CN103424881B - Fresnel prism phase retarder for double-rotation compensator ellipsometer - Google Patents
Fresnel prism phase retarder for double-rotation compensator ellipsometer Download PDFInfo
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Abstract
The invention discloses a Fresnel prism phase retarder for a double-rotation compensator ellipsometer. The Fresnel prism phase retarder consists of two rhombic prisms, and oblique bottom surfaces of one ends of the two rhombic prisms are bound to each other to form a symmetrical structure. The prism materials with corresponding refractive index are selected and oblique angles of the rhombic prisms are determined, an incident beam is emitted into the rhombic prism perpendicularly through the oblique bottom surface of the other end of one of the rhombic prisms, subjected to total reflection twice sequentially through the opposite two sides, emitted into the other rhombic prism through the binding surface of the two rhombic prisms, and further, subjected to total reflection twice through the two sides of the rhombic prism sequentially so as to be emitted out, so that the phase retardation required by the double-rotation compensator Mueller matrix type ellipsometer can be acquired. The phase retarder has good achromatism within bands of ultraviolet light, visible light and infrared light, is insensitive to the incident angle of the light beam, is convenient to process, can be used as a rotary compensator of the double-rotation compensator Mueller matrix type ellipsometer, and can meet the requirements of the double-rotation compensator Mueller matrix type ellipsometer to the broad spectrum band and the 127-degree phase retardation.
Description
Technical field
The invention belongs to ellipsometer technical field, be specifically related to a kind of fresnel prism phase delay device for dual rotary compensator ellipsometer.
Background technology
Ellipsometry is a kind of optical means of phenomenon and the characteristic thereof occurred in interface or film between research two medium, the polarisation transformation that its principle occurs when being the reflection or transmission that utilize light beam on interface or film, comprises phase differential and amplitude ratio.Ellipsometer test (abbreviation ellipsometer) is the universal optical surveying instrument utilizing Ellipsometry to grow up.Its ultimate principle is, by the polarizer, special elliptically polarized light is projected testing sample surface, by measuring the reflected light (or transmitted light) of testing sample, to obtain polarization state change (comprise amplitude ratio and phase differential) of polarized light before and after reflection (or transmission), and then therefrom extract the information of testing sample.Ellipsometer has number of different types, comprises component type ellipsometer, rotatory polarization type ellipsometer, single rotation compensation type ellipsometer, liquid crystal phase modulation type ellipsometer and dual rotary without spin and compensates type Muller matrix ellipsometer etc.
Compensator is the important optical element in ellipsometer, is usually made by optical phase delay device, and optical phase delay device comprises liquid crystal phase retardation device, wave plate and fresnel prism phase delay device etc.Liquid crystal phase retardation device is by controlling the voltage being added in liquid crystal both sides, the double refractive inde of liquid crystal can be changed, thus change by liquid crystal retarder polarized light phase differential, the advantage of liquid crystal phase retardation device is that regulation and control is convenient, and precision is high, but its significant shortcoming is that applicable wavelength band is narrow, be difficult to the demand meeting wide spectral measurement.Wave plate is made by birefringent crystal material or macromolecular material usually, polarized light is made to produce phase differential by the birefringent characteristic of material itself, wave plate compact dimensions, broadband achromatic phase retarder can be made by composite wave plate mode, but because absorption coefficient surges at ultraviolet band, Phase Retardation of Wave Plate device is difficult to extend to ultraviolet band, and wave plate is very responsive to the environmental factor such as temperature, incident angle.Fresnel prism phase delay device utilizes phase change of full reflection principle to make polarized light produce phase differential, the achromatism of ultraviolet-infrared band can be realized well, and by the prism arrangement of given shape (such as by combination that two rhombic prisms symmetries are placed), can eliminate the susceptibility etc. of phase-delay quantity to incident angle, be a kind of more satisfactory ellipsometer compensator.
Have multiple Fresnel total reflection prism phase delay device in prior art, such as R.J.King and M.J.Downs just have devised fresnel prism type phase delay device (R.J.King, M.J.Downs., Vol.16, pp.288,1969) in 1969; The B.D.Johs of R.M.A.Azzam and J.A.Woollam company of the U.S. also devises the fresnel prism phase delay device of quarter-wave or 3/4ths wavelength; Qufu Normal University, Shanghai instrument three company limited of section and Shenzhen Graduate School of Tsinghua University etc. devise fresnel prism phase delay device respectively.But existing fresnel prism phase delay device is the fresnel prism phase delay device of quarter-wave, 1/2nd wavelength or 3/4ths wavelength mostly, or is applied to the phase delay device of particular device or instrument.
Dual rotary compensates the whole 4x4 Muller matrix that type Muller matrix ellipsometer can obtain sample in one-shot measurement, therefore can obtain the sample message of more horn of plenty, gather around and have broad application prospects.What dual rotary compensated type Muller matrix ellipsometer is typically configured to the polarizer, first whirl compensator, sample, second whirl compensator, analyzer, i.e. PC
1rSC
2rA (R.W.Collins, Joohyun Koh, J.Opt.Soc.Am.A, Vol.16, pp.1997-2006,1999), two compensators are according to certain angular speed ratio continuous rotation, thus by the Stokes Vector of the Muller matrix information coupling of sample in light beam, the Muller matrix of sample just can be obtained by analyzing outgoing light beam.
Whirl compensator is the critical component of dual rotary compensator Muller matrix ellipsometer, its phase-delay quantity, is suitable for spectral range and can produces significant impact to the measuring accuracy of ellipsometer to performances such as the susceptibility of incident angle.M.H.Smith (M.H.Smith, Appl.Opt., Vol.41, pp.2488-2493,2002) utilizes conditional number to be optimized dual rotary compensator Muller matrix ellipsometer system configuration, and the optimization phase-delay quantity being compensated device is 127 °.Existing phase delay device design is the fresnel prism phase delay device of quarter-wave, 1/2nd wavelength or 3/4ths wavelength mostly, or be applied to the phase delay device of particular device or instrument, dual rotary compensator Muller matrix ellipsometer can not be met to the requirement of compensator phase-delay quantity.
Summary of the invention
For above defect or the Improvement requirement of prior art, the invention provides a kind of fresnel prism phase delay device for dual rotary compensator ellipsometer, its object is to the phase delay being produced special angle by the mode of two same material same shape rhombic prism Symmetric Composites, thus solution dual rotary compensator ellipsometer needs the problem adapting to special angle retardation.
According to one aspect of the present invention, a kind of fresnel prism phase delay device is provided, for in dual rotary compensator Muller matrix ellipsometer, to obtain the phase-delay quantity adapting to this dual rotary compensator Muller matrix ellipsometer demand, it is characterized in that, this phase delay device is respectively formed symmetrical structure and is formed so that the ramped bottom surface of its one end is bonded to each other by two rhombic prisms, by selecting the prism material of respective indices of refraction and determining rhombic prism oblique angle, incident light beam is made to impinge perpendicularly on this rhombic prism through the ramped bottom surface of one of them rhombic prism other end, and another rhombic prism is incided by the binding face of two rhombic prisms after twice total reflection is carried out successively in its relative two sides, the same relative two sides through this another rhombic prism carry out outgoing after twice total reflection successively again, the required phase-delay quantity of this dual rotary compensator Muller matrix ellipsometer can be obtained.
As present invention further optimization, the phase-delay quantity that light beam produces at the inner each secondary reflection of prism is identical, and the phase-delay quantity sum that each secondary reflection produces is the required phase-delay quantity of described dual rotary compensator Muller matrix ellipsometer.
As present invention further optimization, the relation curve δ between described phase-delay quantity and Refractive Index of Glass Prism and rhombic prism oblique angle
0(n, α) is as follows:
Wherein, δ
0for the phase-delay quantity that light beam produces at the inner individual reflection of prism, n is the refractive index of rhombic prism under corresponding light beam wavelength, and α is the oblique angle of rhombic prism.
As present invention further optimization, the oblique angle α of described rhombic prism is at described curve δ
0the last transition section of (n, α) is selected.
As present invention further optimization, the required phase-delay quantity of described dual rotary compensator Muller matrix ellipsometer is 127 °.
As present invention further optimization, the scope of the oblique angle α of described rhombic prism is 66.7 °-68.3 °, is preferably 67.5 °.
As present invention further optimization, the size of described rhombic prism is determined according to the oblique angle α of this rhombic prism:
Wherein L is the length of described rhombic prism, and H is the height of described rhombic prism, and A is clear aperature and the ramped bottom surface length of side of described rhombic prism.
As present invention further optimization, described rhombic prism is isotropic optical glass, also can be isotropic crystalline material.
As present invention further optimization, described crystalline material is for melting at least one in quartz (Fused Silica), amorphous germanium oxide (Fused Germania), BK7 glass, K9 glass and calcium fluoride.
According to another aspect of the present invention, provide a kind of dual rotary compensator ellipsometer, it has above-mentioned fresnel prism phase delay device.
Compared with prior art, phase delay device designed by the present invention adopts the mode of two same material same shape rhombic prism Symmetric Composites, the oblique angle of rhombic prism is α, incident polarization light beam vertically enters first rhombic prism, through four total reflections, light beam is made to produce phase delay δ, finally from second rhombic prism injection, thus obtain the center phase retardation of 127 °, phase delay device of the present invention can comprise ultraviolet, visible and infraredly realize achromatism in interior broadband scope, dual rotary compensator Muller matrix ellipsometer can be met to compensator phase-delay quantity and broadband requirement, insensitive to beam incident angle, thus the difficulty reducing processing and install, also the rotating environment of whirl compensator is applicable to, and reduce the difficulty of installation and light path debugging.
Accompanying drawing explanation
The structure of the fresnel prism phase delay device designed by Fig. 1 and light path schematic diagram;
The single rhombic prism structural representation of Fig. 2 fresnel prism phase delay;
Fig. 3 melts quartz material at different wavelengths, the curve that its single total reflection phase-delay quantity changes with rhombic prism oblique angle;
The phase delay discharge curve of phase Fresnel delayer designed by Fig. 4 in 210nm-1000nm wavelength band;
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with accompanying drawing, the present invention is further elaborated.Only in order to explain the present invention when relating to instantiation if illustrate herein, do not limit the present invention.
The phase Fresnel delayer of the present embodiment is spliced and combined by two identical rhombic prisms 1 and 2 and is formed, wherein a ramped bottom surface 15 of rhombic prism 1 is fitted with both ramped bottom surface 16 of rhombic prism 2 and is mated, and makes two prisms form symmetrical structure at a certain angle.
First time total reflection is carried out in prism facets 9 in the face 13 that incident polarization light beam 4 impinges perpendicularly on first rhombic prism 1, folded light beam 5 continues to propagate, second time total reflection is there is afterwards in prism facets 10, the folded light beam 6 produced is successively through face 15 and 16 that prism 1 and prism 2 are fitted, incide prism 2, then in prism facets 11, third time total reflection occurs, folded light beam 7 continues to be transmitted to prism facets 12 and the 4th total reflection occurs, and the folded light beam 8 finally produced penetrates from the prism facets 14 of prism 2.
Because two prisms are arranged symmetrically with, so when incident beam 4 vertical prism face 13 is incident, the light path of light beam in two prisms has symmetry, i.e. do not offset between the light beam 8 of prism facets 14 outgoing and incident beam 4.Like this, incident polarized light is propagated altogether through four total reflections in phase delay device, and each total reflection produces phase-delay quantity δ
0, phase-delay quantity 4 δ can be produced through four total reflections
0.
Due to phase-delay quantity δ
0relevant to the oblique angle α of the refractive index n of prism material under wavelength corresponding to light beam and rhombic prism, through selecting the prism material of respective indices of refraction n and the oblique angle α of prism, the phase-delay quantity meeting designing requirement can be obtained, to be applicable in dual rotary compensator Muller matrix ellipsometer.
For more clearly describing the present invention, be preferably described in detail for the design process of the phase Fresnel delayer meeting needs 127 ° of phase-delay quantities in dual rotary compensator Muller matrix ellipsometer in the present embodiment.But in fact, the solution of the present invention is not limited to the phase-delay quantity of this specific size, the phase-delay quantity of other sizes is applicable equally.
(1) the prism arrangement mode of phase delay device and light path design.
As shown in Figure 1, the phase delay device of the present embodiment adopts two with the mode of material similar shape rhombic prism Symmetric Composite.These two rhombic prisms are prism 1 and prism 2, and oblique angle 3 size of rhombic prism is α, and fit in the face 15 of first prism 1 and the face 16 of second prism, such two rhombic prisms are arranged symmetrically with and are combined into designed phase delay device.
Incident polarization light beam 4 impinges perpendicularly on the face 13 of first rhombic prism 1, first time total reflection is carried out in prism facets 9, folded light beam 5 continues to propagate, second time total reflection is there is afterwards in prism facets 10, the folded light beam 6 produced through the face 15 and 16 that prism 1 and prism 2 are fitted, incides prism 2 successively, then in prism facets 11, third time total reflection occurs, folded light beam 7 continues to be transmitted to prism facets 12 and the 4th total reflection occurs, and the folded light beam 8 finally produced penetrates from the prism facets 14 of prism 2.Because two prisms are arranged symmetrically with, so when incident beam 4 vertical prism face 13 is incident, the light path of light beam in two prisms has symmetry, i.e. do not offset between the light beam 8 of prism facets 14 outgoing and incident beam 4.Like this, incident polarized light is propagated altogether through four total reflections in phase delay device, and the phase-delay quantity that each total reflection produces is provided by formula (1),
Wherein, δ
0for the phase-delay quantity that light beam produces at the inner individual reflection of prism, n for the refractive index of prism material under wavelength corresponding to light beam, α be the oblique angle of rhombic prism.
Like this, after four secondary reflections, total phase-delay quantity δ that light beam produces is:
δ＝4δ
0(2)
(2) the rhombic prism Material selec-tion and the oblique angle α that form phase delay device design.
Phase delay device comprises the rhombic prism of two same shapes, same isotropic material selected by these two prisms, can be isotropic optical glass also can be isotropic crystalline material, such as melt quartz (Fused Silica), amorphous germanium oxide (Fused Germania), BK7 glass, K9 glass, calcium fluoride etc.For convenience of description, be now described to melt quartz material.
Can obtain under different refractivity (i.e. different wave length) according to formula (1), single is totally reflected the phase-delay quantity δ produced
0with the curve δ that rhombic prism oblique angle α changes
0(n, α), as shown in Figure 3.As shown in Figure 3, as selected center phase-delay quantity δ
0after, there are two intervals can select the oblique angle α of rhombic prism, i.e. δ
0(n, α) curve first transition section and δ
0(n, α) curve last transition section.δ
0(n, α) curve first transition section δ
0(n, α) rate of curve is large, δ
0to α sensitive, higher to the requirement on machining accuracy of prism like this, and in all band, phase-delay quantity departs from center phase retardation greatly, and namely achromatism effect is bad; And δ
0(n, α) curve last transition section δ
0(n, α) rate of curve is little, and change is relatively mild a lot, δ
0insensitive to α change, in all band, to depart from center phase retardation less for phase-delay quantity.In view of above consideration, preferably at δ in the present embodiment
0(n, α) curve last transition section selects the oblique angle α of rhombic prism.
In 210nm-1000nm wavelength band, when the phase delay device center phase retardation designed is 127 °, can obtain single total reflection phase-delay quantity according to formula (2) is δ
0=31.75 °, as shown in Figure 3, at δ
0(n, α) curve last transition section selects the oblique angle α of rhombic prism, and the scope that can be obtained α by formula (1) is 66.7 °-68.3 °, departs from center phase retardation δ to make phase-delay quantity in 210-1000nm all band
0=31.75 ° smaller, selects optimal design value to be α=67.5 °.Fig. 4 gives when rhombic prism oblique angle is respectively 67.4 °, 67.5 ° and 67.6 °, the phase delay discharge curve of designed phase delay device in 210nm-1000nm wavelength band.As shown in Figure 4, when rhombic prism is selected to optimize bevel angle value 67.5 °, in 210nm-1000nm wavelength band, the deviate of phase-delay quantity and center phase retardation 127 ° between-3.7 ° to 4.2 °, and when there is certain deviation ± 0.1 ° at the oblique angle of rhombic prism, about phase-delay quantity curvilinear motion ± 0.5 °, substantially phase-delay characteristic in all band is not affected, therefore, this can reduce the requirement on machining accuracy of rhombic prism, thus convenient processing.
(3) the rhombic prism size design of phase delay device is formed.
After the oblique angle α of the rhombic prism of composition phase delay device determines, just can determine the physical dimension of rhombic prism according to oblique angle α.Fig. 2 gives the geometric relationship between the physical dimension of rhombic prism, rhombic prism oblique angle 3 size is α, and clear aperature 17 is A, and the length 18 of rhombic prism is L, the height 19 of rhombic prism is H, A, relation between L, H and α can represent with formula (3):
From formula (3), as α behind given rhombic prism oblique angle, only need according to actual operation requirements determine in A, L, H tri-sizes any one, just can determine the apparent size of rhombic prism.Usually according to the actual requirements, first determine the size of clear aperature A, then according to the size of the oblique angle α of the rhombic prism of formula (3) and the design of (2) step, determine length L and the height H of rhombic prism.Such as given clear aperature A=5mm, α=67.5 °, then can obtain L=20.61mm, H=13.54mm according to formula (3).As long as the design load that therefore actual processing dimension is not less than A, L, H just can meet request for utilization.
Combine according to the mode described in (1) with the rhombic prism designed by two (2) (3) steps, just constitute designed phase delay device, can be used as the whirl compensator of dual rotary compensator Muller matrix ellipsometer.
The present invention is not only confined to above-mentioned embodiment; persons skilled in the art are according to content disclosed by the invention; other multiple embodiment can be adopted to implement the present invention; as more conversion materials, wave band or the oblique angle to rhombic prism adjust among a small circle; therefore; every employing method for designing principle of the present invention and thinking, do the design that some simply change or change, all fall into the scope of protection of the invention.
Claims (11)
1. a fresnel prism phase delay device, in dual rotary compensator Muller matrix ellipsometer, to obtain the phase-delay quantity adapting to this dual rotary compensator Muller matrix ellipsometer demand, is characterized in that,
This phase delay device is respectively formed symmetrical structure and is formed so that the ramped bottom surface of its one end is bonded to each other by two rhombic prisms, by selecting the prism material of respective indices of refraction and determining rhombic prism oblique angle, incident light beam is made to impinge perpendicularly on this rhombic prism through the ramped bottom surface of one of them rhombic prism other end, another rhombic prism is incided by the binding face of two rhombic prisms after its relative two sides are totally reflected successively, outgoing after the relative two sides of this another rhombic prism are totally reflected successively again, this phase-delay quantity needed for dual rotary compensator Muller matrix ellipsometer can be obtained.
2. a kind of fresnel prism phase delay device according to claim 1, it is characterized in that, the phase-delay quantity that described light beam produces at the inner each secondary reflection of two rhombic prisms is identical, and the phase-delay quantity sum that four secondary reflections produce is the phase-delay quantity needed for described dual rotary compensator Muller matrix ellipsometer.
3. a kind of fresnel prism phase delay device according to claim 2, is characterized in that, it is characterized in that, the relation curve δ between described phase-delay quantity and rhombic prism refractive index and rhombic prism oblique angle
0(n, α) is as follows:
Wherein, δ
0for the phase-delay quantity that light beam produces at the inner individual reflection of prism, n is the refractive index of rhombic prism under corresponding light beam wavelength, and α is the oblique angle of rhombic prism.
4. a kind of fresnel prism phase delay device according to claim 3, is characterized in that, it is characterized in that, the oblique angle α of described rhombic prism is at described curve δ
0the last transition section of (n, α) is selected.
5. a kind of fresnel prism phase delay device according to any one of claim 1-4, is characterized in that, it is characterized in that, can determine the size of rhombic prism according to the oblique angle α of described rhombic prism:
Wherein L is the length of described rhombic prism, and H is the height of described rhombic prism, and A is clear aperature and the ramped bottom surface length of side of described rhombic prism.
6. a kind of fresnel prism phase delay device according to any one of claim 1-4, is characterized in that, it is characterized in that, the required phase-delay quantity of described dual rotary compensator Muller matrix ellipsometer is 127 °.
7. a kind of fresnel prism phase delay device according to claim 6, is characterized in that, it is characterized in that, the scope of the oblique angle α of described rhombic prism is 66.7 °-68.3 °.
8. a kind of fresnel prism phase delay device according to claim 6, is characterized in that, it is characterized in that, the oblique angle α of described rhombic prism is 67.5 °.
9. a kind of fresnel prism phase delay device according to any one of claim 1-4, is characterized in that, it is characterized in that, described rhombic prism is isotropic optical glass, or isotropic crystalline material.
10. a kind of fresnel prism phase delay device according to claim 9, it is characterized in that, it is characterized in that, described crystalline material is for melting at least one in quartz (Fused Silica), amorphous germanium oxide (Fused Germania), BK7 glass, K9 glass and calcium fluoride.
11. 1 kinds of dual rotary compensator Muller matrix ellipsometers, it is characterized in that, it comprises the fresnel prism phase delay device according to any one of claim 1-10.
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| CN103776445B (en) * | 2014-02-24 | 2017-01-04 | 北京理工大学 | Amplitude-division polarization navigation angle sensing design method and device |
| WO2016057464A1 (en) * | 2014-10-06 | 2016-04-14 | Applied Photophysics, Inc. | Calibration device and uses thereof |
| CN107402454B (en) * | 2017-08-31 | 2020-07-31 | 东南大学 | Device for realizing radial variation nonlinear ellipsometry rotation based on ellipsometry vector light field |
| CN109580551A (en) * | 2018-11-30 | 2019-04-05 | 武汉颐光科技有限公司 | A kind of Fourier transform infrared Muller matrix ellipsometer and its measurement method |
| CN110376136B (en) * | 2019-07-19 | 2021-01-01 | 华中科技大学 | Device and method for measuring optical constant and morphological parameter of film under high temperature loading |
| CN110927974B (en) * | 2019-12-18 | 2022-05-10 | 业成科技（成都）有限公司 | Optical imaging module and VR electronic equipment |
| CN113218877B (en) * | 2021-05-20 | 2022-04-15 | 华南师范大学 | Calibration method of Mueller matrix detection device |
| US11906770B2 (en) | 2021-10-21 | 2024-02-20 | KLA Corporal | Monolithic optical retarder |
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