CN103433840B - 基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 - Google Patents
基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 Download PDFInfo
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CN104608046B (zh) * | 2015-01-27 | 2016-09-21 | 清华大学 | 轴承圆柱滚子圆柱面的超精加工方法 |
CN107932293A (zh) * | 2017-11-20 | 2018-04-20 | 姚松年 | 一种金属板材加工用的抛光装置及其用抛光液的制备方法 |
CN112536710B (zh) * | 2020-12-01 | 2022-03-22 | 新乡市万华数控设备有限公司 | 一种用于双面研磨机的测量机构 |
CN113427389B (zh) * | 2021-06-15 | 2022-10-28 | 浙江工业大学 | 一种圆柱滚子力流变抛光方法 |
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JP2004303280A (ja) * | 2003-03-28 | 2004-10-28 | Hoya Corp | 情報記録媒体用ガラス基板の製造方法 |
CN101204787A (zh) * | 2006-12-22 | 2008-06-25 | 浙江工业大学 | 行星式精密球体研磨机 |
CN101237179A (zh) * | 2007-12-13 | 2008-08-06 | 广东工业大学 | 电流变效应发生装置及其应用和配制的电流变液 |
JP4605233B2 (ja) * | 2008-02-27 | 2011-01-05 | 信越半導体株式会社 | 両面研磨装置用キャリア及びこれを用いた両面研磨装置並びに両面研磨方法 |
US8932952B2 (en) * | 2010-04-30 | 2015-01-13 | Sumco Corporation | Method for polishing silicon wafer and polishing liquid therefor |
CN102513915B (zh) * | 2011-11-30 | 2014-02-12 | 江苏智邦精工科技有限公司 | 一种精密圆柱形零件的加工方法 |
CN203401386U (zh) * | 2013-08-01 | 2014-01-22 | 浙江工业大学 | 基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 |
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Effective date of registration: 20191125 Address after: Room 1,020, Nanxun Science and Technology Pioneering Park, No. 666 Chaoyang Road, Nanxun District, Huzhou City, Zhejiang Province, 313000 Patentee after: Huzhou You Yan Intellectual Property Service Co.,Ltd. Address before: 313000 Room 1403, 14th Floor, Building B, Freeport, Headquarters 1188 District Fulu Road, Wuxing District, Huzhou City, Zhejiang Province Patentee before: Zhejiang creation Intellectual Property Service Co.,Ltd. Effective date of registration: 20191125 Address after: 313000 Room 1403, 14th Floor, Building B, Freeport, Headquarters 1188 District Fulu Road, Wuxing District, Huzhou City, Zhejiang Province Patentee after: Zhejiang creation Intellectual Property Service Co.,Ltd. Address before: The city Zhaohui six districts Chao Wang Road Hangzhou City, Zhejiang province 310014 18 Patentee before: Zhejiang University of Technology |
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Effective date of registration: 20201130 Address after: 313000 No. 818 Xinhui Road, Lianshi Town, Nanxun District, Huzhou City, Zhejiang Province Patentee after: ZHEJIANG SANXING ELECTRICAL TECHNOLOGY Co.,Ltd. Address before: Room 1,020, Nanxun Science and Technology Pioneering Park, No. 666 Chaoyang Road, Nanxun District, Huzhou City, Zhejiang Province, 313000 Patentee before: Huzhou You Yan Intellectual Property Service Co.,Ltd. |
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