CN103411904A - Opto-acoustic gas sensing device based on polyvinylidene fluoride piezoelectric film - Google Patents
Opto-acoustic gas sensing device based on polyvinylidene fluoride piezoelectric film Download PDFInfo
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- CN103411904A CN103411904A CN2013103236026A CN201310323602A CN103411904A CN 103411904 A CN103411904 A CN 103411904A CN 2013103236026 A CN2013103236026 A CN 2013103236026A CN 201310323602 A CN201310323602 A CN 201310323602A CN 103411904 A CN103411904 A CN 103411904A
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Abstract
The invention discloses an opto-acoustic gas sensing device based on a polyvinylidene fluoride piezoelectric film. The opto-acoustic gas sensing device comprises a light source (1) and a tubular acoustic resonant cavity (6) on an optical path (2) of the light source (1), as well as an opto-acoustic gas sensor arranged at the side opening of the tubular acoustic resonant cavity (6) and a modulation-demodulation component adapting to the opto-acoustic gas sensor, particularly, the tubular acoustic resonant cavity (6) is 20 mm-150 mm in length, and 3 mm-10 mm in internal diameter, the side opening of the tubular acoustic resonant cavity (6) is a small hole (4) communicated with the tubular acoustic resonant cavity (6), the small hole (4) is 1.5 mm-2.5 mm in depth and 1.5 mm-2.5 mm in diameter, the opto-acoustic gas sensor is a polyvinylidene fluoride piezoelectric film (5), the distance between the film plane and the end plane of the small hole (4) is 0.1 mm-3 mm, and the output terminal of the opto-acoustic gas sensor is electrically connected with the input terminal of a phase-locked amplifier (8) of the modulation-demodulation component through a pre-amplifier (6). The opto-acoustic gas sensing device has the characteristics of simple structure, larger response band width and stability in operation, and can be widely used for detecting and determining the strength or chemical compositions of gas.
Description
Technical field
The present invention relates to a kind of photoacoustic gas sensing device, especially a kind of photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film.
Background technology
Survey and definite gas concentration or the chemical composition demand that has a wide range of applications in fields such as environmental monitoring, weather, agricultural, safety, medical diagnosis and industry.Along with the development of laser technology, Weak Signal Detection, optoacoustic spectroscopy has also obtained development fast, and optoacoustic spectroscopy is considered to the spectral technique of a kind of zero background, high sensitivity, high selectivity.
Optoacoustic spectroscopy is the unique spectrum technology different from the traditional absorption spectrum based on Bill-lambert (Beer-Lambert) absorption law, is based on a kind of spectral technique of optoacoustic effect, detection by the luminous energy of absorption of sample rather than transmitted light intensity.When the light source irradiation that is in the molecule absorption wave band on sample the time, sample molecule absorbs luminous energy and transits to excited state, the molecule that is in excited state is got back to ground state by collision relaxation, and the luminous energy absorbed simultaneously is converted into the interior energy of molecule, and causes the local temperature of molecule to raise.So when the light on shining sample molecule was subject to modulating, the local temperature of molecule just produced periodically and changes, thereby produce periodic pressure, change, i.e. sound wave.When people record the relation of acoustical signal with optical source wavelength with sonic transducers such as microphones, just obtained photoacoustic spectrum signals.With the general traditional absorption spectroscopy techniques based on Bill-lambert (Beer-Lambert) absorption law, compare, optoacoustic spectroscopy has following characteristics: the one, photoacoustic spectroscopy by the luminous energy of molecule absorption, therefore photoacoustic spectrum signals is only relevant to the luminous energy (but not transmitted light intensity or reflective light intensity) by molecule absorption, therefore, without absorbing with regard to no signal, be a kind of zero background spectrum technology; The 2nd, photoacoustic spectrum signals is surveyed with sonic transducer, so detector does not have wavelength-dependent behavior; The 3rd, optoacoustic spectroscopy has the advantages that the linearity is good, responding range is wide, and a calibration point just is enough to embody the sensor response characteristic in theory; The 4th, optoacoustic spectroscopy has highly sensitive, and system bulk is little, is convenient to develop into the characteristics of portable gas sensor.In view of these characteristics of optoacoustic spectroscopy, except the traditional optoacoustic spectroscopy based on microphone, new optoacoustic spectroscopy constantly occurs.As a kind of " based on the quartz tuning fork strengthened optoacoustic spectroscopy gas sensing device of acoustic resonance cavity " put down in writing in the Chinese invention patent instructions CN101813621B in bulletin on April 25th, 2012.This gas sensing device is by the tubulose acoustic resonance cavity of the condenser lens on laser optical path, cavity axis and light path coaxial and be placed in the quartz tuning-fork at acoustic resonance cavity side opening slit place, and the electric circuit constitute connected with lasing light emitter, quartz tuning-fork.Though the gas sensing device of this use quartz tuning-fork has the characteristics that antijamming capability is strong, but the responsive bandwidth because of quartz tuning-fork is generally less than 5Hz, and very high to the accuracy requirement of the modulating frequency of lasing light emitter, deviation should be less than 0.1Hz, when the environmental baseline of surveying---temperature, carrier gas become to grade while changing, need to proofread and correct timely to the modulating frequency of lasing light emitter the deficiency of guarantee signal output accurately.
Summary of the invention
The technical problem to be solved in the present invention, for overcoming weak point of the prior art, provides a kind of simple in structure, has the photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film of wider responsive bandwidth.
For solving technical matters of the present invention, the technical scheme adopted is: based on the photoacoustic gas sensing device of poly meta fluoroethylene piezoelectric film by the tubulose acoustic resonant cavity on light source and its light path, and the optoacoustic gas sensor that is placed in tubulose acoustic resonant cavity side opening place, the modulation /demodulation parts that connect with optoacoustic gas sensor form, particularly
The pipe range of described tubulose acoustic resonant cavity is that 20～150mm, bore are 3～10mm;
The opening of described tubulose acoustic resonant cavity side is coupled logical aperture, and its hole depth is that 1.5～2.5mm, bore dia are 1.5～2.5mm;
Described optoacoustic gas sensor is poly meta fluoroethylene piezoelectric film, the spacing on the membrane plane of described poly meta fluoroethylene piezoelectric film and small bore end plane is 0.1～3mm, and its output terminal is electrically connected to the input end of the lock-in amplifier of described modulation /demodulation parts through prime amplifier.
Further improvement as the photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film:
On light path between described light source and tubulose acoustic resonant cavity, be equipped with the condenser lens that its focus is positioned at tubulose acoustic resonant cavity mid point.
Described light source is laser instrument, and the wavelength of its output is the light absorption wavelength of gas to be measured.
The tubular axis line of described tubulose acoustic resonant cavity and the light shaft coaxle of light path.
Described aperture is positioned at the mid point of tubulose acoustic resonant cavity, and with its perpendicular connection.
The film length of described poly meta fluoroethylene piezoelectric film is that the wide 9～19mm of being of 20～30mm, film, thickness are 0.1～0.3mm.
Described modulation /demodulation parts are comprised of the lock-in amplifier and the function generator that are electrically connected to, and wherein, the output terminal of function generator is electrically connected to the power control terminal of light source, the input end of lock-in amplifier respectively.
Described modulation /demodulation parts are comprised of the lock-in amplifier and the chopper that are electrically connected to, wherein, the diaphragm of chopper is on the light path between light source and tubulose acoustic resonant cavity, and the output terminal of its control module is electrically connected to the input end of diaphragm drive motor, lock-in amplifier respectively.
Beneficial effect with respect to prior art is:
One, the structure of tubulose acoustic resonant cavity, be the determining of hole depth, aperture of its pipe range, bore and aperture, make it under the normal pressure atmospheric environment, possess splendid resonance effect, both for realizing that high detection sensitivity lays a good foundation, also make its simple in structure, working stability, be easy to determining of modulation /demodulation parts frequency modulating signal.
They are two years old, adopting poly meta fluoroethylene piezoelectric film to survey optoacoustic as sonic transducer absorbs, because it has very wide frequency response characteristic, can be in the frequency ranges output of 0.01Hz～100MHz, therefore suitable wide in range of the scope that the present invention is suitable for, also without any requirement to the precision of modulation of source frequency, the occasion of applying and the application demand that can meet specific occasion have fully been expanded widely, the adjustment of modulation /demodulation parts frequency modulating signal is more arranged and use all characteristics very easily, make its composition that can be widely used in probe gas or content.Poly meta fluoroethylene piezoelectric film also has the advantage that good, anti-the falling property of pliability is strong, water proofing property is good and chemical stability is high in addition, and cheap, has reduced widely the cost of manufacture of the present invention, operation and maintenance.
Further embodiment as beneficial effect:
The one, the setting of condenser lens, be beneficial to the further raising of detection sensitivity.
The 2nd, the laser instrument of the light absorption wavelength that preferred its output wavelength is gas to be measured, as light source, is easy to promote the sensitivity of detection.
The 3rd, selecting the film length of poly meta fluoroethylene piezoelectric film is that the wide 9～19mm of being of 20～30mm, film, thickness are 0.1～0.3mm, is convenient to the Optimized Matching of itself and aperture.
The accompanying drawing explanation
Below in conjunction with accompanying drawing, optimal way of the present invention is described in further detail.
Fig. 1 is a kind of basic structure schematic diagram of the present invention.
Fig. 2 is a kind of basic structure schematic diagram of the modulator in the present invention while selecting chopper.
Fig. 3 is a kind of basic shape appearance figure of the poly meta fluoroethylene piezoelectric film that uses in the present invention.
Fig. 4 is while using the present invention to measure the steam in atmosphere, the signal spectrogram obtained.
Embodiment
Referring to Fig. 1, Fig. 3 and Fig. 4, based on being constructed as follows of the photoacoustic gas sensing device of poly meta fluoroethylene piezoelectric film:
On the light path 2 of light source 1, be equipped with successively condenser lens 3, tubulose acoustic resonant cavity 6; Wherein,
The focus of condenser lens 3 is positioned at the mid point of tubulose acoustic resonant cavity 6.
The pipe range of tubulose acoustic resonant cavity 6 is preferably 30(and can be 20～150) mm, bore be preferably 5(and can be 3～10) mm, and the light shaft coaxle of its tubular axis line and light path 2.Its frequency of operation under the normal pressure atmospheric environment is about 5800Hz.
The mid point of tubulose acoustic resonant cavity 6 is equipped with and its perpendicular aperture be connected 4, and the hole depth of aperture 4 is preferably that 2(can be 1.5～2.5mm), bore dia is preferably 2(and can be 1.5～2.5) mm.
On aperture 4, with poly meta fluoroethylene piezoelectric film 5, to be that LDT0, film are long can be 20～30 for 25(to its model that is preferably that U.S. Measurement Specialties company produces) mm, film wide for 14(can be 9～19mm), thickness is that 0.2(can be 0.1～0.3) finished product of mm.The spacing of the membrane plane of this poly meta fluoroethylene piezoelectric film 5 and aperture 4 transverse planes is preferably 1(and can be 0.1～3) mm, its output terminal is electrically connected to the input end of the lock-in amplifier 8 of modulation /demodulation parts through prime amplifier 7.
The modulation /demodulation parts are comprised of the lock-in amplifier 8 and the function generator 9 that are electrically connected to, and wherein, the output terminal of function generator 9 is electrically connected to the power control terminal of light source 1, the input end of lock-in amplifier 8 respectively.
The modulation /demodulation parts also can be selected structure as shown in Figure 2.Now, the modulation /demodulation parts are comprised of the lock-in amplifier 8 and the chopper 10 that are electrically connected to, wherein, the diaphragm of chopper 10 is on the light path 2 between light source 1 and tubulose acoustic resonant cavity 6, and the output terminal of its control module is electrically connected to the input end of diaphragm drive motor, lock-in amplifier 8 respectively.
While using the wood invention to measure the steam in atmosphere, after the water in modulated laser wave atmosphere is received, to produce photoacoustic signal and excite poly meta fluoroethylene piezoelectric film 5 vibrations, thereby make its electrogenesis current signal and be sent to lock-in amplifier 8, by after lock-in amplifier 8 demodulation, obtaining the absorption signal of steam, namely obtained the signal spectrogram of the steam in atmosphere as shown in Figure 4.
Obviously, those skilled in the art can carry out various changes and modification and not break away from the spirit and scope of the present invention the photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film of the present invention.Like this, if of the present invention these are revised and within modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention also is intended to comprise these changes and modification interior.
Claims (8)
1. photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film, by the tubulose acoustic resonant cavity (6) on light source (1) and its light path (2), and the optoacoustic gas sensor that is placed in tubulose acoustic resonant cavity (6) side opening place, the modulation /demodulation parts that connect with optoacoustic gas sensor form, and it is characterized in that:
The pipe range of described tubulose acoustic resonant cavity (6) is that 20～150mm, bore are 3～10mm;
The opening of described tubulose acoustic resonant cavity (6) side is coupled logical aperture (4), and its hole depth is that 1.5～2.5mm, bore dia are 1.5～2.5mm;
Described optoacoustic gas sensor is poly meta fluoroethylene piezoelectric film (5), the spacing of the membrane plane of described poly meta fluoroethylene piezoelectric film (5) and aperture (4) transverse plane is 0.1～3mm, and its output terminal is electrically connected to the input end of the lock-in amplifier (8) of described modulation /demodulation parts through prime amplifier (7).
2. the photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film according to claim 1, is characterized in that on the light path (2) between light source (1) and tubulose acoustic resonant cavity (6) being equipped with the condenser lens (3) that its focus is positioned at tubulose acoustic resonant cavity (6) mid point.
3. the photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film according to claim 2, is characterized in that light source (1) is laser instrument, and the wavelength of its output is the light absorption wavelength of gas to be measured.
4. the photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film according to claim 3, is characterized in that the tubular axis line of tubulose acoustic resonant cavity (6) and the light shaft coaxle of light path (2).
5. the photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film according to claim 4, is characterized in that aperture (4) is positioned at the mid point of tubulose acoustic resonant cavity (6), and with its perpendicular connection.
6. the photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film according to claim 1, the film length that it is characterized in that poly meta fluoroethylene piezoelectric film (5) is that the wide 9～19mm of being of 20～30mm, film, thickness are 0.1～0.3mm.
7. the photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film according to claim 1, it is characterized in that the modulation /demodulation parts are comprised of the lock-in amplifier (8) and the function generator (9) that are electrically connected to, wherein, the output terminal of function generator (9) is electrically connected to the power control terminal of light source (1), the input end of lock-in amplifier (8) respectively.
8. the photoacoustic gas sensing device based on poly meta fluoroethylene piezoelectric film according to claim 1, it is characterized in that the modulation /demodulation parts are comprised of the lock-in amplifier (8) and the chopper (10) that are electrically connected to, wherein, the light path (2) that the diaphragm of chopper (10) is positioned between light source (1) and tubulose acoustic resonant cavity (6) is upper, and the output terminal of its control module is electrically connected to the input end of diaphragm drive motor, lock-in amplifier (8) respectively.
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| CN112858184A (en) * | 2021-01-29 | 2021-05-28 | 山西大学 | Gas measuring device and method based on piezoelectric material |
| CN113624718A (en) * | 2021-08-13 | 2021-11-09 | 哈尔滨工业大学 | Photoacoustic spectroscopy trace gas detection device and method based on piezoresistive film |
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| CN113624718A (en) * | 2021-08-13 | 2021-11-09 | 哈尔滨工业大学 | Photoacoustic spectroscopy trace gas detection device and method based on piezoresistive film |
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