CN103424377B - For detecting the sensor of liquid refractivity - Google Patents
For detecting the sensor of liquid refractivity Download PDFInfo
- Publication number
- CN103424377B CN103424377B CN201310360490.1A CN201310360490A CN103424377B CN 103424377 B CN103424377 B CN 103424377B CN 201310360490 A CN201310360490 A CN 201310360490A CN 103424377 B CN103424377 B CN 103424377B
- Authority
- CN
- China
- Prior art keywords
- metal grating
- polariser
- grating
- metal
- transparent cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
For detecting the sensor of liquid refractivity, including: the first metal grating polariser, comprise transparent flat substrate and the metal grating layer formed in substrate；Second metal grating polariser, identical with the first metal grating polarizer structure, and be arranged to and the first metal grating polariser parallel spaced apart becoming just to relation；Being arranged on the light source outside the first metal grating polariser, the light that light source sends has constant incident intensity and vertically passes through the first metal grating polariser and point to the second metal grating polariser；And it is arranged on the photodetector outside the second metal grating polariser, the output intensity of the light of the second metal grating polariser is passed through for detection.According to sensor of the invention simple in construction, highly sensitive, in real time and making is simple in detection, can be widely applied to the industry such as chemical industry, medicine, food, biological engineering, oil to detect liquid refractivity.
Description
Technical field
The present invention relates to a kind of sensor, particularly to the biography of a kind of high-acruracy survey liquid refractivity
Sensor.
Background technology
Refractive index is one of important optical parametric of transparency liquid, utilizes refractive index to be possible not only to understand
The optical property of liquid, also contribute to understand the purity of liquid, concentration and dispersion etc. other
Physical property.Some other parameters are also closely related with refractive index, chemical industry, medicine, food,
In the industrial departments such as biology, oil and university institute experiment, often to measure some liquid
Refractive index and concentration, therefore, the accurate measurement to liquid refractivity, have in many research fields
Significance.
At present, method for measuring liquid refractive is broadly divided into geometrical optics approach and wave optics method.
Geometrical optics approach is according to the law of refraction, total reflection law, by accurately measure relevant angle and away from
From solving refractive index, this is such as the method for minimum deviation angle, total reflection method, glancing incidence method, displacement method etc.,
The most most representative be widely used, Abbe refractometer that technology is more ripe.Abbe reflects
It is critical angle that instrument is directly measured, and the measurement of critical angle must have a process, is i.e. reflected by regulation
Angle, finds out the angle that critical ray in visual field is corresponding.Critical angle method is by refracting prisms in instrument certainly
Body Refractive Index of Material and the restriction of drift angle, it is impossible to measure the material that refractive index is bigger and less.It addition,
Directly measured quantities in Abbe refractometer is angle, relative rectilinear range measurement, and angular surveying is complicated,
Precision is also difficult to improve, it more difficult to improving degree of accuracy, therefore this instrument belongs to non real-time measuring instrument, can
See for example Chinese patent application CN200910198516.0.
Wave optics method is by its phase after medium or the change of polarization state and medium according to light
The relevant principle of refractive index measure liquid refractivity, such as Brewster horn cupping, interferometric method, spread out
Penetrate method etc..Although these methods can improve certainty of measurement, but its precision is not only by microscope precision shadow
Ring, and striped extreme value needs human eye to differentiate, bigger by subjective impact, it is impossible to meet high accuracy and survey
Amount requirement.Some new techniques such as surface plasmon sensor and Raman spectrum, although can measure,
But these methods are expensive and liquid is difficult to operation.
Under constant temperature, the size of the refractive index of liquid is affected by its concentration, therefore can survey
Amount refractive index value analyzes the concentration of this liquid, and these are various containing heavy metal etc. in environment measuring water quality
The content of pollutant, fermentable detect the trace substances such as protein, glucose, aminoacid
Concentration has the biggest application prospect.But, liquid is the least in concentration or concentration change is not the biggest
In the case of, the change of its refractive index value is the most small, and trace substance is reflected by existing measuring method
The accuracy of detection of rate is the highest, can be found in such as Chinese patent application CN200710066016.2.
Summary of the invention
An object of the present invention is to provide a kind of sensor, and it can overcome above-mentioned prior art
Certain or some problem.
Include according to sensor of the invention:
First metal grating polariser, comprises transparent flat substrate and the metal formed in substrate
Grating layer；
Second metal grating polariser, identical with the first metal grating polarizer structure, and cloth
It is set to and the first metal grating polariser parallel spaced apart becoming just to relation；
Being arranged on the light source outside the first metal grating polariser, the light that light source sends has constant
Incident intensity and vertical through the first metal grating polariser and point to the second metal grating polariser；
And
It is arranged on the photodetector outside the second metal grating polariser, for detection through second
The output intensity of the light of metal grating polariser.
According to sensor of the invention simple in construction, highly sensitive, detection is real-time and makes letter
Single, can be widely applied to the industry such as chemical industry, medicine, food, biological engineering, oil to detect liquid
Body refractive index.
In one particular embodiment of the present invention, sensor can also include covering at the first metal
The first transparent cover on the metal grating layer of grating polarizer and covering at the second metal grating
The second transparent cover on the metal grating layer of polariser, wherein the first transparent cover is transparent with second
Cover plate faces each other.
In the alternate embodiment of the present invention, sensor can also include covering at the first metal light
Suprabasil first transparent cover of grid polarizer and covering are at the second metal grating polariser
Suprabasil second transparent cover, wherein the first transparent cover faces each other with the second transparent cover.
In a preferred embodiment of the invention, the substrate of the first metal grating polariser and the second metal
The substrate of grating polarizer can also directly face each other.
In a preferred embodiment of the invention, light source is the one-wavelength laser two of wavelength 600nm
Pole is managed.
In one particular embodiment of the present invention, substrate thickness can be about 1mm, metal
Grating can be aluminum grating, and grating flute profile is rectangle, and screen periods is 100nm, metal grating ridge
A width of 50nm and grating depth are 50nm.
Present invention also offers a kind of method for detecting liquid refractivity, including:
The first metal grating polariser, the first metal grating polariser is provided to comprise transparent flat substrate
And in substrate formed metal grating layer；
There is provided and the identical second metal grating polariser of the first metal grating polarizer structure,
Second metal grating polariser is arranged to and the first metal grating polariser parallel spaced apart become the most right
Relation；
Make testing liquid from logical between the first metal grating polariser and the second metal grating polariser
Cross；
Apply outside the first metal grating polariser vertically through the first metal grating polariser also
Point to the light with constant incident intensity of the second metal grating polariser；
Detection is through the output intensity of the light of the second metal grating polariser；And
Do not pass through with light through the output intensity after the second metal grating polariser according to light
The ratio of incident intensity during the first metal grating polariser tries to achieve the refractive index of testing liquid.
In one particular embodiment of the present invention, testing liquid refractive index in the range of
1.35455～1.35485.
The present invention, by detection output intensity, i.e. can obtain testing liquid refractive index value, Jin Erke
To analyze the size of strength of fluid.This is biofermentation, medical medicine, environment measuring, food peace
Congruence field provides the most effective side at the concentration extremely variable quantity of detection trace activity substance
Method.
Accompanying drawing explanation
Fig. 1 is the structural representation according to sensor of the invention；
Fig. 2 is the structural representation of the metal grating polariser according to the present invention；
Fig. 3 is the light transmission rate curve chart of the metal grating polariser according to the present invention；And
Fig. 4 is that the characteristic that the transmitance according to sensor of the invention changes along with liquid refractivity is bent
Line chart.
Detailed description of the invention
Describe sensor of the invention below in conjunction with the accompanying drawings in detail.Those skilled in the art should manage
Solving, the embodiments described below is only the exemplary illustration to the present invention, makes not for it
Any restriction.
Fig. 1 diagrammatically illustrates the general structure of sensor of the invention.As it is shown in figure 1, this
Bright sensor include the light source LD of laser diode form, the first metal grating polariser 1,
Second metal grating polariser 1 ' and photoelectric detector PD.
Fig. 2 diagrammatically illustrates the general structure of the first metal grating polariser of the present invention.Such as figure
Shown in 2, the first metal grating polariser 1 comprises planar substrates 11 and is formed in substrate 11
Metal grating layer.Metal grating layer comprises multiple parallel metal grating ridge 12 being equally spaced apart from.
K9 glass that substrate 11 can use any suitable transparent material, such as thickness to be 1mm or
Quartz.The manufacture method of metal grating polariser can use the plating metal on surface in substrate 11 thin
Film such as aluminum film, plates a layer photoetching glue the most again as mask plate, is then used by electron-beam direct writing side
Formula forms optical grating construction on photoresist surface, then uses ion beam etching process, by photoresist
Flute profile transfer on metallic film, thus form metal grating ridge 12.It follows that can use
Nanometer embossing, the metal grating polariser 1 prepared by said method copies as masterplate
The metal grating polariser 1 ' of more structure identical (including that all kinds of parameter is the most identical).?
In the specific embodiment of the present invention, metal grating ridge 12 is aluminum grating ridge, and grating flute profile is rectangle,
Screen periods A is 100nm, and grating ridge width d is 50nm and grating depth h is 50nm.
Second metal grating polariser 1 ' and the first metal grating polariser 1 structure (include various thing
Reason parameter) identical.In sensor of the invention, the second metal grating polariser 1 ' and
One metal grating polariser 1 both can take face-to-face the mode cloth of (grating layer is in the face of grating layer)
Put, it is also possible to take the mode of back-to-back (basal surface is to substrate) to arrange.No matter take which kind of cloth
Put mode, be required to make the first metal grating polariser parallel with the second metal grating polariser 1 ' every
Open and become just to relation, i.e. making each grating ridge of the first metal grating polariser 1 (or therebetween
Grating groove) to the corresponding grating ridge (or grating groove therebetween) of the second metal grating polariser 1 '
It is directed at one by one.
In one particular embodiment of the present invention, the first metal grating polariser 1 and the second metal
Grating polarizer 1 ' is at a distance of 500 μm.So, the first metal grating polariser 1 and the second metal light
Being the formation of fluid passage 3 (being similar to F-P cavity) between grid polarizer 1 ', testing liquid just may be used
To pass through fluid passage 3 the most from left to right so that its refractive index can be detected in real time.
In the arrangement of (grating layer is in the face of grating layer) face-to-face, the first metal grating polarization
The first transparent cover 2, and the second metal grating polarization can be covered on the metal grating layer of device 1
The second transparent cover 2 ' can be covered on the metal grating layer of device 1 '.First transparent cover 2 and
The length and width of two transparent cover 2 ' all can exceed the length of corresponding metal grating polariser
With width with protect the liquid that do not flow through in fluid passage 3 of corresponding metal grating polariser dirt
Dye or corrosion.After having measured the refractive index of a kind of liquid and prepare to measure the folding of another kind of liquid
When penetrating rate, it is also possible to use new transparent cover to replace original transparent cover to prevent from intersecting dirt
Dye.Transparent cover is made almost without absorbefacient material by light, and its thickness can be thin to being neglected
Degree slightly.Such as, transparent cover can be sheet glass or resin sheet, and described resin is permissible
Be Merlon, polymethyl methacrylate, polrvinyl chloride or polyolefin (such as polypropylene,
Polyethylene) etc..
In the arrangement of back-to-back (basal surface is to substrate), it is also possible to omit the first transparency cover
Sheet 2 and the second transparent cover 2 '.
Referring back to Fig. 1, in sensor of the invention, light source LD is arranged on the first metal grating
The outside (being illustrated as on the upside of it) of polariser 1, the light that light source LD sends (has constant
Incident intensity) vertically pass through the first metal grating polariser 1 and point to the second metal grating polariser
1’.In a preferred embodiment of the invention, light source selects laser diode LD, with laser instrument phase
Ratio, laser diode has that efficiency is high, volume is little, the advantage of good stability, life-span length etc.；This
Invention especially can select SQW (QW) laser diode, and its threshold current is low, defeated
Going out power high, in the passback module of two-way light receiver, up transmitting the most all uses SQW
Laser diode is as light source.
Inventors be surprised to learn that, the wavelength of the light sent when quantum-well diode laser is at 600nm
During place, the transmitance according to the grating polarizer of the present invention is the highest, close to 95%, as shown in Figure 3.
Therefore, SQW (QW) the laser diode conduct that the present invention selects wavelength to be 600nm especially
Monochromater.
Referring still to Fig. 1, in sensor of the invention, photoelectric detector PD is arranged on second
Metal grating polariser 1 ' outside (being illustrated as on the downside of it), for detection through the second metal grating
The output intensity of the light of polariser 1 '.Photoelectric detector PD have low distortion, the high linearity,
The advantages such as dark current is little, responsiveness is high, good stability, and it is operable with visible ray and long-wave band.
Fig. 4 shows that transmitance is along with the performance diagram of testing liquid variations in refractive index, Qi Zhongke
To see that the faint change of refractive index may result in transmitance and changes a lot.In the diagram,
Liquid refractivity excursion is 1.35455～1.35485, the incident a length of 600nm of monochromatic optical wave.
As shown in Figure 4, refractive index is in 0.0003 excursion, if incident intensity is constant, then its
Transmitance monotonic increase, minimum transmitance is 37%, maximum up to 85%, the least in refractive index
In the range of its transmitance excursion the biggest.As long as there being light to enter photoelectric detector PD, it is measured
Refractivity precision at least may be up to 10-7, the precision of concentration corresponding in practice is up to μm ol/L
Rank.If people penetrates light intensity more greatly a bit, the sensitivity of photoelectric detector PD will be the highest,
Its certainty of measurement is the highest.Therefore under constant temperature, when the effective refractive index of testing liquid is one
In the range of Ding during (as escribed above 1.35455～1.35485) change, the absorbance list of sensor
Modulation.The accuracy of detection of sensor is the highest in this range.It addition, sensed by regulation
The size of device parameter such as two-layer grating polarizer spacing, can regulate certainty of measurement, such as, be used for
Detection trace biological substance, it is possible to meet the required precision of actually detected work.
During the liquid refractivity of the present invention detects, testing liquid to be kept is the detection of constant temperature
Environment, gets rid of the interference of external environment, in the range of making testing liquid refractive index value be maintained at measurement.
When the testing liquid of variable concentrations or different material is by fluid passage 3 or F-P cavity, its phase
The refractive index answered is the most different, thus the most different by the output intensity of grating polarizer assembly.Pass through
Detection output intensity, i.e. can obtain testing liquid refractive index value, and then can analyze strength of fluid
Size.This is that the fields such as biofermentation, medical medicine, environment measuring, food safety are in detection
The concentration of trace activity substance extremely variable quantity provides the most effective method.The present invention is to utilize
The refractive index value corresponding with transmitance represents the refractive index value that its output intensity is corresponding, because outgoing
Light intensity is multiplied by transmitance equal to incident intensity, and when incident intensity is certain certain value, output intensity is only
Relevant with transmitance.
As it has been described above, invention also provides a kind of method detecting liquid refractivity: in utilization
State sensor construction, according to light through the output intensity after the second metal grating polariser 1 ' with
Light through this (transmitance) of incident intensity during the first metal grating polariser 1, is not asked
Go out the refractive index of testing liquid.
Claims (4)
1. a sensor, including:
First metal grating polariser, comprises transparent flat substrate and the gold formed in substrate
Belong to grating layer；Wherein substrate thickness is 1mm, and metal grating is aluminum grating, and grating flute profile is
Rectangle, screen periods is 100nm, and a width of 50nm of metal grating ridge and grating depth are
50nm；
Second metal grating polariser, identical with the first metal grating polarizer structure, and
It is arranged to and the first metal grating polariser parallel spaced apart becoming just to relation；
Being arranged on the light source outside the first metal grating polariser, the light that light source sends has perseverance
Determine incident intensity and vertical through the first metal grating polariser and to point to the second metal grating inclined
Shake device；Using wavelength is that the quantum-well diode laser of 600nm is as monochromater；And
It is arranged on the photodetector outside the second metal grating polariser, for detection through the
The output intensity of the light of two metal grating polarisers.
2. the sensor described in claim 1, also includes covering polarizing at the first metal grating
The first transparent cover on the metal grating layer of device and covering at the second metal grating polariser
Metal grating layer on the second transparent cover, wherein the first transparent cover and the second transparent cover
Face each other.
3. the sensor described in claim 1, the wherein substrate of the first metal grating polariser
Substrate with the second metal grating polariser directly faces each other.
4. the sensor described in claim 1, also includes covering polarizing at the first metal grating
Suprabasil first transparent cover of device and cover the substrate at the second metal grating polariser
On the second transparent cover, wherein the first transparent cover faces each other with the second transparent cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310360490.1A CN103424377B (en) | 2013-08-16 | 2013-08-16 | For detecting the sensor of liquid refractivity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310360490.1A CN103424377B (en) | 2013-08-16 | 2013-08-16 | For detecting the sensor of liquid refractivity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103424377A CN103424377A (en) | 2013-12-04 |
| CN103424377B true CN103424377B (en) | 2016-08-10 |
Family
ID=49649448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310360490.1A Expired - Fee Related CN103424377B (en) | 2013-08-16 | 2013-08-16 | For detecting the sensor of liquid refractivity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103424377B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108801978A (en) * | 2018-06-21 | 2018-11-13 | 湖南师范大学 | A kind of high-precision liquid index sensor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8223339B1 (en) * | 2009-08-19 | 2012-07-17 | The United States Of America As Represented By The Secretary Of The Navy | Scanning spectroscopy modulation for frequency domain spectral analysis |
| CN102654457A (en) * | 2012-05-16 | 2012-09-05 | 北京大学 | Refractive index sensor and detection method thereof |
| CN103245636A (en) * | 2013-05-16 | 2013-08-14 | 成都谱视科技有限公司 | Enhancement-type slit optical waveguide grating FP (Fabry Perot) cavity optical biochemistry sensing chip |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130120743A1 (en) * | 2010-06-07 | 2013-05-16 | Burak Turker | Integrated Surface Plasmon Resonance Sensor |
-
2013
- 2013-08-16 CN CN201310360490.1A patent/CN103424377B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8223339B1 (en) * | 2009-08-19 | 2012-07-17 | The United States Of America As Represented By The Secretary Of The Navy | Scanning spectroscopy modulation for frequency domain spectral analysis |
| CN102654457A (en) * | 2012-05-16 | 2012-09-05 | 北京大学 | Refractive index sensor and detection method thereof |
| CN103245636A (en) * | 2013-05-16 | 2013-08-14 | 成都谱视科技有限公司 | Enhancement-type slit optical waveguide grating FP (Fabry Perot) cavity optical biochemistry sensing chip |
Non-Patent Citations (2)
| Title |
|---|
| 双光栅夹有机溶液构成的宽带光限幅器;李淳飞等;《光学学报》;19990331;第19卷(第3期);407-413 * |
| 用透射光栅测定透明液体折射率;童悦;《淮南师范学院学报》;20030531;第5卷(第21期);35-36 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103424377A (en) | 2013-12-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101371129B (en) | Surface plasmon resonance sensors and methods for detecting samples using the same | |
| IL256845A (en) | Resonant periodic structures and methods of using them as filters and sensors | |
| EP2087343B1 (en) | Dynamic detection device based on surface plasmon resonance effect | |
| Chizhik et al. | Nanocavity‐Based Determination of Absolute Values of Photoluminescence Quantum Yields | |
| CN109100331A (en) | A kind of metallic hole array phasmon fibre optical sensor of regular hexagon lattice structure | |
| CN103487356B (en) | A kind of spherical particle spectrum complex refractive index measurement method based on the saturating reflected signal of short-pulse laser | |
| CN107478597A (en) | Metal rectangular slit array structure plasma light fiber sensor based on double transmission peak | |
| CN110044847A (en) | It is a kind of not by the total internal reflection type refractive index sensing method of light source drift effect | |
| CN101294900B (en) | High-fineness cavity surface plasma resonance sensing equipment | |
| CN101965509B (en) | Method and apparatus for phase sensitive surface plasmon resonance | |
| CN104792731A (en) | Liquid refractive index sensor based on resonance light tunnel effect | |
| US8149413B2 (en) | Surface plasmon resonance sensing device | |
| CN103424377B (en) | For detecting the sensor of liquid refractivity | |
| CN103424393A (en) | Surface enhanced Raman based organic phosphorus detection method | |
| Trivedi et al. | 3D printed hand-held refractometer based on laser speckle correlation | |
| CN104749137A (en) | Liquid refractive index measurement system and method | |
| CN104237169B (en) | Detection method of SPR detection system based on external field modulation | |
| Duarte et al. | A low-cost liquid refractive index sensor based on plastic optical fibre and CCD array | |
| Liu et al. | Polarization interference interrogation of angular surface plasmon resonance sensors with wide metal film thickness tolerance | |
| Cabrera et al. | Photothermal lens technique: a comparison between conventional and self-mixing schemes | |
| Helseth | Simultaneous measurements of absorption spectrum and refractive index in a microfluidic system | |
| CN209727122U (en) | A kind of quasi-distributed spr sensor based on few mould twin-core fiber | |
| CN100567957C (en) | A kind of many optical fiber surface plasmon resonance probes with temperature correction | |
| Anderson et al. | Grating light reflection spectroscopy for determination of bulk refractive index and absorbance | |
| RU157412U1 (en) | AUTOMATIC DIGITAL REFRACTOMETER FOR DETERMINING THE REFRACTION INDICATOR OF LIQUIDS |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Pei Ziren Inventor after: Huang Yuanshen Inventor after: Wang Zhongfei Inventor after: Ling Jinzhong Inventor after: Wang Qi Inventor after: Zhang Dawei Inventor after: Zhuang Songlin Inventor after: Sun Haojie Inventor before: Pei Ziren Inventor before: Huang Yuanshen Inventor before: Wang Zhongfei Inventor before: Ling Jinzhong Inventor before: Wang Qi Inventor before: Zhang Dawei Inventor before: Zhuang Songlin |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170328 Address after: 200093 Shanghai military road, Yangpu District, No. 516 Patentee after: University of Shanghai for Science and Technology Patentee after: Shanghai Publishing and Printing College Address before: 200093 Shanghai military road, Yangpu District, No. 516 Patentee before: University of Shanghai for Science and Technology |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160810 Termination date: 20190816 |