CN103441191B - A kind of preparation method of thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure - Google Patents
A kind of preparation method of thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure Download PDFInfo
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- CN103441191B CN103441191B CN201310367670.2A CN201310367670A CN103441191B CN 103441191 B CN103441191 B CN 103441191B CN 201310367670 A CN201310367670 A CN 201310367670A CN 103441191 B CN103441191 B CN 103441191B
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Abstract
The invention belongs to the preparation method of a kind of thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure of thin film solar cell technical field.Method of the present invention adopts magnetron sputtering to prepare Ag/Al core shell composite structure nano particle light trapping structure in conjunction with the mode of in-situ annealing.It is simple and reproducible that magnetron sputtering method prepares metal nanoparticle.Therefore, be very easy to, by the change of technological parameter as film thickness and annealing temperature, prepare the Ag/Al core shell composite structure nano particle of different-shape, different core shell size and different surfaces coverage rate.By the change to above-mentioned parameter, effectively can regulate the optical property of nano particle, its Spectral Extinction peak of broadening.Its delustring peak position is adjustable in 350 ~ 700nm scope, the remarkable broadening of Spectral Extinction halfwidth, and is used as amorphous silicon film solar battery light trapping structure, greatly can improve the photoelectric conversion efficiency of solar cell.
Description
Technical field
The invention belongs to thin film solar cell technical field, be specifically related to a kind of preparation method of thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure.
Background technology
In recent years, utilize the optical absorption characteristic of metal nanoparticle surface phasmon uniqueness to cause as the novel light trapping structure of thin film solar cell to pay close attention to widely.M.A.Green group of University of New South Wales adopts Ag nano-particle reinforcement silicon solar cell absorbing properties, make the absorbing properties of crystal silicon solar battery near 1200nm wavelength improve 7 times, the absorbing properties of polysilicon thin-film solar battery improves 16 times near 1050nm wavelength.The people such as California, USA engineering college K.Nakayama deposit one deck Ag nano particle at GaAs solar battery surface, make cell photoelectric conversion efficiency relatively improve 5.9%.The people such as Derkacs are by Au nanoparticle deposition on the solar cell of InP/GaAsP quantum well structure, and battery overall efficiency improves 17% relatively.But these research work overwhelming majority is only confined to single simple metal nano particle, and simple metal nano particle can only make battery to the influx and translocation of local spectral region, is not very remarkable to the raising of its photoelectric conversion efficiency.Only widen metal nanoparticle delustring spectral domain and strengthen nano particle to light scattering, effective broad absorption of solar cell could be realized.
Research shows, the shell of core shell composite nanometer particle can change the character of core shell effectively, makes the remarkable broadening of nano particle delustring spectral domain of this core shell composite structure, and shows unique engineer's characteristic.Therefore, core shell composite nanometer particle is expected to the absorptivity improving solar cell in wide spectrum scope.Graf etc. find the research of the nano particle optical absorption characteristic of Si02/Au composite construction, and along with the change of Au shell thickness, its Spectral Extinction peak will produce controlled movement within the scope of visible-near-infrared spectrum.F.Hubenthal adopts means of electron beam deposition to prepare Au/Ag core shell structure structure nano particles, and research finds to change shell thickness, can be that delustring peak position is adjustable within the scope of 420 ~ 605nm.
Summary of the invention
The object of the present invention is to provide a kind of preparation method of thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure.
A kind of thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure preparation method, comprises the steps:
Step 1: select basis material;
Step 2: prepare Ag film adopt magnetron sputtering method room temperature on basis material under;
Step 3: carry out in-situ annealing to Ag film, forms Ag core nano particle;
Step 4: on the basis material preparing Ag core nano particle, prepares Al film under again adopting magnetron sputtering method room temperature;
Step 5: carry out in-situ annealing to Al film, while forming Al shell nanoparticle, forms thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure;
Step 6: improve solar cell device technology, prepares the thin film solar cell containing Ag/Al core shell composite nanometer particle light trapping structure.
Basis material described in step 1 is thin film solar cell surface, the emitter region of thin film solar cell or the substrate of thin film solar cell.
The thickness of the film of Ag described in step 2 is 4 ~ 15nm.
The temperature of the film of Ag described in step 3 in-situ annealing is 150 ~ 550 DEG C.
The thickness of the film of Al described in step 4 is 5 ~ 12nm.
The temperature of the film of Al described in step 5 in-situ annealing is 100 ~ 300 DEG C.
Method of the present invention adopts magnetron sputtering to prepare Ag/Al core shell composite structure nano particle light trapping structure in conjunction with the mode of in-situ annealing.Ag/Al core shell composite nanometer particle light trapping structure can be prepared between the antireflective coating of thin film solar cell surface or thin film solar cell and emitter region or between the base of solar cell and substrate.It is simple and reproducible that magnetron sputtering method prepares metal nanoparticle.Therefore, be very easy to, by the change of technological parameter as film thickness and annealing temperature, prepare the Ag/Al core shell composite structure nano particle of different-shape, different core shell size and different surfaces coverage rate.By the change to above-mentioned parameter, effectively can regulate the optical property of nano particle, its Spectral Extinction peak of broadening.Its delustring peak position is adjustable in 350 ~ 700nm scope, the remarkable broadening of Spectral Extinction halfwidth, and is used as amorphous silicon film solar battery light trapping structure, greatly can improve the photoelectric conversion efficiency of solar cell.
Accompanying drawing explanation
Fig. 1 is the thin-film solar cell structure schematic diagram containing Ag/Al core shell composite nanometer particle light trapping structure;
Fig. 2 is the thin-film solar cell structure schematic diagram containing Ag/Al core shell composite nanometer particle light trapping structure;
Fig. 3 is the thin-film solar cell structure schematic diagram containing Ag/Al core shell composite nanometer particle light trapping structure;
In figure, each label is: 1-substrate; 2-base; 3-emitter region; 4-antireflective coating; 5-metal electrode; 6-Ag/Al core shell composite nanometer particle light trapping structure.
Fig. 4 is Ag/Al core shell composite nanometer particle light trapping structure spectral absorption figure prepared by embodiment 2.
Embodiment
A kind of thin film solar cell Ag/Al of the present invention core shell composite nanometer particle light trapping structure preparation method.The present invention, by adopting magnetron sputtering method, prepares a kind of thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure.
A kind of thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure preparation method, comprises the steps:
Step 1: select basis material;
Step 2: prepare Ag film adopt magnetron sputtering method room temperature on basis material under;
Step 3: carry out in-situ annealing to Ag film, forms Ag core nano particle;
Step 4: on the basis material preparing Ag core nano particle, prepares Al film under again adopting magnetron sputtering method room temperature;
Step 5: carry out in-situ annealing to Al film, while forming Al shell nanoparticle, forms thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure;
Step 6: improve solar cell device technology, prepares the thin film solar cell containing Ag/Al core shell composite nanometer particle light trapping structure.
Basis material described in step 1 is thin film solar cell surface, the emitter region of thin film solar cell or the substrate of thin film solar cell, as Figure 1-3.
The purity of magnetic controlled sputtering target should be greater than 5N(5 individual more than 9).
Be further described with instantiation below.
Embodiment 1
Step 1: select thin film solar cell surface as basis material;
Step 2: prepare Ag film adopt magnetron sputtering method room temperature on basis material under, Ag film thickness is 10nm;
Step 3: in-situ annealing is carried out to Ag film, annealing temperature is 450 DEG C, forms Ag core nano particle;
Step 4: on the basis material preparing Ag core nano particle, prepare Al film under again adopting magnetron sputtering method room temperature, Al film thickness is 7nm;
Step 5: in-situ annealing is carried out to Al film, annealing temperature is 250 DEG C, while forming Al shell nanoparticle, forms thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure;
Step 6: improve solar cell device technology, prepares the thin film solar cell containing Ag/Al core shell composite nanometer particle light trapping structure, as shown in Figure 1.
Embodiment 2
Step 1: select the solar cell device not preparing antireflective coating as basis material;
Step 2: prepare Ag film adopt magnetron sputtering method room temperature on basis material under, Ag film thickness is 7nm;
Step 3: in-situ annealing is carried out to Ag film, annealing temperature is 500 DEG C, forms Ag core nano particle;
Step 4: on the basis material preparing Ag core nano particle, prepare Al film under again adopting magnetron sputtering method room temperature, Al film is 8nm;
Step 5: in-situ annealing is carried out to Al film, annealing temperature is 300 DEG C, while forming Al shell nanoparticle, forms thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure;
Step 6: prepare antireflective coating, improves solar cell device technology, prepares the thin film solar cell containing Ag/Al core shell composite nanometer particle light trapping structure, as shown in Figure 2.Fig. 4 is the Ag/Al core shell composite nanometer particle light trapping structure spectral absorption figure of preparation, and straight line is the spectral absorption figure of Ag/Al core shell composite nanometer particle, and intermittent line is the spectral absorption figure of Ag nano particle.
Claims (1)
1. a thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure preparation method, is characterized in that, comprise the steps:
Step 1: select basis material;
Step 2: prepare Ag film adopt magnetron sputtering method room temperature on basis material under;
Step 3: carry out in-situ annealing to Ag film, forms Ag core nano particle;
Step 4: on the basis material preparing Ag core nano particle, prepares Al film under again adopting magnetron sputtering method room temperature;
Step 5: carry out in-situ annealing to Al film, while forming Al shell nanoparticle, forms thin film solar cell Ag/Al core shell composite nanometer particle light trapping structure;
Step 6: improve solar cell device technology, prepares the thin film solar cell containing Ag/Al core shell composite nanometer particle light trapping structure;
Wherein, basis material described in step 1 is thin film solar cell surface, the emitter region of thin film solar cell or the substrate of thin film solar cell;
The thickness of the film of Ag described in step 2 is 4 ~ 15nm;
The temperature of the film of Ag described in step 3 in-situ annealing is 150 ~ 550 DEG C;
The thickness of the film of Al described in step 4 is 5 ~ 12nm;
The temperature of the film of Al described in step 5 in-situ annealing is 100 ~ 300 DEG C.
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| CN107039549A (en) * | 2017-05-25 | 2017-08-11 | 电子科技大学 | A kind of thin-film solar cells and preparation method thereof |
| CN113517367A (en) * | 2021-07-09 | 2021-10-19 | 上海纳米技术及应用国家工程研究中心有限公司 | Construction method of high-sensitivity position detector based on Ag nano-particle/ZnO structure and product thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102299261A (en) * | 2011-09-23 | 2011-12-28 | 清华大学 | Organic solar cell for improving conversion efficiency by utilizing core-shell nanoparticles |
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| CN102299261A (en) * | 2011-09-23 | 2011-12-28 | 清华大学 | Organic solar cell for improving conversion efficiency by utilizing core-shell nanoparticles |
Non-Patent Citations (2)
| Title |
|---|
| "Low-dimension structural properies and microindentation studies of ion-beam-sputtered multilayers of Ag/Al films";C.Kim et al;《Thin Solid Films》;19940315;第240卷(第1-2期);第52-55页 * |
| Ag-Al2O3太阳能选择性吸收涂层的研制;王泉河等;《太阳能学报》;20111230;第32卷(第12期);第1748-1752页 * |
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