CN103411560A - Device and method for measuring microstructure through angular spectrum scanning illumination fluorescent follow-up pinhole detection - Google Patents
Device and method for measuring microstructure through angular spectrum scanning illumination fluorescent follow-up pinhole detection Download PDFInfo
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Abstract
The invention provides a device and method for measuring microstructures through angular spectrum scanning illumination fluorescent follow-up pinhole detection, belongs to the field of ultra-precision three-dimensional microstructure surface morphology measurement and mainly relates to a device and method for measuring microstructures based on angular spectrum scanning illumination fluorescent follow-up pinhole detection. The device is provided with an angular spectrum scanning illumination light path and a fluorescent follow-up pinhole detection light path, and meanwhile a method for measuring three-dimensional microstructure samples is provided. The device and method not only can avoid the problem that some areas can not be illuminated or complex reflection occurs to the areas, wherein the problem is caused by the existing light beam converging illumination technology; the device and method effectively solve the problems that due to the attenuation of detection signal strength and enhancing of background noise, the measurement precision is lowered and even the measurement can not be performed. Moreover, the device and method can achieve that a corresponding fluorescent pinhole exists before every CCD camera pixel, and thus precision adjustment does not need to be performed between the fluorescent follow-up pinholes and the CCD camera pixels.
Description
Technical field
The servo-actuated pin hole of angular spectrum scanning lighting fluorescent surveys microstructure measuring device and method belongs to ultraprecise three-dimensional microstructure measuring surface form field, relates generally to a kind of microstructure measuring device and method of surveying based on the servo-actuated pin hole of angular spectrum scanning lighting fluorescent.
Background technology
The processed and applied of microstructure is mainly reflected in microelectric technique, microsystems technology and three aspects of micro-optic technology, as typical case's application such as computer chip, biochip and microlens arrays.Its common trait of above-mentioned technology is to have three-dimensional structure, functional structure size in micron, sub-micron or nanometer scale, micro-nanoization of this structure not only brought the energy and raw-material saving, more promote the progress of modern science and technology, directly driven the development of related industry.Along with the develop rapidly of micro-processing technology, can carry out the three-dimensional instrument detected of quick nondestructive to such sample and will have huge application prospect.
U.S. Pat 3013467, a kind of confocal imaging technology is disclosed for the first time, the confocal imaging technology of 3 optical conjugates is surveyed in this invention by introducing pointolite, some illumination and point, obtained the axial detection ability to the sample profile, what coordinate the horizontal direction objective table moves and then realizes three-dimensional measurement.Chinese patent CN1395127A, disclose a kind of confocal micro-measurement system.This invention utilizes confocal technology, by confocal light path, introducing optical interference circuit, obtains highly sensitive interferometry signal, realizes the high-acruracy survey axial to sample.U.S. Pat 6282020B1, disclose a kind of confocal microscope system based on scanning galvanometer.This invention utilizes confocal principle, converges the ability of illumination hot spot in the sample surfaces high-speed mobile by introducing the vibration mirror scanning technology, having obtained, and has realized quick confocal detection, has improved measuring speed.But above-mentioned three kinds of methods are all by microcobjective, the sample surfaces that light beam converges to the height fluctuating to be thrown light on, this mode there will be some zone can't throw light on or the problem of complex reflex, and then cause the decay of signal strength detection and the enhancing of ground unrest, make measuring accuracy reduce, even can't measure.
China Patent Publication No. CN1971333A, denomination of invention is for adopting the confocal micro imaging system of dummy pinhole, a kind of confocal micro imaging system based on the dummy pinhole technology is disclosed, this invention utilizes the relevant position on the two-dimensional digital image that CCD collects that dummy pinhole is set, by computing machine, process the intensity signal obtained in dummy pinhole, thereby realize the confocal micro imaging system without pin hole in kind, thereby have pin hole position and big or small controlled, calibrate characteristics easily.But should invent based on basic confocal point-to-point image-forming principle, and once survey and can only if want, carry out imaging to the certain area of sample on sample, a bit carrying out imaging, need additional mechanical three-dimensional scanning mechanism, thereby cause measuring speed to be difficult to improve.Chinese patent CN1632448A, denomination of invention is three-dimensional super-resolution confocal array scanning micro-detecting method and device, discloses a kind of array pin hole technology, by before CCD, introducing pinhole array, realizes the parallel confocal measurement.But the method needs array pin hole position and CCD location of pixels fine registration, thereby causes debuging difficulty.
Summary of the invention
In order to address the above problem, the present invention has designed the servo-actuated pin hole of a kind of angular spectrum scanning lighting fluorescent and has surveyed microstructure measuring device and method; Can't throw light on or the problem of complex reflex in some zone that these apparatus and method not only can avoid existing convergent beam lighting engineering to cause, effectively solving signal strength detection decay and ground unrest strengthens, the measuring accuracy caused reduces, the problem that even can't measure, and can realize all having corresponding fluorescence pin hole to exist before each CCD camera pixel, thereby make between the servo-actuated pin hole of fluorescence and CCD camera pixel, debug without carrying out precision.
The object of the present invention is achieved like this:
The servo-actuated pin hole of angular spectrum scanning lighting fluorescent is surveyed microstructure measuring device, comprises laser instrument, the first scanning galvanometer, the second scanning galvanometer, scanning lens, the first diaphragm, the first imaging len, spectroscope, the second diaphragm, microcobjective, scanning objective table, Guan Jing, the servo-actuated pin hole of fluorescence, the second imaging len, narrow band pass filter and CCD camera; The light beam sent from laser instrument is after the first scanning galvanometer and the reflection of the second scanning galvanometer, successively through scanning lens, the first diaphragm, the first imaging len, spectroscope, the second diaphragm, microcobjective shine with the axially-movable of scanning objective table by the micro-measuring structure sample surfaces, form angular spectrum scanning illumination path; From by the irreflexive light beam of micro-measuring structure sample surfaces, again being passed through microcobjective, the second diaphragm, and reflected by spectroscope, through Guan Jing, converge to the servo-actuated pin hole of fluorescence, the fluorescence inspired is imaged onto the CCD camera by the second imaging len and narrow band pass filter, forms the servo-actuated pin hole of fluorescence and surveys light path; The rotating shaft of the first scanning galvanometer and the second scanning galvanometer is mutually vertical, and the object plane of the back focal plane of scanning lens and the first imaging len coincides with the first plane, diaphragm place; The back focal plane as plane and microcobjective of the first imaging len coincides with the second plane, diaphragm place; The object plane of the front focal plane of Guan Jing and the second imaging len coincides with plane, fluorescence servo-actuated pin hole place; The CCD camera is positioned at the second imaging len as plane, and optical filter is positioned between the servo-actuated pin hole of fluorescence and CCD camera; The servo-actuated pin hole of described fluorescence is for evenly being coated with the thin transparent base material of the fluorescent material with Stokes character.
Described thin transparent base material is the glass that thickness is no more than 0.17mm, and upper and lower surface is parallel and cut open light and process.
The servo-actuated pin hole of angular spectrum scanning lighting fluorescent is surveyed the microstructure measuring method, said method comprising the steps of:
The stepping number of revolutions of step a, setting the first scanning galvanometer is N
x, the second scanning galvanometer the stepping number of revolutions be N
y, along the stepping of optical axis direction, to move number of times be N to the scanning objective table
z, the magazine number of pixels of CCD is M;
Stepping shift position, the stepping turned position of the first scanning galvanometer and the stepping turned position permutation and combination of the second scanning galvanometer of step b, scanning objective table that step a is set, obtain N
x* N
y* N
zIndividual different spatial, to by the micro-measuring structure sample, being carried out the angular spectrum illumination, and then form N at the servo-actuated pinholed surface of fluorescence in each locus
x* N
y* N
zIndividual picture;
M the phosphor dot detector array that step c utilizes the servo-actuated pin hole of fluorescence and CCD camera to form, to the N by micro-measuring structure
x* N
y* N
zIndividual picture is surveyed, and then obtains N
x* N
y* N
z* M light intensity data;
Steps d, the N that utilizes computing machine treatment step c to obtain
x* N
y* N
z* M light intensity data, obtain by M point, N on the micro-measuring structure sample
x* N
yAxial response curve under individual angular spectrum light angle, at first judge every bit and the theoretical sinc function square axial response curve that curve mates most according to confocal principle, i.e. best angular spectrum light angle, and then calculate the axial coordinate of every bit;
Step e, obtain corresponding axial coordinate according to planimetric position and the steps d of every bit, reconstruct by the three-dimensional structure of micro-measuring structure sample.
The servo-actuated pin hole of above-mentioned angular spectrum scanning lighting fluorescent is surveyed the microstructure measuring method, and in described step a, adjacent two the stepping turned position angles of the first scanning galvanometer are identical or different.
The servo-actuated pin hole of above-mentioned angular spectrum scanning lighting fluorescent is surveyed the microstructure measuring method, and in described step a, adjacent two the stepping turned position angles of the second scanning galvanometer are identical or different.
The servo-actuated pin hole of above-mentioned angular spectrum scanning lighting fluorescent is surveyed the microstructure measuring method, and in described step a, adjacent two the stepping translation location gap of scanning objective table are identical or different.
The present invention is by introducing angular spectrum scanning illumination path, realize that parallel beam throws light on by the micro-measuring structure sample with the different incidence angles degree, and then make can be found corresponding optimal illumination angle by the every bit of micro-measuring structure sample, can't throw light on or the problem of complex reflex in some zone of avoiding existing convergent beam lighting engineering to cause, effectively solving signal strength detection decay and ground unrest strengthens, the measuring accuracy caused reduces, the problem that even can't measure.
The present invention also introduces the servo-actuated pin hole of fluorescence and surveys light path, utilizes the fluorescent substance film with Stokes character to realize the detection of array pin hole point, thereby increases substantially measuring speed; Utilize simultaneously the large characteristics of fluorescent material density that have Stokes character in the servo-actuated pin hole of fluorescence, realize all having corresponding fluorescence pin hole to exist before each CCD camera pixel, debug without carrying out precision thereby make between the servo-actuated pin hole of fluorescence and CCD camera pixel.
The accompanying drawing explanation
Fig. 1 is that the servo-actuated pin hole of angular spectrum scanning fluorescence of the present invention is surveyed the microstructure measuring device structural representation.
Fig. 2 is that the servo-actuated pin hole of angular spectrum scanning fluorescence of the present invention is surveyed angular spectrum scanning illumination path figure in microstructure measuring device.
Fig. 3 is that the servo-actuated pin hole of angular spectrum scanning fluorescence of the present invention is surveyed the servo-actuated pin hole detection of fluorescence index path in microstructure measuring device.
The servo-actuated pin hole schematic diagram of Fig. 4 light beam incident fluorescence.
Fig. 5 is that the servo-actuated pin hole of angular spectrum scanning fluorescence of the present invention is surveyed microstructure measuring method process flow diagram.
In figure: 1 laser instrument, 2 first scanning galvanometers, 3 second scanning galvanometers, 4 scanning lenses, 5 first diaphragms, 6 first imaging lens, 7 spectroscopes, 8 second diaphragms, 9 microcobjectives, 10 scanning objective tables, 11 pipe mirrors, the servo-actuated pin hole of 12 fluorescence, 13 second imaging lens, 14 narrow band pass filters, 15CCD camera.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
Specific embodiment one
The servo-actuated pin hole of angular spectrum scanning lighting fluorescent of the present embodiment is surveyed the microstructure measuring device structural representation as shown in Figure 1, and this device comprises laser instrument 1, the first scanning galvanometer 2, the second scanning galvanometer 3, scanning lens 4, the first diaphragm 5, the first imaging len 6, spectroscope 7, the second diaphragm 8, microcobjective 9, scanning objective table 10, pipe mirror 11, the servo-actuated pin hole 12 of fluorescence, the second imaging len 13, narrow band pass filter 14 and CCD camera 15; The light beam sent from laser instrument 1 is after the first scanning galvanometer 2 and the second scanning galvanometer 3 reflections, successively through scanning lens 4, the first diaphragm 5, the first imaging len 6, spectroscope 7, the second diaphragm 8, microcobjective 9 shine with 10 axially-movables of scanning objective table by the micro-measuring structure sample surfaces, form angular spectrum scanning illumination path, as shown in Figure 2; From by the irreflexive light beam of micro-measuring structure sample surfaces, again being passed through microcobjective 9, the second diaphragm 8, and by spectroscope 7 reflections, through pipe mirror 11, converge to the servo-actuated pin hole 12 of fluorescence, the fluorescence inspired is imaged onto CCD camera 15 by the second imaging len 13 and narrow band pass filter 14, form the servo-actuated pin hole of fluorescence and survey light path, as shown in Figure 3; The rotating shaft of the first scanning galvanometer 2 and the second scanning galvanometer 3 is mutually vertical, and the object plane of the back focal plane of scanning lens 4 and the first imaging len 6 coincides with the first diaphragm 5 planes, place; The back focal plane as plane and microcobjective 9 of the first imaging len 6 coincides with the second diaphragm 8 planes, place; The front focal plane of pipe mirror 11 and the object plane of the second imaging len 13 coincide with the servo-actuated pin hole of fluorescence 12 planes, place; CCD camera 15 is positioned at the second imaging len 13 picture planes, and optical filter 14 is positioned between the servo-actuated pin hole 12 of fluorescence and CCD camera 15; The servo-actuated pin hole 12 of described fluorescence is for evenly being coated with the thin transparent base material of the fluorescent material with Stokes character.Described thin transparent base material is the glass that thickness is no more than 0.17mm, and upper and lower surface is parallel and cut open light and process.Selection is no more than the glass of 0.17mm, not only can reduce aberration, and can directly adopt the raw material of cover glass as the thin transparent base material, cost-saving.
The schematic diagram of the servo-actuated pin hole 12 of light beam incident fluorescence as shown in Figure 4.Wherein, circle means fluorescence molecule, and diameter generally arrives the hundreds of nanometer tens, the rectangle of fluorescence molecule below is the thin transparent base material, the black rectangle of below is effective imaging region, and its diameter is generally five microns left and right, much larger than the fluorescence molecule diameter.Corresponding black fluorescence molecule is effective servo-actuated pin hole; The white rectangle is invalid imaging region, and corresponding white fluorescent molecule is invalid servo-actuated pin hole.While therefore making effective imaging region generation micro-displacement, still there is the servo-actuated pin hole of corresponding fluorescence to match.
After the incident beam that Stokes character in the present embodiment refers to is absorbed by fluorescent material, send the light beam longer than incident beam wavelength.
The servo-actuated pin hole of angular spectrum scanning lighting fluorescent of the present embodiment is surveyed microstructure measuring method process flow diagram as shown in Figure 5, and the method comprises the following steps:
The stepping number of revolutions of step a, setting the first scanning galvanometer 2 is N
x, the second scanning galvanometer 3 the stepping number of revolutions be N
y, along the stepping of optical axis direction, to move number of times be N to scanning objective table 10
z, the number of pixels in CCD camera 15 is M;
Stepping shift position, the stepping turned position of the first scanning galvanometer 2 and the stepping turned position permutation and combination of the second scanning galvanometer 3 of step b, scanning objective table 10 that step a is set, obtain N
x* N
y* N
zIndividual different spatial, to by the micro-measuring structure sample, being carried out the angular spectrum illumination, and then form N on the servo-actuated pin hole of fluorescence 12 surfaces in each locus
x* N
y* N
zIndividual picture;
M the phosphor dot detector array that step c utilizes the servo-actuated pin hole 12 of fluorescence and CCD camera 15 to form, to the N by micro-measuring structure
x* N
y* N
zIndividual picture is surveyed, and then obtains N
x* N
y* N
z* M light intensity data;
Steps d, the N that utilizes computing machine treatment step c to obtain
x* N
y* N
z* M light intensity data, obtain by M point, N on the micro-measuring structure sample
x* N
yAxial response curve under individual angular spectrum light angle, at first judge every bit and the theoretical sinc function square axial response curve that curve mates most according to confocal principle, i.e. best angular spectrum light angle, and then calculate the axial coordinate of every bit;
Step e, obtain corresponding axial coordinate according to planimetric position and the steps d of every bit, reconstruct by the three-dimensional structure of micro-measuring structure sample.
The servo-actuated pin hole of above-mentioned angular spectrum scanning lighting fluorescent is surveyed the microstructure measuring method, and in described step a, adjacent two the stepping turned position angles of the first scanning galvanometer 2 are identical; Adjacent two the stepping turned position angles of the second scanning galvanometer 3 are identical; Adjacent two the stepping translation location gap of scanning objective table 10 are identical.Arranging conveniently that this stepping turned position angle is identical and stepping translation location gap is identical adjusted.
Specific embodiment two
The present embodiment is from the different of specific embodiment one, in described step a, and adjacent two the stepping turned positions of the first scanning galvanometer 2; Adjacent two the stepping turned positions of the second scanning galvanometer 3; Scanning adjacent two the stepping translation positions of objective table 10 have a difference at least.Arranging that this stepping turned position angle or stepping translation location gap are different can be accomplished local intense adjustment.
In above embodiment, the steps d of mentioning is specially:
The optical field distribution on the servo-actuated pin hole of fluorescence 12 planes, place is:
Wherein U(x', y') be the image space optical field distribution, U (x, y) is the illumination light field, T (x, y) is microstructure sample thing function, h (x, y; X', y') be the point spread function of microcobjective.By angular spectrum, scan the incident angle of illumination continuous modulation plane wave, i.e. exp[jk (xcos α+ycos β)] corresponding phase value.On the servo-actuated pin hole 12 of fluorescence, be coated with the fluorescent material with Stokes character, each fluorescent material with Stokes character is equivalent to a detector that size is minimum, if these scanning in season objective table 10 motions, make by the micro-measuring structure sample and pass through the object plane of microcobjective 9 along optical axis direction, meet the confocal measurement principle, it detects to such an extent that the normalization light distribution should be:
U ≈ kzNA wherein
2The optics dimensionless coordinate along optical axis direction, N=π a
2/ λ f is Fresnel number.And when measured point moved to the object plane of microcobjective 9, with the fluorescence molecule conjugation on the servo-actuated pin hole 12 of corresponding fluorescence, now the Light Energy that detects of fluorescence molecule was the highest.Further, adjust the light intensity of illumination plane ripple, make high-light-energy that fluorescence molecule now collects just on its fluorescence excitation threshold value, and then inspire the fluorescence phenomenon of another wavelength, the second imaging len 13 and optical filter 14 by its back are imaged onto CCD camera 15, therefore complete the axial coordinate with this fluorescence molecule conjugation measured point.
Claims (6)
1. the servo-actuated pin hole of angular spectrum scanning lighting fluorescent is surveyed microstructure measuring device, it is characterized in that: comprise laser instrument (1), the first scanning galvanometer (2), the second scanning galvanometer (3), scanning lens (4), the first diaphragm (5), the first imaging len (6), spectroscope (7), the second diaphragm (8), microcobjective (9), scanning objective table (10), Guan Jing (11), the servo-actuated pin hole of fluorescence (12), the second imaging len (13), narrow band pass filter (14) and CCD camera (15); The light beam sent from laser instrument (1) is after the first scanning galvanometer (2) and the second scanning galvanometer (3) reflection, pass through successively scanning lens (4), the first diaphragm (5), the first imaging len (6), spectroscope (7), the second diaphragm (8), microcobjective (9) shine with the axially-movable of scanning objective table (10) by the micro-measuring structure sample surfaces, form angular spectrum scanning illumination path; From by the irreflexive light beam of micro-measuring structure sample surfaces, again being passed through microcobjective (9), the second diaphragm (8), and reflected by spectroscope (7), through Guan Jing (11), converge to the servo-actuated pin hole of fluorescence (12), the fluorescence inspired is imaged onto CCD camera (15) by the second imaging len (13) and narrow band pass filter (14), forms the servo-actuated pin hole of fluorescence and surveys light path; The first scanning galvanometer (2) is mutually vertical with the rotating shaft of the second scanning galvanometer (3), and the object plane of the back focal plane of scanning lens (4) and the first imaging len (6) coincides with the first diaphragm (5) plane, place; The picture plane of the first imaging len (6) and the back focal plane of microcobjective (9) coincide with the second diaphragm (8) plane, place; The object plane of the front focal plane of Guan Jing (11) and the second imaging len (13) coincides with the servo-actuated pin hole of fluorescence (12) plane, place; CCD camera (15) is positioned at the second imaging len (13) as plane, and optical filter (14) is positioned between the servo-actuated pin hole of fluorescence (12) and CCD camera (15); The servo-actuated pin hole of described fluorescence (12) is for evenly being coated with the thin transparent base material of the fluorescent material with Stokes character.
2. the servo-actuated pin hole of angular spectrum according to claim 1 scanning lighting fluorescent is surveyed microstructure measuring device, and it is characterized in that: described thin transparent base material is the glass that thickness is no more than 0.17mm, and upper and lower surface is parallel and cut open light and process.
3. the servo-actuated pin hole of angular spectrum scanning lighting fluorescent is surveyed the microstructure measuring method, it is characterized in that: said method comprising the steps of:
The stepping number of revolutions of step a, setting the first scanning galvanometer (2) is N
x, the second scanning galvanometer (3) the stepping number of revolutions be N
y, along the stepping of optical axis direction, to move number of times be N to scanning objective table (10)
z, the number of pixels in CCD camera (15) is M;
Stepping shift position, the stepping turned position of the first scanning galvanometer (2) and the stepping turned position permutation and combination of the second scanning galvanometer (3) of step b, scanning objective table (10) that step a is set, obtain N
x* N
y* N
zIndividual different spatial, to by the micro-measuring structure sample, being carried out the angular spectrum illumination, and then form N in each locus on the servo-actuated pin hole of fluorescence (12) surface
x* N
y* N
zIndividual picture;
M the phosphor dot detector array that step c utilizes the servo-actuated pin hole of fluorescence (12) and CCD camera (15) to form, to the N by micro-measuring structure
x* N
y* N
zIndividual picture is surveyed, and then obtains N
x* N
y* N
z* M light intensity data;
Steps d, the N that utilizes computing machine treatment step c to obtain
x* N
y* N
z* M light intensity data, obtain by M point, N on the micro-measuring structure sample
x* N
yAxial response curve under individual angular spectrum light angle, at first judge every bit and the theoretical sinc function square axial response curve that curve mates most according to confocal principle, i.e. best angular spectrum light angle, and then calculate the axial coordinate of every bit;
Step e, obtain corresponding axial coordinate according to planimetric position and the steps d of every bit, reconstruct by the three-dimensional structure of micro-measuring structure sample.
4. the servo-actuated pin hole of angular spectrum scanning lighting fluorescent according to claim 3 is surveyed the microstructure measuring method, and it is characterized in that: in described step a, adjacent two the stepping turned position angles of the first scanning galvanometer (2) are identical or different.
5. the servo-actuated pin hole of angular spectrum scanning lighting fluorescent according to claim 3 is surveyed the microstructure measuring method, and it is characterized in that: in described step a, adjacent two the stepping turned position angles of the second scanning galvanometer (3) are identical or different.
6. the servo-actuated pin hole of angular spectrum scanning lighting fluorescent according to claim 3 is surveyed the microstructure measuring method, it is characterized in that: in described step a, adjacent two the stepping translation location gap of scanning objective table (10) are identical or different.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104677299A (en) * | 2013-11-29 | 2015-06-03 | 上海微电子装备有限公司 | Film detection device and method |
| CN111366102A (en) * | 2020-04-22 | 2020-07-03 | 昆山尚瑞智能科技有限公司 | Measuring head structure for refractive color confocal measurement of surface morphology of inner hole |
| CN116735562A (en) * | 2023-08-15 | 2023-09-12 | 深圳湾实验室 | Three-dimensional dynamic microscopic imaging system, method and storage medium |
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| JPH01218703A (en) * | 1988-02-26 | 1989-08-31 | Sumitomo Light Metal Ind Ltd | Method for doubling rolling of aluminum foil |
| CN1632448A (en) * | 2005-02-04 | 2005-06-29 | 哈尔滨工业大学 | Three-dimensional super-resolution confocal array scanning and micro-detecting method and device |
| CN102768015A (en) * | 2012-07-05 | 2012-11-07 | 哈尔滨工业大学 | Fluorescence response follow-up pinhole microscopic confocal measuring device |
| CN103115580A (en) * | 2013-01-23 | 2013-05-22 | 刘茂珍 | Three-dimensional hole-shape detection method and detection system based on optical coherence tomography |
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| JPS61232005A (en) * | 1985-04-09 | 1986-10-16 | Sumitomo Light Metal Ind Ltd | Doubling rolling method for aluminum foil |
| JPH01218703A (en) * | 1988-02-26 | 1989-08-31 | Sumitomo Light Metal Ind Ltd | Method for doubling rolling of aluminum foil |
| CN1632448A (en) * | 2005-02-04 | 2005-06-29 | 哈尔滨工业大学 | Three-dimensional super-resolution confocal array scanning and micro-detecting method and device |
| CN102768015A (en) * | 2012-07-05 | 2012-11-07 | 哈尔滨工业大学 | Fluorescence response follow-up pinhole microscopic confocal measuring device |
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| CN104677299A (en) * | 2013-11-29 | 2015-06-03 | 上海微电子装备有限公司 | Film detection device and method |
| CN111366102A (en) * | 2020-04-22 | 2020-07-03 | 昆山尚瑞智能科技有限公司 | Measuring head structure for refractive color confocal measurement of surface morphology of inner hole |
| CN116735562A (en) * | 2023-08-15 | 2023-09-12 | 深圳湾实验室 | Three-dimensional dynamic microscopic imaging system, method and storage medium |
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