CN103433840A - 基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 - Google Patents
基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 Download PDFInfo
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- CN103433840A CN103433840A CN2013103333134A CN201310333313A CN103433840A CN 103433840 A CN103433840 A CN 103433840A CN 2013103333134 A CN2013103333134 A CN 2013103333134A CN 201310333313 A CN201310333313 A CN 201310333313A CN 103433840 A CN103433840 A CN 103433840A
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- 238000004519 manufacturing process Methods 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
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- 239000010935 stainless steel Substances 0.000 description 1
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- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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CN201310333313.4A CN103433840B (zh) | 2013-08-01 | 2013-08-01 | 基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104608046B (zh) * | 2015-01-27 | 2016-09-21 | 清华大学 | 轴承圆柱滚子圆柱面的超精加工方法 |
CN107932293A (zh) * | 2017-11-20 | 2018-04-20 | 姚松年 | 一种金属板材加工用的抛光装置及其用抛光液的制备方法 |
CN112536710A (zh) * | 2020-12-01 | 2021-03-23 | 新乡市万华数控设备有限公司 | 一种用于双面研磨机的测量机构 |
CN113427389A (zh) * | 2021-06-15 | 2021-09-24 | 浙江工业大学 | 一种圆柱滚子力流变抛光方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2004303280A (ja) * | 2003-03-28 | 2004-10-28 | Hoya Corp | 情報記録媒体用ガラス基板の製造方法 |
CN101204787A (zh) * | 2006-12-22 | 2008-06-25 | 浙江工业大学 | 行星式精密球体研磨机 |
CN101237179A (zh) * | 2007-12-13 | 2008-08-06 | 广东工业大学 | 电流变效应发生装置及其应用和配制的电流变液 |
US20110104995A1 (en) * | 2008-02-27 | 2011-05-05 | Shin-Etsu Handotai Co., Ltd. | Carrier for a double-side polishing apparatus, double-side polishing apparatus using this carrier, and double-side polishing method |
TW201137100A (en) * | 2010-04-30 | 2011-11-01 | Sumco Corp | Polishing method and slurry for silicon wafer |
CN102513915A (zh) * | 2011-11-30 | 2012-06-27 | 江苏智邦精工科技有限公司 | 一种精密圆柱形零件的加工方法 |
CN203401386U (zh) * | 2013-08-01 | 2014-01-22 | 浙江工业大学 | 基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 |
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- 2013-08-01 CN CN201310333313.4A patent/CN103433840B/zh not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004303280A (ja) * | 2003-03-28 | 2004-10-28 | Hoya Corp | 情報記録媒体用ガラス基板の製造方法 |
CN101204787A (zh) * | 2006-12-22 | 2008-06-25 | 浙江工业大学 | 行星式精密球体研磨机 |
CN101237179A (zh) * | 2007-12-13 | 2008-08-06 | 广东工业大学 | 电流变效应发生装置及其应用和配制的电流变液 |
US20110104995A1 (en) * | 2008-02-27 | 2011-05-05 | Shin-Etsu Handotai Co., Ltd. | Carrier for a double-side polishing apparatus, double-side polishing apparatus using this carrier, and double-side polishing method |
TW201137100A (en) * | 2010-04-30 | 2011-11-01 | Sumco Corp | Polishing method and slurry for silicon wafer |
CN102513915A (zh) * | 2011-11-30 | 2012-06-27 | 江苏智邦精工科技有限公司 | 一种精密圆柱形零件的加工方法 |
CN203401386U (zh) * | 2013-08-01 | 2014-01-22 | 浙江工业大学 | 基于介电泳效应的保持架偏心转摆式双平面研磨/抛光圆柱形零件设备 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104608046B (zh) * | 2015-01-27 | 2016-09-21 | 清华大学 | 轴承圆柱滚子圆柱面的超精加工方法 |
CN107932293A (zh) * | 2017-11-20 | 2018-04-20 | 姚松年 | 一种金属板材加工用的抛光装置及其用抛光液的制备方法 |
CN112536710A (zh) * | 2020-12-01 | 2021-03-23 | 新乡市万华数控设备有限公司 | 一种用于双面研磨机的测量机构 |
CN112536710B (zh) * | 2020-12-01 | 2022-03-22 | 新乡市万华数控设备有限公司 | 一种用于双面研磨机的测量机构 |
CN113427389A (zh) * | 2021-06-15 | 2021-09-24 | 浙江工业大学 | 一种圆柱滚子力流变抛光方法 |
CN113427389B (zh) * | 2021-06-15 | 2022-10-28 | 浙江工业大学 | 一种圆柱滚子力流变抛光方法 |
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CN103433840B (zh) | 2015-08-19 |
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