CN103433840B - 基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 - Google Patents
基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 Download PDFInfo
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- CN103433840B CN103433840B CN201310333313.4A CN201310333313A CN103433840B CN 103433840 B CN103433840 B CN 103433840B CN 201310333313 A CN201310333313 A CN 201310333313A CN 103433840 B CN103433840 B CN 103433840B
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CN201310333313.4A CN103433840B (zh) | 2013-08-01 | 2013-08-01 | 基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 |
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CN201310333313.4A CN103433840B (zh) | 2013-08-01 | 2013-08-01 | 基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 |
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CN103433840B true CN103433840B (zh) | 2015-08-19 |
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CN104608046B (zh) * | 2015-01-27 | 2016-09-21 | 清华大学 | 轴承圆柱滚子圆柱面的超精加工方法 |
CN107932293A (zh) * | 2017-11-20 | 2018-04-20 | 姚松年 | 一种金属板材加工用的抛光装置及其用抛光液的制备方法 |
CN112536710B (zh) * | 2020-12-01 | 2022-03-22 | 新乡市万华数控设备有限公司 | 一种用于双面研磨机的测量机构 |
CN113427389B (zh) * | 2021-06-15 | 2022-10-28 | 浙江工业大学 | 一种圆柱滚子力流变抛光方法 |
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JP2004303280A (ja) * | 2003-03-28 | 2004-10-28 | Hoya Corp | 情報記録媒体用ガラス基板の製造方法 |
CN101204787A (zh) * | 2006-12-22 | 2008-06-25 | 浙江工业大学 | 行星式精密球体研磨机 |
CN101237179A (zh) * | 2007-12-13 | 2008-08-06 | 广东工业大学 | 电流变效应发生装置及其应用和配制的电流变液 |
JP4605233B2 (ja) * | 2008-02-27 | 2011-01-05 | 信越半導体株式会社 | 両面研磨装置用キャリア及びこれを用いた両面研磨装置並びに両面研磨方法 |
DE112011101518B4 (de) * | 2010-04-30 | 2019-05-09 | Sumco Corporation | Verfahren zum Polieren von Siliziumwafern |
CN102513915B (zh) * | 2011-11-30 | 2014-02-12 | 江苏智邦精工科技有限公司 | 一种精密圆柱形零件的加工方法 |
CN203401386U (zh) * | 2013-08-01 | 2014-01-22 | 浙江工业大学 | 基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 |
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