. 4 carbon nano-tube film;
The actual measurement absorptivity of Fig. 5 carbon nano-tube film under terahertz wave band;
Fig. 6 carries out the simulation result schematic diagram with the CSTMWS simulation software to metamaterial structure.
In figure, Reference numeral is: 1-top layer absorbed layer, 2-dielectric layer, 3-metallic reflector, 4-carbon nano-tube film layer.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the invention will be further described:
The Terahertz absorbed layer of a kind of carbon nano-tube and super Material cladding structure, described Terahertz absorbed layer is followed successively by from top to bottom: top layer absorbed layer, dielectric layer, metallic reflector and carbon nano-tube film layer.Described top layer absorbed layer is by the periodicity metallic pattern cell formation of certain size; Periodically the metallic pattern unit consists of the circular metal circle, and the thickness of quoit is 300nm, and radius is 70um, and the cycle is 75um.It is aluminium that described top layer absorbed layer adopts material.It is silicon nitride that described dielectric layer adopts material, and thickness is 2um.It is aluminium that described metallic reflector adopts material, and thickness is 100nm.The thickness of described carbon nano-tube film layer is 3.5 microns.
Can prepare on the sensing unit of Terahertz pyroelectric detector by the Terahertz absorbed layer.The responsive unit of Terahertz pyroelectric detector comprises super Material cladding structure, carbon nano-tube film, top electrode, lithium tantalate wafer and bottom electrode four-layer structure.Super Material cladding structure and carbon nano-tube film absorb terahertz emission as absorbed layer, carbon nano-tube itself has good thermal conductivity simultaneously, the thermal energy transfer that radiation-absorbing can be changed into is to lithium tantalate wafer, lithium tantalate wafer generation pyroelectric effect and produce the signal of telecommunication, be drawn out to reading circuit by upper and lower electrode and carry out collection and treatment, thereby realize the detection to Terahertz.
Adopt spin-coating method that carbon nano-tube film is inhaled and is prepared into the detector top, with magnetron sputtering method, photoetching technique and PECVD equipment, metamaterial structure is prepared into above carbon nano-tube film, form a kind of Terahertz absorbed layer based on carbon nano-tube and super Material cladding structure, significantly improve detector to the terahertz wave band absorptivity.
Preparation process and method are as follows:
(1) before preparing laminated film, first clean the sensing unit topsheet surface, remove surface contamination;
(2) carbon nano-tube, dimethyl formamide (DMF), polyvinyl butyral resin (PVB) are mixed and made into to the carbon nano-tube mixed liquor by a certain percentage; In mixed solution, solid content is 2%, and after forming film, content of carbon nanotubes is 50%;
(3) ready sensing unit is placed on the sucker of spin coater, with the needle tubing with scale, measures a certain amount of mixed liquor, evenly drop on sensing unit;
(4) spin coater has two rotating speeds that option is set: low or first gear and top gear.Low or first gear disperses spin coating liquid, and top gear makes the even film forming of spin coating liquid.It is 500 that the low or first gear rotating speed is set respectively, and the spin coating time is 30 seconds, and the top gear rotating speed is 1000, and the spin coating time is 15 seconds.Then open the spin coater switch and carry out spin-coating film.Repeat above technique, until reach the carbon nano-tube film thickness requirement needed, form the carbon nano-tube film layer;
(5) adopt magnetron sputtering method to prepare metallic reflector on the carbon nano-tube film layer, reflector thickness is 100nm;
(6) adopt PECVD equipment and mixing sputtering technology to prepare dielectric layer on metallic reflector, thickness of dielectric layers is 2um;
(7) adopt photoetching technique and magnetron sputtering method to prepare the top layer absorbed layer on dielectric layer, the thickness of top layer absorbed layer is 300nm.
Claims (8)
1. the Terahertz absorbed layer of carbon nano-tube and super Material cladding structure, it is characterized in that: described Terahertz absorbed layer is followed successively by from top to bottom: top layer absorbed layer, dielectric layer, metallic reflector and carbon nano-tube film layer.
2. the Terahertz absorbed layer of carbon nano-tube according to claim 1 and super Material cladding structure, it is characterized in that: described top layer absorbed layer is by the periodicity metallic pattern cell formation of certain size; Periodically the metallic pattern unit consists of the circular metal circle, and the thickness of quoit is 300nm, and radius is 70um, and the cycle is 75um.
3. the Terahertz absorbed layer of carbon nano-tube according to claim 2 and super Material cladding structure is characterized in that: it is aluminium that described top layer absorbed layer adopts material.
4. the Terahertz absorbed layer of carbon nano-tube according to claim 1 and super Material cladding structure is characterized in that: it is silicon nitride that described dielectric layer adopts material, and thickness is 2um.
5. the Terahertz absorbed layer of carbon nano-tube according to claim 1 and super Material cladding structure is characterized in that: it is aluminium that described metallic reflector adopts material, and thickness is 100nm.
6. the Terahertz absorbed layer of carbon nano-tube according to claim 1 and super Material cladding structure, it is characterized in that: the thickness of described carbon nano-tube film layer is 3.5 microns.
7. the preparation method according to the Terahertz absorbed layer of the described carbon nano-tube of claim 1-6 any one and super Material cladding structure, is characterized in that, preparation technology comprises the following steps:
1. take carbon nano-tube as raw material, use dimethyl formamide (DMF) as dispersant, epoxy resin, polyurethane or polyvinyl butyral resin (PVB), as film-forming resin, are mixed into solution;
2. measure mixed solution that 1. a certain amount of step obtain on the detector probe unit, control the rotating speed of spin coater, it evenly is spin-coated on components and parts, above technique repeatedly, until arrive thickness and the evenness requirement needed, formation carbon nano-tube film layer;
3. prepare metallic reflector with magnetron sputtering method on the carbon nano-tube film layer, the thickness of film is in 0.1 ~ 1.5um scope;
4. prepare dielectric layer with PECVD equipment and mixing sputtering technology on metallic reflector;
5. use the standby top layer absorbed layer of optical graving on dielectric layer, then with magnetron sputtering method, prepare the metallic aluminium figure, form the Terahertz absorbed layer of carbon nano-tube and super Material cladding structure.
8. the preparation method of the Terahertz absorbed layer of carbon nano-tube according to claim 7 and super Material cladding structure, is characterized in that, described film-forming resin is polyvinyl butyral resin.
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| CN105908180A (en) * | 2016-05-23 | 2016-08-31 | 电子科技大学 | Preparation device of terahertz absorption layer and preparation method |
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| CN113155161A (en) * | 2021-03-12 | 2021-07-23 | 西安理工大学 | Flexible CNTs terahertz metamaterial sensor and manufacturing method thereof |
| CN113820292A (en) * | 2021-08-24 | 2021-12-21 | 西安理工大学 | Flexible terahertz metamaterial sensor based on carbon nanotube film |
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| CN111121981B (en) * | 2018-11-01 | 2021-04-02 | 清华大学 | Preparation method of black body radiation source |
| TWI777133B (en) * | 2019-12-25 | 2022-09-11 | 鴻海精密工業股份有限公司 | Infrared detector and infrared imager based on carbon nanotube structure |
| CN111693494A (en) * | 2020-05-21 | 2020-09-22 | 西安理工大学 | CNTs (carbon nanotubes) super-surface-based THz wave sensor, preparation method and application thereof |
| CN113155161A (en) * | 2021-03-12 | 2021-07-23 | 西安理工大学 | Flexible CNTs terahertz metamaterial sensor and manufacturing method thereof |
| CN113155161B (en) * | 2021-03-12 | 2023-02-21 | 西安理工大学 | Flexible CNTs terahertz metamaterial sensor and manufacturing method thereof |
| WO2023013121A1 (en) * | 2021-08-05 | 2023-02-09 | ソニーセミコンダクタソリューションズ株式会社 | THz DETECTION DEVICE |
| CN113820292A (en) * | 2021-08-24 | 2021-12-21 | 西安理工大学 | Flexible terahertz metamaterial sensor based on carbon nanotube film |
| CN113820292B (en) * | 2021-08-24 | 2024-02-27 | 西安理工大学 | Flexible terahertz metamaterial sensor based on carbon nanotube film |
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